Abstract: A dual-bit memory device is provided which includes trench isolation material disposed below a bit line that is shared by adjacent memory cells. The dual-bit memory device comprises a substrate, a first memory cell designed to store two bits of information, a second memory cell designed to store two bits of information, and an insulator region. The first memory cell is adjacent to the second memory cell. The first memory cell includes a first buried bit line and a second buried bit line. The first memory cell and the second memory cell share the second buried bit line. The insulator region is disposed in the substrate below the second buried bit line to prevent electrons from flowing between the first memory cell and the second memory cell.

Abstract: Flash memory devices and methods for fabricating the same are provided. In accordance with an exemplary embodiment of the invention, a method for fabricating a memory device comprises the steps of fabricating a first gate stack and a second gate stack overlying a substrate. A trench is etched into the substrate between the first gate stack and the second gate stack and a first impurity doped region is formed within the substrate underlying the trench. The trench is filled at least partially with a conductive material.

Abstract: Methods are provided for fabricating a split charge storage node semiconductor memory device. In accordance with one embodiment the method comprises the steps of forming a gate insulator layer having a first physical thickness and a first effective oxide thickness on a semiconductor substrate and forming a control gate electrode having a first edge and a second edge overlying the gate insulator layer. The gate insulator layer is etched to form first and second undercut regions at the edges of the control gate electrode, the first and second undercut region each exposing a portion of the semiconductor substrate and an underside portion of the control gate electrode. First and second charge storage nodes are formed in the undercut regions, each of the charge storage nodes comprising an oxide-storage material-oxide structure having a physical thickness substantially equal to the first physical thickness and an effective oxide thickness less than the first effective oxide thickness.

Abstract: A dual charge storage node memory device and methods for its fabrication are provided. In one embodiment a dielectric plug is formed comprising a first portion recessed into a semiconductor substrate and a second portion extending above the substrate. A layer of semiconductor material is formed overlying the second portion. A first layered structure is formed overlying a first side of the second portion of the dielectric plug, and a second layered structure is formed overlying a second side, each of the layered structures overlying the layer of semiconductor material and comprising a charge storage layer between first and second dielectric layers. Ions are implanted into the substrate to form a first bit line and second bit line, and a layer of conductive material is deposited and patterned to form a control gate overlying the dielectric plug and the first and second layered structures.

Abstract: A method and apparatus are provided for adaptive memory cell overerase compensation. A semiconductor memory device (100) is provided for performing the adaptively compensating erase verify operation (500, 600). The memory device (100) includes at least one word line (402). One or more memory cells (200) and one or more reference cells (406, 408) are connected to the word lines (402), where the one or more reference cells (406, 408) include an erased reference cell (408) connected to each word line (402). The method (500, 600) for adaptive memory cell overerase compensation includes determining an erase verify gate voltage (506, 608) utilizing the erased reference cell(s) (408) and verifying an erase voltage (514) of the memory cells (200) in response to the erase verify gate voltage (512, 614).

Abstract: Methods are provided for fabricating a memory device comprising a dual bit memory cell. The method comprises, in accordance with one embodiment of the invention, forming a gate dielectric layer and a central gate electrode overlying the gate dielectric layer at a surface of a semiconductor substrate. First and second memory storage nodes are formed adjacent the sides of the gate dielectric layer, each of the first and second storage nodes comprising a first dielectric layer and a charge storage layer, the first dielectric layer formed independently of the step of forming the gate dielectric layer. A first control gate is formed overlying the first memory storage node and a second control gate is formed overlying the second memory storage node. A conductive layer is deposited and patterned to form a word line coupled to the central gate electrode, the first control gate, and the second control gate.

Abstract: A semiconductor device includes a core memory array and a periphery area. The core memory array area includes a group of memory cells. The periphery area includes a group of select transistors. The select transistors are formed at substantially the same pitch as the memory cells in the core memory array and with substantially the same channel length.

Abstract: A flash memory system configured in accordance with an example embodiment of the invention employs a virtual ground array architecture. During programming operations, target memory cells are biased with a positive source bias voltage to reduce or eliminate leakage current that might otherwise conduct through the target memory cells. A positive source bias voltage may also be applied to target memory cells during verification operations (program verify, soft program verify, erase verify) to reduce or eliminate leakage current that might otherwise introduce errors in the verification operations.

Abstract: A semiconductor device includes a substrate, a memory cell formed on the substrate, and a contact to the substrate. The contact is formed in an area away from the memory cell and functions to raise the potential of the substrate.

Abstract: A memory device and a method of fabrication are provided. The memory device includes a semiconductor substrate and a charge trapping dielectric stack disposed over the semiconductor substrate. A gate electrode is disposed over the charge trapping dielectric stack, where the gate electrode electrically defines a channel within a portion of the semiconductor substrate. The memory device includes a pair of bitlines, where the bitlines have a lower portion and a substantially trapezoidal shaped upper portion.

Abstract: A technique for forming at least part of an array of a dual bit memory core is disclosed. Initially, a portion of a charge trapping dielectric layer is formed over a substrate and a resist is formed over the portion of the charge trapping dielectric layer. The resist is patterned and a pocket implant is performed at an angle to establish pocket implants within the substrate. A bitline implant is then performed to establish buried bitlines within the substrate. The patterned resist is then removed and the remainder of the charge trapping dielectric layer is formed. A wordline material is formed over the remainder of the charge trapping dielectric layer and patterned to form wordlines that overlie the bitlines. The pocket implants serve to mitigate, among other things, complementary bit disturb (CBD) that can result from semiconductor scaling. As such, semiconductor devices can be made smaller and increased packing densities can be achieved by virtue of the inventive concepts set forth herein.

Abstract: A technique for forming at least part of an array of a dual bit memory core is disclosed. Initially, a portion of a charge trapping dielectric layer is formed over a substrate and a resist is formed over the portion of the charge trapping dielectric layer. The resist is patterned and a pocket implant is performed at an angle to establish pocket implants within the substrate. A bitline implant is then performed to establish buried bitlines within the substrate. The patterned resist is then removed and the remainder of the charge trapping dielectric layer is formed. A wordline material is formed over the remainder of the charge trapping dielectric layer and patterned to form wordlines that overlie the bitlines. The pocket implants serve to mitigate, among other things, complementary bit disturb (CBD) that can result from semiconductor scaling. As such, semiconductor devices can be made smaller and increased packing densities can be achieved by virtue of the inventive concepts set forth herein.

Abstract: A non-volatile memory device includes a semiconductor substrate and a pair of buried bitlines within the substrate. A bottom dielectric layer is formed over the substrate and a charge trapping dielectric layer is formed over the bottom dielectric layer. A multi-layer top dielectric stack is formed over the charge trapping dielectric layer. The top dielectric stack includes a first oxide layer, a nitride layer, and a second oxide layer. A wordline is formed over the top dielectric stack. The multi-layer top dielectric stack has a reduced electrical thickness, thereby providing a memory device, which is operative to be programmed using a reduced operating voltage of less than about +8 Volts.

Abstract: A non-volatile memory device includes a semiconductor substrate and a pair of buried bitlines within the substrate. A scaled down dielectric stack is formed over the substrate. The scaled down dielectric stack includes a scaled down top dielectric layer, a scaled down charge trapping dielectric layer and a bottom dielectric layer. A wordline is formed over the dielectric stack. The memory device is operative to be programmed using a reduced wordline operating voltage of less than about +8 Volts, and to be erased using a reduced wordline operating voltage of less than about ?6 Volts.

Abstract: A non-volatile memory device includes a semiconductor substrate and a source and drain within the substrate. A dielectric stack is formed over the substrate. The dielectric stack includes a thin top dielectric layer. A gate electrode is formed over the dielectric stack. The memory device is operative to perform a direct tunneling channel erase operation in which a pair of charge storing cells within a charge storing layer are erased via direct tunneling through the thin top dielectric layer.

Abstract: A non-volatile memory device includes a semiconductor substrate having first and second bitlines buried therein. The first bitline serves as a source terminal and the second bitline serves as a drain terminal. An oxide-nitride-oxide (ONO) stack is formed over the substrate. The ONO stack includes a charge storing layer having at least four charge storing cells therein. A pair of complementary conductive regions are disposed on opposite sides of the ONO stack extending in a direction perpendicular to the first and second bitlines. A wordline, which serves as a gate electrode, is disposed above the ONO stack and laterally between the first and second complementary conductive regions.