Patents by Inventor Anh Duong

Anh Duong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8809140
    Abstract: A method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process is disclosed, including a multi-step residue cleaning, including exposing the substrate to an aqua regia solution, followed by an exposure to a solution having hydrochloric acid and hydrogen peroxide. The SC2 solution can further react with remaining platinum residues, rendering it more soluble in an aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Grant
    Filed: July 29, 2013
    Date of Patent: August 19, 2014
    Assignees: Intermolecular, Inc., GLOBALFOUNDRIES, Inc.
    Inventors: Anh Duong, Clemens Fitz, Olov Karlsson
  • Patent number: 8784572
    Abstract: A method for cleaning platinum residues from a surface of a substrate is provided. The method initiates with exposing the surface to a first solution containing a mixture of nitric acid and hydrochloric acid. Then, the surface is exposed to a second solution containing hydrochloric acid.
    Type: Grant
    Filed: October 19, 2011
    Date of Patent: July 22, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Anh Duong, Sean Barstow, Olov Karlsson, Bei Li, James Mavrinac
  • Publication number: 20140188556
    Abstract: A method and system analyze marketplace listing strategies. In some embodiments, the method accesses data associated with multiple marketplace listings. Each marketplace listing is associated with a product category. A state-action model, associated with the product category, is created based on the data associated with the multiple marketplace listings. The state-action model is then analyzed to identify a marketplace listing strategy associated with the product category.
    Type: Application
    Filed: March 6, 2014
    Publication date: July 3, 2014
    Applicant: EBAY INC.
    Inventors: Quang Anh Duong, Neelakantan Sundaresan, Nishith Parikh, Zeqian Shen
  • Patent number: 8720586
    Abstract: A casing hanger seal assembly is lowered into a pocket between a casing hanger and a wellhead housing while in a run-in position. The seal assembly has a metal-to-metal upper seal ring and an elastomeric and metal lower seal ring carried by and below the upper seal ring. The upper and lower seal rings are movable from a run-in position to a set position sealing between the sidewalls of the casing hanger and the wellhead housing by applying a downward force. The downward force required to move the lower seal ring to the set position is less than the downward force required to move the upper seal ring to the set position. A downward force applied to the upper seal ring after the lower seal ring has landed in the pocket transfers to the lower seal ring to cause the lower seal ring to move to the set position before the upper seal ring moves to the set position.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: May 13, 2014
    Assignee: Vetco Gray Inc.
    Inventor: Khanh Anh Duong
  • Patent number: 8697573
    Abstract: The invention discloses a method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process, comprising using an aqua regia cleaning solution (comprising a mixture of nitric acid and hydrochloric acid) with microwave assisted heating. Low boiling temperature of hydrochloric acid prevents heating the aqua regia solution to a high temperature, impeding the effectiveness of post silicidation nickel and platinum residue removal. Therefore, embodiments of the invention provide a microwave assisted heating of the substrate in an aqua regia solution, selectively heating platinum residues without significantly increasing the temperature of the aqua regia solution, rendering platinum residues to be more soluble in aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: April 15, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Anh Duong, Olov Karlsson
  • Patent number: 8688544
    Abstract: A method and system analyze marketplace listing strategies. In some embodiments, the method accesses data associated with multiple marketplace listings. Each marketplace listing is associated with a product category. A state-action model, associated with the product category, is created based on the data associated with the multiple marketplace listings. The state-action model is then analyzed to identify a marketplace listing strategy associated with the product category.
    Type: Grant
    Filed: March 25, 2011
    Date of Patent: April 1, 2014
    Assignee: eBay Inc.
    Inventors: Quang Anh Duong, Neelakantan Sundaresan, Nishith Parikh, Zeqian Shen
  • Publication number: 20140062025
    Abstract: A seal assembly for use with a casing hanger that includes a pair of split rings held together by a threaded fastener. Torqueing the fastener axially compresses one of the rings so that it expands radially inward into sealing engagement with a wall of wellbore casing, and radially outward against an inner wall of a wellhead housing. Support grommets are provided where the fastener enters and exits the compressible ring. Protrusions on a side of the support grommets project into the compressible ring and create a sealing interface between each support grommet and compressible ring. O-rings line inner circumferences of the support grommets to seal between the support grommets and fasteners. A threaded end on a lower end of the fastener has a diameter less than an inner diameter of the O-rings to prevent damaging the O-rings during assembly.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: Vetco Gray Inc.
    Inventors: Chau Hoang, Khanh Anh Duong, William Ryan Moore, Karl A. Parfrey, Clayton Griffin
  • Patent number: 8664014
    Abstract: Electrical testing of metal oxide semiconductor (MOS) high-k capacitor structures is used to evaluate photoresist strip or cleaning chemicals using a combinatorial workflow. The electrical testing can be able to identify the damages on the high-k dielectrics, permitting a selection of photoresist strip chemicals to optimize the process conditions in the fabrication of semiconductor devices. The high productivity combinatorial technique can provide a compatibility evaluation of photoresist strip chemicals with high-k devices.
    Type: Grant
    Filed: November 17, 2011
    Date of Patent: March 4, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Bei Li, Sean Barstow, Anh Duong, Zhendong Hong, Ashley Lacey
  • Publication number: 20130338305
    Abstract: Methods of modifying a patterned semiconductor substrate are presented including: providing a patterned semiconductor substrate surface including a dielectric region and a conductive region; and applying an amphiphilic surface modifier to the dielectric region to modify the dielectric region. In some embodiments, modifying the dielectric region includes modifying a wetting angle of the dielectric region. In some embodiments, modifying the wetting angle includes making a surface of the dielectric region hydrophilic. In some embodiments, methods further include applying an aqueous solution to the patterned semiconductor substrate surface. In some embodiments, the conductive region is selectively enhanced by the aqueous solution. In some embodiments, methods further include providing the dielectric region formed of a low-k dielectric material. In some embodiments, applying the amphiphilic surface modifier modifies an interaction of the low-k dielectric region with a subsequent process.
    Type: Application
    Filed: August 20, 2013
    Publication date: December 19, 2013
    Applicant: Intermolecular, Inc.
    Inventors: Anh Duong, Tony Chiang, Zachary M. Fresco, Nitin Kumar, Chi-I Lang, Jinhong Tong, Anna Tsizelmon
  • Publication number: 20130323890
    Abstract: A method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process is disclosed, including a multi-step residue cleaning, including exposing the substrate to an aqua regia solution, followed by an exposure to a solution having hydrochloric acid and hydrogen peroxide. The SC2 solution can further react with remaining platinum residues, rendering it more soluble in an aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Application
    Filed: July 29, 2013
    Publication date: December 5, 2013
    Applicants: Intermolecular Inc.
    Inventors: Anh Duong, Clemens Fitz, Olov Karlsson
  • Publication number: 20130299193
    Abstract: An apparatus and method can be used to positively retain a lockdown ring to axially secure a wellbore member in a wellhead housing. In embodiments, the wellbore member, such as a tubing hanger, can be secured by a lockdown ring having a cylindrical surface below a tapered surface. An energizing ring having a cylindrical surface above a tapered surface can be used to move the lockdown ring from an unset position to a set position, thus energizing the lockdown ring. After being energized, the two cylindrical surfaces can engage each other so that axial movement of the energizing ring, of up to a predetermined distance, does not cause the lockdown ring to move from a set position to an unset position.
    Type: Application
    Filed: May 10, 2012
    Publication date: November 14, 2013
    Applicant: Vetco Gray Inc.
    Inventor: Khanh Anh Duong
  • Patent number: 8575021
    Abstract: Methods for substrate processing are described. The methods include forming a material layer on a substrate. The methods include selecting constituents of a molecular masking layer (MML) to remove an effect of variations in the material layer as a result of substrate processing. The methods include normalizing the surface characteristics of the material layer by selectively depositing the MML on the material layer.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: November 5, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Thomas R. Boussie, Tony P. Chiang, Anh Duong, Zachary Fresco, Nitin Kumar, Chi-I Lang, Sandra G. Malhotra, Jinhong Tong
  • Publication number: 20130267091
    Abstract: The invention discloses a method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process. Post silicidation residues of nickel and platinum may not be removed adequately just by an aqua regia solution (comprising a mixture of nitric acid and hydrochloric acid). Therefore, embodiments of the invention provide a multi-step residue cleaning, comprising exposing the substrate to an aqua regia solution, followed by an exposure to a chlorine gas or a solution comprising dissolved chlorine gas, which may further react with remaining platinum residues, rendering it more soluble in aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Application
    Filed: June 6, 2013
    Publication date: October 10, 2013
    Inventors: Anh Duong, John Foster, Olov Karlsson, James Mavrinac, Usha Raghuram
  • Publication number: 20130244186
    Abstract: A composition for removing photoresist and bottom anti-reflective coating from a semiconductor substrate is disclosed. The composition may comprise a nontoxic solvent, the nontoxic solvent having a flash point above 80 degrees Celsius and being capable of dissolving acrylic polymer and phenolic polymer. The composition may further comprise Tetramethylammonium Hydroxide (TMAH) mixed with the nontoxic solvent.
    Type: Application
    Filed: May 10, 2013
    Publication date: September 19, 2013
    Applicant: Intermolecular Inc.
    Inventors: Indranil De, Anh Duong
  • Patent number: 8535972
    Abstract: Methods of modifying a patterned semiconductor substrate are presented including: providing a patterned semiconductor substrate surface including a dielectric region and a conductive region; and applying an amphiphilic surface modifier to the dielectric region to modify the dielectric region. In some embodiments, modifying the dielectric region includes modifying a wetting angle of the dielectric region. In some embodiments, modifying the wetting angle includes making a surface of the dielectric region hydrophilic. In some embodiments, methods further include applying an aqueous solution to the patterned semiconductor substrate surface. In some embodiments, the conductive region is selectively enhanced by the aqueous solution. In some embodiments, methods further include providing the dielectric region formed of a low-k dielectric material. In some embodiments, applying the amphiphilic surface modifier modifies an interaction of the low-k dielectric region with a subsequent process.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: September 17, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Zachary M. Fresco, Chi-I Lang, Jinhong Tong, Anh Duong, Nitin Kumar, Anna Tsimelzon, Tony Chiang
  • Patent number: 8518765
    Abstract: A method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process is disclosed, including a multi-step residue cleaning, including exposing the substrate to an aqua regia solution, followed by an exposure to a solution having hydrochloric acid and hydrogen peroxide. The SC2 solution can further react with remaining platinum residues, rendering it more soluble in an aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: August 27, 2013
    Assignees: Intermolecular, Inc., GLOBALFOUNDRIES, Inc.
    Inventors: Anh Duong, Clemens Fitz, Olov Karlsson
  • Patent number: 8513117
    Abstract: The invention discloses a method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process. Embodiments of the invention provide a multi-step cleaning process, comprising exposing the substrate to a nitric acid solution after a first anneal, followed by an aqua regia solution after a second anneal. The substrate can be optionally exposed to a hydrochloric acid solution afterward to completely remove any remaining platinum residues.
    Type: Grant
    Filed: November 15, 2011
    Date of Patent: August 20, 2013
    Assignees: Intermolecular, Inc.
    Inventors: Anh Duong, Sean Barstow, Clemens Fitz, John Foster, Olov Karlsson, Bei Li, James Mavrinac
  • Patent number: 8466058
    Abstract: The invention discloses a method for cleaning residues from a semiconductor substrate during a nickel platinum silicidation process. Post silicidation residues of nickel and platinum may not be removed adequately just by an aqua regia solution (comprising a mixture of nitric acid and hydrochloric acid). Therefore, embodiments of the invention provide a multi-step residue cleaning, comprising exposing the substrate to an aqua regia solution, followed by an exposure to a chlorine gas or a solution comprising dissolved chlorine gas, which may further react with remaining platinum residues, rendering it more soluble in aqueous solution and thereby dissolving it from the surface of the substrate.
    Type: Grant
    Filed: November 14, 2011
    Date of Patent: June 18, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Anh Duong, John Foster, Olov Karlsson, James Mavrinac, Usha Raghuram
  • Patent number: 8449681
    Abstract: A composition for removing photoresist and bottom anti-reflective coating from a semiconductor substrate is disclosed. The composition may comprise a nontoxic solvent, the nontoxic solvent having a flash point above 80 degrees Celsius and being capable of dissolving acrylic polymer and phenolic polymer. The composition may further comprise Tetramethylammonium Hydroxide (TMAH) mixed with the nontoxic solvent.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: May 28, 2013
    Assignee: Intermolecular, Inc.
    Inventors: Anh Duong, Indranil De
  • Publication number: 20130130414
    Abstract: Electrical testing of metal oxide semiconductor (MOS) high-k capacitor structures is used to evaluate photoresist strip or cleaning chemicals using a combinatorial workflow. The electrical testing can be able to identify the damages on the high-k dielectrics, permitting a selection of photoresist strip chemicals to optimize the process conditions in the fabrication of semiconductor devices. The high productivity combinatorial technique can provide a compatibility evaluation of photoresist strip chemicals with high-k devices.
    Type: Application
    Filed: November 17, 2011
    Publication date: May 23, 2013
    Applicant: Intermolecular, Inc.
    Inventors: Bei Li, Sean Barstow, Anh Duong, Zhendong Hong, Ashley Lacey