Patents by Inventor Anilkumar Chandolu

Anilkumar Chandolu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250140691
    Abstract: An electronic device comprises a stack comprising tiers of alternating conductive structures and insulative structures overlying a source tier, and strings of memory cells extending vertically through the stack. The strings of memory cells individually comprise a channel material extending vertically through the stack. The electronic device comprises an additional stack overlying the stack and comprising tiers of alternating additional conductive structures and additional insulative structures, and pillars extending through the additional stack and overlying the strings of memory cells. Each of the pillars is horizontally offset in a first horizontal direction and in a second horizontal direction transverse to the first horizontal direction from a center of a corresponding string of memory cells. The electronic device comprises conductive lines overlying the pillars, and interconnect structures directly contacting the pillars and the conductive lines.
    Type: Application
    Filed: January 2, 2025
    Publication date: May 1, 2025
    Inventors: Sidhartha Gupta, Anilkumar Chandolu
  • Publication number: 20250096042
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. The memory-block regions comprise part of a memory-plane region. A pair of elevationally-extending walls are formed that are laterally-spaced relative one another and that are individually horizontally-longitudinally-elongated. The pair of walls are one of (a) or (b), where: (a): in the memory-plane region laterally-between immediately-laterally-adjacent of the memory-block regions; and (b): in a region that is edge-of-plane relative to the memory-plane region. Through the horizontally-elongated trenches and after forming the pair of walls, sacrificial material that is in the first tiers is isotropically etching away and replaced with conducting material of individual conducting lines.
    Type: Application
    Filed: December 5, 2024
    Publication date: March 20, 2025
    Applicant: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Patent number: 12250821
    Abstract: An electronic device comprising a lower deck and an upper deck adjacent to a source. Each of the lower deck and the upper deck comprise tiers of alternating conductive materials and dielectric materials. Each of the lower deck and the upper deck also comprise an array region and one or more non-array regions. Memory pillars are in the lower deck and the upper deck of the array region and the memory pillars are configured to be operably coupled to the source. Dummy pillars are in the upper deck of the one or more non-array regions and the dummy pillars are configured to be electrically isolated from the source. Another conductive material is in the upper deck and the lower deck of the one or more non-array regions. Additional electronic devices and related systems and methods of forming an electronic device are also disclosed.
    Type: Grant
    Filed: December 20, 2023
    Date of Patent: March 11, 2025
    Assignee: Micron Technology, Inc.
    Inventors: S M Istiaque Hossain, Christopher J. Larsen, Anilkumar Chandolu, Wesley O. McKinsey, Tom J. John, Arun Kumar Dhayalan, Prakash Rau Mokhna Rau
  • Publication number: 20250071996
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.
    Type: Application
    Filed: November 12, 2024
    Publication date: February 27, 2025
    Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
  • Patent number: 12224240
    Abstract: A microelectronic device, including a stack structure including alternating conductive structures and dielectric structures is disclosed. Memory pillars extend through the stack structure. Contacts are laterally adjacent to the memory pillars and extending through the stack structure. The contacts including active contacts and support contacts. The active contacts including a liner and a conductive material. The support contacts including the liner and a dielectric material. The conductive material of the active contacts is in electrical communication with the memory pillars. Methods and electronic systems are also disclosed.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: February 11, 2025
    Assignee: Micron Technology, Inc.
    Inventors: S M Istiaque Hossain, Indra V. Chary, Anilkumar Chandolu, Sidhartha Gupta, Shuangqiang Luo
  • Patent number: 12211746
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. The memory-block regions comprise part of a memory-plane region. A pair of elevationally-extending walls are formed that are laterally-spaced relative one another and that are individually horizontally-longitudinally-elongated. The pair of walls are one of (a) or (b), where: (a): in the memory-plane region laterally-between immediately-laterally-adjacent of the memory-block regions; and (b): in a region that is edge-of-plane relative to the memory-plane region. Through the horizontally-elongated trenches and after forming the pair of walls, sacrificial material that is in the first tiers is isotropically etching away and replaced with conducting material of individual conducting lines.
    Type: Grant
    Filed: April 15, 2021
    Date of Patent: January 28, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Patent number: 12191254
    Abstract: An electronic device comprises a stack comprising tiers of alternating conductive structures and insulative structures overlying a source tier, and strings of memory cells extending vertically through the stack. The strings of memory cells individually comprise a channel material extending vertically through the stack. The electronic device comprises an additional stack overlying the stack and comprising tiers of alternating additional conductive structures and additional insulative structures, and pillars extending through the additional stack and overlying the strings of memory cells. Each of the pillars is horizontally offset in a first horizontal direction and in a second horizontal direction transverse to the first horizontal direction from a center of a corresponding string of memory cells. The electronic device comprises conductive lines overlying the pillars, and interconnect structures directly contacting the pillars and the conductive lines.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: January 7, 2025
    Assignee: Micron Technology, Inc.
    Inventors: Sidhartha Gupta, Anilkumar Chandolu
  • Patent number: 12167599
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.
    Type: Grant
    Filed: December 19, 2022
    Date of Patent: December 10, 2024
    Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
  • Publication number: 20240371706
    Abstract: Semiconductor devices having measurement features and associated systems and methods are disclosed herein. In one embodiment, a semiconductor device includes a plurality of stacked semiconductor dies each having measurement features formed along an outer periphery of a surface thereof. One or more image capture devices can image the semiconductor device and a controller can detect the measurement features in imaging data received from the image capture devices. The controller can further determine the distance between two or more of the measurement features to estimate a bond line thickness between semiconductor dies in the stack.
    Type: Application
    Filed: May 10, 2024
    Publication date: November 7, 2024
    Inventors: Anilkumar Chandolu, Lisa R. Copenspire-Ross, Michael D. Kenney
  • Publication number: 20240357820
    Abstract: An electronic device comprising lower and upper decks adjacent to a source. The lower and upper decks comprise tiers of alternating conductive materials and dielectric materials. Memory pillars in the lower and upper decks are configured to be operably coupled to the source. The memory pillars comprise contact plugs in the upper deck, cell films in the lower and upper decks, and fill materials in the lower and upper decks. The cell films in the upper deck are adjacent to the contact plugs and the fill materials in the upper deck are adjacent to the contact plugs. Dummy pillars are in a central region of the lower deck and the upper deck. The dummy pillars comprise an oxide material in the upper deck, the oxide material contacting the contact plugs and the fill materials. Additional electronic devices and related systems and methods are also disclosed.
    Type: Application
    Filed: July 2, 2024
    Publication date: October 24, 2024
    Inventors: S M Istiaque Hossain, Tom J. John, Darwin A. Clampitt, Anilkumar Chandolu, Parkash Rau Mokhna Rau, Christopher J. Larsen, Kye Hyun Baek
  • Publication number: 20240334703
    Abstract: Microelectronic devices include a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. Conductive contact structures extend through the stack structure. An insulative material is between the conductive contact structures and the tiers of the stack structure. In a lower tier portion of the stack structure, a conductive structure, of the conductive structures, has a portion extending a first width between a pair of the conductive contact structures. In a portion of the stack structure above the lower tier portion, an additional conductive structure, of the conductive structures, has an additional portion extending a second width between the pair of the conductive contact structures. The second width is greater than the first width. Related methods and electronic systems are also disclosed.
    Type: Application
    Filed: June 10, 2024
    Publication date: October 3, 2024
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Publication number: 20240324223
    Abstract: Some embodiments include an integrated assembly having a first deck. The first deck has first memory cell levels alternating with first insulative levels. A second deck is over the first deck. The second deck has second memory cell levels alternating with second insulative levels. A cell-material-pillar passes through the first and second decks. Memory cells are along the first and second memory cell levels and include regions of the cell-material-pillar. An intermediate level is between the first and second decks. The intermediate level includes a buffer region adjacent the cell-material-pillar. The buffer region includes a composition different from the first and second insulative materials, and different from the first and second conductive regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: June 3, 2024
    Publication date: September 26, 2024
    Inventors: S. M. Istiaque Hossain, Prakash Rau Mokhna Rau, Arun Kumar Dhayalan, Damir Fazil, Joel D. Peterson, Anilkumar Chandolu, Albert Fayrushin, George Matamis, Christopher Larsen, Rokibul Islam
  • Patent number: 12087632
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. A stair-step structure is formed into the stack. A first liquid is applied onto the stair-step structure. The first liquid comprises insulative physical objects that individually have at least one of a maximum submicron dimension or a minimum submicron dimension. The first liquid is removed to leave the insulative physical objects touching one another and to have void-spaces among the touching insulative physical objects. A second liquid that is different from the first liquid is applied into the void-spaces. The second liquid is changed into a solid insulative material in the void-spaces. Other embodiments, including structure, are disclosed.
    Type: Grant
    Filed: December 6, 2021
    Date of Patent: September 10, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Corey Staller, Anilkumar Chandolu
  • Patent number: 12041775
    Abstract: An electronic device comprising lower and upper decks adjacent to a source. The lower and upper decks comprise tiers of alternating conductive materials and dielectric materials. Memory pillars in the lower and upper decks are configured to be operably coupled to the source. The memory pillars comprise contact plugs in the upper deck, cell films in the lower and upper decks, and fill materials in the lower and upper decks. The cell films in the upper deck are adjacent to the contact plugs and the fill materials in the upper deck are adjacent to the contact plugs. Dummy pillars are in a central region of the lower deck and the upper deck. The dummy pillars comprise an oxide material in the upper deck, the oxide material contacting the contact plugs and the fill materials. Additional electronic devices and related systems and methods are also disclosed.
    Type: Grant
    Filed: September 19, 2022
    Date of Patent: July 16, 2024
    Assignee: Lodestar Licensing Group LLC
    Inventors: S M Istiaque Hossain, Tom J. John, Darwin A. Clampitt, Anilkumar Chandolu, Prakash Rau Mokhna Rau, Christopher J. Larsen, Kye Hyun Baek
  • Patent number: 12010848
    Abstract: Microelectronic devices include a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. Conductive contact structures extend through the stack structure. An insulative material is between the conductive contact structures and the tiers of the stack structure. In a lower tier portion of the stack structure, a conductive structure, of the conductive structures, has a portion extending a first width between a pair of the conductive contact structures. In a portion of the stack structure above the lower tier portion, an additional conductive structure, of the conductive structures, has an additional portion extending a second width between the pair of the conductive contact structures. The second width is greater than the first width. Related methods and electronic systems are also disclosed.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: June 11, 2024
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Patent number: 12004351
    Abstract: Some embodiments include an integrated assembly having a first deck. The first deck has first memory cell levels alternating with first insulative levels. A second deck is over the first deck. The second deck has second memory cell levels alternating with second insulative levels. A cell-material-pillar passes through the first and second decks. Memory cells are along the first and second memory cell levels and include regions of the cell-material-pillar. An intermediate level is between the first and second decks. The intermediate level includes a buffer region adjacent the cell-material-pillar. The buffer region includes a composition different from the first and second insulative materials, and different from the first and second conductive regions. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: June 4, 2024
    Inventors: S. M. Istiaque Hossain, Prakash Rau Mokhna Rau, Arun Kumar Dhayalan, Damir Fazil, Joel D. Peterson, Anilkumar Chandolu, Albert Fayrushin, George Matamis, Christopher Larsen, Rokibul Islam
  • Patent number: 11984364
    Abstract: Semiconductor devices having measurement features and associated systems and methods are disclosed herein. In one embodiment, a semiconductor device includes a plurality of stacked semiconductor dies each having measurement features formed along an outer periphery of a surface thereof. One or more image capture devices can image the semiconductor device and a controller can detect the measurement features in imaging data received from the image capture devices. The controller can further determine the distance between two or more of the measurement features to estimate a bond line thickness between semiconductor dies in the stack.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: May 14, 2024
    Inventors: Anilkumar Chandolu, Lisa R. Copenspire-Ross, Michael D. Kenney
  • Publication number: 20240099006
    Abstract: An electronic device comprises a stack structure comprising vertically alternating insulative structures and conductive structures arranged in tiers, pillars extending vertically through the stack structure, and a barrier material overlying the stack structure. The electronic device comprises a first insulative material extending through the barrier material and into an upper tier portion of the stack structure, and a second insulative material laterally adjacent to the first insulative material and laterally adjacent to at least some of the conductive structures in the upper tier portion of the stack structure. At least a portion of the second insulative material is in vertical alignment with the barrier material. Additional electronic devices and related methods and systems are also disclosed.
    Type: Application
    Filed: November 30, 2023
    Publication date: March 21, 2024
    Inventors: Sidhartha Gupta, Anilkumar Chandolu, S M Istiaque Hossain
  • Publication number: 20240015969
    Abstract: Some embodiments include a method of forming an integrated assembly. Laterally alternating first and second sacrificial materials are formed over a conductive structure, and then a stack of vertically alternating first and second levels is formed over the sacrificial materials. The first levels include first material and the second levels include insulative second material. Channel-material-openings are formed to extend through the stack and through at least some of the strips. Channel-material-pillars are formed within the channel-material-openings. Slits are formed to extend through the stack and through the sacrificial materials. The first sacrificial material is replaced with first conductive material and then the second sacrificial material is replaced with second conductive material. At least some of the first material of the stack is replaced with third conductive material. Some embodiments include integrated assemblies.
    Type: Application
    Filed: September 21, 2023
    Publication date: January 11, 2024
    Applicant: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Patent number: 11871575
    Abstract: An electronic device comprising a lower deck and an upper deck adjacent to a source. Each of the lower deck and the upper deck comprise tiers of alternating conductive materials and dielectric materials. Each of the lower deck and the upper deck also comprise an array region and one or more non-array regions. Memory pillars are in the lower deck and the upper deck of the array region and the memory pillars are configured to be operably coupled to the source. Dummy pillars are in the upper deck of the one or more non-array regions and the dummy pillars are configured to be electrically isolated from the source. Another conductive material is in the upper deck and the lower deck of the one or more non-array regions. Additional electronic devices and related systems and methods of forming an electronic device are also disclosed.
    Type: Grant
    Filed: June 14, 2022
    Date of Patent: January 9, 2024
    Assignee: Micron Technology, Inc.
    Inventors: S M Istiaque Hossain, Christopher J. Larsen, Anilkumar Chandolu, Wesley O. McKinsey, Tom J. John, Arun Kumar Dhayalan, Prakash Rau Mokhna Rau