Abstract: The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured. The intensity of each of the first diffraction orders from the diffraction spectrum are compared to determine overlay (or other properties) of exposed layers on the substrate.

Abstract: The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured. The intensity of each of the first diffraction orders from the diffraction spectrum are compared to determine overlay (or other properties) of exposed layers on the substrate.

Abstract: An AM/FM radio system for a vehicle that is selectively impedance matched to the particular tuned frequency of interest so that noise received by other frequencies does not affect the received signal. The radio system includes an HMI allowing a user to select an AM or FM radio station and a radio tuner responsive to a signal from the HMI identifying the selected radio station. The tuner tunes the radio system to the radio station, and provides a signal to the HMI identifying the radio station. The HMI places a message on a vehicle bus identifying the radio station that the radio tuner is tuned to. An antenna controller receives the message from the vehicle bus to selectively control an impedance matrix to provide impedance matching for the selected radio station frequency. The antenna controller also selectively tunes antenna radiating elements to the particular tuned frequency.

Abstract: A method for determining overlay error includes measuring asymmetry of radiation reflected from each of a plurality of targets on a substrate. The plurality of targets include a predetermined overlay offset. The method also includes comparing the measured asymmetry of the radiation reflected from each of the plurality of targets to the corresponding predetermined overlay offset of the respective target. Additionally, the method includes determining the overlay error of a point on the substrate as a function of measured asymmetry reflected from the point. The function is determined by fitting a polynomial or a Fourier series to a comparison of the measured asymmetry of the radiation reflected from each of the plurality of targets to the corresponding predetermined overlay offset of the respective target. The function limits an effect of linearity error.

Abstract: The invention relates to a converter system (1, 1?, 1?) for an electric vehicle and in particular a lightweight electric vehicle. The converter system (1, 1?, 1?) has a supporting housing (10, 10?, 10?) for connecting to the vehicle, has an electromechanical energy converter arranged at least partially in the supporting housing (10, 10?, 10?), said electromechanical energy converter having at least one stator (21, 21?) and a rotor (22, 22?) which is rotatable relative to the stator (21, 21?) about a drive axis (7, 40), and has a power transmitting device which connects the rotor (22, 22?) to a connection element. To permit a particularly cheap design which is easy to maintain and to reduce thermal problems, the supporting housing (10, 10?, 10?) has at least one first (14) and one second axial portion (15). wherein (the first portion (14) has a greater diameter than the second portion (15) in a direction transversely with respect lo the drive axis (7, 40).

Abstract: A diffraction measurement target that has at least a first sub-target and at least a second sub-target, and wherein (1) the first and second sub-targets each include a pair of periodic structures and the first sub-target has a different design than the second sub-target, the different design including the first sub-target periodic structures having a different pitch, feature width, space width, and/or segmentation than the second sub-target periodic structure or (2) the first and second sub-targets respectively include a first and second periodic structure in a first layer, and a third periodic structure is located at least partly underneath the first periodic structure in a second layer under the first layer and there being no periodic structure underneath the second periodic structure in the second layer, and a fourth periodic structure is located at least partly underneath the second periodic structure in a third layer under the second layer.

Abstract: An inspection apparatus measures a property of a substrate including a periodic structure. An illumination system provides a beam of radiation with an illumination profile including a plurality of illuminated portions. A radiation projector projects the beam of radiation onto the substrate. A detector detects radiation scattered from the periodic structure and separately detects first order diffracted radiation and at least one higher order of diffracted radiation of each of the illuminated portions. A processor determines the property of the substrate from the detected radiation. The plurality of illuminated portions are arranged such that first order diffracted radiation arising from one or more of the illuminated portions are not overlapped by zeroth order or first order diffracted radiation arising from any other of the illuminated portions.

Abstract: The invention relates to a radial bearing, comprising a housing, a housing bore extending along a bearing axis, several tilting segments that are arranged around the bearing axis in order to support a shaft and each have a radially outer bearing surface, by means of which the tilting segments are supported on a supporting surface on the housing. The radially outer bearing surface of each tilting segment and the supporting surface are arranged facing each other. Each tilting segment is movably arranged relative to the housing.

Abstract: The present invention discloses a method of diagnosing colon cancer by using specific markers from a set, having diagnostic power for colon cancer diagnosis and distinguishing colon cancer types in diverse samples.

Abstract: A device for reversing the direction of rotation and/or for adjusting the carbon brushes for a reversible electric motor, in particular for an electric hand tool, with a base and with a mount, which is mounted pivotably on the base and on which brushholders for the carbon brushes wiping over the collector of the electric motor are arranged. The electric motor can be driven by means of power electronics, such as a pulse width controller, a phase gating controller, a phase chopping controller or the like. The power electronics are arranged on the base and/or on the mount. The device furthermore has fixed contacts and switching contacts, which interact with alternate contact-making for reversing the direction of rotation of the electric motor as the mount is pivoted.

Abstract: Described are 8 aqueous compositions useful for treating textile materials to impart oil- and/or water-repellent properties thereto. The compositions contain inter alia polymers containing perfluoroalkyl groups (RF groups), wherein 55 to 100% of the RF groups contain 6 carbon atoms.

Abstract: Aqueous dispersions comprise a specific copolymer based on acrylate, a specific paraffin wax and one or more dispersants. The dispersions have high stability and are useful for treating textile fabrics, conferring outstanding water-repellent properties thereon.

Abstract: The invention relates to a radial bearing, comprising a housing, a housing bore extending along a bearing axis, several tilting segments that are arranged around the bearing axis in order to support a shaft and each have a radially outer bearing surface, by means of which the tilting segments are supported on a supporting surface on the housing. The radially outer bearing surface of each tilting segment and the supporting surface are arranged facing each other. Each tilting segment is movably arranged relative to the housing.

Abstract: A method of determining an overlay error. Measuring an overlay target having process-induced asymmetry. Constructing a model of the target. Modifying the model, e.g., by moving one of the structures to compensate for the asymmetry. Calculating an asymmetry-induced overlay error using the modified model. Determining an overlay error in a production target by subtracting the asymmetry-induced overlay error from a measured overlay error. In one example, the model is modified by varying asymmetry p(n?), p(n?) and the calculating an asymmetry-induced overlay error is repeated for a plurality of scatterometer measurement recipes and the step of determining an overlay error in a production target uses the calculated asymmetry-induced overlay errors to select an optimum scatterometer measurement recipe used to measure the production target.

Abstract: Described are 8 aqueous compositions useful for treating textile materials to impart oil- and/or water-repellent properties thereto. The compositions contain inter alia polymers containing perfluoroalkyl groups (RF groups), wherein 55 to 100% of the RF groups contain 6 carbon atoms.

Abstract: The invention relates to a method and an apparatus for processing a workpiece, such as a wall, a ceiling, a floor or the like in a building, by means of an appliance which can be moved, in particular an electric tool, wherein the appliance can be moved to at least one predeterminable nominal position. Essentially continuous position identification, in particular by means of optical methods, is carried out for the respective actual position of the appliance and/or of an object which can be moved corresponding to the appliance. The position information, such as the coordinates of the respective determined actual position and/or information relating to any, discrepancy between the nominal position and the actual position, is transmitted wirelessly to the appliance. The respective position information is indicated to the user on the appliance, for manual position control.

Abstract: Described are 8 aqueous compositions useful for treating textile materials to impart oil- and/or water-repellent properties thereto. The compositions contain inter alia polymers containing perfluoroalkyl groups (RF groups), wherein 55 to 100% of the RF groups contain 6 carbon atoms.

Abstract: The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate.

Abstract: A method and associated apparatus determine an overlay error on a substrate. A beam is projected onto three or more targets. Each target includes first and second overlapping patterns with predetermined overlay offsets on the substrate. The asymmetry of the radiation reflected from each target on the substrate is measured. The overlay error not resultant from the predetermined overlay offsets is determined. The function that enables calculation of overlay from asymmetry for other points on the wafer is determined by limiting the effect of linearity error when determining the overlay error from the function.

Abstract: A scatterometer configured to measure a property of a substrate, includes a radiation source configured to provide a radiation beam; and a detector configured to detect a spectrum of the radiation beam reflected from a target (30) on the surface of the substrate (W) and to produce a measurement signal representative of the spectrum. The apparatus includes a beam shaper (51, 53) interposed in the radiation path between the radiation source and the detector, the beam shaper being configured to adjust the cross section of the beam dependent on the shape and/or size of the target.