Abstract: A method for manufacturing a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength range and/or in the ultrasonic range, includes arranging at least one piezoelectric element on a support substrate. A diaphragm is formed on the at least one piezoelectric element. In forming the diaphragm, a flowable and curable polymer, which forms the diaphragm after curing, is at least partially cast around the at least one piezoelectric element. The invention further relates to the MEMS sound transducer formed by the method.

Abstract: A MEMS sound transducer for generating and/or detecting sound waves includes a support having a cavity wall which at least partially delimits a cavity of the MEMS sound transducer. At least one cantilever arm element includes a base section that is fixedly connected to the support. Each cantilever arm includes a flexible deflection section overhanging the cavity wall. At one end of the deflection portion is a base end that is disposed to face the cavity wall. Opposite the base end is a free end that is configured to be deflectable relative to the support in the direction of a stroke axis of the MEMS sound transducer. The base end of the deflection section in a sound transducer top view has a curved first contour.

Abstract: A transducer unit for a MEMS sound transducer includes a support, a transducer element connected to the support and deflectable along a reciprocation axis, a coupling element for connecting the transducer element to a diaphragm in a manner spaced apart from the transducer element, and a spring region formed between the transducer element and the coupling element, the spring region including at least one spring element, which movably connects the transducer element to the coupling element, and which includes a damping layer, which at least partially covers the spring element.

Abstract: Eyewear for outputting audio information to the wearer include an eyewear temple, which has at least one loudspeaker. The eyewear temple is configured for placement on an ear of the wearer and spaced apart from an ear opening of the wearer's ear so that the sound waves generated by the loudspeaker are transmitted over the surroundings to the spaced ear opening. The loudspeaker is an ultrasonic loudspeaker. The eyewear has a parametric audio unit that includes the ultrasonic loudspeaker and configured to generate an audible sound beam directed at the ear.

Abstract: A test device for testing a microphone has at least one test loudspeaker for generating at least one test tone into at least one test cavity. The test device has a compartment for accommodating the microphone to be tested in acoustic communication with the test cavity. The test device has at least one reference microphone for ascertaining a reference signal of the test tone emitted from the test loudspeaker. The test device has a reference cavity separated from the test cavity and acoustically coupled with the reference microphone and the test cavity. The test loudspeaker is arranged between the reference microphone and the test loudspeaker.

Abstract: A process for manufacturing a diaphragm unit of a MEMS transducer that includes multiple piezoelectric transducer units, each of the multiple piezoelectric transducer units including at least one electrode layer and at least one piezoelectric layer formed on a carrier includes the step of removing the transducer units from the carrier. At least one of the transducer units that has been removed from the carrier is arranged on a diaphragm and connected to the diaphragm. Moreover, a diaphragm unit made according to the process includes a diaphragm and multiple piezoelectric transducer units arranged on and connected to the diaphragm. Each of the multiple piezoelectric transducer units includes at least one electrode layer and at least one piezoelectric layer formed on a carrier.

Abstract: The invention relates to an amplifier unit for a MEMS sound transducer, which is operable as a microphone and as a loudspeaker, comprising at least one audio amplifier for sound reproduction and/or sound recording. According to the invention, the amplifier unit is designed in such a way that the MEMS sound transducer provided therefor is simultaneously operable as a loudspeaker and as a microphone. Moreover, the invention relates to sound-generating unit comprising a MEMS sound transducer, which is operable as a microphone and as a loudspeaker, and an amplifier unit coupled to the sound transducer for sound reproduction and/or sound recording.

Abstract: A method for manufacturing a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength range and/or in the ultrasonic range, includes arranging at least one piezoelectric element on a support substrate. A diaphragm is formed on the at least one piezoelectric element. In forming the diaphragm, a flowable and curable polymer, which forms the diaphragm after curing, is at least partially cast around the at least one piezoelectric element. The invention further relates to the MEMS sound transducer formed by the method.

Abstract: A loudspeaker unit for a portable device includes an electrodynamic loudspeaker configured as a woofer. The loudspeaker unit additionally includes a MEMS loudspeaker configured as a tweeter. A portable device includes the loudspeaker unit.

Abstract: A manufacturing method for multiple MEMS sound transducers includes manufacturing a reconstructed wafer, separating multiple chips from the wafer, and encapsulating the chips in a molding material. A piezoelectric element of the particular chips is exposed to become deflectable along a stroke axis. The reconstructed wafer is connected to multiple diaphragms associated with the particular chips, wherein the diaphragms are each connected to the associated piezoelectric element so that the diaphragms are each deflectable together with the at least one associated piezoelectric element along the stroke axis. MEMS sound transducers, each of which including at least one of the chips and one of the diaphragms, are isolated. A MEMS sound transducer, which has been manufactured using the aforementioned manufacturing method, is also disclosed.

Abstract: Eyewear for outputting audio information to the wearer include an eyewear temple, which has at least one loudspeaker. The eyewear temple is configured for placement on an ear of the wearer and spaced apart from an ear opening of the wearer's ear so that the sound waves generated by the loudspeaker are transmitted over the surroundings to the spaced ear opening. The loudspeaker is an ultrasonic loudspeaker. The eyewear has a parametric audio unit that includes the ultrasonic loudspeaker and configured to generate an audible sound beam directed at the ear.

Abstract: A sound transducer unit for an in-ear headphone, for generating and/or detecting sound waves in the audible wavelength spectrum and/or in the ultrasonic range, includes at least one MEMS sound transducer arranged on a circuit board. At least one connector element of the circuit board is electrically conductively connected to at least one contact element of the MEMS sound transducer. The MEMS sound transducer is designed as a surface-mount device, which is connected to the circuit board with the aid of surface-mount technology. The sound transducer unit can form a component of a sound-generating unit.

Abstract: A method is provided for operating a piezoelectric MEMS sound transducer in the audible wavelength spectrum and/or in the ultrasonic range. The method includes storing electrical energy in an energy store and indirectly transferring this electrical energy via a transfer unit between the energy store and the piezoelectric MEMS sound transducer. In a first switching state, the transfer unit is first of all charged from the energy store. In a second switching state, the transfer unit is discharged and the piezoelectric MEMS sound transducer is charged. In a third switching state, the piezoelectric MEMS sound transducer is discharged and the transfer unit is charged. In a fourth switching state, the transfer unit is then discharged and the energy store is charged.

Abstract: A MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength spectrum includes a carrier: a diaphragm connected to and deflectable with respect thereto the carrier and a piezoelectric element spaced apart from the diaphragm along a reciprocation axis. The piezoelectric element includes a coupling element that extends along the reciprocation axis and connects to the diaphragm. The piezoelectric element and the coupling element form a cantilever. The MEMS sound transducer includes two cantilever arms are arranged one behind the other, in a top view.

Abstract: A test device for testing a microphone has at least one test loudspeaker for generating at least one test tone into at least one test cavity. The test device has a compartment for accommodating the microphone to be tested in acoustic communication with the test cavity. The test device has at least one reference microphone for ascertaining a reference signal of the test tone emitted from the test loudspeaker. The test device has a reference cavity separated from the test cavity and acoustically coupled with the reference microphone and the test cavity. The test loudspeaker is arranged between the reference microphone and the test loudspeaker.

Abstract: An in-ear receiver can be used in a headset and/or hearing aid and includes a housing in which at least one ear canal section is configured to be inserted into an ear canal of a wearer when the in-ear receiver is used as intended. The housing defines at least one outer contour that is configured with at least in one section adapted to the ear canal of the wearer. The in-ear receiver includes a sound transducer arranged in the housing, and at least one resonant cavity, which is formed in the housing and is divided by the sound transducer into a front volume and a rear volume. The sound transducer is a MEMS sound transducer, and the front volume and/or the rear volume have/has an inner contour adapted to the ear canal.

Abstract: A loudspeaker assembly for on-ear headphones, to be arranged on and/or over the ear, includes a housing in which a woofer is arranged and configured to emit low frequency sound waves along a low frequency sound beam axis toward the wearer's the ear. At least one tweeter is arranged in the housing and configured to emit high frequency sound waves along a high frequency sound beam axis toward the wearer's the ear. The at least one tweeter is a MEMS loudspeaker.

Abstract: A sound transducer arrangement for generating and/or detecting sound waves in the audible wavelength spectrum includes an acoustic unit, which includes a vibratable diaphragm and a MEMS unit coupled to the diaphragm for generating and/or detecting a deflection of the diaphragm. The sound transducer arrangement includes a MEMS structure, which includes a support unit on which the MEMS unit and the acoustic unit are arranged. The support unit includes a metallic lead frame and a plastic body, with which the lead frame is partially circumferentially fused.

Abstract: A method is provided for operating a piezoelectric MEMS sound transducer in the audible wavelength spectrum and/or in the ultrasonic range. The method includes storing electrical energy in an energy store and indirectly transferring this electrical energy via a transfer unit between the energy store and the piezoelectric MEMS sound transducer. In a first switching state, the transfer unit is first of all charged from the energy store. In a second switching state, the transfer unit is discharged and the piezoelectric MEMS sound transducer is charged. In a third switching state, the piezoelectric MEMS sound transducer is discharged and the transfer unit is charged. In a fourth switching state, the transfer unit is then discharged and the energy store is charged.

Abstract: The invention relates to an amplifier unit for a MEMS sound transducer, which is operable as a microphone and as a loudspeaker, comprising at least one audio amplifier for sound reproduction and/or sound recording. According to the invention, the amplifier unit is designed in such a way that the MEMS sound transducer provided therefor is simultaneously operable as a loudspeaker and as a microphone. Moreover, the invention relates to sound-generating unit comprising a MEMS sound transducer, which is operable as a microphone and as a loudspeaker, and an amplifier unit coupled to the sound transducer for sound reproduction and/or sound recording.