Patents by Inventor Ashonita A. Chavan
Ashonita A. Chavan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240155847Abstract: Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, an integrated assembly includes a conductive plate, a top electrode in contact with the conductive plate and shared by a plurality of bottom electrodes included in the integrated assembly, a bottom electrode having a top surface, a bottom surface, and an exterior circumferential surface, and a ferroelectric insulator that separates the top electrode from the bottom electrode. In some implementations, a support structure is not present between a top surface of the ferroelectric insulator and a bottom surface of the conductive plate. The integrated assembly may include a leaker device having a top surface, a bottom surface in contact with the top surface of the bottom electrode, and an exterior circumferential surface. The leaker device may be configured to discharge charge from the bottom electrode to the conductive plate.Type: ApplicationFiled: October 11, 2023Publication date: May 9, 2024Inventors: Giorgio SERVALLI, Ashonita A. CHAVAN
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Patent number: 11935574Abstract: A memory cell comprises a capacitor comprising a first capacitor electrode having laterally-spaced walls, a second capacitor electrode comprising a portion above the first capacitor electrode, and capacitor insulator material between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the capacitor insulator material. A parallel current leakage path is between the second capacitor electrode and the first capacitor electrode. The parallel current leakage path is circuit-parallel with the intrinsic current leakage path, of lower total resistance than the intrinsic current leakage path, and comprises leaker material that is everywhere laterally-outward of laterally-innermost surfaces of the laterally-spaced walls of the first capacitor electrode. Other embodiments, including methods, are disclosed.Type: GrantFiled: October 7, 2021Date of Patent: March 19, 2024Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Ashonita A. Chavan, Sameer Chhajed, Beth R. Cook, Kamal Kumar Muthukrishnan, Durai Vishak Nirmal Ramaswamy, Lance Williamson
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Publication number: 20240049473Abstract: Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, an integrated assembly includes a cell plate, a pillar that includes a bottom electrode and a leaker device on top of the bottom electrode, and a top electrode. The top electrode includes a first top electrode portion and a second top electrode portion. The first top electrode portion is separated from the bottom electrode by the leaker device. The second top electrode portion is separated from the bottom electrode and the leaker device by an insulator. The leaker device is configured to discharge excess charge from the bottom electrode to the cell plate via the first top electrode portion.Type: ApplicationFiled: August 8, 2022Publication date: February 8, 2024Inventors: Ashonita A. CHAVAN, Aysha Siddique SHANTA, Aditi P. KULKARNI
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Patent number: 11871582Abstract: A method of forming a vertical transistor comprising a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region comprises, in multiple time-spaced microwave annealing steps, microwave annealing at least the channel region. The multiple time-spaced microwave annealing steps reduce average concentration of elemental-form H in the channel region from what it was before start of the multiple time-spaced microwave annealing steps. The reduced average concentration of elemental-form H is 0.005 to less than 1 atomic percent. Structure embodiments are disclosed.Type: GrantFiled: January 31, 2022Date of Patent: January 9, 2024Assignee: Micron Technology, Inc.Inventors: Hung-Wei Liu, Vassil N. Antonov, Ashonita A. Chavan, Darwin Franseda Fan, Jeffery B. Hull, Anish A. Khandekar, Masihhur R. Laskar, Albert Liao, Xue-Feng Lin, Manuj Nahar, Irina V. Vasilyeva
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Patent number: 11856790Abstract: A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×102 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.Type: GrantFiled: November 30, 2022Date of Patent: December 26, 2023Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Manuj Nahar
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Publication number: 20230397433Abstract: Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, a memory device includes multiple memory cells. Each memory cell may include a bottom electrode having an open top cylinder shape that contains a support pillar, may include a top electrode, may include an insulator that separates the top electrode from the bottom electrode, and may include a leaker device having an open top cylinder shape. A bottom surface of the leaker device may abut at least one of a top surface of the bottom electrode or a top surface of the support pillar. A top surface of the leaker device may abut a bottom surface of a conductive plate. The memory device may also include the conductive plate.Type: ApplicationFiled: June 6, 2022Publication date: December 7, 2023Inventors: Fatma Arzum SIMSEK-EGE, Ashonita A. CHAVAN
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Patent number: 11735416Abstract: A method includes forming a first amorphous material, forming a second amorphous material over and in contact with the first material, removing a portion of the second material and the first material to form pillars, and exposing the materials to a temperature between a crystallization temperature of the first material and a crystallization temperature of the second material. The first material and the second material each comprise at least one element selected from the group consisting of silicon and germanium. The second material exhibits a crystallization temperature different than a crystallization temperature of the first material. Semiconductor structures, memory devices, and systems are also disclosed.Type: GrantFiled: September 21, 2020Date of Patent: August 22, 2023Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Michael Mutch, Sameer Chhajed
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Patent number: 11711924Abstract: Some embodiments include an integrated assembly having first electrodes with top surfaces, and with sidewall surfaces extending downwardly from the top surfaces. The first electrodes are solid pillars. Insulative material is along the sidewall surfaces of the first electrodes. Second electrodes extend along the sidewall surfaces of the first electrodes and are spaced from the sidewall surfaces by the insulative material. Conductive-plate-material extends across the first and second electrodes, and couples the second electrodes to one another. Leaker-devices electrically couple the first electrodes to the conductive-plate-material and are configured to discharge at least a portion of excess charge from the first electrodes to the conductive-plate-material. Some embodiments include methods of forming integrated assemblies.Type: GrantFiled: March 11, 2022Date of Patent: July 25, 2023Assignee: Micron Technology, Inc.Inventors: Alessandro Calderoni, Beth R. Cook, Durai Vishak Nirmal Ramaswamy, Ashonita A. Chavan
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Patent number: 11706929Abstract: A memory cell includes a select device and a capacitor electrically coupled in series with the select device. The capacitor includes two conductive capacitor electrodes having ferroelectric material there-between. The capacitor has an intrinsic current leakage path from one of the capacitor electrodes to the other through the ferroelectric material. There is a parallel current leakage path from the one capacitor electrode to the other. The parallel current leakage path is circuit-parallel the intrinsic path and of lower total resistance than the intrinsic path. Other aspects are disclosed.Type: GrantFiled: December 23, 2021Date of Patent: July 18, 2023Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Qian Tao, Durai Vishak Nirmal Ramaswamy, Haitao Liu, Kirk D. Prall, Ashonita Chavan
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Patent number: 11676768Abstract: Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.Type: GrantFiled: July 14, 2022Date of Patent: June 13, 2023Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Beth R. Cook, Manuj Nahar, Durai Vishak Nirmal Ramaswamy
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Publication number: 20230121892Abstract: A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×102 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.Type: ApplicationFiled: November 30, 2022Publication date: April 20, 2023Applicant: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy
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Patent number: 11587938Abstract: Some embodiments include a capacitor having a container-shaped bottom portion. The bottom portion has a first region over a second region. The first region is thinner than the second region. The first region is a leaker region and the second region is a bottom electrode region. The bottom portion has an interior surface that extends along the first and second regions. An insulative material extends into the container shape. The insulative material lines the interior surface of the container shape. A conductive plug extends into the container shape and is adjacent the insulative material. A conductive structure extends across the conductive plug, the insulative material and the first region of the bottom portion. The conductive structure directly contacts the insulative material and the first region of the bottom portion, and is electrically coupled with the conductive plug. Some embodiments include methods of forming assemblies.Type: GrantFiled: June 10, 2020Date of Patent: February 21, 2023Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Sanket S. Kelkar, Ashonita A. Chavan, Sameer Chhajed, Adriel Jebin Jacob Jebaraj
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Publication number: 20230015304Abstract: A method used in forming an electronic device comprising conductive material and ferroelectric material comprises forming a composite stack comprising multiple metal oxide-comprising insulator materials. At least one of the metal oxide-comprising insulator materials is between and directly against non-ferroelectric insulating materials. The multiple metal oxide-comprising insulator materials are of different composition from that of immediately-adjacent of the non-ferroelectric insulating materials. The composite stack is subjected to a temperature of at least 200° C. After the subjecting, the composite stack comprises multiple ferroelectric metal oxide-comprising insulator materials at least one of which is between and directly against non-ferroelectric insulating materials. After the subjecting, the composite stack is ferroelectric. Conductive material is formed and that is adjacent the composite stack. Devices are also disclosed.Type: ApplicationFiled: September 21, 2022Publication date: January 19, 2023Applicant: Micron Technology, Inc.Inventors: Manuj Nahar, Ashonita A. Chavan
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Patent number: 11552086Abstract: A method used in forming an electronic component comprising conductive material and ferroelectric material comprises forming a non-ferroelectric metal oxide-comprising insulator material over a substrate. A composite stack comprising at least two different composition non-ferroelectric metal oxides is formed over the substrate. The composite stack has an overall conductivity of at least 1×102 Siemens/cm. The composite stack is used to render the non-ferroelectric metal oxide-comprising insulator material to be ferroelectric. Conductive material is formed over the composite stack and the insulator material. Ferroelectric capacitors and ferroelectric field effect transistors independent of method of manufacture are also disclosed.Type: GrantFiled: August 10, 2020Date of Patent: January 10, 2023Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Manuj Nahar
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Publication number: 20220367118Abstract: Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.Type: ApplicationFiled: July 14, 2022Publication date: November 17, 2022Applicant: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Beth R. Cook, Manuj Nahar, Durai Vishak Nirmal Ramaswamy
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Patent number: 11469043Abstract: A method used in forming an electronic device comprising conductive material and ferroelectric material comprises forming a composite stack comprising multiple metal oxide-comprising insulator materials. At least one of the metal oxide-comprising insulator materials is between and directly against non-ferroelectric insulating materials. The multiple metal oxide-comprising insulator materials are of different composition from that of immediately-adjacent of the non-ferroelectric insulating materials. The composite stack is subjected to a temperature of at least 200° C. After the subjecting, the composite stack comprises multiple ferroelectric metal oxide-comprising insulator materials at least one of which is between and directly against non-ferroelectric insulating materials. After the subjecting, the composite stack is ferroelectric. Conductive material is formed and that is adjacent the composite stack. Devices are also disclosed.Type: GrantFiled: February 23, 2021Date of Patent: October 11, 2022Assignee: Micron Technology, Inc.Inventors: Manuj Nahar, Ashonita A. Chavan
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Patent number: 11404217Abstract: Some embodiments include an apparatus having horizontally-spaced bottom electrodes supported by a supporting structure. Leaker device material is directly against the bottom electrodes. Insulative material is over the bottom electrodes, and upper electrodes are over the insulative material. Plate material extends across the upper electrodes and couples the upper electrodes to one another. The plate material is directly against the leaker device material. The leaker device material electrically couples the bottom electrodes to the plate material, and may be configured to discharge at least a portion of excess charge from the bottom electrodes to the plate material. Some embodiments include methods of forming apparatuses which include capacitors having bottom electrodes and top electrodes, with the top electrodes being electrically coupled to one another through a conductive plate. Leaker devices are formed to electrically couple the bottom electrodes to the conductive plate.Type: GrantFiled: April 17, 2020Date of Patent: August 2, 2022Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Beth R. Cook, Manuj Nahar, Durai Vishak Nirmal Ramaswamy
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Publication number: 20220199634Abstract: Some embodiments include an integrated assembly having first electrodes with top surfaces, and with sidewall surfaces extending downwardly from the top surfaces. The first electrodes are solid pillars. Insulative material is along the sidewall surfaces of the first electrodes. Second electrodes extend along the sidewall surfaces of the first electrodes and are spaced from the sidewall surfaces by the insulative material. Conductive-plate-material extends across the first and second electrodes, and couples the second electrodes to one another. Leaker-devices electrically couple the first electrodes to the conductive-plate-material and are configured to discharge at least a portion of excess charge from the first electrodes to the conductive-plate-material. Some embodiments include methods of forming integrated assemblies.Type: ApplicationFiled: March 11, 2022Publication date: June 23, 2022Applicant: Micron Technology, Inc.Inventors: Alessandro Calderoni, Beth R. Cook, Durai Vishak Nirmal Ramaswamy, Ashonita A. Chavan
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Publication number: 20220157837Abstract: A method of forming a vertical transistor comprising a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region comprises, in multiple time-spaced microwave annealing steps, microwave annealing at least the channel region. The multiple time-spaced microwave annealing steps reduce average concentration of elemental-form H in the channel region from what it was before start of the multiple time-spaced microwave annealing steps. The reduced average concentration of elemental-form H is 0.005 to less than 1 atomic percent. Structure embodiments are disclosed.Type: ApplicationFiled: January 31, 2022Publication date: May 19, 2022Applicant: Micron Technology, Inc.Inventors: Hung-Wei Liu, Vassil N, Antonov, Ashonita A. Chavan, Darwin Franseda Fan, Jeffrey B. Hull, Anish A. Khandekar, Masihhur R. Laskar, Albert Liao, Xue-Feng Lin, Manuj Nahar, Irina V. Vasilyeva
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Publication number: 20220130845Abstract: A method of forming an array of capacitors comprises forming a plurality of horizontally-spaced groups that individually comprise a plurality of horizontally-spaced lower capacitor electrodes having a capacitor insulator thereover. Adjacent of the groups are horizontally spaced farther apart than are adjacent of the lower capacitor electrodes within the groups. A void space is between the adjacent groups. An upper capacitor electrode material is formed in the void space and in the groups over the capacitor insulator and the lower capacitor electrodes. The upper capacitor electrode material in the void space connects the upper capacitor electrode material that is in the adjacent groups relative to one another. The upper capacitor electrode material less-than-fills the void space. At least a portion of the upper capacitor electrode material is removed from the void space to disconnect the upper capacitor electrode material in the adjacent groups from being connected relative to one another.Type: ApplicationFiled: January 3, 2022Publication date: April 28, 2022Applicant: Micron Technology, Inc.Inventors: Sameer Chhajed, Ashonita A. Chavan, Mark Fischer, Durai Vishak Nirmal Ramaswamy