Patents by Inventor Chee-Wee Liu
Chee-Wee Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240404951Abstract: A method includes forming a semiconductor device over a front-side of a substrate, the semiconductor device comprising a channel region, a gate structure across the channel region, and source/drain regions on the channel region and at opposite sides of the gate structure; forming a first source/drain contact on a first one of the source/drain regions; forming a front-side interconnect structure over the first source/drain contact; forming a first dielectric through-silicon via extending through the substrate from a cross-sectional view, the first dielectric through-silicon via overlapping the first source/drain contact from a top view; forming a back-side interconnect structure over a back-side of the substrate, wherein the first dielectric through-silicon via has a back-side surface in contact with the back-side interconnect structure.Type: ApplicationFiled: June 1, 2023Publication date: December 5, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Chia-Che CHUNG, Chia-Jung TSEN, Chee-Wee LIU
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Publication number: 20240395892Abstract: A semiconductor device includes a substrate, a semiconductor strip, an isolation dielectric, a plurality of channel layers, a gate structure, a plurality of source/drain structures, and an isolation layer. The semiconductor strip extends upwardly from the substrate and has a length extending along a first direction. The isolation dielectric laterally surrounds the semiconductor strip. The channel layers extend in the first direction above the semiconductor strip and arrange in a second direction substantially perpendicular to the substrate. The gate structure surrounds each of the channel layers. The source/drain structures are above the semiconductor strip and on either side of the channel layers. The isolation layer is interposed between the semiconductor strip and the gate structure and further interposed between the semiconductor strip and each of the plurality of source/drain structures.Type: ApplicationFiled: July 31, 2024Publication date: November 28, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Yu-Shiang HUANG, Chee-Wee LIU
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Patent number: 12154951Abstract: The present disclosure describes a semiconductor device includes a substrate, a buffer layer on the substrate, and a stacked fin structure on the buffer layer. The buffer layer can include germanium, and the stacked fin structure can include a semiconductor layer with germanium and tin. The semiconductor device further includes a gate structure wrapped around a portion of the semiconductor layer and an epitaxial structure on the buffer layer and in contact with the semiconductor layer. The epitaxial structure includes germanium and tin.Type: GrantFiled: March 6, 2023Date of Patent: November 26, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shahaji B. More, Cheng-Han Lee, Shih-Chieh Chang, Shih-Ya Lin, Chung-En Tsai, Chee-Wee Liu
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Publication number: 20240387545Abstract: A device comprises a gate structure, n-type source/drain features, p-type source/drain features, an NFET channel, and a PFET channel. The gate structure is over a substrate. The n-type source/drain features are on opposite first and second sides of the gate structure, respectively. The p-type source/drain features are on opposite third and fourth sides of the gate structure, respectively. The NFET channel extends within the gate structure and connects the n-type source/drain features. The PFET channel extends within the gate structure and connects the p-type source/drain features. The NFET channel and the PFET channel are vertically spaced apart by the gate structure.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Shih-Ya LIN, Chien-Te TU, Chung-En TSAI, Chee-Wee LIU
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Publication number: 20240371932Abstract: An integrated circuit structure includes a substrate, a bottom nanostructure transistor, and a top nanostructure transistor. The bottom nanostructure transistor is over the substrate and includes a first channel layer, a first gate structure, and first source/drain epitaxial structures. The first gate structure wraps around the first channel layer. The first source/drain epitaxial structures are on opposite sides of the first channel layer. The top nanostructure transistor is over the bottom nanostructure transistor and includes a second channel layer, a second gate structure, and second source/drain epitaxial structures. The second channel layer is over the first channel layer. The second gate structure wraps around the second channel layer. A bottom surface of the second gate structure is substantially coplanar with a bottom surface of the first gate structure. The second source/drain epitaxial structures are on opposite sides of the second channel layer.Type: ApplicationFiled: May 1, 2023Publication date: November 7, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Hsin-Cheng LIN, Yi-Chun LIU, Kung-Ying CHIU, Chee-Wee LIU
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Publication number: 20240371933Abstract: Various embodiments include stacked transistors and methods of forming stacked transistors. In an embodiment, a device includes: a first nanostructure; a second nanostructure above the first nanostructure; a first gate structure extending along a top surface and a bottom surface of the first nanostructure; and a second gate structure extending along a top surface and a bottom surface of the second nanostructure. The first gate structure is disposed at a first side of the first nanostructure and a first side of the second nanostructure. The second gate structure is disposed at a second side of the first nanostructure and a second side of the second nanostructure. The second side of the first nanostructure is opposite the first side of the first nanostructure. The second side of the second nanostructure opposite the first side of the second nanostructure.Type: ApplicationFiled: November 14, 2023Publication date: November 7, 2024Inventors: Hsin-Cheng Lin, Ching-Wang Yao, Kung-Ying Chiu, Chee Wee Liu
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Publication number: 20240363624Abstract: A device includes a semiconductor substrate, a first transistor, a second transistor over the first transistor and a first isolation structure. The first transistor is on the semiconductor substrate. The first transistor comprises a first channel, a first source and a first drain. The first source and the first drain are on opposite sides of the first channel. The second transistor comprises a second channel, a second source and a second drain. The second source and the second drain are on opposite sides of the second channel. The first transistor is connected in series with the second transistor. The first isolation structure is vertically between the first drain and the second source.Type: ApplicationFiled: April 26, 2023Publication date: October 31, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng LIN, Ching-Wang YAO, Kung-Ying CHIU, Chee-Wee LIU
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Publication number: 20240355912Abstract: A memory device comprises a source region, a drain region, a channel region, a gate dielectric layer, an MTJ stack, and a metal gate. The source region and the drain region are over a substrate. The channel region is between the source region and the drain region. The gate dielectric layer is over the channel region. The MTJ stack is over the gate dielectric layer. The MTJ stack comprises a first ferromagnetic layer, a second ferromagnetic layer with a switchable magnetization, and a tunnel barrier layer between the first and second ferromagnetic layers. The metal gate is over the MTJ stack.Type: ApplicationFiled: July 1, 2024Publication date: October 24, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ya-Jui TSOU, Wei-Jen CHEN, Pang-Chun LIU, Chee-Wee LIU, Shao-Yu LIN, Chih-Lin WANG
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Publication number: 20240347536Abstract: An integrated circuit includes a first transistor and a second transistor. The first transistor includes first semiconductor channel layers, first gate structure, and a first source structure and a first drain structure on opposites sides of the first gate structure. The second transistor includes second semiconductor channel layers, second gate structure, and a second source structure and a second drain structure on opposites sides of the second gate structure. The first source structure of the first transistor is electrically coupled to the second drain structure of the second transistor. A thickness of each of the first semiconductor channel layers is less than a thickness of each of the second semiconductor channel layers, and a bandgap of a material of the first semiconductor channel layers is larger than a bandgap of a material of the second semiconductor channel layers.Type: ApplicationFiled: April 12, 2023Publication date: October 17, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng LIN, Chun-Yi CHENG, Ching-Wang YAO, Chee-Wee LIU
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Publication number: 20240341200Abstract: A memory structure comprises a dielectric layer, a first ferromagnetic bottom electrode, a second ferromagnetic bottom electrode, an SOT channel layer, and an MTJ structure. The dielectric layer is over the substrate. The first ferromagnetic bottom electrode extends through the dielectric layer. The second ferromagnetic bottom electrode extends through the dielectric layer, and is spaced apart from the first ferromagnetic bottom electrode. The SOT channel layer extends from the first ferromagnetic bottom electrode to the second ferromagnetic bottom electrode. The MTJ structure is over the SOT channel layer.Type: ApplicationFiled: June 20, 2024Publication date: October 10, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Wei-Jen CHEN, Ya-Jui TSOU, Chee-Wee LIU, Shao-Yu LIN, Chih-Lin WANG
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Publication number: 20240339530Abstract: An integrated circuit includes a first transistor and a second transistor. The first transistor includes first semiconductor channel layers, first gate structure, and a first source structure and a first drain structure on opposites sides of the first gate structure. The second transistor includes second semiconductor channel layers, second gate structure, and a second source structure and a second drain structure on opposites sides of the second gate structure. The first source structure of the first transistor is electrically coupled to the second drain structure of the second transistor. A thickness of each of the first semiconductor channel layers is less than a thickness of each of the second semiconductor channel layers, and a bandgap of a material of the first semiconductor channel layers is larger than a bandgap of a material of the second semiconductor channel layers.Type: ApplicationFiled: April 10, 2023Publication date: October 10, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng LIN, Chun-Yi CHENG, Ching-Wang YAO, Chee-Wee LIU
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Patent number: 12100737Abstract: The current disclosure describes techniques for individually selecting the number of channel strips for a device. The channel strips are selected by defining a three-dimensional active region that include a surface active area and a depth/height. Semiconductor strips in the active region are selected as channel strips. Semiconductor strips contained in the active region will be configured to be channel strips. Semiconductor strips not included in the active region are not selected as channel strips and are separated from source/drain structures by an auxiliary buffer layer.Type: GrantFiled: July 26, 2023Date of Patent: September 24, 2024Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan UniversityInventors: Ya-Jui Tsou, Zong-You Luo, Wen Hung Huang, Jhih-Yang Yan, Chee-Wee Liu
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Publication number: 20240284653Abstract: A memory device includes a first pull-down transistor, a first pass-gate transistor, a second pull-down transistor, a second pass-gate transistor, a first pull-up transistor, and a second pull-up transistor. A first power line, a first bit line, and a second bit line is provided, the first power line includes first and second portions separated from each other, wherein in a cross-sectional view, the second portion of the first power line is laterally between the first and second bit lines along a direction. A first via electrically connects the first portion of the first power line to the first pull-down transistor. A second via electrically connects the first bit line to the first pass-gate transistor. A third via electrically connects the second portion of the first power line to the second pull-down transistor. A fourth via electrically connects the second bit line to the second pass-gate transistor.Type: ApplicationFiled: February 17, 2023Publication date: August 22, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Hsin-Cheng LIN, Tao CHOU, Chee-Wee LIU
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Patent number: 12069965Abstract: A method includes forming a memory stack over a substrate. A dielectric layer is deposited to cover the memory stack. An opening is formed in the dielectric layer. The opening does not expose the memory stack. A spin-orbit-torque (SOT) layer is formed in the opening. A free layer is formed over the dielectric layer to interconnect the memory stack and the SOT layer.Type: GrantFiled: July 17, 2023Date of Patent: August 20, 2024Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ya-Jui Tsou, Zong-You Luo, Chee-Wee Liu, Shao-Yu Lin, Liang-Chor Chung, Chih-Lin Wang
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Patent number: 12062713Abstract: A memory device comprises a source region, a drain region, a channel region, a gate dielectric layer, an MTJ stack, and a metal gate. The source region and the drain region are over a substrate. The channel region is between the source region and the drain region. The gate dielectric layer is over the channel region. The MTJ stack is over the gate dielectric layer. The MTJ stack comprises a first ferromagnetic layer, a second ferromagnetic layer with a switchable magnetization, and a tunnel barrier layer between the first and second ferromagnetic layers. The metal gate is over the MTJ stack.Type: GrantFiled: April 7, 2022Date of Patent: August 13, 2024Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Ya-Jui Tsou, Wei-Jen Chen, Pang-Chun Liu, Chee-Wee Liu, Shao-Yu Lin, Chih-Lin Wang
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Patent number: 12052934Abstract: A memory structure comprises a dielectric layer, a first ferromagnetic bottom electrode, a second ferromagnetic bottom electrode, an SOT channel layer, and an MTJ structure. The dielectric layer is over the substrate. The first ferromagnetic bottom electrode extends through the dielectric layer. The second ferromagnetic bottom electrode extends through the dielectric layer, and is spaced apart from the first ferromagnetic bottom electrode. The SOT channel layer extends from the first ferromagnetic bottom electrode to the second ferromagnetic bottom electrode. The MTJ structure is over the SOT channel layer.Type: GrantFiled: February 10, 2022Date of Patent: July 30, 2024Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Wei-Jen Chen, Ya-Jui Tsou, Chee-Wee Liu, Shao-Yu Lin, Chih-Lin Wang
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Publication number: 20240243165Abstract: A method includes forming a sacrificial multi-layer stack including first, second, and third sacrificial layers stacked in a vertical direction on a substrate; removing the first sacrificial layer to form a first space; depositing a first dielectric layer and a first electrode material in the first space; removing the second sacrificial layer to form a second space; depositing a second dielectric layer and a second electrode material in the second space; removing the third sacrificial layer to form a third space; depositing a third dielectric layer and a third electrode material in the third space.Type: ApplicationFiled: January 12, 2023Publication date: July 18, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL YANG MING CHIAO TUNG UNIVERSITYInventors: Hsin-Cheng LIN, Tao CHOU, Chee-Wee LIU
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Publication number: 20240234465Abstract: A photosensor provided herein includes a sensing structure and a microlens. The sensing structure includes an epitaxial layer, a deep trench and a scattering structure. The epitaxial layer has an illuminated surface and a non-illuminated surface. The deep trench isolation is located along an edge of the epitaxial layer. The scattering structure is embedded in the epitaxial layer and extends inwardly from the illuminated surface. The scattering structure includes a first circular ring pattern and a peripheral pattern. The deep trench isolation surrounds the scattering structure, the peripheral pattern is connected with the deep trench isolation and the first circular ring pattern is separated from the peripheral pattern and the deep trench isolation. The microlens is disposed on the epitaxial layer, wherein the illuminated surface of the epitaxial layer is relatively close to the microlens than the non-illuminated surface.Type: ApplicationFiled: October 19, 2022Publication date: July 11, 2024Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Eknath Sarkar, Yichen Ma, Yu-Chieh Lee, Chee-Wee Liu
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Publication number: 20240212732Abstract: A device is provided. The device includes a physical unclonable function (PUF) cell array. The PUF cell array includes multiple bit cells, and generates a PUF response output, in response to a challenge input, based on a data state of one bit cell in the bit cells. Each of the bit cells stores a bit data and includes a transistor having a control terminal coupled to a word line and a first terminal coupled to a source line, a first memory cell having a first terminal coupled to a first data line and a second terminal coupled to a second terminal of the transistor, and a second memory cell having a first terminal coupled to a second data line, different from the first data line, and a second terminal coupled to the second terminal of the first memory cell at the second terminal of the transistor.Type: ApplicationFiled: March 8, 2024Publication date: June 27, 2024Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., NATIONAL TAIWAN UNIVERSITYInventors: Chia-Che CHUNG, Chia-Jung TSEN, Ya-Jui TSOU, Chee-Wee LIU
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Publication number: 20240204065Abstract: A high frequency transistor includes a substrate, a plurality of gates, a plurality of sources/drains, a first metal layer, a plurality of source/drain contacts, and a plurality of first gate contacts. The gates extend along a first direction on a surface of the substrate, and the sources/drains are disposed in the substrate on both sides of each of the gates. The first metal layer has a first portion extending along the first direction and a second portion extending along a second direction, and the first direction is perpendicular to the second direction. The first portion is a discontinuous line segment having a discontinuous region in the second direction, and the second portion is a continuous line segment passing through the discontinuous region. The source/drain contacts are respectively connected to the first portion and the sources/drains. The first gate contacts are respectively connected to the second portion and the gates.Type: ApplicationFiled: January 12, 2023Publication date: June 20, 2024Applicant: Powerchip Semiconductor Manufacturing CorporationInventors: Hsin-Cheng Lin, Avishek Das, Kuan-Ying Chiu, Chee-Wee Liu