Patents by Inventor Chee-Wee Liu
Chee-Wee Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12676172Abstract: A device is provided. The device includes a physical unclonable function (PUF) cell array. The PUF cell array includes multiple bit cells, and generates a PUF response output, in response to a challenge input, based on a data state of one bit cell in the bit cells. Each of the bit cells stores a bit data and includes a transistor having a control terminal coupled to a word line and a first terminal coupled to a source line, a first memory cell having a first terminal coupled to a first data line and a second terminal coupled to a second terminal of the transistor, and a second memory cell having a first terminal coupled to a second data line, different from the first data line, and a second terminal coupled to the second terminal of the first memory cell at the second terminal of the transistor.Type: GrantFiled: March 8, 2024Date of Patent: July 7, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Chia-Che Chung, Chia-Jung Tsen, Ya-Jui Tsou, Chee-Wee Liu
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Patent number: 12672345Abstract: A semiconductor device includes a first transistor, a second transistor above the first transistor, and an isolation structure. The first transistor includes a first semiconductor channel layer, a first gate structure wrapping around the first semiconductor channel layer, and first source/drain epitaxy structures on opposite ends of the first semiconductor channel layer. The second transistor includes a second semiconductor channel layer, a second gate structure wrapping around the second semiconductor channel layer, and second source/drain epitaxy structures on opposite ends of the second semiconductor channel layer. The isolation structure electrically isolates the first gate structure from the second gate structure, wherein in a top view the isolation structure is adjacent to the second gate structure, and wherein in a first cross-sectional view, the isolation structure wraps around the first semiconductor channel layer.Type: GrantFiled: November 24, 2023Date of Patent: June 30, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Bo-Wei Huang, Chien-Te Tu, Chee-Wee Liu
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Publication number: 20260164636Abstract: A memory device includes a first pull-down transistor, a first pass-gate transistor, a second pull-down transistor, a second pass-gate transistor, a first pull-up transistor, and a second pull-up transistor. A first power line, a first bit line, and a second bit line is provided, the first power line includes first and second portions separated from each other, wherein in a cross-sectional view, the second portion of the first power line is laterally between the first and second bit lines along a direction. A first via electrically connects the first portion of the first power line to the first pull-down transistor. A second via electrically connects the first bit line to the first pass-gate transistor. A third via electrically connects the second portion of the first power line to the second pull-down transistor. A fourth via electrically connects the second bit line to the second pass-gate transistor.Type: ApplicationFiled: February 12, 2026Publication date: June 11, 2026Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng LIN, Tao CHOU, Chee-Wee LIU
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Publication number: 20260143973Abstract: A method of forming a memory device including forming a bottom electrode via (BEVA) in a dielectric layer, forming a magnetic tunnel junction (MTJ) multilayer structure over the BEVA, forming a top electrode on the MTJ multilayer structure, patterning the MTJ multilayer structure using the top electrode as an etch mask to form a MTJ stack, forming a first interlayer dielectric (ILD) layer over the MTJ stack, and after forming the first ILD layer, forming a ferromagnetic metal that exerts a magnetic field on the MTJ stack.Type: ApplicationFiled: January 13, 2026Publication date: May 21, 2026Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ya-Jui TSOU, Jih-Chao CHIU, Huan-Chi SHIH, Chee-Wee LIU, Shao-Yu LIN, Chih-Lin WANG
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Publication number: 20260143665Abstract: A semiconductor device includes a substrate having a semiconductor fin, a first transistor over the substrate, and a second transistor vertically above the first transistor. The first transistor includes a first gate structure over the semiconductor fin, in which in a cross-sectional view, the semiconductor fin comprises a channel portion in contact with a bottom surface of the first gate structure, and source/drain portions on opposite sidewalls of the first gate structure. The second transistor includes a semiconductor channel layer above the semiconductor fin, a second gate structure over the semiconductor channel layer, and source/drain epitaxy structures on opposite ends of the semiconductor channel layer.Type: ApplicationFiled: November 21, 2024Publication date: May 21, 2026Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Hsin-Cheng LIN, Chien-Te TU, Chee-Wee LIU
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Publication number: 20260120759Abstract: An SRAM cell includes a first active region, a first gate structure, a second gate structure, and a first source/drain contact region. The first gate structure is over the first active region and forms a pull-up transistor with the first active region. The second gate structure is over the first active region and forms a write-assist transistor with the first active region. The write-assist transistor and the pull-up transistor are of a same conductivity type. The first source/drain contact region is over a source/drain of the write-assist transistor and a source/drain of the pull-up transistor.Type: ApplicationFiled: December 24, 2025Publication date: April 30, 2026Applicants: Taiwan Semiconductor Manufacturing Company, Ltd., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng LIN, Tao CHOU, Kuan-Ying CHIU, Chee-Wee LIU
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Patent number: 12615801Abstract: The present disclosure provides a semiconductor structure and a method of forming the same. A semiconductor structure according to the present disclosure includes a plurality of nanostructures disposed over a substrate, a plurality of inner spacer features interleaving the plurality of nanostructures. The plurality of nanostructures are arranged along a direction perpendicular to the substrate. The plurality of inner spacer features include a bottommost inner spacer feature and upper inner spacer features disposed above the bottommost inner spacer feature. The first height of the bottommost inner spacer feature along the direction is greater than a second height of each of the upper inner spacer features.Type: GrantFiled: February 16, 2022Date of Patent: April 28, 2026Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang, Wan-Hsuan Hsieh, Yi-Chun Liu, Chee-Wee Liu
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Patent number: 12588181Abstract: A memory device includes a first pull-down transistor, a first pass-gate transistor, a second pull-down transistor, a second pass-gate transistor, a first pull-up transistor, and a second pull-up transistor. A first power line, a first bit line, and a second bit line is provided, the first power line includes first and second portions separated from each other, wherein in a cross-sectional view, the second portion of the first power line is laterally between the first and second bit lines along a direction. A first via electrically connects the first portion of the first power line to the first pull-down transistor. A second via electrically connects the first bit line to the first pass-gate transistor. A third via electrically connects the second portion of the first power line to the second pull-down transistor. A fourth via electrically connects the second bit line to the second pass-gate transistor.Type: GrantFiled: February 17, 2023Date of Patent: March 24, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng Lin, Tao Chou, Chee-Wee Liu
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Publication number: 20260059799Abstract: A method for manufacturing an integrated circuit device is provided. The method includes depositing a dielectric layer over a substrate; depositing a first gate electrode layer over the dielectric layer; removing a first portion of the dielectric layer to leave an opening between the first gate electrode layer, the substrate, and second portions of the dielectric layer; depositing a first gate dielectric layer, such that the first gate dielectric layer has a first portion in the opening and a second portion over a top surface of the first gate electrode layer; and depositing a semiconductor layer, such that the semiconductor layer has a first portion in the opening and a second portion over a top surface of the first gate dielectric layer.Type: ApplicationFiled: August 23, 2024Publication date: February 26, 2026Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Jih-Chao CHIU, Yu-Shan WU, Yuan-Ming LIU, Chee-Wee LIU
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Patent number: 12557558Abstract: A method of forming a memory device including forming a bottom electrode via (BEVA) in a dielectric layer, forming a magnetic tunnel junction (MTJ) multilayer structure over the BEVA, forming a top electrode on the MTJ multilayer structure, patterning the MTJ multilayer structure using the top electrode as an etch mask to form a MTJ stack, forming a first interlayer dielectric (ILD) layer over the MTJ stack, and after forming the first ILD layer, forming a ferromagnetic metal that exerts a magnetic field on the MTJ stack.Type: GrantFiled: June 2, 2022Date of Patent: February 17, 2026Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ya-Jui Tsou, Jih-Chao Chiu, Huan-Chi Shih, Chee-Wee Liu, Shao-Yu Lin, Chih-Lin Wang
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Publication number: 20260040599Abstract: A gate all-around field effect transistor includes a substrate, a first sacrificial layer, a channel layer, a protective layer, a composite field oxide layer, a drain electrode, a source electrode and a gate stack layer. The first sacrificial layer is disposed on the substrate. The channel layer is disposed on the first sacrificial layer, and extends from a drain region to a source region. The protective layer is disposed on the channel layer in the drain and source regions. The composite field oxide layer is disposed on the protective layer in the drain and source regions, and has a drain opening and a source opening for exposing the protective layer. The drain and source electrodes are respectively disposed in the drain and source openings, and in electrical contact with the protective layer. The gate stack layer is disposed on the substrate in the channel region.Type: ApplicationFiled: July 14, 2025Publication date: February 5, 2026Inventors: Yuan-Ming Liu, Jih-Chao Chiu, Yu-Shan Wu, Chee-Wee Liu, HUNG-JEN CHEN
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Publication number: 20260040652Abstract: A method for manufacturing a split double gate transistor includes: forming a first fin on a substrate; removing sacrificial layers from a portion of the first fin; sequentially forming a first gate insulating layer, a channel layer and a protection layer on exposed portions of each gate metal layer; performing a patterning process to form a second fin; patterning the second fin to form a plurality of first recesses and a plurality of second recesses; forming a plurality of inner spacer layers; forming a first gate component, a drain component and a source component; removing the protection layer; and sequentially forming a second gate insulating layer, a plurality of gate connectors, and a second gate component.Type: ApplicationFiled: July 14, 2025Publication date: February 5, 2026Inventors: Chee-Wee Liu, Rachit Dobhal, Yu-Shan Wu, Jih-Chao Chiu, HUNG-JEN CHEN
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Patent number: 12531115Abstract: An SRAM cell includes a first active region, a first gate structure, a second gate structure, and a first source/drain contact region. The first gate structure is over the first active region and forms a pull-up transistor with the first active region. The second gate structure is over the first active region and forms a write-assist transistor with the first active region. The write-assist transistor and the pull-up transistor are of a same conductivity type. The first source/drain contact region is over a source/drain of the write-assist transistor and a source/drain of the pull-up transistor.Type: GrantFiled: August 31, 2023Date of Patent: January 20, 2026Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsin-Cheng Lin, Tao Chou, Kuan-Ying Chiu, Chee-Wee Liu
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Publication number: 20260006766Abstract: A method includes forming a first bottom-tier pull-up transistor and a second bottom-tier pull-up transistor over a substrate, wherein the first and second bottom-tier pull-up transistors are comprised in a static random access memory (SRAM) cell; forming a first middle-tier pull-down transistor and a second middle-tier pull-down transistor over the first and second bottom-tier pull-up transistors, wherein the first and second middle-tier pull-down transistors are comprised in the SRAM cell; forming a first top-tier pass-gate transistor, a second top-tier pass-gate transistor, a third top-tier pass-gate transistor, and a fourth top-tier pass-gate transistor over the first and second middle-tier pull-down transistors, wherein the first, second, third, and fourth top-tier pass-gate transistors are comprised in the SRAM cell.Type: ApplicationFiled: June 26, 2024Publication date: January 1, 2026Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ching-Wang YAO, Hsin-Cheng LIN, Tsai-Yu CHUNG, Tao CHOU, Chee-Wee LIU
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Publication number: 20250372156Abstract: A method includes forming a first read pull-down transistor and a first read pass-gate transistor over a substrate at a first level height, wherein the first read pull-down and first read pass-gate transistors are of a first read port of a static random access memory (SRAM) cell; forming a second read pull-down transistor and a second read pass-gate transistor over the substrate at a second level height higher than the first level height, wherein the second read pull-down and second read pass-gate transistors are of a second read port of the SRAM cell.Type: ApplicationFiled: May 31, 2024Publication date: December 4, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ching-Wang YAO, Je-Min HUNG, Hidehiro FUJIWARA, Chee-Wee LIU, Hung-Jen LIAO
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Publication number: 20250372508Abstract: A method for fabricating an integrated circuit structure is provided. The method include forming a semiconductor device over a semiconductor substrate, wherein the semiconductor device comprises a gate structure and first and second source/drain regions respectively on opposite sides of the gate structure; forming a frontside interconnect structure over a frontside of the semiconductor device, wherein the frontside interconnect structure comprise a frontside metal line and a frontside dielectric layer, and the frontside metal line is electrically connected to the first source/drain region of the semiconductor device; depositing a high-k dielectric layer over a backside of the semiconductor device, wherein a dielectric constant of the high-k dielectric layer is greater than about 3.9; etching an opening in the high-k dielectric layer to expose a backside of the second source/drain region; and forming a backside metal feature in the opening in the high-k dielectric layer.Type: ApplicationFiled: June 4, 2024Publication date: December 4, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., National Yang Ming Chiao Tung UniversityInventors: Chin-Yu LIU, Hsin-Cheng LIN, He-Wen SHEN, Chee-Wee LIU, Chenming HU
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Publication number: 20250366199Abstract: A device comprises a gate structure, n-type source/drain features, p-type source/drain features, an NFET channel, and a PFET channel. The gate structure is over a substrate. The n-type source/drain features are on opposite first and second sides of the gate structure, respectively. The p-type source/drain features are on opposite third and fourth sides of the gate structure, respectively. The NFET channel extends within the gate structure and connects the n-type source/drain features. The PFET channel extends within the gate structure and connects the p-type source/drain features. The NFET channel and the PFET channel are vertically spaced apart by the gate structure.Type: ApplicationFiled: August 7, 2025Publication date: November 27, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Shih-Ya LIN, Chien-Te TU, Chung-En TSAI, Chee-Wee LIU
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Publication number: 20250366200Abstract: A device comprises a first semiconductor layer, a dielectric layer, a second semiconductor layer, and a gate structure. The first semiconductor layer is over a substrate. The first semiconductor layer comprises a first channel region and first source/drain regions on opposite sides of the first channel region. The dielectric layer is over the first semiconductor layer. The second semiconductor layer is over the dielectric layer. The second semiconductor layer comprises a second channel region and second source/drain regions on opposite sides of the second channel region. The gate structure comprises a first portion extending in the dielectric layer, a second portion wrapping around the first channel region of the first semiconductor layer, and a third portion wrapping around the second channel region of the second semiconductor layer.Type: ApplicationFiled: August 8, 2025Publication date: November 27, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Chien-Te TU, Chee-Wee LIU
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Publication number: 20250366080Abstract: A method includes following steps. A channel region is formed extending lengthwise along a first direction over a substrate. Source/drain features are formed interfacing opposite sidewalls of the channel region, respectively. An MTJ-containing gate structure is formed extending lengthwise along a second direction across the channel region. The MTJ-containing gate structure comprises a gate dielectric layer over the channel region, an MTJ stack over the gate dielectric layer, and a gate metal over the MTJ stack. In a write operation of the MTJ stack, a capacitance of the MTJ stack is switched by controlling a voltage pulse duration of a gate voltage applied across the MTJ stack, with no current flowing through the MTJ stack in the write operation for writing the MTJ stack.Type: ApplicationFiled: August 6, 2025Publication date: November 27, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ya-Jui TSOU, Wei-Jen CHEN, Pang-Chun LIU, Chee-Wee LIU, Shao-Yu LIN, Chih-Lin WANG
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Publication number: 20250364025Abstract: A memory device includes a spin-orbit-transfer (SOT) bottom electrode, an SOT ferromagnetic free layer, a first tunnel barrier layer, a spin-transfer-torque (STT) ferromagnetic free layer, a second tunnel barrier layer and a reference layer. The SOT ferromagnetic free layer is over the SOT bottom electrode. The SOT ferromagnetic free layer has a magnetic orientation switchable by the SOT bottom electrode using a spin Hall effect or Rashba effect. The first tunnel barrier layer is over the SOT ferromagnetic free layer. The STT ferromagnetic free layer is over the first tunnel barrier layer and has a magnetic orientation switchable using an STT effect. The second tunnel barrier layer is over the STT ferromagnetic free layer. The second tunnel barrier layer has a thickness different from a thickness of the first tunnel barrier layer. The reference layer is over the second tunnel barrier layer and has a fixed magnetic orientation.Type: ApplicationFiled: August 6, 2025Publication date: November 27, 2025Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Jih-Chao CHIU, Ya-Jui TSOU, Wei-Jen CHEN, Chee-Wee LIU, Shao-Yu LIN, Chih-Lin WANG