Patents by Inventor Chao-An Su

Chao-An Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160358930
    Abstract: A flash memory device is disposed on a semiconductor substrate. The flash memory device includes flash memory cells arranged in rows and columns. Respective flash memory cells include respective access transistors and respective floating gate transistors. The respective access transistors have respective access gates, and the respective floating gate transistors have respective control gates arranged over respective floating gates. First and second wordlines extend substantially in parallel with one another and correspond to first and second rows which neighbor one another. The first wordline is coupled to access gates of access transistors along the first row. The second wordline is coupled to access gates of access transistors along the second row. Nearest edges of the first and second wordlines include at least one wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines.
    Type: Application
    Filed: August 16, 2016
    Publication date: December 8, 2016
    Inventors: Chia-Ta Hsieh, Chi-Wei Ho, Kao-Chao Lin, Josh Lin, Nai-Chao Su, Shih-Jung Tu, Po-Kai Hsu, Shih-Ching Lee, Chen-Ming Huang
  • Patent number: 9437603
    Abstract: A flash memory device is disposed on a semiconductor substrate. The flash memory device includes flash memory cells arranged in rows and columns. Respective flash memory cells include respective access transistors and respective floating gate transistors. The respective access transistors have respective access gates, and the respective floating gate transistors have respective control gates arranged over respective floating gates. First and second wordlines extend substantially in parallel with one another and correspond to first and second rows which neighbor one another. The first wordline is coupled to access gates of access transistors along the first row. The second wordline is coupled to access gates of access transistors along the second row. Nearest edges of the first and second wordlines include at least one wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: September 6, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Ta Hsieh, Chi-Wei Ho, Kao-Chao Lin, Josh Lin, Nai-Chao Su, Shih-Jung Tu, Po-Kai Hsu, Shih-Ching Lee, Chen-Ming Huang
  • Publication number: 20160104713
    Abstract: A flash memory device is disposed on a semiconductor substrate. The flash memory device includes flash memory cells arranged in rows and columns. Respective flash memory cells include respective access transistors and respective floating gate transistors. The respective access transistors have respective access gates, and the respective floating gate transistors have respective control gates arranged over respective floating gates. First and second wordlines extend substantially in parallel with one another and correspond to first and second rows which neighbor one another. The first wordline is coupled to access gates of access transistors along the first row. The second wordline is coupled to access gates of access transistors along the second row. Nearest edges of the first and second wordlines include at least one wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines.
    Type: Application
    Filed: October 29, 2014
    Publication date: April 14, 2016
    Inventors: Chia-Ta Hsieh, Chi-Wei Ho, Kao-Chao Lin, Josh Lin, Nai-Chao Su, Shih-Jung Tu, Po-Kai Hsu, Shih-Ching Lee, Chen-Ming Huang
  • Publication number: 20150375339
    Abstract: An apparatus, system and method for micro welding, wherein insulated object, such as a wire, that includes a metallic conductor that is at least partially covered by one or more layers of insulation, is positioned across a termination point. A laser beam may be applied to an area of the insulated object overlapping the termination point, wherein the applied laser beam is configured to substantially simultaneously (i) ablate the one or more layers of insulation in a first region of the area, (ii) weld the metallic conductor to the termination point in a second region of the area, and (iii) detach a portion of the object from the termination point in a third region of the area.
    Type: Application
    Filed: June 24, 2015
    Publication date: December 31, 2015
    Inventors: William Douglas Sterling, Chao Su, Gongen Gu
  • Publication number: 20150325644
    Abstract: An embodiment is a method comprising diffusing carbon through a surface of a substrate, implanting carbon through the surface of the substrate, and annealing the substrate after the diffusing the carbon and implanting the carbon through the surface of the substrate. The substrate comprises a first gate, a gate spacer, an etch stop layer, and an inter-layer dielectric. The first gate is over a semiconductor substrate. The gate spacer is along a sidewall of the first gate. The etch stop layer is on a surface of the gate spacer and over a surface of the semiconductor substrate. The inter-layer dielectric is over the etch stop layer. The surface of the substrate comprises a surface of the inter-layer dielectric.
    Type: Application
    Filed: July 21, 2015
    Publication date: November 12, 2015
    Inventors: Yu-Chen Su, Huang-Ming Chen, Chun-Feng Nieh, Pei-Chao Su
  • Patent number: 9172525
    Abstract: Embodiments of the present disclosure relate to a method and a device for compensating for a time path. In the embodiments of the present disclosure, on the basis of not changing implemented 1588 synchronization architecture, a compensation unit is added on a service board unit, the compensation unit calculates a compensation time value for asymmetrical reception and transmission of fiber links and transfers the compensation time value into the service board unit, and the service board unit implements automatic compensation according to a port status. The method and the device for compensating for a time path according to the embodiments of the present disclosure may implement automatic compensation for receiving and sending fiber links without manually testing the asymmetry of links node by node, so that the embodiments of the present disclosure can be widely applied in time synchronization networks.
    Type: Grant
    Filed: March 19, 2013
    Date of Patent: October 27, 2015
    Assignee: HUAWEI TECHNOLOGIES CO., LTD.
    Inventors: Dezhong Cao, Buyun Wang, Guojie Pan, Chao Su
  • Patent number: 9105570
    Abstract: An embodiment is a method comprising diffusing carbon through a surface of a substrate, implanting carbon through the surface of the substrate, and annealing the substrate after the diffusing the carbon and implanting the carbon through the surface of the substrate. The substrate comprises a first gate, a gate spacer, an etch stop layer, and an inter-layer dielectric. The first gate is over a semiconductor substrate. The gate spacer is along a sidewall of the first gate. The etch stop layer is on a surface of the gate spacer and over a surface of the semiconductor substrate. The inter-layer dielectric is over the etch stop layer. The surface of the substrate comprises a surface of the inter-layer dielectric.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: August 11, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chen Su, Huang-Ming Chen, Chun-Feng Nieh, Pei-Chao Su
  • Patent number: 8970015
    Abstract: Various semiconductor devices are disclosed. An exemplary device includes: a substrate; a gate structure disposed over the substrate, wherein the gate structure includes a source region and a drain region; a first etch stop layer disposed over the gate structure, a second etch stop layer disposed over the source region and the drain region; a dielectric layer disposed over the substrate; and a gate contact, a source contact, and a drain contact. The dielectric layer is disposed over both etch stop layers. The gate contact extends through the dielectric layer and the first etch stop layer to the gate structure. The source contact and the drain contact extend through the dielectric layer and the second etch stop layer respectively to the source region and the drain region.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: March 3, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Dyi Chang, Pei-Chao Su, Kong-Beng Thei, Hun-Jan Tao, Harry-Hak-Lay Chuang
  • Patent number: 8865500
    Abstract: A method of fabricating a MEMS microphone includes: first providing a substrate having a first surface and a second surface. The substrate is divided into a logic region and a MEMS region. The first surface of the substrate is etched to form a plurality of first trenches in the MEMS region. An STI material is then formed in the plurality of first trenches. Subsequently, the second surface of the substrate is etched to form a second trench in the MEMS region, wherein the second trench connects with each of the first trenches. Finally, the STI material in the first trenches is removed.
    Type: Grant
    Filed: February 3, 2010
    Date of Patent: October 21, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Hsin Huang, Bang-Chiang Lan, Hui-Min Wu, Tzung-I Su, Chao-An Su, Tzung-Han Tan
  • Patent number: 8710601
    Abstract: A micro electro mechanical system (MEMS) structure is disclosed. The MEMS structure includes a backplate electrode and a 3D diaphragm electrode. The 3D diaphragm electrode has a composite structure so that a dielectric is disposed between two metal layers. The 3D diaphragm electrode is adjacent to the backplate electrode to form a variable capacitor together.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: April 29, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Chien-Hsin Huang, Bang-Chiang Lan, Ming-I Wang, Hui-Min Wu, Tzung-I Su, Chao-An Su, Tzung-Han Tan, Min Chen, Meng-Jia Lin
  • Publication number: 20140103407
    Abstract: Various semiconductor devices are disclosed. An exemplary device includes: a substrate; a gate structure disposed over the substrate, wherein the gate structure includes a source region and a drain region; a first etch stop layer disposed over the gate structure, a second etch stop layer disposed over the source region and the drain region; a dielectric layer disposed over the substrate; and a gate contact, a source contact, and a drain contact. The dielectric layer is disposed over both etch stop layers. The gate contact extends through the dielectric layer and the first etch stop layer to the gate structure. The source contact and the drain contact extend through the dielectric layer and the second etch stop layer respectively to the source region and the drain region.
    Type: Application
    Filed: December 20, 2013
    Publication date: April 17, 2014
    Inventors: Hong-Dyi CHANG, Pei-Chao Su, Kong-Beng Thei, Hun-Jan Tao, Harry-Hak-Lay Chuang
  • Patent number: 8648446
    Abstract: Various semiconductor devices are disclosed. An exemplary device includes: a substrate; a gate structure disposed over the substrate, wherein the gate structure includes a source region and a drain region; a first etch stop layer disposed over the gate structure, a second etch stop layer disposed over the source region and the drain region; a dielectric layer disposed over the substrate; and a gate contact, a source contact, and a drain contact. The dielectric layer is disposed over both etch stop layers. The gate contact extends through the dielectric layer and the first etch stop layer to the gate structure. The source contact and the drain contact extend through the dielectric layer and the second etch stop layer respectively to the source region and the drain region.
    Type: Grant
    Filed: July 17, 2013
    Date of Patent: February 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Dyi Chang, Pei-Chao Su, Kong-Beng Thei, Hun-Jan Tao, Harry Hak-Lay Chuang
  • Patent number: 8642986
    Abstract: An integrated circuit (IC) having a microelectromechanical system (MEMS) device buried therein is provided. The integrated circuit includes a substrate, a metal-oxide semiconductor (MOS) device, a metal interconnect, and the MEMS device. The substrate has a logic circuit region and a MEMS region. The MOS device is located on the logic circuit region of the substrate. The metal interconnect, formed by a plurality of levels of wires and a plurality of vias, is located above the substrate to connect the MOS device. The MEMS device is located on the MEMS region, and includes a sandwich membrane located between any two neighboring levels of wires in the metal interconnect and connected to the metal interconnect.
    Type: Grant
    Filed: September 23, 2009
    Date of Patent: February 4, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Tzung-Han Tan, Bang-Chiang Lan, Ming-I Wang, Tzung-I Su, Chien-Hsin Huang, Hui-Min Wu, Chao-An Su, Min Chen, Meng-Jia Lin
  • Publication number: 20140015104
    Abstract: An embodiment is a method comprising diffusing carbon through a surface of a substrate, implanting carbon through the surface of the substrate, and annealing the substrate after the diffusing the carbon and implanting the carbon through the surface of the substrate. The substrate comprises a first gate, a gate spacer, an etch stop layer, and an inter-layer dielectric. The first gate is over a semiconductor substrate. The gate spacer is along a sidewall of the first gate. The etch stop layer is on a surface of the gate spacer and over a surface of the semiconductor substrate. The inter-layer dielectric is over the etch stop layer. The surface of the substrate comprises a surface of the inter-layer dielectric.
    Type: Application
    Filed: July 13, 2012
    Publication date: January 16, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Chen Su, Huang-Ming Chen, Chun-Feng Nieh, Pei-Chao Su
  • Publication number: 20130299921
    Abstract: Various semiconductor devices are disclosed. An exemplary device includes: a substrate; a gate structure disposed over the substrate, wherein the gate structure includes a source region and a drain region; a first etch stop layer disposed over the gate structure, a second etch stop layer disposed over the source region and the drain region; a dielectric layer disposed over the substrate; and a gate contact, a source contact, and a drain contact. The dielectric layer is disposed over both etch stop layers. The gate contact extends through the dielectric layer and the first etch stop layer to the gate structure. The source contact and the drain contact extend through the dielectric layer and the second etch stop layer respectively to the source region and the drain region.
    Type: Application
    Filed: July 17, 2013
    Publication date: November 14, 2013
    Inventors: Hong-Dyi Chang, Pei-Chao Su, Kong-Beng Thei, Hun-Jan Tao, Harry Hak-Lay Chuang
  • Patent number: 8558336
    Abstract: A semiconductor photodetector structure is provided. The structure includes a substrate, a photodetecting element and a semiconductor layer disposed on the photodetecting element. The substrate includes a first semiconductor material and includes a deep trench. The surface of the deep trench includes a first type dopant. The photodetecting element is disposed in the deep trench. The photodetecting element includes a second semiconductor material. The semiconductor layer includes a second type dopant.
    Type: Grant
    Filed: August 17, 2009
    Date of Patent: October 15, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Tzung-I Su, Bang-Chiang Lan, Chao-An Su, Hui-Min Wu, Ming-I Wang, Chien-Hsin Huang, Tzung-Han Tan, Min Chen, Meng-Jia Lin, Wen-Yu Su
  • Patent number: 8502382
    Abstract: A protection structure of a pad is provided. The pad is disposed in a dielectric layer on a semiconductor substrate and the pad includes a connection region and a peripheral region which encompasses the connection region. The protection structure includes at least a barrier, an insulation layer and a mask layer. The barrier is disposed in the dielectric layer in the peripheral region. The insulation layer is disposed on the dielectric layer. The mask layer is disposed on the dielectric layer and covers the insulation layer and the mask layer includes an opening to expose the connection region of the pad.
    Type: Grant
    Filed: April 30, 2012
    Date of Patent: August 6, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Bang-Chiang Lan, Ming-I Wang, Hui-Min Wu, Min Chen, Chien-Hsin Huang, Tzung-I Su, Chao-An Su, Tzung-Han Tan, Li-Che Chen, Meng-Jia Lin
  • Patent number: 8497169
    Abstract: Various methods for protecting a gate structure during contact formation are disclosed. An exemplary method includes: forming a gate structure over a substrate, wherein the gate structure includes a gate and the gate structure interposes a source region and a drain region disposed in the substrate; patterning a first etch stop layer such that the first etch stop layer is disposed on the source region and the drain region; patterning a second etch stop layer such that the second etch stop layer is disposed on the gate structure; and forming a source contact, a drain contact, and a gate contact, wherein the source contact and the drain contact extend through the first etch stop layer and the gate contact extends through the second etch stop layer, wherein the forming the source contact, the drain contact, and the gate contact includes simultaneously removing the first etch stop layer and the second etch stop layer to expose the gate, source region, and drain region.
    Type: Grant
    Filed: May 18, 2012
    Date of Patent: July 30, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Dyi Chang, Pei-Chao Su, Kong-Beng Thei, Hun-Jan Tao, Harry Hak-Lay Chuang
  • Patent number: 8384214
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a dielectric layer, a pad structure and a protection structure. The dielectric layer is disposed on the substrate. The pad structure is disposed in the dielectric layer. The pad structure includes a plurality of first metal layers and a plurality of plugs which are electrically connected to each other vertically. There is no contact plug disposed between the pad structure and the substrate. The protection structure is disposed in the dielectric layer and encompasses the pad structure.
    Type: Grant
    Filed: October 13, 2009
    Date of Patent: February 26, 2013
    Assignee: United Microelectronics Corp.
    Inventors: Hui-Min Wu, Bang-Chiang Lan, Ming-I Wang, Tzung-I Su, Chien-Hsin Huang, Chao-An Su, Tzung-Han Tan, Min Chen, Meng-Jia Lin
  • Publication number: 20130027856
    Abstract: An electronic apparatus with rotation function includes a loading side, a stationary portion and a rotation portion. The stationary portion is disposed at the loading side. The rotation portion is configured for connecting with a functional apparatus. The rotation portion is connected with the stationary portion in an unfixed way. The functional apparatus rotates relative to the stationary portion by the rotation portion.
    Type: Application
    Filed: July 26, 2012
    Publication date: January 31, 2013
    Inventors: Tzu-Wei TAI, Cheng-Wei Chen, Szu-Tang Chiu, Yu-Chao Su, Yi-Rui Lin, Shu-Chun Hsiao