Patents by Inventor Chang-Ming Lin

Chang-Ming Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12059269
    Abstract: A wearable device for measuring a cardiovascular system of a user includes an attachment component, a blood pressure measurement module, and a sensor configured to detect an existence of a limb part of the user. The attachment component is for attaching the wearable device to the limb part of the user and includes a connecting mechanism. A condition of the connecting mechanism can be used to determine whether the attachment component is in a connected configuration or in a disconnected configuration. The blood pressure measurement module has an expander, an actuator, and a blood pressure measurement sensor. The expander can be disposed on the limb part and can contact against the user. The expander can be controlled by the actuator to be inflated, by which the blood pressure measurement sensor can measure blood pressure in the cardiovascular system of the user.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: August 13, 2024
    Assignee: MICROJET TECHNOLOGY CO., LTD.
    Inventors: Hao-Jan Mou, Yung-Lung Han, Chi-Feng Huang, Tsung-I Lin, Chang-Yen Tsai, Wei-Ming Lee
  • Patent number: 12055228
    Abstract: A valve for throttling gas flow from a semiconductor processing tool includes a valve body. A shaft extends through the valve body. The shaft defines an internal cavity and a first opening communicating with the internal cavity. A first deflector is positioned on the shaft proximate the first opening and directed at a first interface between the shaft and the valve body. A method for throttling gas flow from a semiconductor processing tool includes providing a gas in an internal cavity defined in a shaft of a valve and directing the gas through an opening defined in the shaft and communicating with the bore toward an interface between the shaft and a valve body of the valve supporting the shaft.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: August 6, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Sheng-Chun Yang, Po-Chih Huang, Chang Chun, Xuan-Yang Zheng, Tzu-Chuan Chao, Ren-Jyue Wang, Yi-Ming Lin
  • Patent number: 12043537
    Abstract: The present disclosure provides a method of manufacturing a MEMS device. In some embodiments, a first interlayer dielectric layer is formed over a substrate, and a diaphragm is formed over the first interlayer dielectric layer. Then, a second interlayer dielectric layer is formed over the diaphragm. A first etch is performed to form an opening through the second interlayer dielectric layer and the diaphragm and reaching into an upper portion of the first interlayer dielectric layer. A second etch is performed to the first interlayer dielectric layer and the second interlayer dielectric layer to form recesses above and below the diaphragm and to respectively expose a portion of a top surface and a portion of a bottom surface of the diaphragm. A sidewall stopper is formed along a sidewall of the diaphragm into the recesses of the first interlayer dielectric layer and the second interlayer dielectric layer.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: July 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Wei Lin, Chang-Ming Wu, Ting-Jung Chen
  • Publication number: 20210173003
    Abstract: The present disclosure provides a probe apparatus, including a circuit board, a flexible interconnect substrate, at least one probe, and a supporting element. The circuit board includes tester contacts. The flexible interconnect substrate has a first surface and an opposing second surface. The flexible interconnect substrate is electrically coupled to the circuit board. The probe is disposed in the first surface of the flexible interconnect substrate. The probe is electrically coupled to the flexible interconnect substrate, and the probe is configured to electrically contact a device under test. The supporting element is adhered to the second surface of the flexible interconnect substrate. The supporting element is disposed between the flexible interconnect substrate and the circuit board.
    Type: Application
    Filed: December 30, 2019
    Publication date: June 10, 2021
    Inventors: CHANG-MING LIN, Choon Leong LOU
  • Publication number: 20180005002
    Abstract: An ultrasonic fingerprint recognition module and a manufacturing method thereof are provided. The ultrasonic fingerprint recognition module includes a substrate, an ultrasonic transmitter, a thin film transistor and an ultrasonic receiver. The method includes the following steps. In a step (a), the substrate, the ultrasonic transmitter, the thin film transistor and the ultrasonic receiver are provided. In a step (b), the ultrasonic transmitter is attached on a top surface of the substrate, and the ultrasonic transmitter is electrically connected with the substrate. In a step (c), the ultrasonic receiver is attached on the thin film transistor. In a step (d), the thin film transistor is attached on the ultrasonic transmitter. In a step (e), the ultrasonic receiver is electrically connected with the thin film transistor and the thin film transistor is electrically connected with the substrate through wires.
    Type: Application
    Filed: May 17, 2017
    Publication date: January 4, 2018
    Inventor: CHANG-MING LIN
  • Patent number: 9761549
    Abstract: Semiconductor devices and methods are provided. The semiconductor device can include a semiconductor substrate, a plurality of solder pads disposed on the semiconductor substrate, a first insulating layer disposed over the semiconductor substrate, a columnar electrode disposed over the solder pad, and a solder ball disposed on the columnar electrode. The first insulating layer can include a first opening to expose a solder pad of the plurality of solder pads. The columnar electrode can include a bulk material and a through hole in the bulk material. The through hole can expose at least a surface portion of the solder pad. The solder ball can include a convex metal head on a top surface of the bulk material of the columnar electrode, and a filling part filled in the through hole.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: September 12, 2017
    Assignee: TONGFU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Lei Shi, Guo-Hua Gao
  • Patent number: 9620468
    Abstract: Various embodiments provide semiconductor packaging structures and methods for forming the same. In an exemplary method, a chip having a metal interconnect structure thereon can be provided. An insulating layer can be formed on the chip to expose the metal interconnect structure. A columnar electrode can be formed on the metal interconnect structure. A portion of the metal interconnect structure surrounding a bottom of the columnar electrode can be exposed. A diffusion barrier layer can be formed on sidewalls and a top surface of the columnar electrode, and on the exposed portion of the metal interconnect structure surrounding the bottom of the columnar electrode. A solder ball can then be formed on the diffusion barrier layer. The solder ball can wrap at least the sidewalls and the top surface of the columnar electrode.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: April 11, 2017
    Assignee: TONGFU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Yu-Juan Tao
  • Patent number: 9589815
    Abstract: An IC packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a metal pad and an insulating layer and the insulating layer has an opening to expose the meal pad. The method also includes forming an under-the-ball meal electrode on the exposed metal pad. The under-the-ball metal electrode has an electrode body and an electrode tail, the electrode body is located at a bottom portion of the under-the-ball metal electrode and is in contact with the metal pad, and the electrode tail is located at a top portion of the under-the-ball meal electrode. Further, the method includes forming a solder ball on the under-the-ball metal electrode.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: March 7, 2017
    Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Lei Shi, Xiao-Chun Wu
  • Patent number: 9548282
    Abstract: A semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate (300) provided with a plurality of pads (301), columnar electrodes on the pads (301) and a solder ball (321) provided on the columnar electrode. The columnar electrode comprises a main body (307) and a groove in the main body (307), and an opening of the groove is overlapped with the top surface of the columnar electrode. The solder ball (321) comprises a metal bump (320) arranged on the top of the columnar electrode and a filling part (319) filled in the groove. The solder ball and the columnar electrode form a structure similar to a bolt; thus the binding force between the solder ball and the columnar electrode is improved.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: January 17, 2017
    Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Lei Shi, Yujuan Tao
  • Patent number: 9431325
    Abstract: A semiconductor packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a first surface and a second surface, and an electroplating seed layer on the first surface of the semiconductor substrate. The method also includes forming a plurality of columnar electrodes over the electroplating seed layer, where the columnar electrodes include first columnar electrodes and second columnar electrodes. Further, the method includes forming a diffusion barrier layer over the first columnar electrodes and the second columnar electrodes, forming a plurality of first solder balls over the diffusion barrier layer on the first columnar electrodes. The method also includes providing a packaging substrate having solder terminals corresponding to the first solder balls, and mounting the semiconductor substrate onto the packaging substrate in a flipped position, such that the first solder balls are connected with the solder terminals.
    Type: Grant
    Filed: February 3, 2016
    Date of Patent: August 30, 2016
    Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Yu-Juan Tao
  • Patent number: 9379077
    Abstract: A semiconductor device package and packaging method, the semiconductor device packaging method comprising: providing a chip with a bonding pad formed on the chip surface; forming a passivation layer and a bump on the chip surface, wherein the passivation layer has an opening exposing part of the pad, the bump is located in the opening and the size of the bump is less than the size of the opening; forming a solder ball covering the top surface and the side wall of the bump, and the bottom surface of the opening. The formed semiconductor device package is not easy to form a short circuit. The bonding strength between the solder ball and the bump is high and the performance of the semiconductor device is stable.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: June 28, 2016
    Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Lei Shi, Honghui Wang
  • Publication number: 20160155684
    Abstract: A semiconductor packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a first surface and a second surface, and an electroplating seed layer on the first surface of the semiconductor substrate. The method also includes forming a plurality of columnar electrodes over the electroplating seed layer, where the columnar electrodes include first columnar electrodes and second columnar electrodes. Further, the method includes forming a diffusion barrier layer over the first columnar electrodes and the second columnar electrodes, forming a plurality of first solder balls over the diffusion barrier layer on the first columnar electrodes. The method also includes providing a packaging substrate having solder terminals corresponding to the first solder balls, and mounting the semiconductor substrate onto the packaging substrate in a flipped position, such that the first solder balls are connected with the solder terminals.
    Type: Application
    Filed: February 3, 2016
    Publication date: June 2, 2016
    Inventors: CHANG-MING LIN, YU-JUAN TAO
  • Patent number: 9293432
    Abstract: A chip packaging structure and packaging method. The packaging structure comprises: a semiconductor substrate; a metal pad provided inside the semiconductor substrate; an insulating layer provided on the semiconductor substrate, the insulating layer having an opening for exposing the metal pad; a sub-ball metal electrode provided on the metal pad; a solder ball provided on the surface of the sub-ball metal electrode, the solder ball having a first apron structure and the first apron structure covering partial metal pad on the periphery of the bottom of the under-ball metal electrode. The chip packaging structure of the present invention enhances the adhesion between the solder ball and the metal pad, and improves the reliability in chip packaging.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: March 22, 2016
    Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Lei Shi, Haijun Shen
  • Patent number: 9293338
    Abstract: A semiconductor packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a first surface and a second surface, and an electroplating seed layer on the first surface of the semiconductor substrate. The method also includes forming a plurality of columnar electrodes over the electroplating seed layer, where the columnar electrodes include first columnar electrodes and second columnar electrodes. Further, the method includes forming a diffusion barrier layer over the first columnar electrodes and the second columnar electrodes, forming a plurality of first solder balls over the diffusion barrier layer on the first columnar electrodes. The method also includes providing a packaging substrate having solder terminals corresponding to the first solder balls, and mounting the semiconductor substrate onto the packaging substrate in a flipped position, such that the first solder balls are connected with the solder terminals.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: March 22, 2016
    Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: Chang-Ming Lin, Yu-Juan Tao
  • Publication number: 20150303159
    Abstract: A semiconductor device package and packaging method, the semiconductor device packaging method comprising: providing a chip with a bonding pad formed on the chip surface; forming a passivation layer and a bump on the chip surface, wherein the passivation layer has an opening exposing part of the pad, the bump is located in the opening and the size of the bump is less than the size of the opening; forming a solder ball covering the top surface and the side wall of the bump, and the bottom surface of the opening. The formed semiconductor device package is not easy to form a short circuit. The bonding strength between the solder ball and the bump is high and the performance of the semiconductor device is stable.
    Type: Application
    Filed: October 30, 2013
    Publication date: October 22, 2015
    Inventors: Chang-Ming LIN, Lei SHI, Honghui WANG
  • Publication number: 20150294949
    Abstract: A chip packaging structure and packaging method. The packaging structure comprises: a semiconductor substrate; a metal pad provided inside the semiconductor substrate; an insulating layer provided on the semiconductor substrate, the insulating layer having an opening for exposing the metal pad; a sub-ball metal electrode provided on the metal pad; a solder ball provided on the surface of the sub-ball metal electrode, the solder ball having a first apron structure and the first apron structure covering partial metal pad on the periphery of the bottom of the under-ball metal electrode. The chip packaging structure of the present invention enhances the adhesion between the solder ball and the metal pad, and improves the reliability in chip packaging.
    Type: Application
    Filed: October 30, 2013
    Publication date: October 15, 2015
    Applicant: NANTONG FUJITSU MICROELECTRONICS CO., LTD
    Inventors: Chang-Ming Lin, Lei Shi, Haijun Shen
  • Publication number: 20150287688
    Abstract: A semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate (300) provided with a plurality of pads (301), columnar electrodes on the pads (301) and a solder ball (321) provided on the columnar electrode. The columnar electrode comprises a main body (307) and a groove in the main body (307), and an opening of the groove is overlapped with the top surface of the columnar electrode. The solder ball (321) comprises a metal bump (320) arranged on the top of the columnar electrode and a filling part (319) filled in the groove. The solder ball and the columnar electrode form a structure similar to a bolt; thus the binding force between the solder ball and the columnar electrode is improved.
    Type: Application
    Filed: October 30, 2013
    Publication date: October 8, 2015
    Inventors: Chang-Ming Lin, Lei Shi, Yujuan Tao
  • Publication number: 20140124929
    Abstract: Semiconductor devices and methods are provided. The semiconductor device can include a semiconductor substrate, a plurality of solder pads disposed on the semiconductor substrate, a first insulating layer disposed over the semiconductor substrate, a columnar electrode disposed over the solder pad, and a solder ball disposed on the columnar electrode. The first insulating layer can include a first opening to expose a solder pad of the plurality of solder pads. The columnar electrode can include a bulk material and a through hole in the bulk material. The through hole can expose at least a surface portion of the solder pad. The solder ball can include a convex metal head on a top surface of the bulk material of the columnar electrode, and a filling part filled in the through hole.
    Type: Application
    Filed: November 7, 2013
    Publication date: May 8, 2014
    Applicant: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: CHANG-MING LIN, Lei SHI, GUO-HUA GAO
  • Publication number: 20140124928
    Abstract: Various embodiments provide semiconductor packaging structures and methods for forming the same. In an exemplary method, a chip having a metal interconnect structure thereon can be provided. An insulating layer can be formed on the chip to expose the metal interconnect structure. A columnar electrode can be formed on the metal interconnect structure. A portion of the metal interconnect structure surrounding a bottom of the columnar electrode can be exposed. A diffusion barrier layer can be formed on sidewalls and a top surface of the columnar electrode, and on the exposed portion of the metal interconnect structure surrounding the bottom of the columnar electrode. A solder ball can then be formed on the diffusion barrier layer. The solder ball can wrap at least the sidewalls and the top surface of the columnar electrode.
    Type: Application
    Filed: November 7, 2013
    Publication date: May 8, 2014
    Applicant: NANTONG FUJITSU MICROELECTRONICS CO., LTD.
    Inventors: CHANG-MING LIN, YU-JUAN TAO
  • Publication number: 20140124927
    Abstract: An IC packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a metal pad and an insulating layer and the insulating layer has an opening to expose the meal pad. The method also includes forming an under-the-ball meal electrode on the exposed metal pad. The under-the-ball metal electrode has an electrode body and an electrode tail, the electrode body is located at a bottom portion of the under-the-ball metal electrode and is in contact with the metal pad, and the electrode tail is located at a top portion of the under-the-ball meal electrode. Further, the method includes forming a solder ball on the under-the-ball metal electrode.
    Type: Application
    Filed: November 7, 2013
    Publication date: May 8, 2014
    Applicant: Nantong Fujitsu Microelectronics Co., Ltd.
    Inventors: CHANG-MING LIN, LEI SHI, XIAO-CHUN WU