Patents by Inventor Carsten Von Koblinski

Carsten Von Koblinski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230411336
    Abstract: A semiconductor wafer includes: a first main surface and a second main surface opposite the first main surface; a detachment plane parallel to the first main surface inside the semiconductor wafer, the detachment plane defined by defects; electronic semiconductor components formed at the first main surface and between the first main surface and the detachment plane; and a glass structure attached to the first main surface. The glass structure includes openings, each of which leaves a respective area of the electronic semiconductor components uncovered. A method of processing the wafer, a clip, and a semiconductor device are also described.
    Type: Application
    Filed: August 3, 2023
    Publication date: December 21, 2023
    Inventors: Carsten von Koblinski, Daniel Pedone, Matteo Piccin, Roland Rupp, Chiew Li Tai, Jia Yi Wong
  • Patent number: 11848237
    Abstract: An electronic component includes a semiconductor device including a semiconductor die including a first surface, the first surface including a first metallization structure and edge regions surrounding the first metallization structure, a second surface opposing the first surface and including a second metallization structure, and side faces extending between the first surface and the second surface, wherein the edge regions of the first surface and portions of the side faces are covered by a first polymer layer, wherein the electronic component further includes a plurality of leads and a plastic housing composition, wherein the first metallization structure is coupled to a first lead and the second metallization structure is coupled to a second lead of the plurality of leads.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: December 19, 2023
    Assignee: Infineon Technologies AG
    Inventors: Paul Ganitzer, Carsten von Koblinski, Thomas Feil, Gerald Lackner, Jochen Mueller, Martin Poelzl, Tobias Polster
  • Patent number: 11756917
    Abstract: A method for processing a semiconductor wafer is provided. A semiconductor wafer includes a first main surface and a second main surface. Defects are generated inside the semiconductor wafer to define a detachment plane parallel to the first main surface. Processing the first main surface defines a plurality of electronic semiconductor components. A glass structure is provided which includes a plurality of openings. The glass structure is attached to the processed first main surface, each of the plurality of openings leaving a respective area of the plurality of electronic semiconductor components uncovered. A polymer layer is applied to the second main surface and the semiconductor wafer is split into a semiconductor slice and a remaining semiconductor wafer by cooling the polymer layer beneath its glass transition temperature along the detachment plane. The semiconductor slice includes the plurality of electronic semiconductor components.
    Type: Grant
    Filed: March 16, 2021
    Date of Patent: September 12, 2023
    Assignee: Infineon Technologies Austria AG
    Inventors: Carsten von Koblinski, Daniel Pedone, Matteo Piccin, Roland Rupp, Chiew Li Tai, Jia Yi Wong
  • Publication number: 20230187381
    Abstract: A method of manufacturing a semiconductor device includes: forming grooves in a front side surface of a wafer; filling the grooves with a first side face protection material; thinning the wafer at a backside surface of the wafer opposite the front side surface; depositing a backside metallization layer over the backside surface of the thinned wafer; and laser cutting along the grooves through the side face protection material and through the backside metallization layer to separate the wafer into multiple semiconductor devices.
    Type: Application
    Filed: February 6, 2023
    Publication date: June 15, 2023
    Inventors: Christian Gruber, Benjamin Bernard, Tobias Polster, Carsten von Koblinski
  • Patent number: 11605599
    Abstract: A semiconductor device includes a semiconductor die having a front side surface, a backside surface opposite the front side surface and side faces. A backside metallization layer is deposited over the backside surface and projects laterally outwards beyond the side faces. A side face protection layer covers the side faces.
    Type: Grant
    Filed: October 15, 2020
    Date of Patent: March 14, 2023
    Assignee: Infineon Technologies AG
    Inventors: Christian Gruber, Benjamin Bernard, Tobias Polster, Carsten von Koblinski
  • Patent number: 11527468
    Abstract: A connection body which comprises a base structure at least predominantly made of a semiconductor oxide material or glass material, and an electrically conductive wiring structure on and/or in the base structure, wherein the electrically conductive wiring structure comprises at least one vertical wiring section with a first lateral dimension on and/or in the base structure and at least one lateral wiring section connected with the at least one vertical wiring section, wherein the at least one lateral wiring section has a second lateral dimension on and/or in the base structure, which is different to the first lateral dimension.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: December 13, 2022
    Assignee: Infineon Technologies AG
    Inventors: Andreas Riegler, Christian Fachmann, Matteo-Alessandro Kutschak, Carsten von Koblinski, Hans Weber
  • Publication number: 20220293558
    Abstract: A method for forming semiconductor devices includes: attaching a glass structure to a wide band-gap semiconductor wafer having a plurality of semiconductor devices; forming at least one pad structure electrically connected to at least one doping region of a semiconductor substrate of the wide band-gap semiconductor wafer, by forming electrically conductive material within at least one opening extending through the glass structure; and reducing a thickness of the wide band-gap semiconductor wafer after attaching the glass structure. Additional methods for forming semiconductor devices are described.
    Type: Application
    Filed: June 1, 2022
    Publication date: September 15, 2022
    Inventors: Roland Rupp, Alexander Breymesser, Andre Brockmeier, Carsten von Koblinski, Francisco Javier Santos Rodriguez, Ronny Kern
  • Publication number: 20220246745
    Abstract: A silicon carbide device includes a semiconductor substrate comprising a body region and transistor cell that comprises a source region, and a titanium carbide field electrode of the transistor cell, wherein the titanium carbide field electrode is connected to a reference voltage metallization structure or connectable to the reference voltage metallization structure by a switching device, wherein the reference voltage metallization is connected to a fixed voltage that is independent from a gate voltage of the transistor cell.
    Type: Application
    Filed: April 22, 2022
    Publication date: August 4, 2022
    Inventors: Ralf Siemieniec, Thomas Aichinger, Iris Moder, Francisco Javier Santos Rodriguez, Hans-Joachim Schulze, Carsten von Koblinski
  • Patent number: 11393784
    Abstract: A method for forming semiconductor devices includes attaching a glass structure to a wide band-gap semiconductor wafer having a plurality of semiconductor devices. The method further includes forming at least one pad structure electrically connected to at least one doping region of a semiconductor substrate of the wide band-gap semiconductor wafer, by forming electrically conductive material within at least one opening extending through the glass structure.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: July 19, 2022
    Assignee: Infineon Technologies AG
    Inventors: Roland Rupp, Alexander Breymesser, Andre Brockmeier, Carsten von Koblinski, Francisco Javier Santos Rodriguez, Ronny Kern
  • Publication number: 20220181211
    Abstract: An electronic component includes a semiconductor device including a semiconductor die including a first surface, the first surface including a first metallization structure and edge regions surrounding the first metallization structure, a second surface opposing the first surface and including a second metallization structure, and side faces extending between the first surface and the second surface, wherein the edge regions of the first surface and portions of the side faces are covered by a first polymer layer, wherein the electronic component further includes a plurality of leads and a plastic housing composition, wherein the first metallization structure is coupled to a first lead and the second metallization structure is coupled to a second lead of the plurality of leads.
    Type: Application
    Filed: February 23, 2022
    Publication date: June 9, 2022
    Inventors: Paul Ganitzer, Carsten von Koblinski, Thomas Feil, Gerald Lackner, Jochen Mueller, Martin Poelzl, Tobias Polster
  • Patent number: 11342433
    Abstract: A silicon carbide device includes a silicon carbide substrate having a body region and a source region of a transistor cell. Further, the silicon carbide device includes a titanium carbide gate electrode of the transistor cell.
    Type: Grant
    Filed: November 25, 2019
    Date of Patent: May 24, 2022
    Assignee: Infineon Technologies AG
    Inventors: Ralf Siemieniec, Thomas Aichinger, Iris Moder, Francisco Javier Santos Rodriguez, Hans-Joachim Schulze, Carsten von Koblinski
  • Patent number: 11322400
    Abstract: A method of manufacturing a semiconductor wafer having a roughened metallization layer surface is described. The method includes immersing the semiconductor wafer in an electrolytic bath. Gas bubbles are generated in the electrolytic bath. A surface of a metallization layer on the semiconductor wafer is electrochemically roughened in the presence of the gas bubbles by applying a reversing voltage between the metallization layer and an electrode of the electrolytic bath.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: May 3, 2022
    Assignee: Infineon Technologies AG
    Inventors: Carsten von Koblinski, Tobias Polster
  • Patent number: 11302579
    Abstract: In an embodiment, a composite semiconductor substrate includes a first polymer layer and a plurality of semiconductor dies having a first surface, a second surface opposing the first surface, side faces extending between the first surface and the second surface and a first metallization structure on the first surface. Edge regions of the first surface and at least portions of the side faces are embedded in the first polymer layer. At least one metallic region of the first metallization structure is exposed from the first polymer layer. A second metallization structure is arranged on the second surface of the plurality of semiconductor dies. A second polymer layer is arranged on edge regions of the second surface of the plurality of semiconductor dies and on the first polymer layer in regions between the side faces of neighbouring ones of the plurality of semiconductor dies.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: April 12, 2022
    Assignee: Infineon Technologies AG
    Inventors: Paul Ganitzer, Carsten von Koblinski, Thomas Feil, Gerald Lackner, Jochen Mueller, Martin Poelzl, Tobias Polster
  • Publication number: 20220033249
    Abstract: The semiconductor device includes a microelectromechanical system (MEMS) chip having a first main surface and a second main surface situated opposite the first main surface, a first glass-based substrate, on which the MEMS chip is arranged by its first main surface, and a second substrate, which is arranged on the second main surface of the MEMS chip, wherein the MEMS chip has a first recess connected to the surroundings by way of a plurality of perforation holes arranged in the first substrate.
    Type: Application
    Filed: July 15, 2021
    Publication date: February 3, 2022
    Applicant: Infineon Technologies AG
    Inventors: Andre BROCKMEIER, Barbara Angela GLANZER, Marten OLDSEN, Francesco SOLAZZI, Carsten VON KOBLINSKI
  • Publication number: 20210335739
    Abstract: In an embodiment, a semiconductor package includes a first transistor device having first and second opposing surfaces, a first power electrode and a control electrode arranged on the first surface and a second power electrode arranged on the second surface. A first metallization structure arranged on the first surface includes a plurality of outer contact pads which includes a protective layer of solder, Ag or Sn. A second metallization structure is arranged on the second surface. A conductive connection extending from the first surface to the second surface electrically connects the second power electrode to an outer contact pad of the first metallization structure. A first epoxy layer arranged on side faces and on the first surface of the transistor device includes openings which define a lateral size of the plurality of outer contact pads and a package footprint.
    Type: Application
    Filed: July 7, 2021
    Publication date: October 28, 2021
    Inventors: Thomas Feil, Danny Clavette, Paul Ganitzer, Martin Poelzl, Carsten von Koblinski
  • Patent number: 11148943
    Abstract: A semiconductor element is formed in a mesa portion of a semiconductor substrate. A cavity is formed in a working surface of the semiconductor substrate. The semiconductor substrate is brought in contact with a glass piece made of a glass material and having a protrusion. The glass piece and the semiconductor substrate are arranged such that the protrusion extends into the cavity. The glass piece is bonded to the semiconductor substrate. The glass piece is in-situ bonded to the semiconductor substrate by pressing the glass piece against the semiconductor substrate. During the pressing a temperature of the glass piece exceeds a glass transition temperature and the temperature and a force exerted on the glass piece are controlled to fluidify the glass material and after re-solidifying the protrusion completely fills the cavity.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: October 19, 2021
    Assignee: Infineon Technologies AG
    Inventors: Alexander Breymesser, Andre Brockmeier, Carsten von Koblinski, Francisco Javier Santos Rodriguez
  • Publication number: 20210305198
    Abstract: A method for processing a semiconductor wafer is provided. A semiconductor wafer includes a first main surface and a second main surface. Defects are generated inside the semiconductor wafer to define a detachment plane parallel to the first main surface. Processing the first main surface defines a plurality of electronic semiconductor components. A glass structure is provided which includes a plurality of openings. The glass structure is attached to the processed first main surface, each of the plurality of openings leaving a respective area of the plurality of electronic semiconductor components uncovered. A polymer layer is applied to the second main surface and the semiconductor wafer is split into a semiconductor slice and a remaining semiconductor wafer by cooling the polymer layer beneath its glass transition temperature along the detachment plane. The semiconductor slice includes the plurality of electronic semiconductor components.
    Type: Application
    Filed: March 16, 2021
    Publication date: September 30, 2021
    Inventors: Carsten von Koblinski, Daniel Pedone, Matteo Piccin, Roland Rupp, Chiew Li Tai, Jia Yi Wong
  • Patent number: 11081457
    Abstract: In an embodiment, a semiconductor package includes a first transistor device having first and second opposing surfaces, a first power electrode and a control electrode arranged on the first surface and a second power electrode arranged on the second surface. A first metallization structure arranged on the first surface includes a plurality of outer contact pads which includes a protective layer of solder, Ag or Sn. A second metallization structure is arranged on the second surface. A conductive connection extending from the first surface to the second surface electrically connects the second power electrode to an outer contact pad of the first metallization structure. A first epoxy layer arranged on side faces and on the first surface of the transistor device includes openings which define a lateral size of the plurality of outer contact pads and a package footprint.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: August 3, 2021
    Assignee: Infineon Technologies Austria AG
    Inventors: Thomas Feil, Danny Clavette, Paul Ganitzer, Martin Poelzl, Carsten von Koblinski
  • Patent number: 11069639
    Abstract: In an embodiment, a module includes a first electronic device in a first device region and a second electronic device in a second device region. The first electronic device is operably coupled to the second electronic device to form a circuit. Side faces of the first electronic device and of the second electronic device are embedded in, and in direct contact with, a first epoxy layer.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: July 20, 2021
    Assignee: Infineon Technologies Austria AG
    Inventors: Thomas Feil, Danny Clavette, Carsten von Koblinski
  • Publication number: 20210143108
    Abstract: A semiconductor device includes a semiconductor die having a front side surface, a backside surface opposite the front side surface and side faces. A backside metallization layer is deposited over the backside surface and projects laterally outwards beyond the side faces. A side face protection layer covers the side faces.
    Type: Application
    Filed: October 15, 2020
    Publication date: May 13, 2021
    Inventors: Christian Gruber, Benjamin Bernard, Tobias Polster, Carsten von Koblinski