Patents by Inventor Anilkumar Chandolu

Anilkumar Chandolu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11521897
    Abstract: A method of forming a microelectronic device comprises forming a stack structure comprising vertically alternating insulating structures and additional insulating structures arranged in tiers. Each of the tiers individually comprises one of the insulating structures and one of the additional insulating structures. A first trench is formed to partially vertically extend through the stack structure. The first trench comprises a first portion having a first width, and a second portion at a horizontal boundary of the first portion and having a second width greater than the first width. A dielectric structure is formed within the first trench. The dielectric structure comprises a substantially void-free section proximate the horizontal boundary of the first portion of the trench. Microelectronic devices and electronic systems are also described.
    Type: Grant
    Filed: May 14, 2021
    Date of Patent: December 6, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Christopher R. Ritchie, Darwin A. Clampitt, S M Istiaque Hossain
  • Publication number: 20220367512
    Abstract: Some embodiments include an integrated assembly having a first deck. The first deck has first memory cell levels alternating with first insulative levels. A second deck is over the first deck. The second deck has second memory cell levels alternating with second insulative levels. A cell-material-pillar passes through the first and second decks. Memory cells are along the first and second memory cell levels and include regions of the cell-material-pillar. An intermediate level is between the first and second decks. The intermediate level includes a buffer region adjacent the cell-material-pillar. The buffer region includes a composition different from the first and second insulative materials, and different from the first and second conductive regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 17, 2022
    Applicant: Micron Technology, Inc.
    Inventors: S.M. Istiaque Hossain, Prakash Rau Mokhna Rau, Arun Kumar Dhayalan, Damir Fazil, Joel D. Peterson, Anilkumar Chandolu, Albert Fayrushin, George Matamis, Christopher Larsen, Rokibul Islam
  • Patent number: 11482536
    Abstract: An electronic device comprising lower and upper decks adjacent to a source. The lower and upper decks comprise tiers of alternating conductive materials and dielectric materials. Memory pillars in the lower and upper decks are configured to be operably coupled to the source. The memory pillars comprise contact plugs in the upper deck, cell films in the lower and upper decks, and fill materials in the lower and upper decks. The cell films in the upper deck are adjacent to the contact plugs and the fill materials in the upper deck are adjacent to the contact plugs. Dummy pillars are in a central region of the lower deck and the upper deck. The dummy pillars comprise an oxide material in the upper deck, the oxide material contacting the contact plugs and the fill materials. Additional electronic devices and related systems and methods are also disclosed.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: October 25, 2022
    Assignee: Micron Technology, Inc.
    Inventors: S M Istiaque Hossain, Tom J. John, Darwin A. Clampitt, Anilkumar Chandolu, Prakash Rau Mokhna Rau, Christopher J. Larsen, Kye Hyun Baek
  • Publication number: 20220336278
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. The memory-block regions comprise part of a memory-plane region. A pair of elevationally-extending walls are formed that are laterally-spaced relative one another and that are individually horizontally-longitudinally-elongated. The pair of walls are one of (a) or (b), where: (a): in the memory-plane region laterally-between immediately-laterally-adjacent of the memory-block regions; and (b): in a region that is edge-of-plane relative to the memory-plane region. Through the horizontally-elongated trenches and after forming the pair of walls, sacrificial material that is in the first tiers is isotropically etching away and replaced with conducting material of individual conducting lines.
    Type: Application
    Filed: April 15, 2021
    Publication date: October 20, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Publication number: 20220310632
    Abstract: An electronic device comprising a lower deck and an upper deck adjacent to a source. Each of the lower deck and the upper deck comprise tiers of alternating conductive materials and dielectric materials. Each of the lower deck and the upper deck also comprise an array region and one or more non-array regions. Memory pillars are in the lower deck and the upper deck of the array region and the memory pillars are configured to be operably coupled to the source. Dummy pillars are in the upper deck of the one or more non-array regions and the dummy pillars are configured to be electrically isolated from the source. Another conductive material is in the upper deck and the lower deck of the one or more non-array regions. Additional electronic devices and related systems and methods of forming an electronic device are also disclosed.
    Type: Application
    Filed: June 14, 2022
    Publication date: September 29, 2022
    Inventors: S M Istiaque Hossain, Christopher J. Larsen, Anilkumar Chandolu, Wesley O. Mckinsey, Tom J. John, Arun Kumar Dhayalan, Prakash Rau Mokhna Rau
  • Patent number: 11444099
    Abstract: Microelectronic devices include a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. Conductive contact structures extend through the stack structure. An insulative material is between the conductive contact structures and the tiers of the stack structure. In a lower tier portion of the stack structure, a conductive structure, of the conductive structures, has a portion extending a first width between a pair of the conductive contact structures. In a portion of the stack structure above the lower tier portion, an additional conductive structure, of the conductive structures, has an additional portion extending a second width between the pair of the conductive contact structures. The second width is greater than the first width. Related methods and electronic systems are also disclosed.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: September 13, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Patent number: 11437391
    Abstract: A method of forming a microelectronic device comprises forming a stack structure. Pillar structures are formed to vertically extend through the stack structure. At least one trench and additional trenches are formed to substantially vertically extend through the stack structure. Each of the additional trenches comprises a first portion having a first width, and a second portion at a horizontal boundary of the first portion and having a second width greater than the first width. A dielectric structure is formed within the at least one trench and the additional trenches. The dielectric structure comprises at least one angled portion proximate the horizontal boundary of the first portion of at least some of the additional trenches. The at least one angled portion extends at an acute angle to each of a first direction and a second direction transverse to the first direction. Microelectronic devices and electronic systems are also described.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: September 6, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Raja Kumar Varma Manthena, Anilkumar Chandolu
  • Patent number: 11430809
    Abstract: Some embodiments include an integrated assembly having a first deck. The first deck has first memory cell levels alternating with first insulative levels. A second deck is over the first deck. The second deck has second memory cell levels alternating with second insulative levels. A cell-material-pillar passes through the first and second decks. Memory cells are along the first and second memory cell levels and include regions of the cell-material-pillar. An intermediate level is between the first and second decks. The intermediate level includes a buffer region adjacent the cell-material-pillar. The buffer region includes a composition different from the first and second insulative materials, and different from the first and second conductive regions. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: August 4, 2020
    Date of Patent: August 30, 2022
    Assignee: Micron Technology, Inc.
    Inventors: S. M. Istiaque Hossain, Prakash Rau Mokhna Rau, Arun Kumar Dhayalan, Damir Fazil, Joel D. Peterson, Anilkumar Chandolu, Albert Fayrushin, George Matamis, Christopher Larsen, Rokibul Islam
  • Patent number: 11417681
    Abstract: A method used in forming a memory array comprising strings of memory cells and operative through-array-vias (TAVs) comprises forming a stack comprising vertically-alternating insulative tiers and conductive tiers. The stack comprises a TAV region and an operative memory-cell-string region. The TAV region comprises spaced operative TAV areas. Operative channel-material strings are formed in the stack in the operative memory-cell-string region and dummy channel-material strings are formed in the stack in the TAV region laterally outside of and not within the operative TAV areas. Operative TAVs are formed in individual of the spaced operative TAV areas in the TAV region. Other methods and structure independent of method are disclosed.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yi Hu, Merri L. Carlson, Anilkumar Chandolu, Indra V. Chary, David Daycock, Harsh Narendrakumar Jain, Matthew J. King, Jian Li, Brett D. Lowe, Prakash Rau Mokhna Rau, Lifang Xu
  • Patent number: 11387245
    Abstract: An electronic device comprising a lower deck and an upper deck adjacent to a source. Each of the lower deck and the upper deck comprise tiers of alternating conductive materials and dielectric materials. Each of the lower deck and the upper deck also comprise an array region and one or more non-array regions. Memory pillars are in the lower deck and the upper deck of the array region and the memory pillars are configured to be operably coupled to the source. Dummy pillars are in the upper deck of the one or more non-array regions and the dummy pillars are configured to be electrically isolated from the source. Another conductive material is in the upper deck and the lower deck of the one or more non-array regions. Additional electronic devices and related systems and methods of forming an electronic device are also disclosed.
    Type: Grant
    Filed: April 17, 2020
    Date of Patent: July 12, 2022
    Assignee: Micron Technology, Inc.
    Inventors: S M Istiaque Hossain, Christopher J. Larsen, Anilkumar Chandolu, Wesley O. McKinsey, Tom J. John, Arun Kumar Dhayalan, Prakash Rau Mokhna Rau
  • Publication number: 20220149011
    Abstract: Semiconductor die assemblies having interconnect structures with redundant electrical connectors are disclosed herein. In one embodiment, a semiconductor die assembly includes a first semiconductor die, a second semiconductor die, and an interconnect structure between the first and the second semiconductor dies. The interconnect structure includes a first conductive film coupled to the first semiconductor die and a second conductive film coupled to the second semiconductor die. The interconnect structure further includes a plurality of redundant electrical connectors extending between the first and second conductive films and electrically coupled to one another via the first conductive film.
    Type: Application
    Filed: January 20, 2022
    Publication date: May 12, 2022
    Inventor: Anilkumar Chandolu
  • Publication number: 20220108998
    Abstract: A microelectronic device includes a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. At least one slit region divides the stack structure into blocks. Each block comprises an array of active pillars. Along the at least one slit region is a horizontally alternating sequence of slit structure segments and support pillar structures. The slit structure segments and the support pillar structures each extend vertically through the stack structure. Additional microelectronic devices are also disclosed as are related methods and electronic systems.
    Type: Application
    Filed: October 5, 2020
    Publication date: April 7, 2022
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Publication number: 20220109002
    Abstract: An electronic device comprises a stack structure comprising vertically alternating insulative structures and conductive structures arranged in tiers, pillars extending vertically through the stack structure, and a barrier material overlying the stack structure. The electronic device comprises a first insulative material extending through the barrier material and into an upper tier portion of the stack structure, and a second insulative material laterally adjacent to the first insulative material and laterally adjacent to at least some of the conductive structures in the upper tier portion of the stack structure. At least a portion of the second insulative material is in vertical alignment with the barrier material. Additional electronic devices and related methods and systems are also disclosed.
    Type: Application
    Filed: October 6, 2020
    Publication date: April 7, 2022
    Inventors: Sidhartha Gupta, Anilkumar Chandolu, S M Istiaque Hossain
  • Publication number: 20220093467
    Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. A stair-step structure is formed into the stack. A first liquid is applied onto the stair-step structure. The first liquid comprises insulative physical objects that individually have at least one of a maximum submicron dimension or a minimum submicron dimension. The first liquid is removed to leave the insulative physical objects touching one another and to have void-spaces among the touching insulative physical objects. A second liquid that is different from the first liquid is applied into the void-spaces. The second liquid is changed into a solid insulative material in the void-spaces. Other embodiments, including structure, are disclosed.
    Type: Application
    Filed: December 6, 2021
    Publication date: March 24, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Corey Staller, Anilkumar Chandolu
  • Publication number: 20220068965
    Abstract: Some embodiments include a method of forming an integrated assembly. Laterally alternating first and second sacrificial materials are formed over a conductive structure, and then a stack of vertically alternating first and second levels is formed over the sacrificial materials. The first levels include first material and the second levels include insulative second material. Channel-material-openings are formed to extend through the stack and through at least some of the strips. Channel-material-pillars are formed within the channel-material-openings. Slits are formed to extend through the stack and through the sacrificial materials. The first sacrificial material is replaced with first conductive material and then the second sacrificial material is replaced with second conductive material. At least some of the first material of the stack is replaced with third conductive material. Some embodiments include integrated assemblies.
    Type: Application
    Filed: May 17, 2021
    Publication date: March 3, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Anilkumar Chandolu, Indra V. Chary
  • Publication number: 20220068956
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.
    Type: Application
    Filed: August 31, 2020
    Publication date: March 3, 2022
    Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
  • Publication number: 20220045086
    Abstract: Some embodiments include an integrated assembly having a first deck. The first deck has first memory cell levels alternating with first insulative levels. A second deck is over the first deck. The second deck has second memory cell levels alternating with second insulative levels. A cell-material-pillar passes through the first and second decks. Memory cells are along the first and second memory cell levels and include regions of the cell-material-pillar. An intermediate level is between the first and second decks. The intermediate level includes a buffer region adjacent the cell-material-pillar. The buffer region includes a composition different from the first and second insulative materials, and different from the first and second conductive regions. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: August 4, 2020
    Publication date: February 10, 2022
    Applicant: Micron Technology, Inc.
    Inventors: S.M. Istiaque Hossain, Prakash Rau Mokhna Rau, Arun Kumar Dhayalan, Damir Fazil, Joel D. Peterson, Anilkumar Chandolu, Albert Fayrushin, George Matamis, Christopher Larsen, Rokibul Islam
  • Publication number: 20220028881
    Abstract: An electronic device comprising lower and upper decks adjacent to a source. The lower and upper decks comprise tiers of alternating conductive materials and dielectric materials. Memory pillars in the lower and upper decks are configured to be operably coupled to the source. The memory pillars comprise contact plugs in the upper deck, cell films in the lower and upper decks, and fill materials in the lower and upper decks. The cell films in the upper deck are adjacent to the contact plugs and the fill materials in the upper deck are adjacent to the contact plugs. Dummy pillars are in a central region of the lower deck and the upper deck. The dummy pillars comprise an oxide material in the upper deck, the oxide material contacting the contact plugs and the fill materials. Additional electronic devices and related systems and methods are also disclosed.
    Type: Application
    Filed: July 23, 2020
    Publication date: January 27, 2022
    Inventors: S M Istiaque Hossain, Tom J. John, Darwin A. Clampitt, Anilkumar Chandolu, Prakash Rau Mokhna Rau, Christopher J. Larsen, Kye Hyun Baek
  • Patent number: 11233036
    Abstract: Semiconductor die assemblies having interconnect structures with redundant electrical connectors are disclosed herein. In one embodiment, a semiconductor die assembly includes a first semiconductor die, a second semiconductor die, and an interconnect structure between the first and the second semiconductor dies. The interconnect structure includes a first conductive film coupled to the first semiconductor die and a second conductive film coupled to the second semiconductor die. The interconnect structure further includes a plurality of redundant electrical connectors extending between the first and second conductive films and electrically coupled to one another via the first conductive film.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: January 25, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Anilkumar Chandolu
  • Publication number: 20220013534
    Abstract: Microelectronic devices include a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. Conductive contact structures extend through the stack structure. An insulative material is between the conductive contact structures and the tiers of the stack structure. In a lower tier portion of the stack structure, a conductive structure, of the conductive structures, has a portion extending a first width between a pair of the conductive contact structures. In a portion of the stack structure above the lower tier portion, an additional conductive structure, of the conductive structures, has an additional portion extending a second width between the pair of the conductive contact structures. The second width is greater than the first width. Related methods and electronic systems are also disclosed.
    Type: Application
    Filed: July 7, 2020
    Publication date: January 13, 2022
    Inventors: Anilkumar Chandolu, Indra V. Chary