Solar antenna array fabrication
Methods for constructing multi-walled carbon nanotube (MWCNT) antenna arrays, may include: variable doping of the MWCNTs, forming light pipes with layers of variable dielectric glass, forming geometric diodes on full-wave rectified devices that propagate both electrons and holes, using clear conductive ground plans to form windows that can control a building's internal temperature, and generating multiple lithographic patterns with a single mask.
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This application is a continuation-in-part of U.S. patent application Ser. No. 17/348,330, filed on Jun. 15, 2021, which is a continuation-in-part of U.S. patent application Ser. No. 15/682,646, filed on Aug. 24, 2017, which is a continuation-in-part of U.S. patent application Ser. No. 15/411,396, filed on Jan. 20, 2017, which is a continuation-in-part of U.S. patent application Ser. No. 15/249,953, filed on Aug. 29, 2016, which is a continuation-in-part of U.S. patent application Ser. No. 15/133,807, filed on Apr. 20, 2016, all of which are incorporated herein by reference.
FIELD OF ENDEAVORVarious aspects of this disclosure may pertain to economical manufacturing processes of visible light rectenna arrays for the conversion of solar energy to electricity.
BACKGROUNDRectifiers for AC to DC conversion of high frequency signals have been well known for decades. A particular type of diode rectifier when coupled to an antenna, called a rectenna, has also been known for decades. More specifically, over 20 years ago, Logan described using an array of rectennas to capture and convert microwaves into electrical energy in U.S. Pat. No. 5,043,739 granted Aug. 27, 1991. However, the dimensions of the antenna limited the frequency until recently, when Gritz, in U.S. Pat. No. 7,679,957 granted Mar. 16, 2010, described using a similar structure for converting infrared light into electricity, and Pietro Siciliano suggested that such a structure may be used for sunlight in “Nano-Rectenna For High Efficiency Direct Conversion of Sunlight to Electricity,” by Pietro Siciliano of The Institute for Microelectronics and Microsystems IMM-CNR, Lecce (Italy).
Still, the minimum dimensions required for such visible light rectennas are generally in the tens of nanometers. While these dimensions may be accomplished by today's deep submicron masking technology, such processing is typically far more expensive than the current solar cell processes, which require much larger dimensions.
Still, as Logan pointed out in U.S. Pat. No. 5,043,739, the efficiency of microwave rectennas can be as high as 40%, more than double that of typical single junction poly-silicon solar cell arrays, and when using metal-oxide-metal (MOM) rectifying diodes, as Pietro suggests, no semiconductor transistors are needed in the array core.
As such, it may be advantageous to be able to utilize the existing fine geometry processing capability of current semiconductor fabrication without incurring the cost of such manufacturing.
Also, recently, Rice University reported that their researchers created a carbon nanotube (CNT) thread with metallic-like electrical and thermal properties. Furthermore, carbon nanotube structures are becoming more manufacturable, as described by Rosenberger et al. in U.S. Pat. No. 7,354,977 granted Apr. 8, 2008. Various forms of continuous CNT growth may have also been contemplated, such as Lemaire et.al. repeatedly harvesting a CNT “forest” while it is growing in U.S. Pat. No. 7,744,793 granted Jun. 29, 2010, and/or put into practice using techniques described by Predtechensky et al. in U.S. Pat. No. 8,137,653 granted Mar. 20, 2012. Grigorian et al. describes continuously pushing a carbon gas through a catalyst backed porous membrane to grow CNTs in U.S. Pat. No. 7,431,985 granted Oct. 7, 2008.
Furthermore, others have contemplated using CNTs for various structures such as Rice University's CNT thread as described in “Rice's carbon nanotube fibers outperform copper,” by Mike Williams, posted on Feb. 13, 2014 at: news.rice.edu/2014/02/13/rices-carbon-nanotube-fibers-outperform-copper-2; magnetic data storage as described by Tyson Winarski in U.S. Pat. No. 7,687,160 granted Mar. 30, 2010; or connecting multi-walled CNTs (MWCNTs) to carbonized gold pads for low resistance interconnect in “Metal-nanocarbon contacts” by Patrick Wilhite et al. published in Semicond. Sci. Technol. 29 (2014) 054006 (16pp); and in particular, antenna-based solar cells, as described by Tadashi Ito et al. in US Patent Application Publication 2010/0244656 published Sep. 30, 2010. Still, Ito et al. did not describe methods to inexpensively construct carbon nanotube solar antennas for efficient conversion of solar energy; rather Erik C. Anderson et.al. suggested combining multi-walled CNTs and tunnel diodes to form optical rectennas in “High Performance Multiwall Carbon Nanotube-Insulator-Metal Tunnel Diode Arrays for Optical Rectification” published in 2018 in Advanced Electronic Materials, DOI: 10.1002/aelm.201700446.
Finally, Zixu Zhu et. al. described a terahertz frequency “Geometric Diode” with both hole and electron charge carriers in “Graphene geometric diodes for terahertz rectennas” published 15 Apr. 2013 in J. Phys. D: Appl. Phys. 46 (2013) 185101.
SUMMARY OF VARIOUS EMBODIMENTSVarious aspects of the present disclosure may relate to ways to manufacture structures of MWCNT rectenna arrays for converting sunlight into electricity, which may utilize current IC manufacturing techniques and self-aligning process steps, and which may be successively used to achieve the molecular sized dimensions required for the antennas and the geometric diodes. Other aspects of the present disclosure may relate to ways to operate the MWCNT rectenna array to optimally convert sunlight into electricity.
The structure of the rectenna array may include an array of MWCNT antennas connecting between interdigitated ground lines and negative voltage lines through geometric diodes. The antennas may be of varying lengths and orientations, distributed for maximum reception of substantially the full spectrum of ambient sunlight, e.g., having ¼ wavelengths or harmonic multiples of ¼ wavelengths, where single ¼-wavelength antenna diode combinations may half-wave rectify the received light, and two coupled ¼-wavelength antenna diode combinations may full-wave rectify the received light.
In one aspect, the multi-walled carbon nanotube antennas may be constructed between interdigitated conductive lines alternating from the ground and negative voltage lines by growing from a nickel catalyst on the ground lines to the side walls of the negative voltage lines.
In another aspect, the two coupled ¼-wavelength antennas diode combinations may be connected by multiple direct contacts or intermediate CNT fuzz on a common ground line, to form center ground tapped full-wave rectified antennas.
In another aspect, the two coupled ¼-wavelength antennas diode combinations may be connected by multiple direct contacts on a common insulating material, where the first coupled ¼-wavelength antennas diode combination is connected to a ground line and the second coupled ¼-wavelength antennas diode combination is connected to a negative voltage line, where the diodes are geometric diodes.
In another aspect, the geometric diodes may be electrically biased such that the geometric diodes connected to the ground lines inject holes into the ground lines and geometric diodes connected to the negative voltage lines inject electrons into the negative voltage lines.
In another aspect, the interdigitated ground and negative voltage lines may each be a mix of one or two conductive materials and nickel catalyst on both the negative voltage lines and the ground lines. The negative voltage lines and ground lines may have different mixes of conductive materials and nickel, each of which may be applied with different thicknesses.
In another aspect, the interdigitated conductive lines may be deposited on a sheet of glass, and the space between the interdigitated conductive lines may be filled with a clear insulating material to form a low-k capacitor between the conductive lines and covered with another higher dielectric insulating material followed by a conductive material to form a high-k output capacitor (it is noted that “low-k” and “high-k” are terms of art that refer to a dielectric material (e.g., used in a capacitor) having a relative dielectric constant less than or greater than that of silicon dioxide). The output capacitor may be sufficiently large enough to filter the AC signal on the negative voltage lines.
In another aspect, the nickel may be annealed to selectively form catalytic sites on the ground lines while diffusing at least one of the mix of conductive materials into the nickel on the negative voltage lines, and carbon may be selectively or simultaneously applied to both the ground and negative voltage lines to selectively or simultaneously grow graphene on the negative voltage lines while growing MWCNT antennas from ground lines to the negative voltage lines, where the tips of the MWCNTs form geometric diodes that connect to the graphene on the negative voltage lines with low contact resistance. Selective growth may be performed by using different concentrations and pressures of the applied carbon. The annealing on the catalytic sites may be performed to both control the locations of the catalytic material on the MWCNTs and the diameters of the MWCNTs.
In another aspect, the carbon may vary in concentration with other gasses during a single application, or the isotopes of the carbon may vary in concentration during a single application to increase the probability of injecting electrons or holes through the geometric diodes.
In yet another aspect, manufacturing arrays of MWCNT rectennas may include eliminating some MWCNT shorts between the negative voltage lines and the ground lines by: applying a voltage bias between the negative voltage lines and the ground lines; measuring the temperature with an infrared (IR) camera; determining the hot spots and either: cutting the base of the nearest negative voltage line, cutting the base of the nearest ground line, or locating the shorting MWCNTs within the hot spots using high magnification under regular light and cutting the shorting MWCNTs, where the cutting may be performed using a high intensity laser.
In another aspect, eliminating MWCNT shorts between the negative voltage lines and the ground lines may include applying timed pulses while measuring the ultraviolet (UV) or IR emissions to determine the locations of the shorts, where the pulses are timed to focus the maximum amount of current on each shorting MWCNT based on the locations of the UV or IR emissions.
In another aspect, the conductive material may be clear, to form a window or window covering.
In another aspect, a building, whose air conditioning is powered by windows composed of arrays of ¼-wavelength antenna diode combinations, may control the windows to optimize for both the internal temperature and the light allowed into the building.
In yet another aspect, the glass may be layered with gradually varying dielectric differences to trap light between the glass and the ground plane until absorbed by the MWCNT antennas.
In another process, variable depths of resist may deposited on multiple layers of thin films on the glass, where the resist may be exposed either by variable exposure using lasers or with multiple frequencies of light shining through a single mask containing multiple ¼-wavelength patterns for the frequencies, and processing steps may be performed such that errors due to multiple alignments may be avoided. The mask may be stepped once across the entire surface area being processed with multiple exposures on each step. The resist may be composed of multiple resists, each of which is sensitive to a different frequency of light. Additionally, the laser may also use multiple frequencies of light. The process may then consist of multiple etching steps, including using some of the thin films as additional masks. Following the formation of MWCNT antennas between the ground lines and the negative voltage lines, a combination of clear low-k and high-k dielectric insulators may be deposited to reduce the parallel capacitance across the antennas while increasing the capacitance between the negative voltage lines and an added ground plane.
In yet another process an inert gas may be injected between the glass and added ground plane, with both the negative voltage and ground lines biased to negative voltages to allow the vibration of the MWCNT antennas induced by thermal Brownian motion of the gas hitting the MWCNTs to be rectified into additional power.
Various aspects of the present disclosure will now be described in connection with the attached drawings, in which:
Various aspects of the present disclosure are now described with reference to
An electrical diagram 10 of a combined diode and antenna according to an aspect of the present disclosure is shown in
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A polarizing grate may transmit light whose wavelength may be larger than the grate's spacing, when the light may be polarized perpendicular to the grate. A polarizing grate may reflect light of the same wavelength, when the light may be polarized parallel to the direction of the lines in the grate. By shining light up through the glass that may be polarized in a direction that is perpendicular to the direction of the negative voltage and ground fingers 64,63, and where the light may have a longer wavelength than the spacing between the negative voltage and ground fingers 64,63, the resist over the gaps 51 and the ends of the rows of fingers 52 between the perpendicular bus lines 56 and 57 and the bus lines 53 and 54 may be exposed. Alternatively, non-polarized light may be used, which may be partially absorbed by the carbon nanotube antennas 49 spanning between the voltage and ground fingers 64,63, when the left and right perpendicular bus lines 56 and 57 may be electrically connected through a resistor 60, which may remove some of the light shining through the glass, leaving all the light to shine through the area not connected with carbon nanotube antennas, thereby exposing the resist 50. Washing away the unexposed resist may leave the resist 50, which may then be cured, and which may thereby form a continuous serpentine separation between the power 54 and ground 53 bus lines. Laser scribing may then be used to form vias 55 through an insulating layer above the fingers and bus lines. Optionally, an additional spray may be applied before laser scribing to enhance the scribing of the vias 55.
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It is further contemplated that the amount of light transmitted into the building may be controlled by controlling the amount of light being converted to power by the antennas in such a way that the temperature in the building may be controlled by balancing the amount of light used to power the building's air conditioning versus the amount of light transmitted through the windows used to heat the building.
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It will be appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described hereinabove. Rather the scope of the present invention includes both combinations and sub-combinations of various features described hereinabove as well as modifications and variations which would occur to persons skilled in the art upon reading the foregoing description and which are not in the prior art.
Claims
1. A method to construct a center-tapped full-wave rectified multi-walled carbon nanotube (MWCNT) antenna array, the method including: depositing a repeating pattern of interdigitated lines on a glass substrate; growing groups of two MWCNT antennas from a common line to each of two separate adjacent conductive lines; from each group connecting the two MWCNT antennas on the common line by either multiple direct contacts or multiple irregularly grown small carbon nanotubes (CNTs); and depositing a conductive ground plane above the MWCNT antenna array.
2. A method as in claim 1, wherein tips of the MWCNT antennas on the separate conductive lines form geometric diodes.
3. A method as in claim 2, further including growing graphene on the separate conductive lines.
4. A method as in claim 3, wherein the graphene is grown simultaneously with the MWCNT antennas.
5. A method as in claim 3, wherein the graphene is grown prior to growing the MWCNT antennas.
6. A method as in claim 3, wherein the geometric diodes connect to the graphene on the separate conductive lines to form low resistance diodes.
7. A method as in claim 6, wherein the common line is a conductive ground line and the two separate conductive lines are negative voltage lines.
8. A method as in claim 7, wherein the conductive lines include a nickel catalyst.
9. A method as in claim 8 where the nickel catalyst is annealed to control diameters of the MWCNT antennas and to adhere the nickel catalyst to bases of the MWCNT antennas.
10. A method as in claim 6, wherein the common line is an insulating line and the two separate adjacent conductive lines are respectively, a ground line and a negative voltage line.
11. A method as in claim 10, wherein the conductive lines include a nickel catalyst.
12. A method as in claim 10, wherein the geometric diodes are electrically biased to different voltages, and wherein the geometric diodes connected to the ground lines inject holes into the ground lines and the geometric diodes connected to the negative voltage lines inject electrons into the negative voltage lines.
13. A method as in claim 1, further including:
- filling spaces between the interdigitated lines with a clear insulating material to form a low-k capacitor between the conductive lines; and
- covering the spaces with another dielectric insulating material having a higher dielectric constant than the clear insulating material before depositing the ground plane.
14. A method as in claim 13, wherein the clear insulating material comprises amorphous boron nitride.
15. A method as in claim 1, wherein carbon used to grow the MWCNT antennas varies in concentration with other dopants during MWCNT growth.
16. A method as in claim 1, wherein carbon used to grow the MWCNT antennas varies in isotope concentration during MWCNT growth.
17. A method as in claim 7, further including eliminating MWCNT shorts between the negative voltage lines and the ground lines by applying a voltage bias between the negative voltage lines and the ground lines.
18. A method as in claim 7, further including eliminating MWCNT shorts between the negative voltage lines and the ground lines by: (1) measuring temperature with an infrared (IR) camera; (2) determining any hot spots; and (3) cutting a base of a nearest negative voltage line to a hot spot.
19. A method as in claim 7, further including eliminating MWCNT shorts between the negative voltage lines and the ground lines by: (1) measuring temperature with an IR camera; (2) determining any hot spots; and (3) cutting a base of a nearest ground line to a hot spot.
20. A method as in claim 7, further including eliminating MWCNT shorts between the negative voltage lines and the ground lines by: (1) measuring temperature with an IR camera; (2) determining any hot spots; (3) locating shorting MWCNTs within the hot spots using high magnification under visible light; and (4) cutting a shorting MWCNT.
21. A method as in claim 20, where the cutting is performed using a high intensity laser.
22. A method as in claim 7, where MWCNT shorts between the negative voltage lines and the ground lines are eliminated by (1) measuring the UV or IR emissions to determine the locations of the shorts, and (2) applying timed pulses between appropriate negative voltage and ground lines.
23. A method as in claim 1, wherein the ground plane comprises a clear conductive material.
24. A method as in claim 23, wherein the MWCNT antenna array covers a window of a building.
25. A method as in claim 23, wherein the MWCNT antenna array is a window of a building.
26. A method as in claim 25, wherein a variable load on an air conditioner driven by the window controls an internal temperature by controlling both an amount of air conditioning and an amount of light transmitted through the window.
27. A method as in claim 1, wherein the glass substrate is composed of layers of glass of gradually varying dielectric constants to trap light between the glass and the ground plane until absorbed by the MWCNT antennas.
28. A method as in claim 1, wherein the depositing a repeating pattern of interdigitated lines includes: (1) depositing multiple layers of thin films on the glass substrate; (2) depositing multiple layers of resist on the thin films; (3) exposing the resist to multiple exposures of light; (4) developing multiple thicknesses of the resist; and (5) etching the interdigitated lines.
29. A method as in claim 28, wherein each of the multiple layers of resist is sensitive to a different frequency of light.
30. A method as in claim 28, wherein the multiple exposures of light are different amounts of laser light.
31. A method as in claim 28, wherein the multiple exposures of light are different frequencies of laser light.
32. A method as in claim 28, wherein the multiple exposures of light are different frequencies exposed through a single mask containing multiple patterns of thin films that selectively transmit respective ones of the different frequencies of light.
33. A method as in claim 32, wherein the mask is iteratively stepped and exposed across the entire MWCNT antenna array.
34. A method as in claim 7, further including: (1) injecting an inert gas between the glass and ground plane, and (2) biasing both the negative voltage and ground lines to negative voltages, thereby resulting in vibration of the MWCNT antennas induced by thermal Brownian motion of the inert gas hitting the MWCNTs being rectified into electrical power.
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Type: Grant
Filed: May 19, 2022
Date of Patent: Nov 21, 2023
Patent Publication Number: 20220278461
Assignee: NOVASOLIX, INC. (Newark, CA)
Inventors: Laurence H. Cooke (Los Gatos, CA), Darin S. Olson (Walnut Creek, CA), Paul Comita (Menlo Park, CA), Robert E. Cousins (Saratoga, CA), Albert K. Henning (Palo Alto, CA), Andreas Hegedus (Burlingame, CA), David B. Cooke (Los Gatos, CA), Yao Te Cheng (Sunnyvale, CA), John Burke (Danville, CA), Richard T. Preston (Woodside, CA)
Primary Examiner: Mayla Gonzalez Ramos
Application Number: 17/748,988
International Classification: H01Q 21/00 (20060101); H01Q 1/42 (20060101); H01Q 1/22 (20060101); H10K 39/10 (20230101); H10K 85/20 (20230101);