Abstract: An electron beam inspection apparatus includes a stage to mount a substrate to be inspected thereon and to be continuously movable, an electron beam column, while the stage continuously moves, to scan the substrate by irradiating the substrate with multi-beams composed of a plurality of first electron beams in a plurality of beam rows, in each of which corresponding beams of the plurality of first electron beams are arranged at a same pitch in a straight line, such that the center of each of irradiation regions irradiated with the multi-beams does not overlap with the other irradiation regions in a movement direction of the stage, and a detector to detect a secondary electron emitted from the substrate due to irradiation of the multi-beams on the substrate.

Abstract: In the separation roller, an entire area of a circumferential surface of the separation roller facing the sending roller is exposed to come in direct contact with the banknote, moving from the storage unit, on the storage unit side with respect to a contact portion which is in contact with the sending roller, both end portions in an axial direction of the separation roller are formed of a material having a friction coefficient smaller than that of a central portion thereof, and the diameter of the both end portions is the same as the diameter of the central portion.

Abstract: A conduit control device includes a cylinder member, a piston member, an attachment section including a rigid cylinder, a compression spring, a first elastic member being brought into contact with a contact surface of the rigid cylinder and elastically deformed to thereby seal a gap in a state in which the piston member is depressed via the button section, and a second elastic member brought into contact with an exterior member and elastically deformed to thereby seal a gap in a state in which the piston member is depressed via the button section.

Abstract: A check valve unit includes a low-strength part and a high-strength part which are provided in the side of a head part of the check valve unit moving and have strength levels which differ from each other. The low-strength part and high-strength part are arranged alternately in circumferential directions of the check valve unit.

Abstract: A paper sheet handling apparatus includes: a paper sheet insertion unit into which a plurality of paper sheets are inserted; a first plate provided at the paper sheet insertion unit; a second plate provided at the paper sheet insertion unit and that holds the plurality of paper sheets in a sandwiching manner with the first plate; a pressure distribution sensing sheet provided to at least one of the first or second plate and that senses a pressure distribution on the plurality of paper sheets held by the first and second plates; and a controlling unit that determines the presence/absence of a foreign body according to the pressure distribution sensed by the pressure distribution sensing sheet.

Abstract: Provided is a film forming apparatus for forming a film on a substrate maintained within a film forming container by supplying a raw material gas to the substrate. The film forming container includes a substrate maintaining unit, a supply mechanism configured to include a supply pipe with supply holes formed thereon to supply a raw material gas to the interior of the film forming container through the supply holes, an exhaust mechanism configured to include an exhaust pipe with exhaust holes formed thereon to exhaust gas from the interior of the film forming container through the exhaust holes, and a controller configured to control the substrate maintaining unit, the supply mechanism, and the exhaust mechanism. The supply holes and the exhaust holes are formed to face each other with the substrate maintained in the substrate maintaining unit interposed therebetween.

Abstract: A paper sheet handling apparatus includes: a paper sheet insertion unit into which a plurality of paper sheets are inserted; a first plate provided at the paper sheet insertion unit; a second plate provided at the paper sheet insertion unit and that holds the plurality of paper sheets in a sandwiching manner with the first plate; a pressure distribution sensing sheet provided to at least one of the first or second plate and that senses a pressure distribution on the plurality of paper sheets held by the first and second plates; and a controlling unit that determines the presence/absence of a foreign body according to the pressure distribution sensed by the pressure distribution sensing sheet.

Abstract: Provided is a method of selectively etching a portion of silicon existing on a surface of a substrate to be processed, which includes: loading the substrate to be processed into a chamber; and supplying an FNO gas and an F2 gas that are diluted with an inert gas into the chamber such that the FNO gas and the F2 gas are reacted with the portion of silicon existing on the surface of the substrate to be processed.

Abstract: Provided is a method of selectively etching a portion of silicon existing on a surface of a substrate to be processed, which includes: loading the substrate to be processed into a chamber; and supplying an FNO gas and an F2 gas that are diluted with an inert gas into the chamber such that the FNO gas and the F2 gas are reacted with the portion of silicon existing on the surface of the substrate to be processed.

Abstract: A check valve unit includes a low-strength part and a high-strength part which are provided in the side of a head part of the check valve unit moving and have strength levels which differ from each other. The low-strength part and high-strength part are arranged alternately in circumferential directions of the check valve unit.

Abstract: Provided is a raw material gas supply device which includes: a raw material container; a carrier gas supply unit configured to supply a carrier gas into the container via a carrier gas flow path; a first flow rate measurement unit configured to measure a flow rate of the carrier gas flowing therethrough and output the same as a first flow rate measurement value; a raw material gas supply path configured to supply a raw material gas containing a vaporized raw material into a film forming apparatus; a second flow rate measurement unit configured to measure a flow rate of the raw material gas flowing therethrough and output the same as a second flow rate measurement value; and a flow rate calculation unit configured to calculate a difference between the first and second flow rate measurement values and to convert the difference into a vaporization flow rate of the raw material.

Abstract: A housing is provided with a partition wall portion that partitions an inner space of the housing into an electric motor accommodating space and a speed reducer accommodating space. The partition wall portion fixes a gear that constitutes a speed reducer. In addition, the partition wall portion has a housing boss portion, and an inner stator is fixed to the housing boss portion. Thus, heat generated by the inner stator is dissipated to the outside through the housing boss portion and the partition wall portion.

Abstract: A speed change gear includes: an internal gear member; an eccentric member; an oscillating member; a pair of first and second rotating members; and a pin that is supported at both ends by insertion holes of the first and second rotating members. The insertion hole and the insertion hole have the same diameter. The outside diameter of the other side end portion of the pin is smaller than the outside diameter of one side end portion of the pin such that the one side end portion is press-fitted in the corresponding insertion hole and the other side end portion is supported by the corresponding insertion hole.

Abstract: An easily structured swing internal contact type planetary gear device is proposed which can achieve a higher meshing ratio when an involute tooth profile is adapted. Each of an internal tooth of an internally toothed gear wheel and an external tooth of an externally toothed gear wheel is formed with an involute tooth profile. Under a driving condition, one of an internal tooth body of the internally toothed gear wheel and an external tooth body of the externally toothed gear wheel is elastically deformed in an extending direction and the other thereof is elastically deformed in a contracting direction so that the number of meshing teeth becomes larger than the number of meshing teeth under a non-driving condition.

Abstract: A film deposition apparatus includes a film deposition chamber into which a substrate is carried, a heating mechanism that heats the substrate carried into the film deposition chamber, an adhesion accelerating agent feed mechanism that feeds an adhesion accelerating agent gas into the film deposition chamber, and a control part that controls the heating mechanism and the adhesion accelerating agent feed mechanism. When depositing a polyimide film on the substrate by feeding a first source gas formed of dianhydride and a second source gas formed of diamine into the film deposition chamber, the control part is configured to control the adhesion accelerating agent feed mechanism to treat a surface of the substrate with the adhesion accelerating agent gas by feeding the adhesion accelerating agent gas into the film deposition chamber until the substrate is heated to a predetermined temperature for depositing the polyimide film.

Abstract: An easily structured swing internal contact type planetary gear device is proposed which can achieve a higher meshing ratio when an involute tooth profile is adapted. Each of an internal tooth of an internally toothed gear wheel and an external tooth of an externally toothed gear wheel is formed with an involute tooth profile. Under a driving condition, one of an internal tooth body of the internally toothed gear wheel and an external tooth body of the externally toothed gear wheel is elastically deformed in an extending direction and the other thereof is elastically deformed in a contracting direction so that the number of meshing teeth becomes larger than the number of meshing teeth under a non-driving condition.

Abstract: The present invention provides mobile terminals with various types of services such as electronic commerce service, music delivery service, and position information service. User applications required for the electronic commerce service, music delivery service, and position information service are respectively configured as service objects each having a server facility, and further a local gateway is provided, whereby various types of services can be used through a browser.

Abstract: The present invention provides mobile terminals with various types of services such as electronic commerce service, music delivery service, and position information service. User applications required for the electronic commerce service, music delivery service, and position information service are respectively configured as service objects each having a server facility, and further a local gateway is provided, whereby various types of services can be used through a browser.

Abstract: Provided is a film forming apparatus for forming a film on a substrate maintained within a film forming container by supplying a raw material gas to the substrate. The film forming container includes a substrate maintaining unit, a supply mechanism configured to include a supply pipe with supply holes formed thereon to supply a raw material gas to the interior of the film forming container through the supply holes, an exhaust mechanism configured to include an exhaust pipe with exhaust holes formed thereon to exhaust gas from the interior of the film forming container through the exhaust holes, and a controller configured to control the substrate maintaining unit, the supply mechanism, and the exhaust mechanism. The supply holes and the exhaust holes are formed to face each other with the substrate maintained in the substrate maintaining unit interposed therebetween.

Abstract: The present invention provides mobile terminals with various types of services such as electronic commerce service, music delivery service, and position information service. User applications required for the electronic commerce service, music delivery service, and position information service are respectively configured as service objects each having a server facility, and further a local gateway is provided, whereby various types of services can be used through a browser.