Patents by Inventor Andreas Hegedus

Andreas Hegedus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Puncture resistant electrostatic chuck
    Patent number: 5986875
    Abstract: A puncture resistant electrostatic chuck (20) is described. The chuck (20) comprises at least one electrode (25); and a composite insulator (30) covering the electrode. The composite insulator comprises a matrix material having a conformal holding surface (50) capable of conforming to the substrate (35) under application of an electrostatic force generated by the electrode to reduce leakage of heat transfer fluid held between the substrate and the holding surface. A hard puncture resistant layer, such a layer of fibers or an aromatic polyamide layer, is positioned below the holding surface (50) and is sufficiently hard to increase the puncture resistance of the composite insulator.
    Type: Grant
    Filed: January 29, 1998
    Date of Patent: November 16, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Arik Donde, Hyman J. Levinstein, Robert W. Wu, Andreas Hegedus, Edwin C. Weldon, Shamouil Shamouilian, Jon T. Clinton, Surinder S. Bedi
  • Puncture resistant electrostatic chuck
    Patent number: 5729423
    Abstract: A puncture resistant electrostatic chuck (20) is described. The chuck (20) comprises at least one electrode (25); and a composite insulator (30) covering the electrode. The composite insulator comprises a matrix material having a conformal holding surface (50) capable of conforming to the substrate (35) under application of an electrostatic force generated by the electrode to reduce leakage of heat transfer fluid held between the substrate and the holding surface. A hard puncture resistant layer, such a layer of fibers or an aromatic polyamide layer, is positioned below the holding surface (50) and is sufficiently hard to increase the puncture resistance of the composite insulator.
    Type: Grant
    Filed: November 25, 1996
    Date of Patent: March 17, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Arik Donde, Hyman J. Levinstein, Robert W. Wu, Andreas Hegedus, Edwin C. Weldon, Shamouil Shamouilian, Jon T. Clinton, Surinder S. Bedi