Patents by Inventor Andreas Grassmann

Andreas Grassmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching of contact holes
    Patent number: 6025116
    Abstract: The photolithographic etching of contact holes in trenches in an insulator layer over a silicon body is improved by adjusting properly the depth of the trench and the thickness of the photoresist used in the photolithography.
    Type: Grant
    Filed: March 31, 1997
    Date of Patent: February 15, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventor: Andreas Grassmann