Abstract: A processing method for a package substrate in which a plurality of device chips on a wiring base material are sealed with a sealant includes a through-hole forming step of forming a through-hole in the package substrate so as to have a predetermined positional relation to a scheduled division line and a segmentation step of performing alignment with reference to the through-hole and segmenting the package substrate along the scheduled division line from the sealant side to segment the package substrate into individual packages.

Abstract: A method of manufacturing a packaged device chip includes the steps of forming a rewiring layer having rewiring patterns respectively in a plurality of areas demarcated on the rewiring layer by a projected dicing line on a first surface of a support member that has a second surface opposite the first surface, forming a dividing groove for dividing the rewiring layer in the rewiring layer along the projected dicing line, placing device chips in the respective areas on the rewiring layer and connecting the rewiring patterns and the device chips to each other, covering the device chips and the rewiring layer with molded resin while filling the dividing groove with the molded resin, and cutting the molded resin across an area disposed within the dividing groove and narrower than the dividing groove and forming packaged device chips.

Abstract: A method of processing a workpiece includes sticking an adhesive layer side of a resin sheet having a layered structure that includes an adhesive layer and a base material layer, to an annular frame having an opening in covering relation to the opening, forming surface irregularities on a face side of the base material layer that is opposite the adhesive layer, placing the face side of the workpiece and the face side of the base material layer in facing relation to each other and pressing the workpiece against the resin sheet or pressing the resin sheet against the workpiece, thereby bringing the workpiece into intimate contact with the resin sheet to fix the workpiece to the resin sheet, holding the face side of the workpiece fixed to the resin sheet on a holding surface of a chuck table, and grinding the reverse side of the workpiece with a grinding stone.

Abstract: A method of processing a workpiece includes sticking an adhesive layer side of a resin sheet having a layered structure that includes the adhesive layer and a base material layer, to a support base, forming surface irregularities on a face side of the base material layer that is opposite the adhesive layer; placing a face side of the workpiece and the face side of the base material layer in facing relation to each other and pressing the workpiece against the resin sheet or pressing the resin sheet against the workpiece, thereby bringing the workpiece into intimate contact with the resin sheet to fix the workpiece to the resin sheet; holding a surface of the support base that is opposite the resin sheet on a holding surface of a chuck table, and grinding a reverse side of the workpiece with a grinding stone disposed in facing relation to the holding surface.

Abstract: A workpiece processing method is provided for processing a workpiece including a device region, a peripheral surplus region surrounding the device region, and key patterns being arranged on a top surface side in the peripheral surplus region so as to correspond to a plurality of planned dividing lines, the method including: a resin sheet sticking step of sticking a resin sheet to the top surface side of the workpiece, and transferring the key patterns onto the resin sheet; a peripheral surplus region removing step of dividing the peripheral surplus region from the workpiece, and peeling off the peripheral surplus region from the resin sheet; and a device region processing step of identifying a position of at least one planned dividing line by using, as marks, traces of the key patterns exposed in the peripheral surplus region removing step, and processing the device region along the plurality of planned dividing lines.

Abstract: A manufacturing method of a semiconductor package includes a groove forming step of cutting a semiconductor package substrate from an upper surface side along division lines in a cut-in-depth range of at least such a depth as to cause a ground line included in a wiring substrate to be exposed in a processing groove to such a depth that the semiconductor package substrate is not fully cut with a first cutting blade, thereby forming the processing groove having a first width at least on an upper surface of a sealing material, a shielding layer forming step of forming a shielding layer on a side surface of the processing groove, a bottom surface of the processing groove, and the upper surface of the sealing material with a conductive material from an upper side of the sealing material, and a dividing step of, cutting the semiconductor package substrate into individual semiconductor packages.

Abstract: There is provided a processing method for a package substrate having a plurality of division lines formed on the front side. The processing method includes the steps of holding the back side of the package substrate by using a holding tape and fully cutting the package substrate along the division lines to such a depth corresponding to the middle of the thickness of the holding tape by using a profile grinding tool, thereby dividing the package substrate into individual semiconductor packages. The profile grinding tool has a plurality of projections for cutting the package substrate respectively along the plural division lines. Each projection has an inclined side surface.

Abstract: A semiconductor package has a semiconductor chip on a wiring board, sealed with a sealant. A semiconductor package substrate is formed with V grooves along division lines from a resin layer side by use of a V blade. The wiring board is divided along the V grooves into individual semiconductor packages, while forming an inclined surface and a vertical surface at each package side surface. A shield layer is formed on the package upper surface and the package side surfaces. In this instance, the aspect ratio at the vertical surface side of the package interval is controlled, whereby an appropriate shield layer is formed on the package upper surface and the package inclined surfaces, thereby securing a shielding effect, and the shield layer is formed in a thin form on the package vertical surfaces and on the groove bottom between the packages, thereby restraining generation of burs.

Abstract: A processing method for dividing a plate-shaped workpiece into a plurality of individual packages along a plurality of crossing division lines, in which the workpiece has terminals on the back side, includes the steps of attaching a protective member to the back side of the workpiece so as to cover the terminals to thereby unite the protective member with the workpiece, dividing the workpiece with the protective member along each division line to obtain the individual packages in a condition where the protective member is attached to each package, forming a conductive shield layer on the outer surface of each package, and peeling the protective member from each package.

Abstract: Disclosed herein is a method of manufacturing a semiconductor package including a semiconductor chip sealed by a sealing synthetic resin. The method includes preparing a wiring board in which upstanding encircling walls with side-surface shield layers embedded therein surround mounts on which semiconductor chips are to be mounted, mounting the semiconductor chips on the mounts surrounded by the upstanding encircling walls on the wiring board, supplying a sealing synthetic resin to spaces surrounded by the upstanding encircling walls thereby to produce an sealed board, dividing the sealed board along projected dicing lines into individual semiconductor packages, and forming an upper-surface shield layer for blocking electromagnetic waves on the semiconductor packages.

Abstract: A semiconductor package manufacturing method includes the steps of bonding a plurality of semiconductor chips to the front side of a wiring substrate, next supplying a sealing compound to the front side of the wiring substrate to thereby form a sealing layer from the sealing compound on the front side of the wiring substrate, thereby forming a package substrate, next holding the package substrate on a holding tape, next cutting the front side of the resin layer by using a profile grinding tool to thereby form a plurality of ridges and grooves on the front side of the resin layer, thereby increasing the surface area of the front side of the resin layer, and next dividing the package substrate along each division line to obtain a plurality of individual semiconductor packages.

Abstract: A processing method for a package substrate in which a plurality of device chips on a wiring base material are sealed with a sealant includes a through-hole forming step of forming a through-hole in the package substrate so as to have a predetermined positional relation to a scheduled division line and a segmentation step of performing alignment with reference to the through-hole and segmenting the package substrate along the scheduled division line from the sealant side to segment the package substrate into individual packages.

Abstract: A multi blade that processes semiconductor packages into a desired shape while dividing a package substrate includes plural cutting blades that divide the package substrate into the individual semiconductor packages and a spacer provided between two cutting blades adjacent to each other, and is configured in such a manner that the cutting blades and the spacer have the same rotation axis center. The outer surface of the spacer is formed into a transfer shape of the semiconductor package and is covered by an abrasive grain layer, and the upper surface of the package substrate is ground by the outer surface of the spacer simultaneously with cutting of the package substrate by the plural cutting blades.

Abstract: There is provided a manufacturing method of a semiconductor package in which plural semiconductor chips different in the thickness are mounted. In the manufacturing method, the back surface of a package board in which the plural semiconductor chips on a wiring base are collectively sealed by a sealant is held by a holding tape and a resin layer is thinned by a shaping abrasive stone. Then, a dividing unit is caused to cut to the middle of the holding tape along planned dividing lines to divide the package board into individual semiconductor packages.

Abstract: A package substrate processing method for processing a package substrate in which a plurality of semiconductor chips on a wiring substrate are collectively sealed with a sealing agent is provided. In the package substrate processing method, a protective tape is adhered to the wiring substrate side of the package substrate, the package substrate is divided into a plurality of semiconductor packages, and a shield layer is formed on an upper surface and side surfaces of each package. In this instance, the package substrate is divided in a state in which adhesiveness of an adhesive layer of the protective tape in the periphery of the package substrate is reduced or eliminated, whereby adhesion of a metallic powder scattering at the time of the dividing to the adhesive layer of the protective tape is restrained.

Abstract: A multi blade that processes semiconductor packages into a desired shape while dividing a package substrate includes plural cutting blades that divide the package substrate into the individual semiconductor packages and a spacer provided between two cutting blades adjacent to each other, and is configured in such a manner that the cutting blades and the spacer have the same rotation axis center. The outer surface of the spacer is formed into a transfer shape of the semiconductor package and is covered by an abrasive grain layer, and the upper surface of the package substrate is ground by the outer surface of the spacer simultaneously with cutting of the package substrate by the plural cutting blades.

Abstract: A plurality of semiconductor packages are manufactured by a method that includes the steps of bonding a plurality of semiconductor chips on the front side of a wiring substrate, next supplying a sealing compound to the front side of the wiring substrate to form a resin layer from the sealing component on the front side of the wiring substrate, thereby forming a sealed substrate including the wiring substrate and the resin layer covering the semiconductor chips, next cutting the sealed substrate from the resin layer side by using a V blade to thereby form a V groove along each division line, next dividing the wiring substrate along each V groove to obtain a plurality of individual bare packages, and finally forming an electromagnetic shield layer on the upper surface and an inclined side surface of each bare package, thereby obtaining the plural semiconductor packages.

Abstract: Disclosed herein is a semiconductor package including a redistribution layer and a semiconductor chip connected to the redistribution layer, the semiconductor chip being sealed with a resin layer, the redistribution layer including a ground line exposed to the side surface of the redistribution layer. The semiconductor package includes a contact metal formed on the side surface of the redistribution layer so as to cover the ground line and a shield layer formed on the upper surface and the side surface of the semiconductor package so as to cover the contact metal. The shield layer is connected through the contact metal to the ground line exposed to the side surface of the redistribution layer.

Abstract: There is provided a processing method for a package substrate having a plurality of division lines formed on the front side. The processing method includes the steps of holding the back side of the package substrate by using a holding tape and fully cutting the package substrate along the division lines to such a depth corresponding to the middle of the thickness of the holding tape by using a profile grinding tool, thereby dividing the package substrate into individual semiconductor packages. The profile grinding tool has a plurality of projections for cutting the package substrate respectively along the plural division lines. Each projection has an inclined side surface.

Abstract: There is provided a manufacturing method of a semiconductor package in which plural semiconductor chips different in the thickness are mounted. In the manufacturing method, the back surface of a package board in which the plural semiconductor chips on a wiring base are collectively sealed by a sealant is held by a holding tape and a resin layer is thinned by a shaping abrasive stone. Then, a dividing unit is caused to cut to the middle of the holding tape along planned dividing lines to divide the package board into individual semiconductor packages.