Abstract: A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

Abstract: A method including removing an impurity from a gas stream to a processing chamber at a point of use. An apparatus with a point of use purifier on a gas stream. An apparatus including a shelf having dimensions suitable for placement within a thermal processing including a body of a material that renders the body opaque to radiation frequency range used for a temperature measurement of a substrate in a thermal processing chamber.

Abstract: A single wafer cleaning chamber that includes a rotatable bracket that can place a wafer beneath an upper end of a catch cup during a wafer cleaning process, a gutter positioned above a wafer transfer slit; where the catch cup can mate with the gutter to create a gap, and with the upper end of the catch cup positioned at a height equal to or higher than the gutter.

Abstract: A wafer transfer cassette of the kind which includes a support frame, a first wafer supporting construction, and a second wafer supporting construction. The support frame includes first and second vertically extending support structures which are horizontally spaced from one another. The first wafer supporting construction includes a first bracket portion and a first fin portion extending from the first bracket portion. The first bracket portion is mounted to the first support structure in a position wherein the first fin portion extends from the first bracket portion towards the second support structure. The second wafer supporting construction includes a second bracket portion and a second fin portion extending from the second bracket portion. The second bracket portion is mounted to the second support structure in a position wherein the second fin portion extends from the second support structure towards the first support structure.

Abstract: Methods and apparatus for enabling repeatable positioning of inspection and other service tools on an inner diameter of a shroud wall between a top guide and core plate in a boiling water nuclear reactor are described. In one embodiment, the delivery system includes a positioning unit configured to attach to a shroud head flange, a strong back assembly, and a rail assembly connected to the strong back assembly. The positioning unit includes a horizontal member having a plurality of slots and circular shaped openings to mate with seismic pins on the shroud head flange, a radial member and a z-axis adjustment assembly. The radial member extends from the horizontal member to the z-axis adjustment assembly. The z-axis adjustment assembly includes a mast coupling and an elongate screw threadedly attached to the coupling so that as the screw rotates, the coupling moves relative to the radial member. The strong back assembly includes a mast and an extension unit.

Abstract: An actuator for performing work in a nuclear reactor is described. In one embodiment, the actuator includes an x-axis linear slide assembly, a y-axis linear slide assembly, and a z-axis linear slide assembly. The x-axis linear slide assembly is mounted to a junction box, the y-axis linear slide assembly is mounted on a carriage of the x-axis assembly, and the z-axis linear slide assembly is mounted on a carriage of the y-axis assembly. The actuator also includes motor assemblies coupled to respective linear slide assemblies. Each motor assembly includes a motor and a resolver sealed in a leakproof can. Pulley-timing belt assemblies couple each motor to a respective lead screw. Specifically, a drive pulley is connected to a rotor shaft of each motor, and a lead screw pulley is secured to an end of each lead screw. Each pulley-timing belt assembly also includes an idler pulley, and a belt extends around the lead screw pulley, the idler pulley, and the drive pulley.