Abstract: A supply control apparatus is provided and includes a memory for storing lot control data for controlling a plurality of lots, reticule control data for controlling a plurality of masks, and inline photo device control data; an update section for updating the data; a control information generating section generating lot supply control information for controlling lot supply based on the lot control data and the reticule control data, as well as mask supply control information for controlling mask supply; and a communications section for transmitting the lot supply control information to a lot supply device that supplies lots to the photo device, transmitting the mask supply control information to a mask supply device that supplies masks to the photo device, while receiving notification information on the current position of a lot or a mask from the lot supply device, the mask supply device or the photo device.

Abstract: A linear actuator comprises a piston which is provided in an actuator body and which is displaceable under a pressure fluid, a slide table which is integrally connected to the piston and which is linearly displaceable, a rod which is engaged with the slide table and which has a shaft section inserted into an engagement hole of the piston, end blocks which are connected to ends of the actuator body, and stoppers which are provided on end surfaces of the end blocks and which adjust a displacement amount of the slide table.

Abstract: An optimum method for deposition time is provided that can improve uniformity of processing time of oxidation thickness. When starting a heat oxidation process, a time for optimum oxidation processing in the process management system is calculated based on atmospheric pressure data, a target thickness of that process, oxidization time, thickness data and atmospheric pressure data in the immediately preceding process under the same oxidization processing job. The optimum system comprises a process management system such as a host computer, a device having a barometer, a heat oxidation-processing device and a thickness-measuring device. The host computer, the barometer, the heat oxidation processing device and the thickness-measuring device are connected via a network so as to transmit data to and from each device.

Abstract: A nut member 5 for moving forward and rearward by rotating a feed screw 4 by a stepping motor 28 and a transfer table 7 for transferring a workpiece W are elastically connected by a spring means 24 in transferring of the workpiece to thereby allow the nut member 5 to overrun by flection of the spring means 24, to allow the stepping motor 28 to rotate excessively in a cushioned manner, and to obtain a thrust for pushing the workpiece against an object after the transfer table 7 reaches the transfer end of the workpiece.

Abstract: A first clamping arm mounted to an arm rotary shaft is rotated by a driving mechanism formed of a worm wheel mounted to the arm rotary shaft, a worm supported on a junction frame, and a first driving source to clamp a workpiece between a second clamping arm and the first clamping arm. A rotating force in a direction opposite to a reaction force in clamping is applied by a clamping force applying mechanism to the junction frame which has been displaced through a certain angle by the reaction force to thereby generate a rotating force in a clamping direction in the arm rotary shaft through the worm and the worm wheel to thereby apply a clamping force to the first clamping arm.

Abstract: The invention provides a clamping device in which there is no need to carry out troublesome setting operation of a clamping position according to a size of a work piece and wear of respective components and an operation efficiency can be further improved. A worm which is engaged with a worm wheel provided to a periphery of a rotating shaft of a clamping arm and which is connected to an electric motor can reciprocate in an axial direction. On the axis, a clamping force applying mechanism to be actuated in response to contact of the rotated clamping arm with the workpiece to apply an axial force in a direction of the axis to the worm is provided. The clamping arm is rotated by driving the worm for rotation by the electric motor and the clamping force applying mechanism applies a clamping force to the clamping arm which has come in contact with the workpiece.

Abstract: A clamping device includes a first clamping arm and a second clamping arm, an arm driving portion for displacing the first clamping arm to a clamping position and a non-clamping position, and a clamping force applying portion for applying a required clamping force to the clamping arm. The arm driving portion has a first driving source for displacing the first clamping arm and a power transmission mechanism. The clamping force applying portion has a pressing member for applying the clamping force to the first clamping arm by applying a rotating force in a clamping direction to the rotary shaft and a second driving source for displacing the pressing member from a non-operating position to an operating position for applying the clamping force.

Abstract: A linear actuator comprises a piston which is provided in an actuator body and which is displaceable under a pressure fluid, a slide table which is integrally connected to the piston and which is linearly displaceable, a rod which is engaged with the slide table and which has a shaft section inserted into an engagement hole of the piston, end blocks which are connected to ends of the actuator body, and stoppers which are provided on end surfaces of the end blocks and which adjust a displacement amount of the slide table.

Abstract: A nut member 5 for moving forward and rearward by rotating a feed screw 4 by a stepping motor 28 and a transfer table 7 for transferring a workpiece W are elastically connected by a spring means 24 in transferring of the workpiece to thereby allow the nut member 5 to overrun by flection of the spring means 24, to allow the stepping motor 28 to rotate excessively in a cushioned manner, and to obtain a thrust for pushing the workpiece against an object after the transfer table 7 reaches the transfer end of the workpiece.