Abstract: Disclosed are an apparatus for distributing power of an electric vehicle and a method thereof capable of optimally improving the energy consumption efficiency of the electric vehicle by predicting a vehicle speed for a predetermined time using a learned vehicle speed prediction model, determining wheel power based on the vehicle speed, and distributing the wheel power to a front wheel drive motor and a rear wheel drive motor. The apparatus includes a storage that stores a vehicle speed prediction model in which learning is completed, and a controller that predicts a vehicle speed for a preset time using the vehicle speed prediction model, determines wheel power based on the vehicle speed, and distributes the wheel power to a front wheel drive motor and a rear wheel drive motor.

Abstract: Proposed is a method of controlling an autonomous driving system. Root learning data is generated by performing learning for raw data. A plurality of first layer learning data is generated by performing learning, to which driving environment variables of an autonomous vehicle are applied, for the root learning data. The root learning data is updated from the plurality of first layer learning data depending on whether or not an integration condition of the plurality of first layer learning data is met.

Abstract: A method for managing NFT-based driver data for an autonomous vehicle includes: receiving driver data including driver’s driving information, traveling information and environment information transmitted from the autonomous vehicle; determining whether an autonomous driving algorithm applied to the autonomous vehicle is improvable based on the driver data; improving the autonomous driving algorithm based on the driver data based on a determination result; generating NFT data corresponding to the driver data as the autonomous driving algorithm is improved; and registering the NFT data in an NFT market for an autonomous vehicle.

Abstract: The apparatus for securely updating the binary data in the vehicle includes a plurality of nodes that transmit/receive block data to/from each other through a wireless network. Each of the plurality of nodes includes a data reception unit that receives block data from another node, a data verification unit that compares the block data received from the another node with previously stored block data, a data correction unit that deletes the block data, or combines the block data with the previously stored block data and encrypts the combined block data to generate corrected block data, a data storage unit that stores the corrected block data, and a data transmission unit that transmits the corrected block data to another node.

Abstract: Disclosed are an autonomous driving apparatus and method for an ego vehicle that autonomously travels. The autonomous driving apparatus includes a first sensor to detect a nearby vehicle nearby an ego vehicle, a memory to store map information, and a processor including a driving trajectory generator to generate a first driving trajectory of the ego vehicle and a second driving trajectory of the nearby vehicle based on the map information stored in the memory and a control processor configured to control autonomous driving of the ego vehicle based on the first and second driving trajectories generated by the driving trajectory generator.

Abstract: In an autonomous driving apparatus and method, the apparatus includes a sensor unit, an output unit, a memory, and a processor configured to control the autonomous driving of an ego vehicle based on a map information stored in the memory. The processor generates an actual driving trajectory and an expected driving trajectory of a surrounding vehicle around the ego vehicle based on driving information of the surrounding vehicle detected by the sensor unit and the map information and controls one or more of the driving of the ego vehicle and provides communication with an external organization, based on a state of a passenger detected by the sensor unit when an autonomous driving mode of the ego vehicle is turned off, and based on an autonomous driving risk of the ego vehicle determined based on a trajectory error between the actual driving trajectory and expected driving trajectory of the surrounding vehicle.

Abstract: A method of manufacturing an integrated circuit (IC) device includes forming a photoresist layer on a substrate, and exposing the photoresist layer to light by using a photolithographic apparatus including a light generator. The light generator includes a chamber having a plasma generation space, an optical element in the chamber, and a debris shielding assembly between the optical element and the plasma generation space in the chamber, and the debris shielding assembly includes a protective film facing the optical element and being spaced apart from the optical element with a protective space therebetween, the protective space including an optical path, and a protective frame to support the protective film and to shield the protective space from the plasma generation space.

Abstract: Disclosed are an apparatus and method for displaying a rear image of a vehicle. The apparatus for displaying a rear image of a vehicle includes a rear camera configured to capture a rear image of the vehicle, a steering angle sensor configured to sense a steering angle of a steering wheel, a display unit, and an image processing unit configured to convert the rear image captured by the rear camera when the vehicle moves backward into an image in a direction where the vehicle is to move backward according to the steering angle of the steering wheel that is sensed by the steering angle sensor, and display the converted image in the direction where the vehicle is to move backward through the display unit.

Abstract: An autonomous driving apparatus and method for an ego vehicle that autonomously travels includes a first sensor to detect a vehicle nearby the ego vehicle, a memory to store map information, and a processor to control autonomous driving of the ego vehicle based on the nearby vehicle detected by the first sensor and the map information stored in the memory.

Abstract: An autonomous driving apparatus and method, in which the apparatus includes a sensor unit detecting a surrounding vehicle around an ego vehicle that autonomously travels, an output unit, a memory storing map information, and a processor controlling the autonomous driving of the ego vehicle based on the map information. The processor is configured to generate an actual driving trajectory and expected driving trajectory of the surrounding vehicle based on driving information of the surrounding vehicle detected by the sensor unit and the map information, determine whether a driving mode of the surrounding vehicle is an autonomous driving mode and an autonomous driving risk of the ego vehicle based on a trajectory error between the actual driving trajectory and expected driving trajectory of the surrounding vehicle, and output a warning to a passenger through the output unit at a level corresponding to the determined autonomous driving risk.

Abstract: A method of manufacturing an integrated circuit (IC) device includes forming a photoresist layer on a substrate, and exposing the photoresist layer to light by using a photolithographic apparatus including a light generator. The light generator includes a chamber having a plasma generation space, an optical element in the chamber, and a debris shielding assembly between the optical element and the plasma generation space in the chamber, and the debris shielding assembly includes a protective film facing the optical element and being spaced apart from the optical element with a protective space therebetween, the protective space including an optical path, and a protective frame to support the protective film and to shield the protective space from the plasma generation space.

Abstract: A method of manufacturing an integrated circuit (IC) device includes forming a photoresist layer on a substrate, and exposing the photoresist layer to light by using a photolithographic apparatus including a light generator. The light generator includes a chamber having a plasma generation space, an optical element in the chamber, and a debris shielding assembly between the optical element and the plasma generation space in the chamber, and the debris shielding assembly includes a protective film facing the optical element and being spaced apart from the optical element with a protective space therebetween, the protective space including an optical path, and a protective frame to support the protective film and to shield the protective space from the plasma generation space.

Abstract: Disclosed are an autonomous driving apparatus and method for an ego vehicle that autonomously travels. The autonomous driving apparatus includes a first sensor to detect a nearby vehicle nearby an ego vehicle, a memory to store map information, and a processor including a driving trajectory generator to generate a first driving trajectory of the ego vehicle and a second driving trajectory of the nearby vehicle based on the map information stored in the memory and a control processor configured to control autonomous driving of the ego vehicle based on the first and second driving trajectories generated by the driving trajectory generator.

Abstract: Provided are a method and an apparatus for inspecting an extreme ultraviolet (EUV) mask at a high speed with high optical efficiency, and a method of manufacturing the EUV mask, wherein the method of inspecting the EUV mask is included in the method of manufacturing the EUV mask. The apparatus for inspecting the EUV mask includes a light source configured to generate and output light, a linear zone plate configured to convert the light from the light source to light having a linear form, a slit plate configured to output the light having the linear form by removing a higher-order diffracted light component from the light having the linear form, a stage on which the EUV mask is located, and a detector configured to detect the light reflected from the EUV mask, in response to the light being irradiated onto and reflected from the EUV mask.

Abstract: In an autonomous driving apparatus and method, the apparatus includes a sensor unit, an output unit, a memory, and a processor configured to control the autonomous driving of an ego vehicle based on a map information stored in the memory. The processor generates an actual driving trajectory and an expected driving trajectory of a surrounding vehicle around the ego vehicle based on driving information of the surrounding vehicle detected by the sensor unit and the map information and controls one or more of the driving of the ego vehicle and provides communication with an external organization, based on a state of a passenger detected by the sensor unit when an autonomous driving mode of the ego vehicle is turned off, and based on an autonomous driving risk of the ego vehicle determined based on a trajectory error between the actual driving trajectory and expected driving trajectory of the surrounding vehicle.

Abstract: An autonomous driving apparatus and method, in which the apparatus includes a sensor unit detecting a surrounding vehicle around an ego vehicle that autonomously travels, an output unit, a memory storing map information, and a processor controlling the autonomous driving of the ego vehicle based on the map information. The processor is configured to generate an actual driving trajectory and expected driving trajectory of the surrounding vehicle based on driving information of the surrounding vehicle detected by the sensor unit and the map information, determine whether a driving mode of the surrounding vehicle is an autonomous driving mode and an autonomous driving risk of the ego vehicle based on a trajectory error between the actual driving trajectory and expected driving trajectory of the surrounding vehicle, and output a warning to a passenger through the output unit at a level corresponding to the determined autonomous driving risk.

Abstract: An autonomous driving apparatus and method, in which the autonomous driving apparatus may include a sensor unit configured to detect a surrounding vehicle around an ego vehicle that autonomously travels and a state of a driver who has got in the ego vehicle, a driving information detector configured to detect driving information on a driving state of the ego vehicle, a memory configured to store map information, and a processor configured to control autonomous driving of the ego vehicle based on the map information stored in the memory.

Abstract: The apparatus for securely updating the binary data in the vehicle includes a plurality of nodes that transmit/receive block data to/from each other through a wireless network. Each of the plurality of nodes includes a data reception unit that receives block data from another node, a data verification unit that compares the block data received from the another node with previously stored block data, a data correction unit that deletes the block data, or combines the block data with the previously stored block data and encrypts the combined block data to generate corrected block data, a data storage unit that stores the corrected block data, and a data transmission unit that transmits the corrected block data to another node.

Abstract: An extreme ultraviolet (EUV) generation device includes a housing module including a housing body whose inside is maintained in a vacuum state and an exit window formed on one side of the housing body, a laser source which emits lasers toward the inside of the housing body through the exit window, a plasma generation module which is located inside the housing body and generates plasma by allowing the lasers to be emitted toward a plasma gas, which flows into a laser focal area, and a radio frequency (RF) power supply module which preionizes the plasma gas before the plasma gas flows into the laser focal area.

Abstract: A wafer inspection apparatus includes a linear stage configured to support a chuck on which a wafer is disposed and to move the chuck along a guide rail, wherein the guide rail extends in a first direction, an image sensor module overlapping the linear stage, and a rotary stage supported by the linear stage. The rotary stage is configured to rotate the chuck in a state where a center of the wafer is aligned with the image sensor module. The image sensor module includes a light source directing light onto the wafer, and an image sensor extending in a second direction crossing the first direction.