Abstract: In a fluid control device, a check valve includes a first valve housing and a first diaphragm. The first diaphragm defines a first valve chamber and a second valve chamber. An exhaust valve includes a second valve housing and a second diaphragm. The second diaphragm defines a third valve chamber and a fourth valve chamber. The check valve is opened and closed by a difference in pressure between the first valve chamber and the second valve chamber. The exhaust valve is opened and closed by a difference in pressure between the third valve chamber and the fourth valve chamber.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate including a first main surface and a second main surface, and a frame plate surrounding the surroundings of the vibrating plate. The driver is provided on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate has a hole formed thereon. Furthermore, the flexible plate faces the second main surface of the vibrating plate, and adheres to the frame plate by the adhesive agent that contains a plurality of particles arranged such that the plurality of particles are interposed between the flexible plate and the vibrating plate.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A fluid control device includes a vibrating plate including a first main surface and a second main surface, a driver that is provided on the first main surface of the vibrating plate and vibrates the vibrating plate, and a plate that is provided on the second main surface of the vibrating plate and has a hole provided thereon. At least one of either the vibrating plate or the plate is positioned between the hole and a region of the vibrating plate facing the hole, and includes a projection projecting in a direction intermediate between the hole and the region of the vibrating plate facing the hole.

Abstract: In a fluid control device, a check valve includes a first valve housing and a first diaphragm. The first diaphragm defines a first valve chamber and a second valve chamber. An exhaust valve includes a second valve housing and a second diaphragm. The second diaphragm defines a third valve chamber and a fourth valve chamber. The check valve is opened and closed by a difference in pressure between the first valve chamber and the second valve chamber. The exhaust valve is opened and closed by a difference in pressure between the third valve chamber and the fourth valve chamber.

Abstract: A fluid control device includes a vibrating plate unit, a driver, a flexible plate, and a base plate. The vibrating plate unit includes a vibrating plate including first and second main surfaces, and a frame plate surrounding the surrounding of the vibrating plate. The driver is bonded to the first or the second main surface of the vibrating plate and vibrates the vibrating plate. The flexible plate includes a hole provided therein, and is bonded to the frame plate so as to face the vibrating plate. The base plate is bonded to the main surface of the flexible plate on a side opposite to the vibrating plate. A size relationship between the coefficients of linear expansion of the material of the base plate and the frame plate is equal to a size relationship between the coefficients of linear expansion of the material of the vibrating plate and the driver.

Abstract: In a fluid control device, a check valve includes a first valve housing and a first diaphragm. The first diaphragm defines a first valve chamber and a second valve chamber. An exhaust valve includes a second valve housing and a second diaphragm. The second diaphragm defines a third valve chamber and a fourth valve chamber. The check valve is opened and closed by a difference in pressure between the first valve chamber and the second valve chamber. The exhaust valve is opened and closed by a difference in pressure between the third valve chamber and the fourth valve chamber.

Abstract: An analyzing device includes a heating device, a cooling device, and a controller. The cooling device includes a piezoelectric pump, a check valve, an exhaust valve, and an air tank. The analyzing device heats a subject by the heating device. The cooling device drives the piezoelectric pump while the heating device heating the subject. With this, the outside air is sucked through a suction port and the air that is discharged from the piezoelectric pump is accommodated in the air tank through the check valve. Then, the pressure in the air tank is increased. Thereafter, the cooling device stops driving of the piezoelectric pump. With this, the air in the air tank is discharged toward the subject via the exhaust valve so as to cool the subject.

Abstract: A fluid control device includes a vibrating plate unit, a driver, and a flexible plate. The vibrating plate unit includes a vibrating plate with first and second main surfaces, a frame plate surrounding the vibrating plate, and a link portion linking the vibrating plate and the frame plate and elastically supporting the vibrating plate against the frame plate. The driver is on the first main surface of the vibrating plate, and vibrates the vibrating plate. The flexible plate having a hole faces the second main surface of the vibrating plate, being fixed to the frame plate. At least a portion of the vibrating plate and the link portion are thinner than the thickness of the frame plate so that the surface of the portion of the vibrating plate and the link portion, on the side of the flexible plate, can separate from the flexible plate.

Abstract: A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.

Abstract: A gas control apparatus includes an upper housing to which a second piezoelectric pump is joined, a lower housing to which a first piezoelectric pump is joined, and a diaphragm. The upper housing includes a discharge hole through which gas is discharged. The lower housing includes introduction holes through which gas is introduced, an opening, a first valve seat, a second valve seat, and a third valve seat. The diaphragm is sandwiched between the upper housing and the lower housing, and is fixed to the upper housing and the lower housing so that the diaphragm contacts the first valve seat, the second valve seat, and the third valve seat. The diaphragm divides an inner space of the upper housing and the lower housing to define valve chests together with the upper housing and the lower housing.

Abstract: A small-sized, low-profile fluid pump having high pumping capabilities includes an actuator and a planar section including a metal plate. The actuator includes a disk-shaped piezoelectric element attached to a disk-shaped diaphragm. As a result of application of a square-wave or sine-wave drive voltage, the actuator performs a bending vibration from the central portion to the peripheral portion. The peripheral portion of the actuator is not restrained. The actuator performs a bending vibration in the state in which it is in proximity to the planar section while facing the planar section. A center vent is provided at or in an area adjacent to the center of an actuator facing area of the planar section that faces the actuator.

Abstract: A piezoelectric micro-blower includes a blower chamber located between a blower body and a vibrating plate, a first wall portion of the blower body arranged to face the vibrating plate across the blower chamber so as to vibrate with vibrations of the vibrating plate, a first opening in the first wall portion, a second wall portion on the opposite side of the first wall portion with respect to the blower chamber, a second opening in a portion of the second wall portion which faces the first opening, and an inflow passage located between the first wall portion and the second wall portion. Each of the first and second openings includes a plurality of holes, and each hole of the first opening and each hole of the second opening are arranged to face each other. Thus, noise is significantly reduced while the flow characteristic is maintained.

Abstract: A piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. The micro-blower has a blower body with a first wall and a second wall. Openings are formed in the respective walls and face a center of a diaphragm. An inflow path allowing the openings to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element to cause the diaphragm to vibrate, a part of the first wall close to the first opening vibrates. Thus, gas can be drawn from the inflow path and discharged from the opening in the second wall.

Abstract: In a method for adjusting a fluid control apparatus, in a pressing step, a piezoelectric pump is placed on a stage with a cover plate facing upward, the stage is moved up, and a center portion of a principal surface of the cover plate on a side opposite to a diaphragm is pressed with a pressing pin. As a result, the cover plate and the base plate are shaped so as to warp convexly toward the diaphragm side, and a portion joined to a flexible plate is pulled, such that the flexible plate is caused to warp convexly toward the diaphragm side. Thus, residual tensile stress occurs in a movable portion of the flexible plate. Therefore, due to the residual tensile stress, the tensile stress of the movable portion of the flexible plate is increased.

Abstract: A piezoelectric pump includes a leaf spring including a disc portion defining an actuator, an outer frame portion defining a housing, and an elastic support portion. The actuator flexurally vibrates from a center portion of a principal surface thereof to an outer periphery thereof. The elastic support portion includes a beam portion and connection portions and elastically supports the disc portion on the outer frame portion. The beam portion extends in a gap between the disc portion and the outer frame portion in a direction along an outer periphery of the disc portion. A first of the connection portions connects the beam portion to the disc portion. Second and third connection portions are offset from the first connection portion and connect the beam portion to the outer frame portion.

Abstract: A fluid supply device includes a fluid supply source, a valve, a differential-pressure generator, and a pressurizing device. The valve includes a casing, a displacement member that divides an inside of the casing into a first valve chamber and a second valve chamber, the displacement member being displaced by a pressure of a fluid being exerted on a front main surface and a back main surface of the displacement member, a first opening provided in the first valve chamber, a second opening provided in the first valve chamber, and a third opening provided in the second valve chamber. Thus, flow rate fluctuations are reduced even when the pressure on the ejection side or the suction side of the device fluctuates due to changes in atmospheric conditions.

Abstract: An overturn prevention control device for a two-wheel vehicle having a vehicle body, a front wheel, an actuator that steers the front wheel, a rear wheel, and a rear-wheel driving portion, includes an angular velocity sensor and a control unit arranged to output a steering angle command signal for controlling the actuator. The angular velocity sensor includes a detection axis, is mounted on the vehicle body such that the detection axis is downwardly inclined at a predetermined angle relative to a forward direction of the vehicle body, and detects an angular velocity about the detection axis. The angular velocity detected by the angular velocity sensor includes an angular velocity in a lateral direction of inclination and an angular velocity in an azimuthal direction. The zero-set error and offset noise are incorporated into the azimuth angle command. Thus, the two-wheel vehicle can be prevented from overturning.

Abstract: A piezoelectric micropump in which a pump chamber is isolated by a diaphragm. A piezoelectric element is disposed on a back surface of the diaphragm, and the diaphragm is deformed by bending deformation of the piezoelectric element to change the volume of the pump chamber and transport fluid in the pump chamber. A support member for supporting a back surface of the piezoelectric element is provided so that the support member inhibits bending of a peripheral portion of the diaphragm in a reverse direction. The support member thus prevents the piezoelectric element from being floated. Accordingly, the displacement of the piezoelectric element can be reliably transmitted as the change in volume of the pump chamber, thereby enhancing the fluid transportation performance.

Abstract: A piezoelectric micro-blower includes a blower chamber located between a blower body and a vibrating plate, a first wall portion of the blower body arranged to face the vibrating plate across the blower chamber so as to vibrate with vibrations of the vibrating plate, a first opening in the first wall portion, a second wall portion on the opposite side of the first wall portion with respect to the blower chamber, a second opening in a portion of the second wall portion which faces the first opening, and an inflow passage located between the first wall portion and the second wall portion. Each of the first and second openings includes a plurality of holes, and each hole of the first opening and each hole of the second opening are arranged to face each other. Thus, noise is significantly reduced while the flow characteristic is maintained.