Abstract: A semiconductor device with a connection pad in a substrate, the connection pad having an exposed surface made of a metallic material that diffuses less readily into a dielectric layer than does a metal of a wiring layer connected thereto.

Abstract: The wavelength-selective polarization conversion element includes a plurality of polarization splitting surfaces each of which separates entering light into two polarized light components having polarization directions different from each other, a plurality of phase plates that causes a polarization direction of one polarized light component in the two polarized light components from the polarization splitting surfaces to coincide with a polarization direction of the other polarized light component. The element further includes a plurality of dichroic surfaces that is disposed closer to a light entrance side than the plurality of polarization splitting surfaces or between the plurality of polarization splitting surfaces and the plurality of phase plates, each dichroic surface separating entering light into two wavelength region components different from each other.

Abstract: An optical system for image projection is disclosed which is capable of improving contrast while suppressing reduction of light amount. The optical system includes a converging optical system, and a polarization beam splitting surface transmitting an incoming light flux having a first polarization direction from the converging optical system, to introduce it to the image-forming element and causing light having a second polarization direction, of an outgoing light flux from the image-forming element, to proceed to a projection optical system. In a first cross-section parallel to a normal to the polarization beam splitting surface, the converging optical system has a configuration causing an incident angle on the splitting surface of a light ray passing through a barycenter of intensity distribution of the outgoing light flux to be larger than an incident angle thereon of a light ray passing through a barycenter of intensity distribution of the incoming light flux.

Abstract: An optical system for image projection is disclosed which is easy to be manufactured and designed and capable of projecting a bright image with high contrast. The optical system includes an illumination optical system introducing a luminous flux emitted from a light source to an image-forming element through an optical surface having a light-splitting function, and a projection optical system projecting the luminous flux from the image-forming element through the optical surface onto a projection surface. The illumination optical system includes a conversion system which respectively converts the widths of the luminous flux in first and second cross-sections into widths different from those before entering thereinto. Conversion rates in the first and second cross-sections are different from each other.

Abstract: A semiconductor device with a connection pad in a substrate, the connection pad having an exposed surface made of a metallic material that diffuses less readily into a dielectric layer than does a metal of a wiring layer connected thereto.

Abstract: A post-dry etching cleaning liquid composition for cleaning a substrate after dry etching is provided, the cleaning liquid composition containing at least one type of fluorine compound, glyoxylic acid, at least one type of organic acid salt, and water. With regard to the fluorine compound, ammonium fluoride may be used. With regard to the organic acid salt, at least one of ammonium oxalate, ammonium tartarate, ammonium citrate, and ammonium acetate may be used.

Abstract: After the resist stripping liquid is supplied to the surface of the substrate which is being rotated at a first rotational speed, the rotational speed of the substrate is reduced from the first rotational speed to a second rotational speed with the supply of the resist stripping liquid to the surface of the substrate continued, thereby forming a liquid film by a mount of the resist stripping liquid on the surface of the substrate and then, maintaining a state where the liquid film is formed.

Abstract: An illumination optical system is disclosed which capable of uniformly illuminating a surface to be illuminated. The illumination optical system comprises a polarization conversion element which converts a luminous flux from a light source into a luminous flux having a certain polarization direction, a polarization beam splitter which splits the luminous flux from the polarization conversion element, and a phase plate which gives a phase difference to the luminous flux from the polarization beam splitter. The system illuminates the surface with the luminous flux from the phase plate and satisfies the conditions ?x<?y and 0°<?y<?y. ?x and ?y represent the maximum incident angles onto the surface in the x and y directions, and ?y represents an incident angle onto the phase plate at which the phase difference at a principal wavelength of the luminous flux that passes through the phase plate is 90 degrees.

Abstract: Embodiments in accordance with the present invention relate to a positioning control system of a magnetic disk drive. Even if there is no phase correlation in a specific vibration component before and after a seek operation of a magnetic head, a resonance filter in accordance with an embodiment of the present invention follows the vibration at the frequency at high speed. A frequency showing a periodic disturbance is selected as a target frequency Ft[Hz]. A resonance filter showing a peak gain at a frequency Ft is designed. For an input to the resonance filter, a time-variable gain K(t) is used that varies depending on the time lapsed after the completion of a seek operation. This time-variable gain K(t) takes a value larger than 1 when the resonance filter starts operating, and after the lapse of a fixed length of time, the value becomes 1 by degrees.

Abstract: In a magnetic disk device, oscillation occurring at a frequency higher than Nyquist frequency is suppressed. In one embodiment, a multi-late filter having a resonance point at a frequency higher than the intended Nyquist frequency is introduced in a previous stage of a controlled object. At that time, since a resonance characteristic of the multi-rate filter is aliased by a sampler, the multi-rate filter is designed such that the resonance point after the aliasing is stabilized in phase by a following compensator.

Abstract: A wavelength-selective polarization conversion element is disclosed, which is capable of reducing the number of optical elements in an optical system and simplifying the configuration thereof. The polarization conversion element comprises a beam splitting film which splits light by transmission and reflection and has a characteristic in which at least its transmittance for light with a first polarization direction changes between a transmittance higher than 50% and a transmittance lower than 50% depending on wavelength regions, and a phase plate which converts the polarization direction of light from the beam splitting film between the first polarization direction and a second polarization direction. The polarization conversion element converts light of two of first, second and third wavelength regions into light with one of the first and second polarization directions and converts light of the remaining wavelength region into light with the other polarization direction.

Abstract: The wavelength-selective polarization conversion element includes a plurality of polarization splitting surfaces each of which separates entering light into two polarized light components having polarization directions different from each other, a plurality of phase plates that causes a polarization direction of one polarized light component in the two polarized light components from the polarization splitting surfaces to coincide with a polarization direction of the other polarized light component. The element further includes a plurality of dichroic surfaces that is disposed closer to a light entrance side than the plurality of polarization splitting surfaces or between the plurality of polarization splitting surfaces and the plurality of phase plates, each dichroic surface separating entering light into two wavelength region components different from each other.

Abstract: An image projection apparatus includes a first reflection type liquid crystal display device for modulating and reflecting red light, a second reflection type liquid crystal display device for modulating and reflecting green light, a third reflection type liquid crystal display device for modulating and reflecting blue light, the image projection apparatus projecting colored light made of the red, green and blue lights from the first to third reflection type liquid crystal display devices, a first 1/4 wave plate provided on an optical path of the red light, a second 1/4 wave plate provided on an optical path of the green light, and a third 1/4 wave plate provided on an optical path of the blue light, a direction of a fast axis of the third 1/4 wave plate being different from a direction that minimizes leakage light of the blue light.

Abstract: A post-dry etching cleaning liquid composition for cleaning a substrate after dry etching is provided, the cleaning liquid composition containing at least one type of fluorine compound, glyoxylic acid, at least one type of organic acid salt, and water. With regard to the fluorine compound, ammonium fluoride may be used. With regard to the organic acid salt, at least one of ammonium oxalate, ammonium tartarate, ammonium citrate, and ammonium acetate may be used.

Abstract: In one embodiment, the magnetic disk drive has a magnetic head, an actuator driving the magnetic head, and a control portion controlling a controlled object, including the magnetic head and the actuator, by creating a control signal based on a given target position signal and on a position signal played back by the magnetic head such that the magnetic head reaches a target position.

Abstract: An optical system for image projection is disclosed which is capable of improving contrast while suppressing reduction of light amount. The optical system includes a converging optical system, and a polarization beam splitting surface transmitting an incoming light flux having a first polarization direction from the converging optical system, to introduce it to the image-forming element and causing light having a second polarization direction, of an outgoing light flux from the image-forming element, to proceed to a projection optical system. In a first cross-section parallel to a normal to the polarization beam splitting surface, the converging optical system has a configuration causing an incident angle on the splitting surface of a light ray passing through a barycenter of intensity distribution of the outgoing light flux to be larger than an incident angle thereon of a light ray passing through a barycenter of intensity distribution of the incoming light flux.

Abstract: An optical system for image projection is disclosed which is easy to be manufactured and designed and capable of projecting a bright image with high contrast. The optical system includes an illumination optical system introducing a luminous flux emitted from a light source to an image-forming element through an optical surface having a light-splitting function, and a projection optical system projecting the luminous flux from the image-forming element through the optical surface onto a projection surface. The illumination optical system includes a conversion system which respectively converts the widths of the luminous flux in first and second cross-sections into widths different from those before entering thereinto. Conversion rates in the first and second cross-sections are different from each other.

Abstract: Embodiments in accordance with the present invention relate to a positioning control system of a magnetic disk drive. Even if there is no phase correlation in a specific vibration component before and after a seek operation of a magnetic head, a resonance filter in accordance with an embodiment of the present invention follows the vibration at the frequency at high speed. A frequency showing a periodic disturbance is selected as a target frequency Ft[Hz]. A resonance filter showing a peak gain at a frequency Ft is designed. For an input to the resonance filter, a time-variable gain K(t) is used that varies depending on the time lapsed after the completion of a seek operation. This time-variable gain K(t) takes a value larger than 1 when the resonance filter starts operating, and after the lapse of a fixed length of time, the value becomes 1 by degrees.

Abstract: A polarization splitter includes first and second glass members, and a polarization splitting layer and an adhesive layer arranged between the first and second glass members, wherein the polarization splitter satisfies ?2×E<6000000 and K>0.5, where ? is a coefficient of linear expansion of the first and second glass members (10?7/K), E is a Young's modulus of the first and second glass members (108 N/mm2), and K is a photoelastic constant of the first and second glass members (nm/mm·mm2/N).

Abstract: An image display optical system according to the present invention has an illumination optical system, a plurality of image display elements, a color separation/combination optical system, and a projection optical system. The image display optical system also has a light guide element which reflects illumination light from the illumination optical system with a reflectivity of substantially 100% to guide the reflected light to the color separation/combination optical system and transmits image light from the color separation/combination optical system to the projection optical system. Each optical path of the illumination light and each optical path of the image light are different from each other in the light guide element and the color separation/combination optical system. The projection optical system is an eccentric optical system. With the configuration, the use efficiency of light can be enhanced to obtain bright and high-definition display images.