Patents by Inventor Andreas Hegedus
Andreas Hegedus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240097346Abstract: Methods for constructing multi-walled carbon nanotube (MWCNT) antenna arrays, may include: variable doping of the MWCNTs, forming light pipes with layers of variable dielectric glass, forming geometric diodes on full-wave rectified devices that propagate both electrons and holes, using clear conductive ground plans to form windows that can control a building's internal temperature, and generating multiple lithographic patterns with a single mask.Type: ApplicationFiled: November 21, 2023Publication date: March 21, 2024Inventors: Laurence H. COOKE, Darin S. OLSON, Paul COMITA, Robert E. COUSINS, Albert K. HENNING, Andreas HEGEDUS, David B. COOKE, Yao Te CHENG, John BURKE, Richard T. PRESTON
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Patent number: 11824264Abstract: Methods for constructing multi-walled carbon nanotube (MWCNT) antenna arrays, may include: variable doping of the MWCNTs, forming light pipes with layers of variable dielectric glass, forming geometric diodes on full-wave rectified devices that propagate both electrons and holes, using clear conductive ground plans to form windows that can control a building's internal temperature, and generating multiple lithographic patterns with a single mask.Type: GrantFiled: May 19, 2022Date of Patent: November 21, 2023Assignee: NOVASOLIX, INC.Inventors: Laurence H. Cooke, Darin S. Olson, Paul Comita, Robert E. Cousins, Albert K. Henning, Andreas Hegedus, David B. Cooke, Yao Te Cheng, John Burke, Richard T. Preston
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Patent number: 10580920Abstract: A solar antenna array may comprise an array of carbon nanotube antennas that may capture and convert sunlight into electrical power. A method for constructing the solar antenna array from a glass top down to aluminum over a plastic bottom such that light passing through the glass top and/or reflected off the aluminum both may be captured by the antennas sandwiched between. Techniques for patterning the glass to further direct the light toward the antennas and techniques for continuous flow fabrication and testing are also described.Type: GrantFiled: January 20, 2017Date of Patent: March 3, 2020Assignee: NovaSolix, Inc.Inventors: Laurence H. Cooke, Andreas Hegedus, Jyotsna Iyer, Paul Comita
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Patent number: 10204831Abstract: Embodiments of the invention generally relate to apparatuses and methods for producing epitaxial thin films and devices by epitaxial lift off (ELO) processes. In one embodiment, a method for forming thin film devices during an ELO process is provided which includes coupling a plurality of substrates to an elongated support tape, wherein each substrate contains an epitaxial film disposed over a sacrificial layer disposed over a wafer, exposing the substrates to an etchant during an etching process while moving the elongated support tape, and etching the sacrificial layers and peeling the epitaxial films from the wafers while moving the elongated support tape. Embodiments also include several apparatuses, continuous-type as well as a batch-type apparatuses, for forming the epitaxial thin films and devices, including an apparatus for removing the support tape and epitaxial films from the wafers on which the epitaxial films were grown.Type: GrantFiled: September 22, 2015Date of Patent: February 12, 2019Assignee: ALTA DEVICES, INC.Inventors: Thomas Gmitter, Gang He, Melissa Archer, Andreas Hegedus
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Patent number: 10066297Abstract: A showerhead for a semiconductor processing reactor formed by an array of showerhead tiles. Each showerhead tile has a plurality of process gas apertures, which may be in a central area of the tile or may extend over the entire tile. Each showerhead tile can be dimensioned for processing a respective substrate or a plurality of substrates or the array can be dimensioned for processing a substrate. An exhaust region surrounds the process gas apertures. The exhaust region has at least one exhaust aperture, and may include an exhaust slot, a plurality of connected exhaust slots or a plurality of exhaust apertures. The exhaust region surrounds the array of showerhead tiles, or a respective portion of the exhaust region surrounds the plurality of process gas apertures in each showerhead tile or group of showerhead tiles. A gas curtain aperture may be between the exhaust region and the process gas apertures of one of the showerhead tiles or adjacent to the central area of the tile.Type: GrantFiled: October 27, 2015Date of Patent: September 4, 2018Assignee: ALTA DEVICES, INC.Inventors: Gregg Higashi, Alexander Lerner, Khurshed Sorabji, Lori D. Washington, Andreas Hegedus
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Publication number: 20170309767Abstract: A solar antenna array may comprise an array of carbon nanotube antennas that may capture and convert sunlight into electrical power. A method for constructing the solar antenna array from a glass top down to an aluminum covered plastic bottom such that light passing through the glass top and/or reflected off the aluminum bottom both may be captured by the antennas sandwiched between. Techniques for patterning the glass to further direct the light toward the antennas and techniques for continuous flow fabrication and testing are also described.Type: ApplicationFiled: August 29, 2016Publication date: October 26, 2017Inventors: Laurence H. COOKE, Andreas HEGEDUS, Jyotsna IYER, Paul COMITA, William J. ALLEN
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Publication number: 20170309765Abstract: A solar antenna array may comprise an array of antennas that may capture and convert sunlight into electrical power. Methods for constructing the solar antenna array may initially use range of semiconductor processing steps to minimize development costs, and may subsequently use a combination of stamps and low cost materials to reduce manufacturing costs. Designs may be optimized for capturing a broad spectrum of visible light and non-polarized light. Continuous flow Fabrication and Testing is also described.Type: ApplicationFiled: April 20, 2016Publication date: October 26, 2017Inventors: Laurence H. COOKE, Andreas HEGEDUS
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Publication number: 20170309766Abstract: A solar antenna array may comprise an array of carbon nanotube antennas that may capture and convert sunlight into electrical power. A method for constructing the solar antenna array from a glass top down to aluminum over a plastic bottom such that light passing through the glass top and/or reflected off the aluminum both may be captured by the antennas sandwiched between. Techniques for patterning the glass to further direct the light toward the antennas and techniques for continuous flow fabrication and testing are also described.Type: ApplicationFiled: January 20, 2017Publication date: October 26, 2017Inventors: Laurence H. COOKE, Andreas HEGEDUS, Jyotsna IYER, Paul COMITA
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Patent number: 9698284Abstract: An optoelectronic device including at least one of a solar device, a semiconductor device, and an electronic device. The device includes a semiconductor unit. A plurality of metal fingers is disposed on a surface of the semiconductor unit for electrical conduction. Each of the metal fingers corresponds to a section of the optoelectronic device. A plurality of pad areas is available for connection to a bus bar, wherein each of the metal fingers is connected to a corresponding pad area for forming an electrical contact. The optoelectronic device includes a bad section, wherein the bad section is associated with a compromised metal finger and a compromised pad area. A dielectric spot coating is disposed above the compromised pad area to electrically isolate the bad section.Type: GrantFiled: August 31, 2011Date of Patent: July 4, 2017Assignee: ALTA DEVICES, INC.Inventor: Andreas Hegedus
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Patent number: 9679814Abstract: Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material.Type: GrantFiled: May 27, 2015Date of Patent: June 13, 2017Assignee: ALTA DEVICES, INC.Inventors: Melissa Archer, Harry Atwater, Thomas Gmitter, Gang He, Andreas Hegedus, Gregg Higashi, Stewart Sonnenfeldt
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Patent number: 9647148Abstract: An optoelectronic device including at least one of a solar device, a semiconductor device, and an electronic device. The device includes a semiconductor unit. A plurality of metal fingers is disposed on a surface of the semiconductor unit for electrical conduction. Each of the metal fingers includes a pad area for forming an electrical contact. The optoelectronic device includes a plurality of pad areas that is available for connection to a bus bar, wherein each of the metal fingers is connected to a corresponding pad area for forming an electrical contact.Type: GrantFiled: September 8, 2014Date of Patent: May 9, 2017Assignee: ALTA DEVICES, INC.Inventor: Andreas Hegedus
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Patent number: 9644268Abstract: A thermal bridge connecting first and second processing zones and a method for transferring a work piece from a first to a second processing zone by way of the thermal bridge are disclosed. A work piece, transportable from the first to the second processing zone on or above the thermal bridge, is maintained at a temperature between the temperatures of the processing zones. The thermal bridge member features a thermally conductive transport member for the work piece supported over an infrared transmissive member that is insulative to heat conduction and convection. The bridge insulative member extends between the first and second processing zones or between reactors. An infrared radiation beam source emits infrared radiation which passes through the bridge insulative member to the transport member, heating the member. In an alternate embodiment, the transport member may be heated directly. A liner member may be mounted above the bridge member to retain heat.Type: GrantFiled: August 31, 2011Date of Patent: May 9, 2017Assignee: ALTA DEVICES, INC.Inventors: Gregg Higashi, Khurshed Sorabji, Andreas Hegedus
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Publication number: 20160130724Abstract: Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a heating lamp assembly for a vapor deposition reactor system is provided which includes a lamp housing disposed on an upper surface of a support base and containing a first lamp holder and a second lamp holder and a plurality of lamps extending from the first lamp holder to the second lamp holder. The plurality of lamps may have split filament lamps and/or non-split filament lamps, and in some examples, split and non-split filament may be alternately disposed between the first and second lamp holders. A reflector may be disposed on the upper surface of the support base between the first and second lamp holders. The reflector may contain gold or a gold alloy.Type: ApplicationFiled: January 18, 2016Publication date: May 12, 2016Applicant: Alta Devices, Inc.Inventors: Gang He, Gregg Higashi, Khurshed Sorabji, Roger Hamamjy, Andreas Hegedus
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Publication number: 20160049334Abstract: Embodiments of the invention generally relate to apparatuses and methods for producing epitaxial thin films and devices by epitaxial lift off (ELO) processes. In one embodiment, a method for forming thin film devices during an ELO process is provided which includes coupling a plurality of substrates to an elongated support tape, wherein each substrate contains an epitaxial film disposed over a sacrificial layer disposed over a wafer, exposing the substrates to an etchant during an etching process while moving the elongated support tape, and etching the sacrificial layers and peeling the epitaxial films from the wafers while moving the elongated support tape. Embodiments also include several apparatuses, continuous-type as well as a batch-type apparatuses, for forming the epitaxial thin films and devices, including an apparatus for removing the support tape and epitaxial films from the wafers on which the epitaxial films were grown.Type: ApplicationFiled: September 22, 2015Publication date: February 18, 2016Inventors: Thomas GMITTER, Gang HE, Melissa ARCHER, Andreas HEGEDUS
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Publication number: 20160047042Abstract: A showerhead for a semiconductor processing reactor formed by an array of showerhead tiles. Each showerhead tile has a plurality of process gas apertures, which may be in a central area of the tile or may extend over the entire tile. Each showerhead tile can be dimensioned for processing a respective substrate or a plurality of substrates or the array can be dimensioned for processing a substrate. An exhaust region surrounds the process gas apertures. The exhaust region has at least one exhaust aperture, and may include an exhaust slot, a plurality of connected exhaust slots or a plurality of exhaust apertures. The exhaust region surrounds the array of showerhead tiles, or a respective portion of the exhaust region surrounds the plurality of process gas apertures in each showerhead tile or group of showerhead tiles. A gas curtain aperture may be between the exhaust region and the process gas apertures of one of the showerhead tiles or adjacent to the central area of the tile.Type: ApplicationFiled: October 27, 2015Publication date: February 18, 2016Applicant: Alta Devices, Inc.Inventors: Gregg Higashi, Alexander Lerner, Khurshed Sorabji, Lori D. Washington, Andreas Hegedus
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Patent number: 9175393Abstract: A showerhead for a semiconductor-processing reactor formed by an array of showerhead tiles. Each showerhead tile has a plurality of process gas apertures, which may be in a central area of the tile or may extend over the entire tile. Each showerhead tile can be dimensioned for processing a respective substrate or the array can be dimensioned for processing a substrate. An exhaust region surrounds the process gas apertures. The exhaust region has at least one exhaust aperture, and may include an exhaust slot, a plurality of connected exhaust slots or a plurality of exhaust apertures. The exhaust region surrounds the array of showerhead tiles, or a respective portion of the exhaust region surrounds the plurality of process gas apertures in each showerhead tile or group of showerhead tiles. A gas curtain aperture may be between the exhaust region and the process gas apertures of one of the showerhead tiles or adjacent to the central area of the tile.Type: GrantFiled: August 31, 2011Date of Patent: November 3, 2015Assignee: Alta Devices, Inc.Inventors: Gregg Higashi, Khurshed Sorabji, Lori D. Washington, Andreas Hegedus
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Patent number: 9169554Abstract: Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a wafer carrier track for levitating and traversing a wafer carrier within a vapor deposition reactor system is provided which includes upper and lower sections of a track assembly having a gas cavity formed therebetween. A guide path extends along an upper surface of the upper section and between two side surfaces which extend along and above the guide path and parallel to each other. A plurality of gas holes along the guide path extends from the upper surface of the upper section, through the upper section, and into the gas cavity. In some examples, the upper and lower sections of the track assembly may independently contain quartz, and in some examples, may be fused together.Type: GrantFiled: March 16, 2010Date of Patent: October 27, 2015Assignee: Alta Devices, Inc.Inventors: Gang He, Gregg Higashi, Khurshed Sorabji, Roger Hamamjy, Andreas Hegedus
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Patent number: 9165805Abstract: An apparatus or method for forming a tape-based, epitaxial lift-off film. The epitaxial lift-off film can be for at least one of a solar device, a semiconductor device, and an electronic device. The apparatus can comprise: a tape supply section, the tape supply section providing an unloaded support tape; a lamination section for receiving the unloaded support tape and a plurality of substrates, each substrate containing an epitaxial film thereon, the lamination section adhering the substrates to the unloaded support tape to form a loaded support tape; and an ELO etch section comprising a pressure system for applying pressure on said loaded support tape such that pressure is applied progressively downward and progressively towards a center-line of said loaded support tape when passing through said ELO etch section, the ELO etch section removing the substrates from the loaded support tape, while leaving the epitaxial film on the loaded support tape.Type: GrantFiled: December 17, 2009Date of Patent: October 20, 2015Assignee: Alta Devices, Inc.Inventors: Thomas Gmitter, Gang He, Melissa Archer, Andreas Hegedus
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Publication number: 20150279741Abstract: Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming an ELO thin film is provided which includes depositing an epitaxial material over a sacrificial layer on a substrate, adhering a flattened, pre-curved support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process includes bending the pre-curved support handle to have substantial curvature while peeling the epitaxial material from the substrate and forming an etch crevice therebetween. Compression is maintained within the epitaxial material during the etching process. The flattened, pre-curved support handle may be formed by flattening a pre-curved support material.Type: ApplicationFiled: May 27, 2015Publication date: October 1, 2015Inventors: Melissa ARCHER, Harry ATWATER, Thomas GMITTER, Gang HE, Andreas HEGEDUS, Gregg HIGASHI, Stewart SONNENFELDT
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Patent number: 9121096Abstract: Embodiments of the invention generally relate to a concentric gas manifold assembly used in deposition reactor or system during a vapor deposition process. In one embodiment, the manifold assembly has an upper section coupled to a middle section coupled to a lower section. The middle section contains an inlet, a manifold extending from the inlet to a passageway, and a tube extending along a central axis and containing a channel along the central axis and in fluid communication with the passageway. The lower section of the manifold assembly contains a second manifold extending from a second inlet to a second passageway and an opening concentric with the central axis. The tube extends to the opening to form a second channel between the tube and an edge of the opening. The second channel is concentric with the central axis and is in fluid communication with the second passageway.Type: GrantFiled: October 9, 2009Date of Patent: September 1, 2015Assignee: Alta Devices, Inc.Inventor: Andreas Hegedus