Patents by Inventor Akiyoshi Goto

Akiyoshi Goto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160347897
    Abstract: The actinic ray-sensitive or radiation-sensitive resin composition of the present invention contains a resin (P) including a repeating unit (i) having a group which decomposes by the action of an acid represented by the following General Formula (1), a pattern forming method using the composition, a method for manufacturing an electronic device, and an electronic device.
    Type: Application
    Filed: August 11, 2016
    Publication date: December 1, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Akiyoshi GOTO, Masafumi KOJIMA, Michihiro SHIRAKAWA, Keita KATO, Keiyu OU
  • Publication number: 20160349613
    Abstract: The actinic ray-sensitive or radiation-sensitive resin composition of the present invention contains a resin (P) including a repeating unit (i) having a group represented by the following General Formula (1), and a compound which generates an acid by irradiation with actinic ray or radiation, represented by a specific formula, a pattern forming method using the composition, a method for manufacturing an electronic device, and an electronic device.
    Type: Application
    Filed: August 9, 2016
    Publication date: December 1, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Akiyoshi GOTO, Masafumi KOJIMA, Michihiro SHIRAKAWA, Keita KATO
  • Publication number: 20160327866
    Abstract: A pattern forming method includes, in this order: a step (1) of forming a film on a substrate by using an actinic ray-sensitive or radiation-sensitive resin composition containing at least a resin having a group that is decomposed due to an action of an acid so as to generate a polar group; a step (2) of exposing the film; a step (3) of causing the exposed film to come into contact with a component that performs any one interaction of an ionic bond, a hydrogen bond, a chemical bond, and a dipole interaction with a polar group generated in the exposed film without substantially dissolving the exposed film; and a step (4) of forming a pattern by developing the exposed film by using a developer including an organic solvent and removing an area of the film having a small exposure amount.
    Type: Application
    Filed: July 22, 2016
    Publication date: November 10, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Hajime FURUTANI, Michihiro SHIRAKAWA, Akiyoshi GOTO, Masafumi KOJIMA
  • Publication number: 20160313645
    Abstract: The present invention relates to a pattern forming method including: forming a film using an actinic ray-sensitive or radiation-sensitive resin composition that includes a (A) resin which has an increase in the polarity by the action of an acid, and thus, has a decrease in the solubility in a developer containing an organic solvent, a (B) compound capable of generating an acid upon irradiation with specific actinic ray or radiation, and a (C) solvent, exposing the film, and developing the exposed film using a developer including an organic solvent, in which the resin (A) has a structure in which a polar group is protected with a leaving group which decomposes to leave by the action of an acid, and the leaving group is a group represented by the following General Formula (I).
    Type: Application
    Filed: July 1, 2016
    Publication date: October 27, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Keita KATO, Keiyu OU, Michihiro SHIRAKAWA, Akiyoshi GOTO, Masafumi KOJIMA
  • Publication number: 20160266488
    Abstract: An actinic ray-sensitive or radiation-sensitive resin composition contains a resin (P) having a partial structure represented by General Formula (X), and a compound capable of generating an acid upon irradiation with actinic ray or radiation.
    Type: Application
    Filed: May 19, 2016
    Publication date: September 15, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Masafumi KOJIMA, Akiyoshi GOTO, Akinori SHIBUYA, Keita KATO, Kei YAMAMOTO
  • Publication number: 20160223905
    Abstract: This active light-sensitive or radiation-sensitive resin composition contains a resin (A), a compound (B) capable of generating an acid upon irradiation with active light or radiation, and a compound (C) having at least one oxygen atom. The compound (C) does not include the resin (A) and the compound (B).
    Type: Application
    Filed: April 7, 2016
    Publication date: August 4, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Keiyu OU, Keita KATO, Michihiro SHIRAKAWA, Akiyoshi GOTO, Sou KAMIMURA
  • Patent number: 9405197
    Abstract: There is provided a pattern forming method containing: forming a film by using a radiation-sensitive or actinic ray-sensitive resin composition containing: (A) a onium salt compound containing a nitrogen atom in a cationic moiety; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) a resin capable of increasing the polarity by the action of an acid to decrease solubility in a developer containing an organic solvent, exposing the film; and developing the exposed film by using a developer containing an organic solvent to form a negative pattern.
    Type: Grant
    Filed: February 19, 2015
    Date of Patent: August 2, 2016
    Assignee: FUJIFILM Corporation
    Inventors: Akinori Shibuya, Shohei Kataoka, Tomoki Matsuda, Toshiaki Fukuhara, Akiyoshi Goto
  • Publication number: 20160195814
    Abstract: There is provided a pattern formation method comprising: a step (1) of forming a film using an actinic ray-sensitive or radiation-sensitive resin composition which contains a resin of which, due to a polarity being increased by an action of an acid, solubility decreases with respect to a developer which includes an organic solvent; a step (2) of exposing the film to an actinic ray or radiation; a step (3) of forming a target process pattern by developing the film using a developer which includes an organic solvent; and a step (4) of obtaining a processed pattern by applying a processing agent which includes a compound (x) which has at least one of a primary amino group and a secondary amino group with respect to the target process pattern.
    Type: Application
    Filed: March 14, 2016
    Publication date: July 7, 2016
    Applicant: FUJIFILM Corporation
    Inventors: Yuichiro ENOMOTO, Ryosuke UEBA, Michihiro SHIRAKAWA, Hajime FURUTANI, Akiyoshi GOTO, Masafumi KOJIMA
  • Publication number: 20160048082
    Abstract: A pattern-forming method includes forming a film on a substrate by using an actinic ray-sensitive or radiation-sensitive resin composition containing at least a resin that exhibits, due to an action of an acid, increase in polarity and decrease in solubility with respect to a developer including an organic solvent, and a compound that generates an acid by being irradiated with actinic rays or radiation; exposing the film; and forming a negative tone pattern by developing the exposed film with a developer including an organic solvent, in which the developer includes at least one compound A selected from the group consisting of an onium salt, a polymer having an onium salt, a nitrogen-containing compound including three or more nitrogen atoms, a basic polymer, and a phosphorus-based compound.
    Type: Application
    Filed: October 21, 2015
    Publication date: February 18, 2016
    Applicant: FUJIFILM CORPORATION
    Inventors: Masafumi KOJIMA, Akiyoshi GOTO, Michihiro SHIRAKAWA, Hajime FURUTANI, Akinori SHIBUYA
  • Patent number: 9250519
    Abstract: The pattern forming method of the present invention includes: (i) forming a film including an actinic ray-sensitive or radiation-sensitive resin composition containing a compound (A) represented by General Formula (I) shown below; a resin (P) capable of decreasing solubility with respect to a developer including organic solvent by the action of an acid; and a compound (B) capable of generating an acid by irradiation of actinic rays or radiation; (ii) irradiating the film with actinic rays or radiation; (iii) developing the film irradiated with the actinic rays or radiation using a developer including an organic solvent. [Chem.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: February 2, 2016
    Assignee: FUJIFILM Corporation
    Inventors: Shohei Kataoka, Akinori Shibuya, Akiyoshi Goto, Tomoki Matsuda, Toshiaki Fukuhara
  • Publication number: 20160004156
    Abstract: There is provided a pattern forming method including: (1) filtering, by using a filter, a resin solution containing (A) a resin capable of increasing its polarity by an action of an acid to decrease solubility in a developer including an organic solvent, and (C1) a solvent; (2) preparing an actinic ray-sensitive or radiation-sensitive resin composition containing the resin (A) obtained from the filtrating (1) and a solvent (C2) different from the solvent (C1); (3) filtering the actinic ray-sensitive or radiation-sensitive resin composition by using a filter; (4) forming a film by using a filtrate obtained by the filtering (3); (5) exposing the film; and (6) performing development using a developer containing an organic solvent to form a negative pattern, wherein an absolute value of the difference between solubility parameter (SPC1) of the solvent (C1) and solubility parameter (SPDEV) of the developer (C1), |SPC1?SPDEV|, is 1.00 (cal/cm3)1/2 or less.
    Type: Application
    Filed: September 14, 2015
    Publication date: January 7, 2016
    Applicant: FUJIFILM CORPORATION
    Inventors: Shinichi SUGIYAMA, Sou KAMIMURA, Akiyoshi GOTO
  • Publication number: 20160004157
    Abstract: A method of forming a pattern includes (a) forming a film of an actinic-ray- or radiation-sensitive resin composition, (b) exposing the film to light, and (c) developing the exposed film with a developer comprising an organic solvent to thereby form a negative pattern. The actinic-ray- or radiation-sensitive resin composition includes (A) a resin whose solubility in the developer comprising an organic solvent is lowered when acted on by an acid, which resin contains a repeating unit with any of lactone structures of general formula (1) below, and (B) a compound that when exposed to actinic rays or radiation, generates an acid.
    Type: Application
    Filed: September 14, 2015
    Publication date: January 7, 2016
    Applicant: FUJIFILM CORPORATION
    Inventors: Junichi ITO, Akinori SHIBUYA, Akiyoshi GOTO, Michihiro SHIRAKAWA, Kei YAMAMOTO, Fumihiro YOSHINO
  • Publication number: 20150338736
    Abstract: Provided is an actinic-ray- or radiation-sensitive resin composition including a resin (A) and any of compounds (B) of general formula (I) below. (In general formula (I), Rf represents a fluorine atom or a monovalent organic group containing at least one fluorine atom; R1 represents a hydrogen atom or a monovalent substituent containing no fluorine atom; X1 represents a monovalent organic group having at least two carbon atoms, or a methyl group in which a substituent other than a fluorine atom is optionally introduced, provided that X1 may be bonded to R1 to thereby form a ring; and Z represents a moiety that when exposed to actinic rays or radiation, is converted to a sulfonic acid group, an imidic acid group or a methide acid group.
    Type: Application
    Filed: June 26, 2015
    Publication date: November 26, 2015
    Applicant: FUJIFILM CORPORATION
    Inventors: Takeshi KAWABATA, Hiroo TAKIZAWA, Akinori SHIBUYA, Akiyoshi GOTO, Masafumi KOJIMA, Keita KATO
  • Publication number: 20150277225
    Abstract: An actinic-ray-sensitive or radiation-sensitive resin composition contains a compound (A) which generates acid by being irradiated with actinic rays or radiation where, when relative light absorbance is ?r using triphenyl sulfonium nonaphlate as a reference and relative quantum efficiency is ?r using triphenyl sulfonium nonaphlate as a reference, the relative light absorbance ?r is 0.4 to 0.8 and ?rĂ—?r is 0.5 to 1.0.
    Type: Application
    Filed: June 15, 2015
    Publication date: October 1, 2015
    Inventors: MASAFUMI KOJIMA, AKINORI SHIBUYA, AKIYOSHI GOTO, SHOHEI KATAOKA, KOSUKE KOSHIJIMA
  • Patent number: 9116426
    Abstract: The invention provides a dye compound having a partial structure represented by the following formula (5): wherein in formula (5), Dye represents a dye structure; G1 represents NR or an oxygen atom; G2 represents a monovalent substituent group having an ?Es? value as a steric parameter of 1.5 or more; p represents an integer from 1 to 8; when p is 2 or greater, the two or more structures represented by p may be the same or different from each other; and R represents a hydrogen atom or a monovalent substituent group.
    Type: Grant
    Filed: January 22, 2013
    Date of Patent: August 25, 2015
    Assignee: FUJIFILM Corporation
    Inventors: Kyohei Arayama, Hiroaki Idei, Shinichi Kanna, Kenta Ushijima, Akiyoshi Goto
  • Publication number: 20150168830
    Abstract: There is provided an actinic ray-sensitive or radiation-sensitive resin composition containing a compound represented by Formula (1): wherein R1 represents a polycyclic aromatic group or a polycyclic heterocyclic aromatic group, R2 represents a (n+2)-valent saturated hydrocarbon group. R3 represents a (m+2)-valent saturated hydrocarbon group, R4 and R5 each independently represent a substituent, Q represents a linking group containing a heteroatom, m and n each independently represent an integer of 0 to 12, when n is 2 or more, R4's may be the same or different, R4's may be linked to each other to form a non-aromatic ring together with R2, when m is 2 or more, R5's may be the same or different, and R5's may be linked to each other to form a non-aromatic ring together with R3, and X? represents a non-nucleophilic anion.
    Type: Application
    Filed: February 27, 2015
    Publication date: June 18, 2015
    Applicant: FUJIFILM CORPORATION
    Inventors: Akiyoshi GOTO, Akinori SHIBUYA, Shohei KATAOKA, Shuhei YAMAGUCHI, Tomoki MATSUDA, Keita KATO
  • Publication number: 20150160559
    Abstract: There is provided a pattern forming method containing: forming a film by using a radiation-sensitive or actinic ray-sensitive resin composition containing: (A) a onium salt compound containing a nitrogen atom in a cationic moiety; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; and (C) a resin capable of increasing the polarity by the action of an acid to decrease solubility in a developer containing an organic solvent, exposing the film; and developing the exposed film by using a developer containing an organic solvent to form a negative pattern.
    Type: Application
    Filed: February 19, 2015
    Publication date: June 11, 2015
    Applicant: FUJIFILM CORPORATION
    Inventors: Akinori SHIBUYA, Shohei KATAOKA, Tomoki MATSUDA, Toshiaki FUKUHARA, Akiyoshi GOTO
  • Publication number: 20150111135
    Abstract: The pattern forming method of the present invention includes: (i) forming a film including an actinic ray-sensitive or radiation-sensitive resin composition containing a compound (A) represented by General Formula (I) shown below; a resin (P) capable of decreasing solubility with respect to a developer including organic solvent by the action of an acid; and a compound (B) capable of generating an acid by irradiation of actinic rays or radiation; (ii) irradiating the film with actinic rays or radiation; (iii) developing the film irradiated with the actinic rays or radiation using a developer including an organic solvent. [Chem.
    Type: Application
    Filed: December 23, 2014
    Publication date: April 23, 2015
    Applicant: FUJIFILM Corporation
    Inventors: Shohei KATAOKA, Akinori SHIBUYA, Akiyoshi GOTO, Tomoki MATSUDA, Toshiaki FUKUHARA
  • Publication number: 20150111157
    Abstract: Provided is a method of forming a pattern, including forming a film comprising an actinic-ray- or radiation-sensitive resin composition comprising, resin (A) comprising any of repeating units of general formula (I) below, which resin when acted on by an acid, decreases its solubility in a developer comprising an organic solvent, and a compound (B) expressed by any of general formulae (B-1) to (B-3) below, which compound when exposed to actinic rays or radiation, generates an acid, exposing the film to actinic rays or radiation, and developing the exposed film with a developer comprising an organic solvent to thereby obtain a negative pattern.
    Type: Application
    Filed: December 23, 2014
    Publication date: April 23, 2015
    Applicant: FUJIFILM CORPORATION
    Inventors: Keita KATO, Michihiro SHIRAKAWA, Akinori SHIBUYA, Akiyoshi GOTO, Shohei KATAOKA, Tomoki MATSUDA
  • Patent number: 8815478
    Abstract: The invention provides a colored curable composition including a dipyrromethene compound having a structure in which a polymerizable group and a carboxyl group are introduced in the same molecule, a resist liquid, an ink for inkjet printing, a color filter, a method of producing a color filter, a solid-state image sensor, a liquid crystal display, an organic EL display, an image display device and a colorant compound.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: August 26, 2014
    Assignee: FUJIFILM Corporation
    Inventors: Junichi Ito, Yuki Mizukawa, Yoshiharu Yabuki, Shinichi Kanna, Haruki Inabe, Yushi Kaneko, Akiyoshi Goto