Abstract: An etching apparatus includes: an etching chamber; a piping unit disposed in an upper portion of the etching chamber and including a plurality of nozzles via which an etchant is sprayed; a substrate mask disposed below the piping unit; and a transfer unit disposed below the substrate mask and used to transfer a substrate. The substrate mask interposed between the piping unit including the nozzles and the substrate has a mesh structure or a plurality of holes or slits. Thus, the generation of microbubbles can be prevented during a wet etching process so that a thin layer formed on the substrate can be etched at a uniform etch rate. Also, a lift unit having a fixing unit may be disposed on a lateral surface of the substrate mask. The lift unit moves the substrate mask up and down so as to obtain a uniform etch rate.

Abstract: A semiconductor device and method of fabricating the same, which forms a contact hole, a via hole or a via contact hole with multiple profiles with various taper angles. The semiconductor device includes a substrate, a thin film transistor formed on the substrate and having a semiconductor layer, a gate insulating layer, a gate electrode, and an interlayer dielectric, and a contact hole penetrating the gate insulating layer and the interlayer dielectric and exposing a portion of the semiconductor layer. The contact hole has a multiple profile in which an upper portion of the contact hole has a wet etch profile and a lower portion of the contact hole has at least one of the wet etch profile and a dry etch profile.

Abstract: A semiconductor device and method of fabricating the same, which forms a contact hole, a via hole or a via contact hole with multiple profiles with various taper angles. The semiconductor device includes a substrate, a thin film transistor formed on the substrate and having a semiconductor layer, a gate insulating layer, a gate electrode, and an interlayer dielectric, and a contact hole penetrating the gate insulating layer and the interlayer dielectric and exposing a portion of the semiconductor layer. The contact hole has a multiple profile in which an upper portion of the contact hole has a wet etch profile and a lower portion of the contact hole has at least one of the wet etch profile and a dry etch profile.

Abstract: A sulfur dioxide absorbent comprising an ionic liquid comprised of alkyl ether-substituted imidazolium cation and an alkanesulfonate anion moieties possesses a high thermal/chemical stability, high SO2 absorption rate and low regeneration temperature, and is useful for an effective separation of SO2 from a combustion exhaust gas mixture or the like.

Abstract: Provided are a phosphor, a phosphor manufacturing method, and a white light emitting device. The phosphor is represented as a chemical formula of aMO-bAlN-cSi3N4, which uses light having a peak wavelength in a wavelength band of about 350 nm to about 480 nm as an excitation source to emit visible light having a peak wavelength in a wavelength band of about 480 nm to about 680 nm. (where M is one selected from alkaline earth metals (0.2?a/(a+b)?0.9, 0.05?b(b+c)0.85, 0.4?c/(c+a)?0.

Abstract: A liquid crystal display device includes: first and second substrates facing and spaced apart from each other; a liquid crystal layer between the first and second substrates; a first polarizing plate on an outer surface of the first substrate; a second polarizing plate on an outer surface of the second substrate, the second polarizing plate including an anti-static pressure sensitive adhesive (ASPSA) layer; and a conductive tape electrically connected to the ASPSA layer.

Abstract: A quality control apparatus for a gas diffusion layer includes a support, at least one first pressure device, a plate provided below the first pressure device and supporting the pressure applied to the gas diffusion layer sample, a first controller controlling the compression of the first pressure device, a thickness gauge measuring the thickness of the gas diffusion layer sample, a flow channel formed in the sample compressing portion to discharge a gas to the gas diffusion layer sample, a gas supply controller, a gas supply source, a pressure gauge, two fixing devices, a third controller controlling the compression of the fixing devices, two second pressure, a second controller controlling the compression of the second pressure device, a stopper, a protrusion, and a load cell.

Abstract: There is provided a lightweight, slim and compact haptic feedback device due to an actuator module constituted of a piezoelectric element and a vibration plate, and an electronic device having the same. The haptic feedback device includes a haptic device receiving contact pressure applied thereto, and an actuator module being in contact with a lower surface of the haptic device and excited according to variations in contact pressure with the haptic device to thereby generate vibrations.

Abstract: There is provided an actuator module, a haptic feedback device, and an electronic device having the same. The haptic feedback device includes a haptic device receiving a user contact applied thereto, and an actuator module generating vibrations according to the user contact applied to the haptic device.

Abstract: An apparatus for pre-activation of a polymer electrolyte fuel cell includes a first plate and a second plate hot pressing the unit cell stack, each having a flow channel supplying water vapor to opposing inner surfaces with the unit cell stack therebetween and including a resistor producing heat, a compressor, a temperature controller and a water vapor supplier connected to the flow channels of the plates. The apparatus for pre-activating a polymer electrolyte fuel cell may be used to prepare a prep-activated integrated body of a polymer electrolyte fuel cell membrane electrode assembly and gas diffusion layers by performing hot pressing while supplying water vapor to the unit cell stack to hydrate the polymer electrolyte membrane.

Abstract: A flat panel display, having an anti-electrostatic configuration, comprising a plurality of gate lines and data lines formed on an insulating substrate having an emission region and a pad portion, an anti-electrostatic wire initially coupling the gate lines, and an anti-electrostatic circuit coupled to a data line. The anti-electrostatic wire between a gate line and an adjacent gate line is subsequently cut by an opening for cutting the anti-electrostatic wire to electrically isolate the respective gate lines.

Abstract: A mobile communication terminal including an input unit, a display unit, a receiving unit configured to receive a signal including at least one interactive function, a memory configured to store at least one symbol indicating a type of the at least one interactive function, and a control unit configured to detect the type of the interactive function included in the signal received by the receiving unit, to search the memory for the symbol indicating the at least one interactive function, to control the display unit to display the searched symbol, and to control an operation of the interactive function according to a signal provided via the input unit.

Abstract: Disclosed is a hydrogen supply tank including at least one hydrogen-generating container mounted thereto, wherein the hydrogen-generating container receives a hydrogen-generating material capable of heat emission and dehydrogenation under heating, and has a hydrogen discharge path that allows discharge of the generated hydrogen, on the wall surface thereof; the tank has a plurality of divided sections formed therein; the hydrogen-generating container is mounted to each section; and the hydrogen supply tank stores the hydrogen discharged from the hydrogen-generating container and supplies the hydrogen to external sites. Disclosed also are a hydrogen supply apparatus, a hydrogen supply method and a hydrogen-consuming device using the same.

Abstract: Provided are a large-scale cluster monitoring system and a method for automatically building/restoring the same, which can automatically build a large-scale monitoring system and can automatically build a monitoring environment when a failure occurs in nodes. The large-scale cluster monitoring system includes a CM server, a BD server, GM nodes, NA nodes, and a DB agent. The CM server manages nodes in a large-scale cluster system. The DB server stores monitoring information that is state information of nodes in groups. The GM nodes respectively collect the monitoring information that is the state information of the nodes in the corresponding groups to store the collected monitoring information in the DB server. The NA nodes access the CM server to obtain GM node information and respectively collect the state information of the nodes in the corresponding groups to transfer the collected state information to the corresponding GM nodes.

Abstract: A method of varying a transmittance of a transparent conductive film includes forming the transparent conductive film on a substrate and injecting a high energy source into the transparent conductive film to vary the transmittance of the transparent conductive film.

Abstract: Provided are a phosphor, a phosphor manufacturing method, and a white light emitting device. The phosphor is represented as a chemical formula of aMO-bAl2O3-cSi3N4, which uses light having a peak wavelength in a wavelength band of about 350 nm to about 480 nm as an excitation source to emit visible light having a peak wavelength in a wavelength band of about 480 nm to about 680 nm. (where M is one kind or two kinds of elements selected from Mg, Ca, Sr, and Ba (0.2?a/(a+b)?0.9, 0.05?b/(b+c)?0.85, 0.4?c/(c+a)?0.

Abstract: A semiconductor device and method of fabricating the same, which forms a contact hole, a via hole or a via contact hole with multiple profiles with various taper angles. The semiconductor device includes a substrate, a thin film transistor formed on the substrate and having a semiconductor layer, a gate insulating layer, a gate electrode, and an interlayer dielectric, and a contact hole penetrating the gate insulating layer and the interlayer dielectric and exposing a portion of the semiconductor layer. The contact hole has a multiple profile in which an upper portion of the contact hole has a wet etch profile and a lower portion of the contact hole has at least one of the wet etch profile and a dry etch profile.

Abstract: A method for manufacturing an organic light emitting diode (OLED) display includes forming a first electrode having different thicknesses corresponding to a first pixel, a second pixel, and a third pixel, forming a first emission layer, a second emission layer, and a third emission layer respectively corresponding to the first pixel, the second pixel, and the third pixel, and forming a second electrode on the first emission layer, the second emission layer, and the third emission layer, wherein forming the first electrodes includes forming a first electrode material layer on the substrate, forming a photoresist pattern having different thicknesses corresponding to the first pixel, the second pixel, and the third pixel, respectively, and etching the first electrode material layer along with the photoresist pattern.

Abstract: Provided are a phosphor, a phosphor manufacturing method, and a white light emitting device. The phosphor is represented as a chemical formula of MaSibOcNd:Eu, which uses light having a peak wavelength in a wavelength band of about 350 nm to about 480 nm as an excitation source to emit light having one of a green wavelength, a yellow wavelength, and a red wavelength as a peak wavelength in a wavelength band of about 480 nm to about 680 nm (where M is at least one or more alkaline earth metals selected from a group consisting of Ra, Ba, Sr, Ca, Mg, and Be (1?a?7, 2?b?13, 1?c?18, and 0<d?16)).

Abstract: An etching apparatus that includes a number of chambers having an opening that is opened to move in or discharge a substrate, an injection member that is installed inside each chamber to inject a chemical liquid, and an interception member that is adjacently installed at the opening of each chamber and sucks gas introduced into the opening.