Patents by Inventor Chang-Ming Lin
Chang-Ming Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12059269Abstract: A wearable device for measuring a cardiovascular system of a user includes an attachment component, a blood pressure measurement module, and a sensor configured to detect an existence of a limb part of the user. The attachment component is for attaching the wearable device to the limb part of the user and includes a connecting mechanism. A condition of the connecting mechanism can be used to determine whether the attachment component is in a connected configuration or in a disconnected configuration. The blood pressure measurement module has an expander, an actuator, and a blood pressure measurement sensor. The expander can be disposed on the limb part and can contact against the user. The expander can be controlled by the actuator to be inflated, by which the blood pressure measurement sensor can measure blood pressure in the cardiovascular system of the user.Type: GrantFiled: December 29, 2020Date of Patent: August 13, 2024Assignee: MICROJET TECHNOLOGY CO., LTD.Inventors: Hao-Jan Mou, Yung-Lung Han, Chi-Feng Huang, Tsung-I Lin, Chang-Yen Tsai, Wei-Ming Lee
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Patent number: 12055228Abstract: A valve for throttling gas flow from a semiconductor processing tool includes a valve body. A shaft extends through the valve body. The shaft defines an internal cavity and a first opening communicating with the internal cavity. A first deflector is positioned on the shaft proximate the first opening and directed at a first interface between the shaft and the valve body. A method for throttling gas flow from a semiconductor processing tool includes providing a gas in an internal cavity defined in a shaft of a valve and directing the gas through an opening defined in the shaft and communicating with the bore toward an interface between the shaft and a valve body of the valve supporting the shaft.Type: GrantFiled: April 8, 2022Date of Patent: August 6, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Sheng-Chun Yang, Po-Chih Huang, Chang Chun, Xuan-Yang Zheng, Tzu-Chuan Chao, Ren-Jyue Wang, Yi-Ming Lin
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Patent number: 12043537Abstract: The present disclosure provides a method of manufacturing a MEMS device. In some embodiments, a first interlayer dielectric layer is formed over a substrate, and a diaphragm is formed over the first interlayer dielectric layer. Then, a second interlayer dielectric layer is formed over the diaphragm. A first etch is performed to form an opening through the second interlayer dielectric layer and the diaphragm and reaching into an upper portion of the first interlayer dielectric layer. A second etch is performed to the first interlayer dielectric layer and the second interlayer dielectric layer to form recesses above and below the diaphragm and to respectively expose a portion of a top surface and a portion of a bottom surface of the diaphragm. A sidewall stopper is formed along a sidewall of the diaphragm into the recesses of the first interlayer dielectric layer and the second interlayer dielectric layer.Type: GrantFiled: August 11, 2020Date of Patent: July 23, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Wei Lin, Chang-Ming Wu, Ting-Jung Chen
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Publication number: 20210173003Abstract: The present disclosure provides a probe apparatus, including a circuit board, a flexible interconnect substrate, at least one probe, and a supporting element. The circuit board includes tester contacts. The flexible interconnect substrate has a first surface and an opposing second surface. The flexible interconnect substrate is electrically coupled to the circuit board. The probe is disposed in the first surface of the flexible interconnect substrate. The probe is electrically coupled to the flexible interconnect substrate, and the probe is configured to electrically contact a device under test. The supporting element is adhered to the second surface of the flexible interconnect substrate. The supporting element is disposed between the flexible interconnect substrate and the circuit board.Type: ApplicationFiled: December 30, 2019Publication date: June 10, 2021Inventors: CHANG-MING LIN, Choon Leong LOU
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Publication number: 20180005002Abstract: An ultrasonic fingerprint recognition module and a manufacturing method thereof are provided. The ultrasonic fingerprint recognition module includes a substrate, an ultrasonic transmitter, a thin film transistor and an ultrasonic receiver. The method includes the following steps. In a step (a), the substrate, the ultrasonic transmitter, the thin film transistor and the ultrasonic receiver are provided. In a step (b), the ultrasonic transmitter is attached on a top surface of the substrate, and the ultrasonic transmitter is electrically connected with the substrate. In a step (c), the ultrasonic receiver is attached on the thin film transistor. In a step (d), the thin film transistor is attached on the ultrasonic transmitter. In a step (e), the ultrasonic receiver is electrically connected with the thin film transistor and the thin film transistor is electrically connected with the substrate through wires.Type: ApplicationFiled: May 17, 2017Publication date: January 4, 2018Inventor: CHANG-MING LIN
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Patent number: 9761549Abstract: Semiconductor devices and methods are provided. The semiconductor device can include a semiconductor substrate, a plurality of solder pads disposed on the semiconductor substrate, a first insulating layer disposed over the semiconductor substrate, a columnar electrode disposed over the solder pad, and a solder ball disposed on the columnar electrode. The first insulating layer can include a first opening to expose a solder pad of the plurality of solder pads. The columnar electrode can include a bulk material and a through hole in the bulk material. The through hole can expose at least a surface portion of the solder pad. The solder ball can include a convex metal head on a top surface of the bulk material of the columnar electrode, and a filling part filled in the through hole.Type: GrantFiled: November 7, 2013Date of Patent: September 12, 2017Assignee: TONGFU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Guo-Hua Gao
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Patent number: 9620468Abstract: Various embodiments provide semiconductor packaging structures and methods for forming the same. In an exemplary method, a chip having a metal interconnect structure thereon can be provided. An insulating layer can be formed on the chip to expose the metal interconnect structure. A columnar electrode can be formed on the metal interconnect structure. A portion of the metal interconnect structure surrounding a bottom of the columnar electrode can be exposed. A diffusion barrier layer can be formed on sidewalls and a top surface of the columnar electrode, and on the exposed portion of the metal interconnect structure surrounding the bottom of the columnar electrode. A solder ball can then be formed on the diffusion barrier layer. The solder ball can wrap at least the sidewalls and the top surface of the columnar electrode.Type: GrantFiled: November 7, 2013Date of Patent: April 11, 2017Assignee: TONGFU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Yu-Juan Tao
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Patent number: 9589815Abstract: An IC packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a metal pad and an insulating layer and the insulating layer has an opening to expose the meal pad. The method also includes forming an under-the-ball meal electrode on the exposed metal pad. The under-the-ball metal electrode has an electrode body and an electrode tail, the electrode body is located at a bottom portion of the under-the-ball metal electrode and is in contact with the metal pad, and the electrode tail is located at a top portion of the under-the-ball meal electrode. Further, the method includes forming a solder ball on the under-the-ball metal electrode.Type: GrantFiled: November 7, 2013Date of Patent: March 7, 2017Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Xiao-Chun Wu
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Patent number: 9548282Abstract: A semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate (300) provided with a plurality of pads (301), columnar electrodes on the pads (301) and a solder ball (321) provided on the columnar electrode. The columnar electrode comprises a main body (307) and a groove in the main body (307), and an opening of the groove is overlapped with the top surface of the columnar electrode. The solder ball (321) comprises a metal bump (320) arranged on the top of the columnar electrode and a filling part (319) filled in the groove. The solder ball and the columnar electrode form a structure similar to a bolt; thus the binding force between the solder ball and the columnar electrode is improved.Type: GrantFiled: October 30, 2013Date of Patent: January 17, 2017Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Yujuan Tao
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Patent number: 9431325Abstract: A semiconductor packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a first surface and a second surface, and an electroplating seed layer on the first surface of the semiconductor substrate. The method also includes forming a plurality of columnar electrodes over the electroplating seed layer, where the columnar electrodes include first columnar electrodes and second columnar electrodes. Further, the method includes forming a diffusion barrier layer over the first columnar electrodes and the second columnar electrodes, forming a plurality of first solder balls over the diffusion barrier layer on the first columnar electrodes. The method also includes providing a packaging substrate having solder terminals corresponding to the first solder balls, and mounting the semiconductor substrate onto the packaging substrate in a flipped position, such that the first solder balls are connected with the solder terminals.Type: GrantFiled: February 3, 2016Date of Patent: August 30, 2016Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Yu-Juan Tao
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Patent number: 9379077Abstract: A semiconductor device package and packaging method, the semiconductor device packaging method comprising: providing a chip with a bonding pad formed on the chip surface; forming a passivation layer and a bump on the chip surface, wherein the passivation layer has an opening exposing part of the pad, the bump is located in the opening and the size of the bump is less than the size of the opening; forming a solder ball covering the top surface and the side wall of the bump, and the bottom surface of the opening. The formed semiconductor device package is not easy to form a short circuit. The bonding strength between the solder ball and the bump is high and the performance of the semiconductor device is stable.Type: GrantFiled: October 30, 2013Date of Patent: June 28, 2016Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Honghui Wang
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Publication number: 20160155684Abstract: A semiconductor packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a first surface and a second surface, and an electroplating seed layer on the first surface of the semiconductor substrate. The method also includes forming a plurality of columnar electrodes over the electroplating seed layer, where the columnar electrodes include first columnar electrodes and second columnar electrodes. Further, the method includes forming a diffusion barrier layer over the first columnar electrodes and the second columnar electrodes, forming a plurality of first solder balls over the diffusion barrier layer on the first columnar electrodes. The method also includes providing a packaging substrate having solder terminals corresponding to the first solder balls, and mounting the semiconductor substrate onto the packaging substrate in a flipped position, such that the first solder balls are connected with the solder terminals.Type: ApplicationFiled: February 3, 2016Publication date: June 2, 2016Inventors: CHANG-MING LIN, YU-JUAN TAO
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Patent number: 9293432Abstract: A chip packaging structure and packaging method. The packaging structure comprises: a semiconductor substrate; a metal pad provided inside the semiconductor substrate; an insulating layer provided on the semiconductor substrate, the insulating layer having an opening for exposing the metal pad; a sub-ball metal electrode provided on the metal pad; a solder ball provided on the surface of the sub-ball metal electrode, the solder ball having a first apron structure and the first apron structure covering partial metal pad on the periphery of the bottom of the under-ball metal electrode. The chip packaging structure of the present invention enhances the adhesion between the solder ball and the metal pad, and improves the reliability in chip packaging.Type: GrantFiled: October 30, 2013Date of Patent: March 22, 2016Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Lei Shi, Haijun Shen
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Patent number: 9293338Abstract: A semiconductor packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a first surface and a second surface, and an electroplating seed layer on the first surface of the semiconductor substrate. The method also includes forming a plurality of columnar electrodes over the electroplating seed layer, where the columnar electrodes include first columnar electrodes and second columnar electrodes. Further, the method includes forming a diffusion barrier layer over the first columnar electrodes and the second columnar electrodes, forming a plurality of first solder balls over the diffusion barrier layer on the first columnar electrodes. The method also includes providing a packaging substrate having solder terminals corresponding to the first solder balls, and mounting the semiconductor substrate onto the packaging substrate in a flipped position, such that the first solder balls are connected with the solder terminals.Type: GrantFiled: November 7, 2013Date of Patent: March 22, 2016Assignee: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: Chang-Ming Lin, Yu-Juan Tao
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Publication number: 20150303159Abstract: A semiconductor device package and packaging method, the semiconductor device packaging method comprising: providing a chip with a bonding pad formed on the chip surface; forming a passivation layer and a bump on the chip surface, wherein the passivation layer has an opening exposing part of the pad, the bump is located in the opening and the size of the bump is less than the size of the opening; forming a solder ball covering the top surface and the side wall of the bump, and the bottom surface of the opening. The formed semiconductor device package is not easy to form a short circuit. The bonding strength between the solder ball and the bump is high and the performance of the semiconductor device is stable.Type: ApplicationFiled: October 30, 2013Publication date: October 22, 2015Inventors: Chang-Ming LIN, Lei SHI, Honghui WANG
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Publication number: 20150294949Abstract: A chip packaging structure and packaging method. The packaging structure comprises: a semiconductor substrate; a metal pad provided inside the semiconductor substrate; an insulating layer provided on the semiconductor substrate, the insulating layer having an opening for exposing the metal pad; a sub-ball metal electrode provided on the metal pad; a solder ball provided on the surface of the sub-ball metal electrode, the solder ball having a first apron structure and the first apron structure covering partial metal pad on the periphery of the bottom of the under-ball metal electrode. The chip packaging structure of the present invention enhances the adhesion between the solder ball and the metal pad, and improves the reliability in chip packaging.Type: ApplicationFiled: October 30, 2013Publication date: October 15, 2015Applicant: NANTONG FUJITSU MICROELECTRONICS CO., LTDInventors: Chang-Ming Lin, Lei Shi, Haijun Shen
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Publication number: 20150287688Abstract: A semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate (300) provided with a plurality of pads (301), columnar electrodes on the pads (301) and a solder ball (321) provided on the columnar electrode. The columnar electrode comprises a main body (307) and a groove in the main body (307), and an opening of the groove is overlapped with the top surface of the columnar electrode. The solder ball (321) comprises a metal bump (320) arranged on the top of the columnar electrode and a filling part (319) filled in the groove. The solder ball and the columnar electrode form a structure similar to a bolt; thus the binding force between the solder ball and the columnar electrode is improved.Type: ApplicationFiled: October 30, 2013Publication date: October 8, 2015Inventors: Chang-Ming Lin, Lei Shi, Yujuan Tao
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Publication number: 20140124929Abstract: Semiconductor devices and methods are provided. The semiconductor device can include a semiconductor substrate, a plurality of solder pads disposed on the semiconductor substrate, a first insulating layer disposed over the semiconductor substrate, a columnar electrode disposed over the solder pad, and a solder ball disposed on the columnar electrode. The first insulating layer can include a first opening to expose a solder pad of the plurality of solder pads. The columnar electrode can include a bulk material and a through hole in the bulk material. The through hole can expose at least a surface portion of the solder pad. The solder ball can include a convex metal head on a top surface of the bulk material of the columnar electrode, and a filling part filled in the through hole.Type: ApplicationFiled: November 7, 2013Publication date: May 8, 2014Applicant: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: CHANG-MING LIN, Lei SHI, GUO-HUA GAO
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Publication number: 20140124928Abstract: Various embodiments provide semiconductor packaging structures and methods for forming the same. In an exemplary method, a chip having a metal interconnect structure thereon can be provided. An insulating layer can be formed on the chip to expose the metal interconnect structure. A columnar electrode can be formed on the metal interconnect structure. A portion of the metal interconnect structure surrounding a bottom of the columnar electrode can be exposed. A diffusion barrier layer can be formed on sidewalls and a top surface of the columnar electrode, and on the exposed portion of the metal interconnect structure surrounding the bottom of the columnar electrode. A solder ball can then be formed on the diffusion barrier layer. The solder ball can wrap at least the sidewalls and the top surface of the columnar electrode.Type: ApplicationFiled: November 7, 2013Publication date: May 8, 2014Applicant: NANTONG FUJITSU MICROELECTRONICS CO., LTD.Inventors: CHANG-MING LIN, YU-JUAN TAO
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Publication number: 20140124927Abstract: An IC packaging method is provided. The method includes providing a semiconductor substrate. The semiconductor substrate has a metal pad and an insulating layer and the insulating layer has an opening to expose the meal pad. The method also includes forming an under-the-ball meal electrode on the exposed metal pad. The under-the-ball metal electrode has an electrode body and an electrode tail, the electrode body is located at a bottom portion of the under-the-ball metal electrode and is in contact with the metal pad, and the electrode tail is located at a top portion of the under-the-ball meal electrode. Further, the method includes forming a solder ball on the under-the-ball metal electrode.Type: ApplicationFiled: November 7, 2013Publication date: May 8, 2014Applicant: Nantong Fujitsu Microelectronics Co., Ltd.Inventors: CHANG-MING LIN, LEI SHI, XIAO-CHUN WU