Abstract: Described are 8 aqueous compositions useful for treating textile materials to impart oil- and/or water-repellent properties thereto. The compositions contain inter alia polymers containing perfluoroalkyl groups (RF groups), wherein 55 to 100% of the RF groups contain 6 carbon atoms.

Abstract: Aqueous dispersions comprise a specific copolymer based on acrylate, a specific paraffin wax and one or more dispersants. The dispersions have high stability and are useful for treating textile fabrics, conferring outstanding water-repellent properties thereon.

Abstract: The invention relates to a radial bearing, comprising a housing, a housing bore extending along a bearing axis, several tilting segments that are arranged around the bearing axis in order to support a shaft and each have a radially outer bearing surface, by means of which the tilting segments are supported on a supporting surface on the housing. The radially outer bearing surface of each tilting segment and the supporting surface are arranged facing each other. Each tilting segment is movably arranged relative to the housing.

Abstract: A method of determining an overlay error. Measuring an overlay target having process-induced asymmetry. Constructing a model of the target. Modifying the model, e.g., by moving one of the structures to compensate for the asymmetry. Calculating an asymmetry-induced overlay error using the modified model. Determining an overlay error in a production target by subtracting the asymmetry-induced overlay error from a measured overlay error. In one example, the model is modified by varying asymmetry p(n?), p(n?) and the calculating an asymmetry-induced overlay error is repeated for a plurality of scatterometer measurement recipes and the step of determining an overlay error in a production target uses the calculated asymmetry-induced overlay errors to select an optimum scatterometer measurement recipe used to measure the production target.

Abstract: Described are 8 aqueous compositions useful for treating textile materials to impart oil- and/or water-repellent properties thereto. The compositions contain inter alia polymers containing perfluoroalkyl groups (RF groups), wherein 55 to 100% of the RF groups contain 6 carbon atoms.

Abstract: The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate.

Abstract: The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate.

Abstract: The invention relates to a method and an apparatus for processing a workpiece, such as a wall, a ceiling, a floor or the like in a building, by means of an appliance which can be moved, in particular an electric tool, wherein the appliance can be moved to at least one predeterminable nominal position. Essentially continuous position identification, in particular by means of optical methods, is carried out for the respective actual position of the appliance and/or of an object which can be moved corresponding to the appliance. The position information, such as the coordinates of the respective determined actual position and/or information relating to any, discrepancy between the nominal position and the actual position, is transmitted wirelessly to the appliance. The respective position information is indicated to the user on the appliance, for manual position control.

Abstract: Described are 8 aqueous compositions useful for treating textile materials to impart oil- and/or water-repellent properties thereto. The compositions contain inter alia polymers containing perfluoroalkyl groups (RF groups), wherein 55 to 100% of the RF groups contain 6 carbon atoms.

Abstract: The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate.

Abstract: A method for determining overlay error includes measuring asymmetry of radiation reflected from each of a plurality of targets on a substrate. The plurality of targets include a predetermined overlay offset. The method also includes comparing the measured asymmetry of the radiation reflected from each of the plurality of targets to the corresponding predetermined overlay offset of the respective target. Additionally, the method includes determining the overlay error of a point on the substrate as a function of measured asymmetry reflected from the point. The function is determined by fitting a polynomial or a Fourier series to a comparison of the measured asymmetry of the radiation reflected from each of the plurality of targets to the corresponding predetermined overlay offset of the respective target. The function limits an effect of linearity error.

Abstract: A method and associated apparatus determine an overlay error on a substrate. A beam is projected onto three or more targets. Each target includes first and second overlapping patterns with predetermined overlay offsets on the substrate. The asymmetry of the radiation reflected from each target on the substrate is measured. The overlay error not resultant from the predetermined overlay offsets is determined. The function that enables calculation of overlay from asymmetry for other points on the wafer is determined by limiting the effect of linearity error when determining the overlay error from the function.

Abstract: A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target (30) on the surface of the substrate (W) and to produce a measurement signal representative of the spectrum. The apparatus includes a beam shaper (51, 53) interposed in the radiation path between the radiation source and the detector, the beam shaper being configured to adjust the cross section of the beam dependent on the shape and/or size of the target.

Abstract: An apparatus measures properties, such as overlay error, of a substrate divided into a plurality of fields. The apparatus includes a radiation source configured to direct radiation onto a first target of each field of the substrate. Each first target (T4G) has at least a first grating and a second grating having respective predetermined offsets, the predetermined offset (+d) of the first grating being in a direction opposite the predetermined offset (?d) of the second grating. A detector is configured to detect the radiation reflected from each first target and to obtain an asymmetry value for each first target from the detected radiation.

Abstract: The invention relates to a converter system (1, 1?, 1?) for an electric vehicle and in particular a lightweight electric vehicle. The converter system (1, 1?, 1?) has a supporting housing (10, 10?, 10?) for connecting to the vehicle, has an electromechanical energy converter arranged at least partially in the supporting housing (10, 10?, 10?), said electromechanical energy converter having at least one stator (21, 21?) and a rotor (22, 22?) which is rotatable relative to the stator (21, 21?) about a drive axis (7, 40), and has a power transmitting device which connects the rotor (22, 22?) to a connection element.

Abstract: A method is disclosed for braking electrically driven vehicles, in particular rail vehicles. In at least one embodiment, the behavior of the brake system is configured directly as a function of the system state, i.e. the operating conditions of the vehicle, such as for example the laden state of the vehicle, temperature of the engines and in particular of the magnets, as well as redundancy requirements, and therefore permit the fully functioning mechanical brake which is present in vehicles nowadays to be eliminated.

Abstract: The invention relates to a battery pack (1) for electric vehicles or vehicles with an electric hybrid drive. The battery pack (1) according to the invention comprises a battery housing (2) and battery cells, which are arranged within the battery housing (2), are self-contained and are electrically connected to one another in order to achieve a desired terminal voltage. A plurality of battery cells are in each case arranged at a distance from one another in a fastening frame (6) and in each case form cell modules (4). The cell modules (4) are in each case arranged on fastening elements, which pass through the battery housing (2), the fastening elements, being in the form of spacers between the cell modules (4) and, with the battery housing (2), forming a bearing unit.

Abstract: The invention relates to a liquid-lubricated gear train having the following characteristics: the gear train has at least two gears, the teeth of which mesh with each other; the gear train has an engagement area, which has an inlet and an outlet; the gear train has a casing wall, which encloses at least one of two gears that work with each other and partially or completely blocks the enclosed interior off from the environment; the casing wall has an outlet in the area of the inlet, wherein said outlet establishes a conducting connection between the interior and the atmosphere; and the distance between the dynamic enveloping circle of the gears and the casing wall is less than the tooth height.

Abstract: A battery assembly (1) comprises a number of electrochemical cells (2), in particular flat battery cells, which are received in a holding means (3), wherein the holding means (3) has at least one fixing plate (4) which at least indirectly adjoins a electrochemical cell (2), wherein, there is a defined surface pressure between a surface (5) of the electrochemical cell (2) and the fixing plate (4).

Abstract: An electrochemical energy storage device (1) comprising a casing (2), in which a plurality of flat galvanic cells (3) are arranged. Between two adjacent flat galvanic cells is in each case, a flat heat conducting body (4) and/or a flat elastic body (5) arranged. Preferably, the flat galvanic cells, the flat heat conducting bodies and/or the flat elastic bodies exert upon each other at the contact surface areas, a force (11) corresponding to a surface pressing, and the casing has a wall with a structure or with structures (8, 9), in which a heat conducting body (4) engages such, that said heat conducting body may not be shiftable in the direction of the force (11), acting on the contact surface areas.