Abstract: A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall.

Abstract: A piezoelectric pump capable of generating a large displacement at a central portion of a piezoelectric element even when a driving voltage is relatively low and preventing short-circuits caused by migration. The piezoelectric pump includes a pump body with a pump chamber, and a piezoelectric element that closes the pump chamber. The central area and the peripheral area of the piezoelectric element are bent in opposite directions by applying voltages to the piezoelectric element so that the volume of the pump chamber is changed. The piezoelectric element is a laminate including a plurality of piezoelectric layers with electrodes interposed therebetween. The central area and the peripheral area of each piezoelectric layer are polarized opposite to each other in the thickness direction, and the electrodes are formed such that voltages in the same direction in the thickness direction are applied to the central area and the peripheral area of each piezoelectric layer.

Abstract: A piezoelectric micropump in which a pump chamber is isolated by a diaphragm. A piezoelectric element is disposed on a back surface of the diaphragm, and the diaphragm is deformed by bending deformation of the piezoelectric element to change the volume of the pump chamber and transport fluid in the pump chamber. A support member for supporting a back surface of the piezoelectric element is provided so that the support member inhibits bending of a peripheral portion of the diaphragm in a reverse direction. The support member thus prevents the piezoelectric element from being floated. Accordingly, the displacement of the piezoelectric element can be reliably transmitted as the change in volume of the pump chamber, thereby enhancing the fluid transportation performance.

Abstract: A micropump having a diaphragm portion, a valve portion of an intake-side check valve, and a valve portion of a discharge-side check valve formed in a single elastic-member sheet. A piezoelectric actuator is attached onto a back surface of the diaphragm portion. The elastic-member sheet is sandwiched between a first case member and a second case member, the elastic-member sheet providing sealing between both case members. A vibration chamber is defined between the elastic-member sheet and the first case member, the vibration chamber housing the piezoelectric actuator. A pump chamber is defined between the elastic-member sheet and the second case member.

Abstract: An overturn prevention control device for a two-wheel vehicle having a vehicle body, a front wheel, an actuator that steers the front wheel, a rear wheel, and a rear-wheel driving portion, includes an angular velocity sensor and a control unit arranged to output a steering angle command signal for controlling the actuator. The angular velocity sensor includes a detection axis, is mounted on the vehicle body such that the detection axis is downwardly inclined at a predetermined angle relative to a forward direction of the vehicle body, and detects an angular velocity about the detection axis. The angular velocity detected by the angular velocity sensor includes an angular velocity in a lateral direction of inclination and an angular velocity in an azimuthal direction. The zero-set error and offset noise are incorporated into the azimuth angle command. Thus, the two-wheel vehicle can be prevented from overturning.

Abstract: An aligning device that can reliably correct misalignment between electronic components for increasing the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method. The aligning device comprises a chamber; a flexible bellows configured to define an airtight chamber therein with the chamber; a driving unit configured to move one of a first block member and a second block member relative to the other, the first block member being for holding a first electronic component and being provided in the airtight chamber, and the second block member being for holding a second electronic component and being provided in the airtight chamber; and an image-taking port protruding inward from an outer surface of the chamber so as to define a space, the image-taking port having an observation window through which at least one of the first electronic component and the second electronic component is observed.

Abstract: An overturn prevention control device includes a bicycle robot capable of freely laterally inclining, an angular velocity sensor mounted on the bicycle robot such that a detection axis thereof extends in a substantially longitudinal direction of the bicycle robot, a motor mounted on the body such that a rotating shaft thereof extends in a substantially longitudinal direction of the body, a rotation sensor that detects a rotational position or a rotational speed of the motor, and an inertial rotor coupled to the rotating shaft of the motor. The overturn prevention control device corrects inclination of the bicycle robot by rotating the inertial rotor using the motor and by utilizing a reaction torque occurring when the inertial rotor is rotated.

Abstract: A bonding device that is not affected by heat and that is capable of maintaining wafers to be bonded parallel to each other so as to increase and stabilize the accuracy with which the wafers are bonded. A first space is formed between a first block member and a first pressure shaft, and a second space is formed between a second block member and a second pressure shaft. In this way, little heat is transferred from the first block member and the second block member to the first pressure shaft and the second pressure shaft, respectively, and therefore, a substantially uniform temperature is maintained inside the first block member and the second block member. Stresses caused by a difference between thermal expansion of the first block member and the second block member and thermal expansion of the first pressure shaft and the second pressure shaft are relieved by deflection of the first support pillar members and the second support pillar members.

Abstract: A component mounting device includes a head to which a component is attached e.g. by suction and a base for holding a substrate onto which the component is to be mounted. The head and the base are shifted relatively in an axial direction in order to mount the component onto the substrate. An attachment part is detachably attached to at least one of the head and the base, and has a projection at a position distant from the center of axis. The head and the base are shifted relatively in the axial direction so that the projection comes into contact with an opposing section on the head or the base. The relative shifting of the head and the base is repeated for a plurality of cycles while changing the attachment orientation of the attachment part for every cycle so that a plurality of coordinate values is obtained, each coordinate value corresponding to a contact point between the projection and the opposing section in the axial direction.

Abstract: A voice coil linear actuator comprises: an axially-shaped center yoke formed of a ferromagnetic material; an armature coil concentrically disposed so as to move along the axial direction of the center yoke; and a plurality of ring-shaped permanent magnets which have N and S magnetic poles arranged in the radial direction thereof, and are disposed concentrically as to the armature coil. The armature coil has armature coil units distributed in at least three positions in the axial direction, with adjacent pairs of the armature coil units being arranged so that electric current flows through them in opposite directions, respectively. The permanent magnets are distributed in at least three positions in the axial direction at positions facing respective armature coil units in the radial direction. The respective directions of the N magnetic poles of adjacent permanent magnets are arranged facing in opposite directions.

Abstract: A component-placing apparatus for driving a nozzle in the rotational and vertical directions for applying suction to a component includes a rotary actuator and a linear actuator having a stator connected to a stator of the rotary actuator such that these stators are immovable relative to each other. A spline shaft is connected to a rotating shaft of the rotary actuator, and a nozzle connecting shaft having a suction nozzle disposed at the bottom thereof is engaged with the spline shaft and is allowed to move only rectilinearly. A hollow holder encircling the nozzle connecting shaft with rotary bearings being interposed therebetween is connected to a mover of the linear actuator, and the hollow holder is engaged with the stator of the linear actuator with a linear guide being interposed therebetween.

Abstract: A component-placing apparatus for driving a nozzle in the rotational and vertical directions for applying suction to a component includes a rotary actuator and a linear actuator having a stator connected to a stator of the rotary actuator such that these stators are immovable relative to each other. A spline shaft is connected to a rotating shaft of the rotary actuator, and a nozzle connecting shaft having a suction nozzle disposed at the bottom thereof is engaged with the spline shaft and is allowed to move only rectilinearly. A hollow holder encircling the nozzle connecting shaft with rotary bearings being interposed therebetween is connected to a mover of the linear actuator, and the hollow holder is engaged with the stator of the linear actuator with a linear guide being interposed therebetween.

Abstract: A voice coil linear actuator comprises: an axially-shaped center yoke formed of a ferromagnetic material; an armature coil concentrically disposed so as to move along the axial direction of the center yoke; and a plurality of ring-shaped permanent magnets which have N and S magnetic poles arranged in the radial direction thereof, and are disposed concentrically as to the armature coil. The armature coil has armature coil units distributed in at least three positions in the axial direction, with adjacent pairs of the armature coil units being arranged so that electric current flows through them in opposite directions, respectively. The permanent magnets are distributed in at least three positions in the axial direction at positions facing respective armature coil units in the radial direction. The respective directions of the N magnetic poles of adjacent permanent magnets are arranged facing in opposite directions.