Patents by Inventor Cheng Chi

Cheng Chi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11784233
    Abstract: An IC structure includes a source epitaxial structure, a drain epitaxial structure, a first silicide region, a second silicide region, a source contact, a backside via rail, a drain contact, and a front-side interconnection structure. The first silicide region is on a front-side surface, a first sidewall of the source epitaxial structure, and a second sidewall of the source epitaxial structure. The second silicide region is on a front-side surface of the drain epitaxial structure. The source contact is in contact with the first silicide region and has a protrusion extending past a backside surface of the source epitaxial structure. The backside via rail is in contact with the protrusion of the source contact. The drain contact is in contact with the second silicide region. The front-side interconnection structure is on a front-side surface of the source contact and a front-side surface of the drain contact.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Huan-Chieh Su, Li-Zhen Yu, Chun-Yuan Chen, Cheng-Chi Chuang, Shang-Wen Chang, Yi-Hsun Chiu, Pei-Yu Wang, Ching-Wei Tsai, Chih-Hao Wang
  • Publication number: 20230317566
    Abstract: A device includes a stack of semiconductor nanostructures, a gate structure wrapping around the semiconductor nanostructures, a source/drain region abutting the gate structure and the stack, a contact structure on the source/drain region, a backside dielectric layer under the stack, and a via structure extending from the contact structure to a top surface of the backside dielectric layer.
    Type: Application
    Filed: August 5, 2022
    Publication date: October 5, 2023
    Inventors: Yun Ju FAN, Huan-Chieh SU, Chun-Yuan CHEN, Cheng-Chi CHUANG, Chih-Hao WANG
  • Patent number: 11777003
    Abstract: A semiconductor structure includes an epitaxial region having a front side and a backside. The semiconductor structure includes an amorphous layer formed over the backside of the epitaxial region, wherein the amorphous layer includes silicon. The semiconductor structure includes a first silicide layer formed over the amorphous layer. The semiconductor structure includes a first metal contact formed over the first silicide layer.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: October 3, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Chuan Chiu, Huan-Chieh Su, Pei-Yu Wang, Cheng-Chi Chuang, Chun-Yuan Chen, Li-Zhen Yu, Chia-Hao Chang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20230306943
    Abstract: A vocal removal method and a system thereof are provided. In the vocal removal method, a voice separation model is generated and trained to process a real-time input music to separate the voice and the accompaniment. The vocal removal method further comprises the steps of feature extraction and reconstruction to obtain the voice minimized music.
    Type: Application
    Filed: October 22, 2020
    Publication date: September 28, 2023
    Inventors: Jianwen ZHENG, Shao-Fu SHIH, Kai LI, Cheng CHI
  • Patent number: 11769685
    Abstract: A manufacturing method of a semiconductor package is provided. The manufacturing method includes the following. A plurality of semiconductor components are provided. Each semiconductor component has at least one conductive bump. A substrate is provided. The substrate has a plurality of conductive pads. A transfer device is provided. The transfer device transfers the semiconductor components onto the substrate. A heating device is provided. The heating device heats or pressurizes at least two semiconductor components. During transferring of the semiconductor components to the substrate, the at least one conductive bump of each semiconductor component is docked to a corresponding one of the conductive pads.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: September 26, 2023
    Assignee: Innolux Corporation
    Inventors: Cheng-Chi Wang, Wen-Hsiang Liao, Yeong-E Chen, Hung-Sheng Chou, Cheng-En Cheng
  • Patent number: 11769696
    Abstract: During a front side process of a wafer, a hard mask layer is formed under a metal portion of a semiconductor device, and an epitaxial layer is deposited to form epitaxial portions of the semiconductor device. In a back side process of the wafer to cut the epitaxial layer, the metal portion is covered and protected by the hard mask layer from damages during etching of the epitaxial layer.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: September 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Yuan Chen, Li-Zhen Yu, Huan-Chieh Su, Lo-Heng Chang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20230298943
    Abstract: A semiconductor structure has a frontside and a backside. The semiconductor structure includes an isolation structure at the backside; one or more transistors at the frontside, wherein the one or more transistors have source/drain epitaxial features; two metal plugs through the isolation structure and contacting two of the source/drain electrodes from the backside; and a dielectric liner filling a space between the two metal plugs, wherein the dielectric liner partially or fully surrounds an air gap between the two metal plugs.
    Type: Application
    Filed: May 25, 2023
    Publication date: September 21, 2023
    Inventors: Chun-Yuan Chen, Huan-Chieh Su, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20230299167
    Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor structure according to one embodiment includes first nanostructures, a first gate structure wrapping around each of the first nanostructures and disposed over an isolation structure, and a backside gate contact disposed below the first nanostructures and adjacent to the isolation structure. A bottom surface of the first gate structure is in direct contact with the backside gate contact.
    Type: Application
    Filed: May 22, 2023
    Publication date: September 21, 2023
    Inventors: Huan-Chieh Su, Chun-Yuan Chen, Lo-Heng Chang, Li-Zhen Yu, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11764077
    Abstract: The embodiment of the disclosure provides a composite layer circuit element and a manufacturing method thereof. The manufacturing method of the composite layer circuit element includes the following. A carrier is provided. A first dielectric layer is formed on the carrier, and the first dielectric layer is patterned. The carrier on which the first dielectric layer is formed is disposed on a first curved-surface mold, and the first dielectric layer is cured. A second dielectric layer is formed on the first dielectric layer. The second dielectric layer is patterned. The carrier on which the first dielectric layer and the second dielectric layer are formed is disposed on a second curved-surface mold, and the second dielectric layer is cured. A thickness of a projection of the first curved-surface mold is smaller than a thickness of a projection of the second curved-surface mold.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: September 19, 2023
    Assignee: Innolux Corporation
    Inventors: Chuan-Ming Yeh, Heng-Shen Yeh, Kuo-Jung Fan, Cheng-Chi Wang
  • Publication number: 20230287161
    Abstract: A method of forming an etched part includes forming a substrate including a thermoset resin and etching a surface of the substrate. The thermoset resin includes a vat photopolymerization (VPP) thermoset resin and at least one of an etchable phase and etchable particles disposed within the VPP thermoset resin. The etching removes the etchable phase from the VPP thermoset resin at the surface of the substrate such that a plurality of micro-mechanical bonding sites are formed on an etched surface of the substrate.
    Type: Application
    Filed: May 18, 2023
    Publication date: September 14, 2023
    Applicant: Ford Global Technologies, LLC
    Inventors: Xiaojiang Wang, Shannon Christine Bollin, Robert D. Bedard, Matthew Cassoli, Ellen Cheng-chi Lee
  • Patent number: 11752204
    Abstract: The present invention provides vaccines comprising carbohydrate antigen conjugated to a diphtheria toxin (DT) as a carrier protein, wherein the ratio of the number of carbohydrate antigen molecule to the carrier protein molecule is higher than 5:1. Also disclosed herein is a novel saponin adjuvant and methods to inhibit cancer cells, by administering an effective amount of the vaccine disclose herein.
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: September 12, 2023
    Assignee: OBI PHARMA INC.
    Inventors: Wei-Han Lee, Nan-Hsuan Wang, Chung-Hao Chang, Yih-Huang Hsieh, Cheng-Der Tony Yu, Cheng-Chi Wang, Yu-Hsin Lin, Yu-Chen Lin, I-Ju Chen
  • Publication number: 20230282523
    Abstract: A transistor structure includes a semiconductor substrate; an NFET channel structure atop the substrate; a PFET channel structure atop the substrate; a first dielectric atop the PFET channel structure; a second dielectric atop the NFET channel structure; a shared internal metal gate atop the dielectrics; a shared ferroelectric layer atop the shared internal metal gate; and a shared external gate electrode atop the shared ferroelectric layer. The first and second dielectrics are doped with different metals that provide differing overall work functions for the PFET and the NFET. A method for making a transistor structure includes depositing a shared dielectric onto an NFET channel structure and a PFET channel structure, and converting the shared dielectric to a first high-k dielectric atop the PFET channel structure and a second high-k dielectric atop the NFET channel structure. The first high-k dielectric and the second high-k dielectric are doped with different metals.
    Type: Application
    Filed: March 7, 2022
    Publication date: September 7, 2023
    Inventors: Takashi Ando, REINALDO VEGA, Praneet Adusumilli, Cheng Chi
  • Patent number: 11749728
    Abstract: A method includes forming a dummy gate structure over a substrate; forming a source/drain structure over the substrate; replacing the dummy gate structure with a metal gate structure; forming a protection cap over the metal gate structure; forming a source/drain contact over the source/drain structure; performing a selective deposition process to form a first etch stop layer on the protection cap, in which the selective deposition process has a faster deposition rate on the protection cap than on the source/drain contact; depositing a second etch stop layer over the first etch stop layer the source/drain contact; etching the second etch stop layer to form an opening; and forming a via contact in the opening.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Yu-Ming Lin, Chih-Hao Wang
  • Publication number: 20230275155
    Abstract: A semiconductor nanostructure and an epitaxial semiconductor material portion are formed on a front surface of a substrate, and a planarization dielectric layer is formed thereabove. Recess cavities are formed to expose a first active region and the epitaxial semiconductor material portion. A metallic cap structure is formed on the first active region, and a sacrificial metallic material portion is formed on the epitaxial semiconductor material portion. A connector via cavity is formed by anisotropically etching the sacrificial metallic material portion and an underlying portion of the epitaxial semiconductor material portion while the metallic cap structure is masked with a hard mask layer. A connector via structure is formed in the connector via cavity. Front-side metal interconnect structures are formed on the connector via structure and the metallic cap structure, and a backside via structure is formed through the substrate on the connector via structure.
    Type: Application
    Filed: May 5, 2023
    Publication date: August 31, 2023
    Inventors: Li-Zhen Yu, Chia-Hao Chang, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20230275154
    Abstract: A semiconductor nanostructure and an epitaxial semiconductor material portion are formed on a front surface of a substrate, and a planarization dielectric layer is formed thereabove. Recess cavities are formed to expose a first active region and the epitaxial semiconductor material portion. A metallic cap structure is formed on the first active region, and a sacrificial metallic material portion is formed on the epitaxial semiconductor material portion. A connector via cavity is formed by anisotropically etching the sacrificial metallic material portion and an underlying portion of the epitaxial semiconductor material portion while the metallic cap structure is masked with a hard mask layer. A connector via structure is formed in the connector via cavity. Front-side metal interconnect structures are formed on the connector via structure and the metallic cap structure, and a backside via structure is formed through the substrate on the connector via structure.
    Type: Application
    Filed: May 5, 2023
    Publication date: August 31, 2023
    Inventors: Li-Zhen Yu, Chia-Hao Chang, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 11742385
    Abstract: A semiconductor structure includes a source/drain (S/D) feature; one or more channel semiconductor layers connected to the S/D feature; a gate structure engaging the one or more channel semiconductor layers; a first silicide feature at a frontside of the S/D feature; a second silicide feature at a backside of the S/D feature; and a dielectric liner layer at the backside of the S/D feature, below the second silicide feature, and spaced away from the second silicide feature by a first gap.
    Type: Grant
    Filed: May 23, 2022
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Publication number: 20230268403
    Abstract: A device includes semiconductor device structure includes a first dielectric layer. A first plurality of nanostructures are disposed on the first dielectric layer, with the first plurality of nanostructures overlying one another. A first source/drain region is disposed laterally adjacent to a first side of the first plurality of nanostructures. A second dielectric layer is on a first side of the first source/drain region. A front side source/drain contact is disposed on a second side of the first source/drain region that is opposite the first side, and a backside source/drain contact is disposed on the first side of the first source/drain region. The backside source/drain contact extends through the second dielectric layer.
    Type: Application
    Filed: July 6, 2022
    Publication date: August 24, 2023
    Inventors: Cheng-Chi CHUANG, Li-Zhen YU, Huan-Chieh SU, Chun-Yuan CHEN, Lin-Yu HUANG, Chih-Hao WANG
  • Publication number: 20230268277
    Abstract: Embodiments of the present disclosure provide semiconductor device structures. In one embodiment, the semiconductor device structure includes a gate dielectric layer, a gate electrode layer in contact with the gate dielectric layer, a first self-aligned contact (SAC) layer disposed over the gate electrode layer, an isolation layer disposed between the gate electrode layer and the first SAC layer, and a first sidewall spacer in contact with the gate dielectric layer, the isolation layer, and the first SAC layer.
    Type: Application
    Filed: April 26, 2023
    Publication date: August 24, 2023
    Inventors: Sheng-Tsung WANG, Lin-Yu HUANG, Cheng-Chi CHUANG, Chih-Hao WANG
  • Publication number: 20230260897
    Abstract: A semiconductor structure includes a source/drain (S/D) region, one or more dielectric layers over the S/D region, one or more semiconductor channel layers connected to the S/D region, an isolation structure under the S/D region and the one or more semiconductor channel layers, and a via under the S/D region and electrically connected to the S/D region. A lower portion of the via is surrounded by the isolation structure and an upper portion of the via extends vertically between the S/D region and the isolation structure.
    Type: Application
    Filed: April 17, 2023
    Publication date: August 17, 2023
    Inventors: Chun-Yuan Chen, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang
  • Publication number: 20230256608
    Abstract: Systems and methods for manipulating deformable objects using air are disclosed. In one embodiment, a system for manipulating a deformable object, the system includes a first robot arm having a first gripper, a second robot arm having a second gripper, a blower robot arm having an air pump, and one or more processors programmed to control the first robot arm and the second robot arm to grasp the deformable object using the first gripper and the second gripper, respectively, and to control the blower robot arm to perform a plurality of blowing actions onto the deformable object until an objective is satisfied.
    Type: Application
    Filed: February 10, 2023
    Publication date: August 17, 2023
    Applicants: Toyota Research Institute, Inc., Columbia University, Toyota Jidosha Kabushiki Kaisha
    Inventors: Zhenjia Xu, Cheng Chi, Benjamin Burchfiel, Eric Cousineau, Siyuan Feng, Shuran Song