Abstract: This invention relates to a semiconductor device with embedded capacitor elements of which capacitor insulation layer is made of ferroelectric layer or dielectric layer of high dielectric constant, and its manufacturing method. This invention is made in order to solve the problems of rapid increase of leak current of capacitor element and the poor reliability caused by the large deviation of crystal sizes of conventional capacitor insulation layer of capacitor element incorporated in the semiconductor device.

Abstract: A semi conductor device forming a capacitor through an interlayer insulating layer on a semiconductor substrate on which an integrated circuit is formed. This semiconductor device has an interlayer insulating layer with moisture content of 0.5 g/cm.sup.3 or less, which covers the capacitor in one aspect, and has a passivation layer with hydrogen content of 10.sup.21 atoms/cm.sup.3 or less, which covers the interconnections of the capacitor in other aspect. By thus constituting, deterioration of the capacitor dielectric can be prevented which brings about the electrical reliability of the ferroelectric layer or high dielectric layer.

Abstract: An air conditioner for a vehicle has a heat pump type refrigerant circuit capable of operating at least in a heating mode. The air conditioner comprises a motor fan for supplying air heated by a heat exchanger to the interior of the vehicle during operation of the heating mode, a sensor for detecting the temperature of the air at a position downstream of the heat exchanger and a control unit for controlling the volume of the air supplied by the motor fan to a predetermined minimum volume by controlling the drive of the motor fan when the detected air temperature is lower than a predetermined temperature. Even in a condition where a sufficiently large heat radiation from the heat exchanger cannot be expected, a large volume of cold air that has been insufficiently heated can be prevented from being discharged into the interior of the vehicle.

Abstract: In an automobile air-conditioner comprising a compressor with variable discharge capacity for compressing a refrigerant, an outlet temperature sensor for sensing an outlet temperature at an outlet of at least one of a heat sink and a radiator, a room temperature sensor for sensing a room temperature inside the automobile, an outside air temperature sensor for sensing an outside air temperature outside the automobile, and a room temperature setting unit for setting the room temperature to a desired temperature, a first arithmetic operating unit carries out an arithmetic operation according to at least the room temperature, the outside air temperature, and the desired temperature, to obtain a target temperature. A second arithmetic operating unit predicts the rotation speed of the compressor with a predetermined feed-forward arithmetic expression to obtain a predicted rotation speed.

Abstract: A semiconductor device comprising an integrated circuit and a capacitor. In this capacitor, a bottom electrode, a dielectric film and a top electrode are formed, independently of the integrated circuit, on the interlayer insulating film, and the top electrode and bottom electrode are connected with metal interconnections through contact holes opened in the protective film for protecting the surface of the capacitor. In this constitution, either the top electrode or the bottom electrode is connected the bias line of the integrated circuit, and the other is connected to the ground line, so that extraneous emission may be reduced without having to connect the capacitor outside.

Abstract: A semiconductor device comprising: (a) a semiconductor substrate on whose surface an integrated circuit is formed, (b) a first insulating layer formed on the semiconductor device and having first contact holes which lead to the integrated circuit, (c) a capacitance element formed on the first insulating layer, (d) a second insulating layer formed on the first insulating layer to cover the capacitance element, and having second contact holes which lead to an upper and a lower electrodes of the capacitance element respectively, and (e) interconnections which are connected to the integrated circuit and the capacitance element respectively through the first and second contact holes. The hydrogen density of this semiconductor device is 10.sup.11 atoms/cm.sup.2 or less.

Abstract: An air conditioner for vehicles includes a refrigerant circuit having a compressor capable of varying its output, a heat sink and a radiator disposed in an air duct for cooling operation, heating operation and dehumidifying operation modes; sensors for detecting air temperatures at the output-side positions of the heat sink and the radiator, respectively; and a control unit for controlling the output of the compressor in response to at least one of the detected air temperatures. The heat absorbing action due to the heat sink and the heat radiating action due to the radiator are appropriately controlled in the refrigerant circuit side in the respective operation modes without unnecessary heat absorbing and heat radiating actions. Further, the temperature of the air discharged from the air duct into the interior of the vehicle can be properly controlled by adjustment of the heat absorbing ability of the heat sink and the heat radiating ability of the radiator by the control of the compressor output.

Abstract: A semiconductor device comprises silicon substrate 1 on which an integrated circuit is formed, first insulating layer 6 formed on silicon substrate 1, a capacitor comprising lower electrode 7 formed on first insulating layer 6, dielectric film 8 having a high dielectric constant and upper electrode 9, a second insulating film 11 having contact holes 13 which lead to lower electrode 7 and upper electrode 9 independently, diffusion barrier layer 17 which touches lower electrode 7 and upper electrode 9 at the bottom of contact holes 13, and interconnection layer 15 formed on diffusion barrier layer 17. In diffusion barrier layer 17 at the bottom of contact hole 13, a lamellar region made of granular crystal is formed.

Abstract: A semiconductor device forming a capacitor through an interlayer insulating layer on a semiconductor substrate on which an integrated circuit is formed. This semiconductor device has an interlayer insulating layer with moisture content of 0.5 g/cm.sup.3 or less, which covers the capacitor in one aspect, and has a passivation layer with hydrogen content of 10.sup.21 atoms/cm.sup.3 or less, which covers the interconnections of the capacitor in other aspect. By thus constituting, deterioration of the capacitor dielectric can be prevented which brings about the electrical reliability of the ferroelectric layer or high dielectric layer.

Abstract: An automotive air conditioning system comprises a heat pump type refrigerant circuit charged with a first refrigerant and includes first and second internal heat exchangers disposed within an air conditioning duct and an external heat exchanger located outside the duct. A plurality of electromagnetic valves are selectively operated so that in one operational state the external heat exchanger performs as an evaporator and the second internal heat exchanger performs as a condenser, and such that in another operational state the external heat exchanger and the first internal heat exchanger perform as evaporators and the second internal heat exchanger performs as a condenser. A first pressure equalizing type expansion valve mechanism associated with the external heat exchanger has a P-T characteristic curve wherein a static superheat curve intersects with a saturated first refrigerant vapor curve when the temperature of the first refrigerant immediately upstream of the external heat exchanger is in a low range.

Abstract: An air conditioner for vehicles that prevents icing and lack of visibility from developing on window glass of a vehicle during heating, and which permits a dehumidifying operation to be made without lowering of the air blowing temperature. The air conditioner is of a heat pump type comprising a compressor, an exterior heat exchanger, and a first interior heat exchanger, which are provided together with a second interior heat exchanger used as a heat radiator at least during heating. Further, piping lines are provided for introducing a refrigerant gas for passage through the second interior heat exchanger to the exterior heat exchanger through an expansion means, and for introducing the refrigerant gas for passage through the second interior heat exchanger to the first interior heat exchanger through a first expansion means.

Abstract: A manufacturing method of a semiconductor device comprises the steps:(a) forming a ferroelectric capacitor on a semiconductor substrate on which a MOS transistor is formed, (b) forming an interlayer insulating film which covers the whole semiconductor substrate, (c) forming first contact holes which reach diffusion layers of the MOS transistor, (d) after forming the first contact holes, providing a heat treatment in hydrogen atmosphere, (e) after the heat treatment, forming second contact holes which reach upper and lower electrodes of the ferroelectric capacitor on the interlayer insulating film, and (f) forming metal interconnection. Since the heat treatment in hydrogen atmosphere is provided before forming the second contact holes, a surface state density at interface between the semiconductor and a gate insulating film of the MOS transistor can be lowered without degrading the characteristics of ferroelectric capacitor.

Abstract: An air conditioner for vehicles includes a damper for switching among an outside-air inlet mode, an inside-air inlet mode and an outside/inside-air inlet mode, a manual switch for selecting any one of the respective inlet modes, an automatic switch for automatically selecting one of the respective inlet modes, a heating and cooling operation unit, an inside-air temperature sensor, an outside-air temperature sensor and a control unit for selectively controlling the respective inlet modes based on the condition of the heating and cooling operation unit, the condition of the respective switches and the difference between the temperatures detected by the respective temperature sensors. In the air conditioner, an optimum air conditioning in correspondence to the load required for air conditioning can be realized from the viewpoint of saving of energy and efficient operation.

Abstract: An external heat exchanger of a heat pump air-conditioner on an electric vehicle is determined as being frosted based on signals from temperature sensors. If the external heat exchanger is frosted, then a frosting flag is set and the air-conditioner is operated in a cooling mode to radiate heat from the external heat exchanger for thereby defrosting the external heat exchanger while the air-conditioner is in a pre-air-conditioning mode before the driver enters the electric vehicle or while the battery on the electric vehicle is being charged. While the battery is being charged, the external heat exchanger is defrosted by the electric energy supplied from an external power supply to charge the battery.

Abstract: The present invention is directed to a control apparatus for use in an automotive air conditioning system which includes a variable capacity-type refrigerant compressor. The automotive air conditioning system comprises a refrigerant circuit including a refrigerant compressor with an externally controlled, variable capacity control mechanism; an evaporator connected to a suction chamber of the compressor; and a control apparatus which controls refrigerant circuit operation. The control apparatus includes an adjusting device for adjusting a control point of the compressor suction chamber pressure. During operation of the automotive air conditioning system, the control point of the compressor suction chamber pressure is adjusted to effectively maintain the temperature of air immediately downstream from the evaporator at the set temperature.

Abstract: The present invention is directed to a control apparatus for use in an automotive air conditioning system which includes a variable capacity type refrigerant compressor. The automotive air conditioning system comprises a refrigerant circuit including a refrigerant compressor with an externally controlled variable capacity control mechanism and an evaporator connected to a suction chamber of the compressor, and a control apparatus which controls operation thereof. The control apparatus includes an adjusting device for adjusting a pressure control point in the compressor suction chamber. At the time operation of the refrigerant circuit is initiated, the pressure control point of the compressor suction chamber is adjusted to a predetermined constant value which is determined by air temperature immediately downstream from the evaporator.

Abstract: A variable capacity type slant plate compressor including a crank chamber a suction chamber and a discharge chamber is disclosed. The crank chamber is linked by a first communication path to the suction chamber, and is linked by a second communication path to the discharge chamber. A first valve control mechanism is disposed within the first communication path. A second valve control mechanism is disposed within the second communication path. The first valve control mechanism controls the opening and closing of the first communication path so that the suction chamber pressure is maintained at a predetermined constant value. The second communication path is compulsorily opened by operation of the second valve control mechanism in response to an external signal so as to compulsorily minimize the capacity of the compressor.

Abstract: An automotive air conditioning system includes a compressor with a variable displacement mechanism, a condenser, a decompression device and an evaporator serially arranged to form a closed refrigerant circulation path. A conduit connects an outer side of the compressor to an intermediate portion of a fluid conduit passing through the condenser. A pressure adjusting mechanism is disposed in the bypass conduit to adjust the pressure of refrigerant in the condenser. The pressure adjustment mechanism permits the automotive air conditioning system, which includes a compressor with a variable displacement mechanism, to maintain the amount of refrigerant circulated in the system at a desired level under small, as well as large, air conditioning loads.

Abstract: The present invention relates to an agent for preventing and treating thrombocytopenia which comprises, an an active ingredient, a muramyldipeptide derivative of the formula: ##STR1## wherein X represents an amino acid residue selected from L-alanine, L-serine and L-valine, Y represents ##STR2## wherein R.sub.1 represents a carboxyl group, n represents an integer of 1 to 6, A represents a saturated aliphatic hydrocarbon group having 7 to 29 carbon atoms which may have branched chains, and Acyl represents an acyl group having 2 to 6 carbon atoms, and the agent exhibits excellent preventing and treating effects on thrombocytopenia when administered orally or parenterally.

Abstract: This invention relates to a water-in-oil type emulsion explosive comprising an aqueous oxidizer solution, an oily material, an emulsifier and hollow microspheres, in which the whole or a part of the oily material is replaced with a polymer which is oil-soluble and has a ladder structure in the molecule.