Abstract: A gating apparatus for controlling the gap between two surfaces that includes an upper structure having a polished central region portion, an elastically deformable fulcrum structure, and an elastically deformable lever region. The upper structure can be fabricated from silicon using microelectromechanical system (MEMS) fabrication techniques. The gating apparatus also includes a lower structure coupled to the upper structure at the elastically deformable fulcrum structure. The upper structure, in response to a force, can bend about the fulcrum structure, thereby forming a variable gap between the polished central region portion and the lower structure. The variable gap can be used as a filter to filter fluids and mixed phase fluids. The structures can be made from a wide variety of materials including silicon, glass, ceramic, metal, and plastic.

Abstract: A method for controlling the temperature of a device is described. The method includes providing a body having a heating/cooling region to which the device is exposed, heating the device with a heating channel provided in the body with one end exposed to the heating/cooling region and cooling the device with cooling channel provided in the body with one end exposed to the heating/cooling region. The heating and cooling channels are provided in the body such that energy propagating in the heating channel is intermingled with gas propagating in the cooling channel and the heating and cooling sources directly impinge upon the device in the heating region.

Abstract: A circuit component has an elastically deformable first structure, a second structure, and a support structure coupling the first and second structures, wherein the support structure acts a fulcrum about which the first structure can be variably deformed in response to a variable force, to provide either a variable capacitor or a variable tank circuit having a variable capacitor and an inductor. In one particular embodiment, the circuit component includes a zipper actuator for elastically deforming the first structure. A method of making a circuit component includes forming an elastically deformable first structure, forming a second structure, and forming a support structure coupling the first and second structures, to provide either a variable capacitor or a variable tank circuit having a variable capacitor and an inductor. In one particular embodiment, the method includes forming a zipper actuator for elastically deforming the first structure.

Abstract: A bistable structure provided by the invention is characterized as including a deflection element that has mechanically constrained end points and a compliant span between the end points that is substantially free to deflect between two stable positions when a force is applied at a point along the span. The deflection element span is provided, as-fabricated, curved in one of the two stable positions and in a mechanically unstressed condition along the length of the span. The as-fabricated curve of the deflection element span includes a curve maxima at a point along the span length that is at least about ¼ of the span length from the end points of the span. The deflection element span is constrained to substantially prohibit development of a second bending mode that is characteristic for the span as the element deflects between the two stable positions.

Abstract: A material transportation system includes one or more material transportation vehicles, each having magnetic wheels coupled to a magnetically attractive surface that can include a ceiling, a wall, a floor, and/or a transition region. The material transportation vehicles are adapted to carry material from place to place. Each material transportation vehicle has sensors and motor controls that reduce swing motion of the material transportation vehicle and the material coupled thereto. A collision avoidance and traffic control system prevents collisions between the one or more material transportation vehicles.

Abstract: One or more flexures, each having compliant support structures with folded beams, provide a coupling having three degrees of freedom, two couplings having five degrees of freedom, a motion stage having five degrees of freedom, and a motion stage having one degree of freedom.

Abstract: A motion apparatus having two or five degrees of freedom includes a plurality of arm flexures, a plurality of parallelogram flexures or a plurality of compound parallelogram flexures. The motion apparatus minimizes direct, parasitic, and coupled error motions.

Abstract: A bistable structure provided by the invention is characterized as including a deflection element that has mechanically constrained end points and a compliant span between the end points that is substantially free to deflect between two stable positions when a force is applied at a point along the span. The deflection element span is provided, as-fabricated, curved in one of the two stable positions and in a mechanically unstressed condition along the length of the span. The as-fabricated curve of the deflection element span includes a curve maxima at a point along the span length that is at least about ¼ of the span length from the end points of the span. The deflection element span is constrained to substantially prohibit development of a second bending mode that is characteristic for the span as the element deflects between the two stable positions.

Abstract: An instrument for enabling a precise determination of the force-displacement characteristics of a compliant structure, including both in-plane and out-of-plane structure deflection, is provided by the invention. The instrument includes a fixture that is oriented for constraining an end of the compliant structure with respect to mechanical ground as the force-displacement characteristic is determined. A mechanical probe of the instrument is disposed relative to the fixture to enable pushing of the probe against a free end of the compliant structure. A mechanical stage is provided, including a support for the probe, and being free with respect to mechanical ground to advance the probe relative to the fixture. This enables pushing of the probe against the free end of the compliant structure.

Abstract: A motion apparatus having two or five degrees of freedom includes a plurality of arm flexures, a plurality of parallelogram flexures or a plurality of compound parallelogram flexures. The motion apparatus minimizes direct, parasitic, and coupled error motions.

Abstract: A contactor for use in testing integrated circuit chips. The contactor is made with an array of V-shaped contact elements. The V-shaped contact elements are nested so that the contact elements can be longer than the pitch of the contact points. In this way, the compliance of the beam portions of the contact elements can be increased. Also, the V-shape is very robust. Further, the V-shape allows “fly-by” testing, which is very useful at high speeds.

Abstract: A system to automate distribution of materials and tooling to production machines, where a very simple cross-section track, such as a circle or an X, is anchored to the equipment and to load/unload stations for materials and tooling, and where simple one or two wheeled robotic cars, where the wheels need not be mounted with yaw pivots to the cars, transport the materials or tooling. A control system keeps controls the motor or motors that drive one or two wheels to minimize pitch of the cars as they move along the track.

Abstract: A semiconductor structure for controlling the temperature of a component is described. The structure includes a resistive layer having one or more channels provided therein and having a resistance characteristic such that a signal applied thereto causes the resistive layer to generate heat. A cooling fluid is fed through the one or more channels to cool both the structure and a component disposed on the structure. By providing the cooling channels in the resistive layer, the heating and cooling sources are intermingled. The structure can optionally include precising and vacuum clamping structures, to locate and hold the component that is to be temperature controlled.

Abstract: A panel having a panel topology and a mode-shaped panel are provided each having pre-defined bending strength characteristics, vibration characteristics and acoustic characteristics improved from those of a flat panel. A panel having both panel topology and a mode shape is provided having further improvements. A panel having a multi-layered structure is provided having at least one layer that has either a mode shape or a panel topology, and other layers that may be flat or curved and that may be damping layers.

Abstract: A contactor for use in testing integrated circuit chips. The contactor is made with an array of V-shaped contact elements. The V-shaped contact elements are nested so that the contact elements can be longer than the pitch of the contact points. In this way, the compliance of the beam portions of the contact elements can be increased. Also, the V-shape is very robust. Further, the V-shape allows “fly-by” testing, which is very useful at high speeds.

Abstract: A novel automatically submersible and refloatable underwater tubular pipe platform geometric structure adapted for deployment in underwater target monitoring systems and the like, wherein the floating upon the surface of the water enables flooding of the pipe structure and its submergence, and the introduction of compressed air drives the water out of the pipe platform structure to enable its automatic re-floating.

Abstract: A damped tool holder system having, in combination, a longitudinally extending cylindrical tool provided with a forward outer cutting or operating end and a rearward inner end which is to be held within a tool holder; a coaxial tool holder receiving the inner end of the tool; a rigid mechanical support connection between the tool and the tool holder at a first region thereof; and a second annular support connection between the tool and the tool holder at a second region thereof spaced from but adjacent the first region and effected by a vibration damping annular film structure disposed therebetween at said second region.

Abstract: A quasi-kinematic coupling for mating components (mechanical parts, surfaces, assemblies and the like) employing mating sets of surface of revolution, (conical) grooves and cooperative surface of revolution (spherical/conical) protrusions for establishing six lines (not just prior points) of contact at the kinematic interfaces, and with elastic compliance therebetween and preferably with relief features to define the effective orientation as a clamping force seats the protrusions in the grooves and seals the component mating surfaces into contact.

Abstract: A system and method of preloading linear motion bearings arranged to move between two orthogonal surfaces of each of a rail and an overlapping carriage, wherein a permanent magnet linear electric motor with a high attractive force between the coils and the magnets is inclined at an acute angle to the surfaces, such that the attractive force creates a preload force on each of the bearings; the magnet being fixed as a track in a trough along the rail, and the coils being recessed in a groove in the inner top surface of the carriage, both oriented at said acute angle, and providing through such preloading, a high degree of stiffness and load capacity in all degrees of freedom of the carriage except in the linear direction of movement along the rail.

Abstract: An interface between a test head portion of automatic test equipment and handling device such as a prober. The interface employs preloaded kinematic couplings between the test head and handling device and between the probe card and the test head. These couplings allow the probe card to be repeatedly positioned relative to the component in the handling device. They also reduce forces on the probe card to prevent distortion of the probe card. The interface provide seperate mechanical and electrical loops such that mechanical position is not dependant on the electrical structure.