Abstract: A dropping rate measuring device for measuring a flow rate of liquid droplets which grow on a lower end of a nozzle and intermittently drop from the lower end of the nozzle includes an imaging unit that images a growing liquid droplet which is growing on the lower end of the nozzle at a plurality of time points and acquires a plurality of pieces of image data of the growing liquid droplet, and a data processor that calculates the flow rate by analyzing the plurality of pieces of image data acquired by the imaging unit.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A dripping detection apparatus includes a cylindrical drip cylinder into which a nozzle is inserted from an upper side and that receives inside a liquid droplet dripping from a lower end of the nozzle, and a photo interrupter that has equal to or more than one light emitting element emitting light and equal to or more than two light receiving elements receiving the light, wherein the equal to or more than one light emitting element and the equal to or more than two light receiving elements are arranged at opposing or substantially opposing positions with the drip cylinder interposed between the elements and equal to or more than two light paths connecting the equal to or more than one light emitting element to the equal to or more than two light receiving elements are located at a lower side relative to the lower end of the nozzle.

Abstract: A fluid control device includes a tube insertion portion formed in a casing, a fixing member that fixedly holds, in the tube insertion portion, a tube inserted into the tube insertion portion, a pressing member driven by an actuator to press the tube within the tube insertion portion, and a controller that controls the actuator for the pressing member, wherein the controller controls the pressing member to start pressing on the tube after the fixing member has fixedly hold the tube in the tube insertion portion.

Abstract: In a method for adjusting a fluid control apparatus, in a pressing step, a piezoelectric pump is placed on a stage with a cover plate facing upward, the stage is moved up, and a center portion of a principal surface of the cover plate on a side opposite to a diaphragm is pressed with a pressing pin. As a result, the cover plate and the base plate are shaped so as to warp convexly toward the diaphragm side, and a portion joined to a flexible plate is pulled, such that the flexible plate is caused to warp convexly toward the diaphragm side. Thus, residual tensile stress occurs in a movable portion of the flexible plate. Therefore, due to the residual tensile stress, the tensile stress of the movable portion of the flexible plate is increased.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A dropping rate measuring device for measuring a flow rate of liquid droplets which grow on a lower end of a nozzle and intermittently drop from the lower end of the nozzle includes an imaging unit that images a growing liquid droplet which is growing on the lower end of the nozzle at a plurality of time points and acquires a plurality of pieces of image data of the growing liquid droplet, and a data processor that calculates the flow rate by analyzing the plurality of pieces of image data acquired by the imaging unit.

Abstract: An analyzing device includes a heating device, a cooling device, and a controller. The cooling device includes a piezoelectric pump, a check valve, an exhaust valve, and an air tank. The analyzing device heats a subject by the heating device. The cooling device drives the piezoelectric pump while the heating device heating the subject. With this, the outside air is sucked through a suction port and the air that is discharged from the piezoelectric pump is accommodated in the air tank through the check valve. Then, the pressure in the air tank is increased. Thereafter, the cooling device stops driving of the piezoelectric pump. With this, the air in the air tank is discharged toward the subject via the exhaust valve so as to cool the subject.

Abstract: A piezoelectric pump includes a piezoelectric element, an intermediate plate, and a vibrating plate. The piezoelectric element has a substantially flat plate shape. The intermediate plate is bonded to a principal surface of the piezoelectric element and applies a residual stress in a compressive direction to the piezoelectric element. The vibrating plate is bonded to the intermediate plate such that the vibrating plate faces a principal surface of the piezoelectric element and receives a residual stress in a compressive direction from the intermediate plate. In addition, the vibrating plate defines a portion of a wall surface of a pump chamber having an open hole. A fluid passage is provided in the piezoelectric pump. The fluid passage communicates with the outside of the chamber at one end thereof, and communicates with the pump chamber through the open hole at the other end.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A fluid control device (10) includes a container (13), a pump (11), a solenoid valve (12), and a capacitor. The pump (11) is driven by a main power source, and is capable of pressurizing or depressurizing the inside of the container (13). A suction port and a discharge port of the pump (11) internally communicate with each other. The solenoid valve (12) is connected at both ends thereof to the container (13) and the pump (11). If the voltage of the main power source is reduced or lost, the solenoid valve (12) releases pressure in the container (13) by being driven by the power stored in the capacitor or secondary battery.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A gas control apparatus includes an upper housing to which a second piezoelectric pump is joined, a lower housing to which a first piezoelectric pump is joined, and a diaphragm. The upper housing includes a discharge hole through which gas is discharged. The lower housing includes introduction holes through which gas is introduced, an opening, a first valve seat, a second valve seat, and a third valve seat. The diaphragm is sandwiched between the upper housing and the lower housing, and is fixed to the upper housing and the lower housing so that the diaphragm contacts the first valve seat, the second valve seat, and the third valve seat. The diaphragm divides an inner space of the upper housing and the lower housing to define valve chests together with the upper housing and the lower housing.

Abstract: A gas control device (100) includes a first pump (101), a second pump (201), a first check valve (102), a second check valve (202), and a receptacle (9). The volume of the receptacle (9) changes in accordance with the pressure of air flowing thereinto. The first pump (101) has an air suction hole (53) and an air discharge hole (24). The second pump (201) has an air suction hole (197) and an air discharge hole (181). The first pump (101) is a type of pump having a high discharge flow rate and a low discharge pressure. The second pump (201) is a type of pump having a low discharge flow rate and a high discharge pressure. The suction hole (53) of the first pump (101) communicates with a first ventilation hole (106). The suction hole (197) of the second pump (201) communicates with a second ventilation hole (107).