Patents by Inventor Cha Deok Dong
Cha Deok Dong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230301116Abstract: According to one embodiment, a magnetic: memory device includes a stacked structure in which a magnetoresistance effect element and a switching element are stacked. The switching element is provided on a lower layer side of the magnetoresistance effect element, and when viewed in a stacking direction of the magnetoresistance effect element and the switching element, a pattern of the switching element is located inside a pattern of the magnetoresistance effect element.Type: ApplicationFiled: September 12, 2022Publication date: September 21, 2023Applicants: Kioxia Corporation, SK hynix Inc.Inventors: Kenichi YOSHINO, Kazuya SAWADA, Naoki AKIYAMA, Takuya SHIMANO, Cha Deok DONG, Keorock CHOI, Bokyung JUNG, Gukcheon KIM
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Publication number: 20230171967Abstract: A semiconductor device may include: a memory cell disposed over a substrate and including a variable resistance layer and a selector layer; a protection layer disposed on side surfaces of the memory cell and an upper surface of the substrate on which the memory cell is not disposed; and a first encapsulation layer disposed on the memory cell and the protection layer, wherein the protection layer may include a treated surface that is modified by a material including helium.Type: ApplicationFiled: September 6, 2022Publication date: June 1, 2023Inventors: Cha Deok DONG, Keo Rock CHOI, Guk Cheon KIM
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Publication number: 20230142183Abstract: A method for fabricating a semiconductor device including a plurality of memory cells. The method includes: forming a first electrode layer; forming an initial Si-containing layer over the first electrode layer; performing a radical oxidation process to covert a first portion of the initial Si-containing layer into an oxide layer including silicon dioxide (SiO2) and form a Si-containing layer under the oxide layer by using a second portion of the initial Si-containing layer; and incorporating a dopant into the oxide layer by an ion implantation process to form a selector pattern.Type: ApplicationFiled: August 18, 2022Publication date: May 11, 2023Inventors: Cha Deok DONG, Keo Rock CHOI, Guk Cheon KIM
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Patent number: 10777742Abstract: Methods, systems, and devices are disclosed for implementing semiconductor memory using variable resistance elements for storing data. In one aspect, an electronic device is provided to comprise a semiconductor memory unit including: a substrate; an interlayer dielectric layer disposed over the substrate; and a variable resistance element including a seed layer formed over the interlayer dielectric layer, a first magnetic layer formed over the seed layer, a tunnel barrier layer formed over the first magnetic layer, and a second magnetic layer formed over the tunnel barrier layer, wherein the seed layer includes a conductive material having a metallic property and an oxygen content of 1% to approximately 10%.Type: GrantFiled: November 25, 2019Date of Patent: September 15, 2020Assignee: SK hynix Inc.Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim
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Publication number: 20200098984Abstract: Methods, systems, and devices are disclosed for implementing semiconductor memory using variable resistance elements for storing data. In one aspect, an electronic device is provided to comprise a semiconductor memory unit including: a substrate; an interlayer dielectric layer disposed over the substrate; and a variable resistance element including a seed layer formed over the interlayer dielectric layer, a first magnetic layer formed over the seed layer, a tunnel barrier layer formed over the first magnetic layer, and a second magnetic layer formed over the tunnel barrier layer, wherein the seed layer includes a conductive material having a metallic property and an oxygen content of 1% to approximately 10%.Type: ApplicationFiled: November 25, 2019Publication date: March 26, 2020Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim
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Patent number: 10490741Abstract: Methods, systems, and devices are disclosed for implementing semiconductor memory using variable resistance elements for storing data. In one aspect, an electronic device is provided to comprise a semiconductor memory unit including: a substrate; an interlayer dielectric layer disposed over the substrate; and a variable resistance element including a seed layer formed over the interlayer dielectric layer, a first magnetic layer formed over the seed layer, a tunnel barrier layer formed over the first magnetic layer, and a second magnetic layer formed over the tunnel barrier layer, wherein the seed layer includes a conductive material having a metallic property and an oxygen content of 1% to approximately 10%.Type: GrantFiled: November 16, 2016Date of Patent: November 26, 2019Assignee: SK hynix Inc.Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim
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Patent number: 10305030Abstract: Electronic devices and systems having semiconductor memory are provided. In one implementation, for example, an electronic device may include a substrate; an under layer disposed over the substrate and including conductive hafnium silicate; a free layer disposed over the under layer and having a variable magnetization direction; a tunnel barrier layer disposed over the free layer; and a pinned layer disposed over the tunnel barrier layer and having a pinned magnetization direction, and wherein the free layer includes: a first ferromagnetic material; a second ferromagnetic material having a coercive force smaller than that of the first ferromagnetic material; and an amorphous spacer interposed between the first ferromagnetic material and the second ferromagnetic material.Type: GrantFiled: January 8, 2018Date of Patent: May 28, 2019Assignee: SK hynix Inc.Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim, Jeong-Myeong Kim
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Patent number: 10120799Abstract: An electronic device is provided to include a semiconductor memory that includes: a substrate including a first region and a second region different from the first region; an interlayer dielectric layer formed over the substrate; a first conductive pattern located over the first region and formed in the interlayer dielectric layer, the first conductive pattern including a planarized top surface with a top surface of the interlayer dielectric layer; a second conductive pattern located over the second region and formed in the interlayer dielectric layer, the second conductive pattern including at least a portion recessed below a top surface of the interlayer dielectric layer; a variable resistance pattern formed over the interlayer dielectric layer the variable resistance pattern having a bottom surface coupled to the first conductive pattern and exhibiting different resistance values; and a capping layer pattern formed over the variable resistance pattern.Type: GrantFiled: August 11, 2017Date of Patent: November 6, 2018Assignee: SK hynix Inc.Inventors: Cha-Deok Dong, Ki-Seon Park, Bo-Mi Lee, Won-Joon Choi, Guk-Cheon Kim, Yang-Kon Kim
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Publication number: 20180130945Abstract: Electronic devices and systems having semiconductor memory are provided. In one implementation, for example, an electronic device may include a substrate; an under layer disposed over the substrate and including conductive hafnium silicate; a free layer disposed over the under layer and having a variable magnetization direction; a tunnel barrier layer disposed over the free layer; and a pinned layer disposed over the tunnel barrier layer and having a pinned magnetization direction, and wherein the free layer includes: a first ferromagnetic material; a second ferromagnetic material having a coercive force smaller than that of the first ferromagnetic material; and an amorphous spacer interposed between the first ferromagnetic material and the second ferromagnetic material.Type: ApplicationFiled: January 8, 2018Publication date: May 10, 2018Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim, Jeong-Myeong Kim
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Patent number: 9947859Abstract: An electronic device that includes a first structure including a first magnetic layer, a second magnetic layer, and a tunnel barrier layer which is interposed between the first magnetic layer and the second magnetic layer; and a second structure disposed over the first structure, and including a magnetic correction layer for correcting a magnetic field of the first structure, wherein a width of a bottom surface of the second structure is larger than a width of a top surface of the first structure.Type: GrantFiled: December 3, 2014Date of Patent: April 17, 2018Assignees: SK Hynix Inc., TOSHIBA MEMORY CORPORATIONInventors: Cha-Deok Dong, Daisuke Watanabe, Kazuya Sawada, Young-Min Eeh, Koji Ueda, Toshihiko Nagase
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Patent number: 9865806Abstract: Electronic devices and systems having semiconductor memory are provided. In one implementation, for example, an electronic device may include a substrate; an under layer disposed over the substrate and including conductive hafnium silicate; a free layer disposed over the under layer and having a variable magnetization direction; a tunnel barrier layer disposed over the free layer; and a pinned layer disposed over the tunnel barrier layer and having a pinned magnetization direction, and wherein the free layer includes: a first ferromagnetic material; a second ferromagnetic material having a coercive force smaller than that of the first ferromagnetic material; and an amorphous spacer interposed between the first ferromagnetic material and the second ferromagnetic material.Type: GrantFiled: November 17, 2016Date of Patent: January 9, 2018Assignee: SK hynix Inc.Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim, Jeong-Myeong Kim
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Publication number: 20170344476Abstract: An electronic device is provided to include a semiconductor memory that includes: a substrate including a first region and a second region different from the first region; an interlayer dielectric layer formed over the substrate; a first conductive pattern located over the first region and formed in the interlayer dielectric layer, the first conductive pattern including a planarized top surface with a top surface of the interlayer dielectric layer; a second conductive pattern located over the second region and formed in the interlayer dielectric layer, the second conductive pattern including at least a portion recessed below a top surface of the interlayer dielectric layer; a variable resistance pattern formed over the interlayer dielectric layer the variable resistance pattern having a bottom surface coupled to the first conductive pattern and exhibiting different resistance values; and a capping layer pattern formed over the variable resistance pattern.Type: ApplicationFiled: August 11, 2017Publication date: November 30, 2017Inventors: Cha-Deok Dong, Ki-Seon Park, Bo-Mi Lee, Won-Joon Choi, Guk-Cheon Kim, Yang-Kon Kim
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Patent number: 9780297Abstract: An electronic device includes a semiconductor memory, wherein the semiconductor memory includes: a variable resistance element having a stacked structure of a first magnetic layer, a tunnel barrier layer, and a second magnetic layer; and a protection layer including a pillar-shaped magnetic compensation layer and a non-magnetic layer, which are formed on the sidewall of the variable resistance element.Type: GrantFiled: July 28, 2014Date of Patent: October 3, 2017Assignee: SK hynix Inc.Inventors: Bo-Mi Lee, Cha-Deok Dong
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Patent number: 9747964Abstract: Electronic devices have a semiconductor memory unit including a magnetization compensation layer in a contact plug. One implementation of the semiconductor memory unit includes a variable resistance element having a stacked structure of a first magnetic layer, a tunnel barrier layer, and a second magnetic layer, and a contact plug arranged in at least one side of the variable resistance element and comprising a magnetization compensation layer. Another implementation includes a variable resistance element having a stacked structure of a first magnetic layer having a variable magnetization, a tunnel barrier layer, and a second magnetic layer having a pinned magnetization; and a contact plug arranged at one side of and separated from the variable resistance element to include a magnetization compensation layer that produces a magnetic field to reduce an influence of a magnetic field of the second magnetic layer on the first magnetic layer.Type: GrantFiled: August 8, 2016Date of Patent: August 29, 2017Assignee: SK hynix Inc.Inventor: Cha-Deok Dong
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Patent number: 9734060Abstract: An electronic device is provided to include a semiconductor memory that includes: a substrate including a first region and a second region different from the first region; an interlayer dielectric layer formed over the substrate; a first conductive pattern located over the first region and formed in the interlayer dielectric layer, the first conductive pattern including a planarized top surface with a top surface of the interlayer dielectric layer; a second conductive pattern located over the second region and formed in the interlayer dielectric layer, the second conductive pattern including at least a portion recessed below a top surface of the interlayer dielectric layer; a variable resistance pattern formed over the interlayer dielectric layer the variable resistance pattern having a bottom surface coupled to the first conductive pattern and exhibiting different resistance values; and a capping layer pattern formed over the variable resistance pattern.Type: GrantFiled: July 1, 2015Date of Patent: August 15, 2017Assignee: SK hynix Inc.Inventors: Cha-Deok Dong, Ki-Seon Park, Bo-Mi Lee, Won-Joon Choi, Guk-Cheon Kim, Yang-Kon Kim
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Publication number: 20170069837Abstract: Electronic devices and systems having semiconductor memory are provided. In one implementation, for example, an electronic device may include a substrate; an under layer disposed over the substrate and including conductive hafnium silicate; a free layer disposed over the under layer and having a variable magnetization direction; a tunnel barrier layer disposed over the free layer; and a pinned layer disposed over the tunnel barrier layer and having a pinned magnetization direction, and wherein the free layer includes: a first ferromagnetic material; a second ferromagnetic material having a coercive force smaller than that of the first ferromagnetic material; and an amorphous spacer interposed between the first ferromagnetic material and the second ferromagnetic material.Type: ApplicationFiled: November 17, 2016Publication date: March 9, 2017Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim, Jeong-Myeong Kim
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Publication number: 20170062712Abstract: Methods, systems, and devices are disclosed for implementing semiconductor memory using variable resistance elements for storing data. In one aspect, an electronic device is provided to comprise a semiconductor memory unit including: a substrate; an interlayer dielectric layer disposed over the substrate; and a variable resistance element including a seed layer formed over the interlayer dielectric layer, a first magnetic layer formed over the seed layer, a tunnel barrier layer formed over the first magnetic layer, and a second magnetic layer formed over the tunnel barrier layer, wherein the seed layer includes a conductive material having a metallic property and an oxygen content of 1% to approximately 10%.Type: ApplicationFiled: November 16, 2016Publication date: March 2, 2017Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh, Min-Suk Lee, Chan-Sik Park, Jae-Heon Kim, Choi-Dong Kim, Jae-Hong Kim, Yang-Kon Kim, Jong-Koo Lim
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Publication number: 20160351239Abstract: Electronic devices have a semiconductor memory unit including a magnetization compensation layer in a contact plug. One implementation of the semiconductor memory unit includes a variable resistance element having a stacked structure of a first magnetic layer, a tunnel barrier layer, and a second magnetic layer, and a contact plug arranged in at least one side of the variable resistance element and comprising a magnetization compensation layer. Another implementation includes a variable resistance element having a stacked structure of a first magnetic layer having a variable magnetization, a tunnel barrier layer, and a second magnetic layer having a pinned magnetization; and a contact plug arranged at one side of and separated from the variable resistance element to include a magnetization compensation layer that produces a magnetic field to reduce an influence of a magnetic field of the second magnetic layer on the first magnetic layer.Type: ApplicationFiled: August 8, 2016Publication date: December 1, 2016Inventor: Cha-Deok Dong
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Patent number: 9508921Abstract: The disclosed technology provides an electronic device and a fabrication method thereof, in which an etching margin in formation of a variable resistance element is secured and process difficulty is reduced. An electronic device according to an implementation includes a semiconductor memory, the semiconductor memory including: a variable resistance element including a stack of a first magnetic layer, a tunnel barrier layer and a second magnetic layer; a contact plug coupling a top of the variable resistance element and including a magnetism correcting layer; and a conductive line coupled to the variable resistance element through the contact plug including the magnetism correcting layer.Type: GrantFiled: July 28, 2014Date of Patent: November 29, 2016Assignee: SK hynix Inc.Inventors: Cha-Deok Dong, Ki-Seon Park
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Patent number: 9502639Abstract: An electronic device includes a semiconductor memory, wherein the semiconductor memory includes: a seed layer including conductive hafnium silicate; a first magnetic layer formed over the seed layer; a tunnel barrier layer formed over the first magnetic layer; and a second magnetic layer formed over the tunnel barrier layer.Type: GrantFiled: January 17, 2014Date of Patent: November 22, 2016Assignee: SK hynix Inc.Inventors: Won-Joon Choi, Ki-Seon Park, Cha-Deok Dong, Bo-Mi Lee, Guk-Cheon Kim, Seung-Mo Noh