Abstract: The present invention relates to a sound transducer assembly (1) with a MEMS sound transducer (21) for generating and/or detecting sound waves in the audible wavelength spectrum, which comprises a first cavity (41), and an ASIC (11) electrically connected to the MEMS sound transducer. In accordance with the invention, the ASIC (11) is embedded in a first substrate (10), and the first MEMS sound transducer (21) is arranged in a second substrate (20). In addition, it is provided that the first substrate (10) and the second substrate (20) are electrically connected to one another, and that the first cavity (41) is at least partially formed in the first and/or second substrate (10, 20).

Abstract: The invention relates to a circuit board module (2) for a sound transducer assembly (1) for generating and/or detecting sound waves in the audible wavelength spectrum, with a circuit board (4), which features a recess (6) with a first opening (7), and at least a part of a MEMS sound transducer (5), which is arranged in the area of the first opening (7), such that the recess (6) at least partially forms a cavity (9) of the MEMS sound transducer (5). In accordance with the invention, the recess (6) features a second opening (8) opposite to the first opening (7), such that the recess (6) extends completely through the circuit board (4). In addition, the invention relates to a sound transducer assembly (1) with such a circuit board module (2) along with a method for manufacturing such sound transducer assembly (1).

Abstract: A loudspeaker arrangement for a plurality of MEMS loudspeakers for generating sound waves in the audible wavelength spectrum includes a housing, which has a sound conduction cavity and at least one sound outlet opening, and at least two MEMS loudspeakers, arranged in the interior of the housing opposite and spaced apart from each other by the sound conduction cavity. Each MEMS loudspeaker has a cavity in the region of their opposite faces. The loudspeaker arrangement includes a shielding wall for acoustically decoupling the two MEMS loudspeakers from each other.

Abstract: A MEMS loudspeaker arrangement for generating sound waves in the audible wavelength spectrum includes a housing that defines a sound-conducting channel and a sound outlet arranged at the end of the sound-conducting channel. At least two MEMS loudspeakers are arranged in the interior of the housing so that they generate sound waves through the sound-conducting channel to the sound outlet. One of the MEMS loudspeakers is disposed downstream of the other in the direction of the sound outlet. A control unit is connected to control the MEMS loudspeakers so as to increase the maximum loudness of the MEMS loudspeaker arrangement. The first of the two MEMS loudspeakers is controlled to function as a sound generator for generating an initial wave, and the second MEMS loudspeaker is controlled to function as a sound amplifier for amplifying the initial wave.

Abstract: The invention relates to a MEMS loudspeaker (1) for generating sound waves in the audible wavelength spectrum, with a carrier substrate (2) that features a sub-strate cavity (6) with two substrate openings (7, 8), which are formed on two opposite sides of the carrier substrate (2), an actuator structure (3), in particular a piezoelectric actuator structure, which is arranged in the area of one of the two substrate openings (7, 8) and is connected to the carrier substrate (2) in its edge area, and a membrane (4) anchored in its edge area, which, by means of the actuator structure (3), can be set into vibration for generating sound waves. In accordance with the invention, in a cross-sectional view of the MEMS loudspeaker (1), the membrane (4) is spaced at a distance from the actuator structure (3), such that an intermediate cavity (13) is formed between these two.

Abstract: The invention relates to a MEMS sound transducer (2) for generating and/or detecting sound waves in the audible wavelength spectrum with a membrane carrier (40), a membrane (30) that is connected in its edge area (37) to the membrane carrier, and may vibrate along the z-axis (50) with respect to the membrane carrier, and a stopper mechanism (60), which limits the vibrations of the membrane in at least one direction (51). In accordance with the invention, the MEMS sound transducer is characterized by the fact that the stopper mechanism at least features one reinforcing element (31) that is arranged on one side of the membrane, and an end stop (61) opposite to the reinforcing element, which is spaced at a distance from it in a neutral position of the membrane and against which the reinforcing element abuts at a maximum deflection. The invention also relates to a transducer arrangement (1) with such a MEMS sound transducer (2).

Abstract: A MEMS loudspeaker for generating sound waves within an audible wavelength spectrum includes a circuit board, a membrane spaced from the circuit board and being deflectable along a z-axis, at least one piezoelectric actuator for deflecting the membrane, an electronic control unit embedded in the circuit board for controlling the at least one piezoelectric actuator, and at least one position sensor for providing to the control unit a sensor signal dependent on the deflection of the membrane, the control unit controlling the piezoelectric actuator based on the sensor signal.

Abstract: The present invention relates to a loudspeaker array (1) comprising a printed circuit board (2); a MEMS loudspeaker (3), which is intended for generating sound waves in the audible wavelength range and which has a diaphragm (9) deflectable along a Z axis; a sound-conducting channel (21), which is adjacent to the MEMS loudspeaker (3) and which has an acoustic outlet opening (22); and an ASIC (4), which is electrically connected to the MEMS loudspeaker (3). Furthermore, the printed circuit board (2) comprises a first circuit board cavity (11), in which the ASIC (4) is disposed so as to be fully integrated into the printed circuit board (2). Furthermore, the printed circuit board (2) comprises a second circuit board cavity (13) having an opening (14), which is closed by means of the MEMS loudspeaker (3), so that the second circuit board cavity (13) forms at least one part of a cavity (15) of the MEMS loudspeaker (3).

Abstract: A MEMS sound transducer for at least one of generating and detecting sound waves in air in an audible wavelength spectrum includes a carrier substrate, a cavity defined in the carrier substrate, the cavity defining at least one opening, and a multilayered piezoelectric membrane structure spanning over the opening of the cavity and having an edge area connected with the carrier substrate so that with respect to the carrier substrate the membrane structure is capable of vibrating to at least one of generate and/or and detect sound energy, wherein the membrane structure has in cross-section at least in some areas a first piezo layer spaced from a second piezo layer. An interlayer is arranged in an area between the first and second piezo layers, the interlayer being made of at least one of silicon oxide, silicon nitride and polysilicon, the interlayer being configured so that sound energy can be reflected in the direction of at least one interface of the membrane structure adjacent to the air.

Abstract: A microelectromechanical device has a mobile mass that undergoes a movement, in particular a spurious movement, in a first direction in response to an external event; the device moreover has a stopper structure configured so as to stop said spurious movement. In particular, a stopper element is fixedly coupled to the mobile mass and is configured so as to abut against a stopper mass in response to the spurious movement, thereby stopping it. In detail, the stopper element is arranged on the opposite side of the stopper mass with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass and extends in the space occupied by the stopper mass, in the first direction.

Abstract: A microelectromechanical device has a mobile mass that undergoes a movement, in particular a spurious movement, in a first direction in response to an external event; the device moreover has a stopper structure configured so as to stop said spurious movement. In particular, a stopper element is fixedly coupled to the mobile mass and is configured so as to abut against a stopper mass in response to the spurious movement, thereby stopping it. In detail, the stopper element is arranged on the opposite side of the stopper mass with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass and extends in the space occupied by the stopper mass, in the first direction.

Abstract: A micro-electro-mechanical variable capacitor has a first and a second electrode, and a dielectric region arranged on the first electrode. An intermediate electrode is arranged on the dielectric region. The first electrode is fixed and anchored to a substrate, and the second electrode includes a membrane movable with respect to the first electrode according to an external actuation, in particular an electrostatic force due to an actuation voltage applied between an actuation electrode and the first electrode. The second electrode is suspended over the intermediate electrode in a first operating condition, and contacts the intermediate electrode in a second operating condition; in particular, in the second operating condition, a short-circuit is established between the second electrode and the intermediate electrode.

Abstract: An Integrated gyroscope includes a suspended mass; mobile actuation electrodes extending from the suspended mass; and a sensing mass connected to the actuation mass through coupling springs. The suspended mass is formed by an external part and an internal part, electrically separated by an electrical-insulation region having a closed annular shape. The electrical-insulation region is laterally completely surrounded by the external part and by the internal part. In one embodiment, the suspended mass has the shape of a closed frame delimiting an opening, the sensing mass is formed inside the opening and is connected to the internal part, and the mobile actuation electrodes are connected to the external part.

Abstract: A micro-electro-mechanical variable capacitor has a first and a second electrode, and a dielectric region arranged on the first electrode. An intermediate electrode is arranged on the dielectric region. The first electrode is fixed and anchored to a substrate, and the second electrode includes a membrane movable with respect to the first electrode according to an external actuation, in particular an electrostatic force due to an actuation voltage applied between an actuation electrode and the first electrode. The second electrode is suspended over the intermediate electrode in a first operating condition, and contacts the intermediate electrode in a second operating condition; in particular, in the second operating condition, a short-circuit is established between the second electrode and the intermediate electrode.