Patents by Inventor Aritoshi Sugimoto

Aritoshi Sugimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5877498
    Abstract: An X-ray analyzing method for inspecting opening states of fine holes comprises the steps of: irradiating a finely converged electron beam into a first fine hole, observing an X-ray emitted from the inside of said first fine hole in order to obtain an first X-ray analysis data about the residue substance existing at the bottom of said first fine hole; irradiating a finely converged electron beam into a second fine hole, observing an X-ray emitted from the inside of said second fine hole in order to obtain an second X-ray analysis data about the residue substance existing at the bottom of said second fine hole; and comparing said first X-ray analysis data with said second X-ray analysis data, forming a judgment as to whether or not a difference between said first and second analysis data is smaller than a predetermined threshold value and using an outcome of said judgment to determine the opening states of said first and second fine holes.
    Type: Grant
    Filed: July 15, 1997
    Date of Patent: March 2, 1999
    Assignee: Hitachi, Ltd.
    Inventors: Aritoshi Sugimoto, Yoshimi Sudo, Tokuo Kure, Ken Ninomiya, Katsuhiro Kuroda, Takashi Nishida, Hideo Todokoro, Yasuhiro Mitsui, Hiroyasu Shichi