Patents by Inventor Chia-Hsiang Lin
Chia-Hsiang Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12272693Abstract: A method for fabricating a semiconductor device includes the steps of: providing a substrate having a high-voltage (HV) region and a low-voltage (LV) region; forming a base on the HV region and fin-shaped structures on the LV region; forming a first insulating around the fin-shaped structures; removing the base, the first insulating layer, and part of the fin-shaped structures to form a first trench in the HV region and a second trench in the LV region; forming a second insulating layer in the first trench and the second trench; and planarizing the second insulating layer to form a first shallow trench isolation (STI) on the HV region and a second STI on the LV region.Type: GrantFiled: March 21, 2022Date of Patent: April 8, 2025Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ya Chiu, Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin, Chien-Ting Lin, Chia-Jung Hsu, Chin-Hung Chen
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Publication number: 20250113559Abstract: Trench contact structures with etch stop layers, and methods of fabricating trench contact structures with etch-stop layers, are described. In an example, an integrated circuit structure includes a fin structure. An epitaxial source or drain structure is on the fin structure. An isolation structure is laterally adjacent to sides of the fin structure. A dielectric layer is on at least a portion of a top surface of the isolation structure and partially surrounds the epitaxial source or drain structure and leaves an exposed portion of the epitaxial source or drain structure. A conductive trench contact structure is on the exposed portion of the epitaxial source or drain structure. The conductive trench contact structure does not extend into the isolation structure.Type: ApplicationFiled: September 28, 2023Publication date: April 3, 2025Inventors: Guowei XU, Chiao-Ti HUANG, Feng ZHANG, Robin CHAO, Tao CHU, Anand S. MURTHY, Ting-Hsiang HUNG, Chung-Hsun LIN, Oleg GOLONZKA, Yang ZHANG, Chia-Ching LIN
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Publication number: 20250110307Abstract: An optical system affixed to an electronic apparatus is provided, including a first optical module, a second optical module, and a third optical module. The first optical module is configured to adjust the moving direction of a first light from a first moving direction to a second moving direction, wherein the first moving direction is not parallel to the second moving direction. The second optical module is configured to receive the first light moving in the second moving direction. The first light reaches the third optical module via the first optical module and the second optical module in sequence. The third optical module includes a first photoelectric converter configured to transform the first light into a first image signal.Type: ApplicationFiled: December 12, 2024Publication date: April 3, 2025Inventors: Chao-Chang HU, Chih-Wei WENG, Chia-Che WU, Chien-Yu KAO, Hsiao-Hsin HU, He-Ling CHANG, Chao-Hsi WANG, Chen-Hsien FAN, Che-Wei CHANG, Mao-Gen JIAN, Sung-Mao TSAI, Wei-Jhe SHEN, Yung-Ping YANG, Sin-Hong LIN, Tzu-Yu CHANG, Sin-Jhong SONG, Shang-Yu HSU, Meng-Ting LIN, Shih-Wei HUNG, Yu-Huai LIAO, Mao-Kuo HSU, Hsueh-Ju LU, Ching-Chieh HUANG, Chih-Wen CHIANG, Yu-Chiao LO, Ying-Jen WANG, Shu-Shan CHEN, Che-Hsiang CHIU
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Publication number: 20250113595Abstract: Multiple voltage threshold integrated circuit structures with local layout effect tuning, and methods of fabricating multiple voltage threshold integrated circuit structures with local layout effect tuning, are described. For example, an integrated circuit structure includes a first fin structure or vertical arrangement of horizontal nanowires. A second fin structure or vertical arrangement of horizontal nanowires is laterally spaced apart from the first fin structure or vertical arrangement of horizontal nanowires. An N-type gate structure is over the first fin structure or vertical arrangement of horizontal nanowires. A P-type gate structure is over the second fin structure or vertical arrangement of horizontal nanowires, the P-type gate structure in contact with the N-type gate structure with a PN boundary between the P-type gate structure and the N-type gate structure.Type: ApplicationFiled: September 28, 2023Publication date: April 3, 2025Inventors: Tao CHU, Minwoo JANG, Yanbin LUO, Paul PACKAN, Guowei XU, Chiao-Ti HUANG, Robin CHAO, Feng ZHANG, Ting-Hsiang HUNG, Chia-Ching LIN, Yang ZHANG, Chung-Hsun LIN, Anand S. MURTHY
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Publication number: 20250112120Abstract: Integrated circuit structures having deep via bar width tuning are described. For example, an integrated circuit structure includes a plurality of gate lines extending over first and second semiconductor nanowire stack channel structures or fin structures. A plurality of trench contacts is intervening with the plurality of gate lines. A conductive structure is between the first and second semiconductor nanowire stack channel structures or fin structures, the conductive structure having a first width in a first region and a second width in a second region between the first and second semiconductor nanowire stack channel structures or fin structures, the second width different than the first width.Type: ApplicationFiled: September 29, 2023Publication date: April 3, 2025Inventors: Tao CHU, Minwoo JANG, Yanbin LUO, Paul PACKAN, Conor P. PULS, Guowei XU, Chiao-Ti HUANG, Robin CHAO, Feng ZHANG, Ting-Hsiang HUNG, Chia-Ching LIN, Yang ZHANG, Chung-Hsun LIN, Anand S. MURTHY
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Publication number: 20250113547Abstract: Integrated circuit structures having internal spacers for 2D channel materials, and methods of fabricating integrated circuit structures having internal spacers for 2D channel materials, are described. For example, an integrated circuit structure includes a stack of two-dimensional (2D) material nanowires. A gate structure is vertically around the stack of 2D material nanowires. Internal gate spacers are between vertically adjacent ones of the stack of 2D material nanowires and laterally adjacent to the gate structure. The 2D material nanowires are recessed relative to the internal gate spacers. Conductive contact structures are at corresponding ends of the stack of 2D material nanowires, the conductive contact structures adjacent to the internal gate spacers and vertically overlapping with the internal gate spacers.Type: ApplicationFiled: September 29, 2023Publication date: April 3, 2025Inventors: Chia-Ching LIN, Tao CHU, Chiao-Ti HUANG, Guowei XU, Robin CHAO, Feng ZHANG, Yue ZHONG, Yang ZHANG, Ting-Hsiang HUNG, Kevin P. O’BRIEN, Uygar E. AVCI, Carl H. NAYLOR, Mahmut Sami KAVRIK, Andrey VYATSKIKH, Rachel STEINHARDT, Chelsey DOROW, Kirby MAXEY
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Publication number: 20250107175Abstract: Integrated circuit structures having reduced local layout effects, and methods of fabricating integrated circuit structures having reduced local layout effects, are described. For example, an integrated circuit structure includes an NMOS region including a first plurality of fin structures or vertical stacks of horizontal nanowires, and first alternating gate lines and trench contact structures over the first plurality of fin structures or vertical stacks of horizontal nanowires. The integrated circuit structure also includes a PMOS region including a second plurality of fin structures or vertical stacks of horizontal nanowires, and second alternating gate and trench contact structures over the second plurality of fin structures or vertical stacks of horizontal nanowires. A gate line is shared between the NMOS region and the PMOS region, and a trench contact structure is shared between the NMOS region and the PMOS region.Type: ApplicationFiled: September 25, 2023Publication date: March 27, 2025Inventors: Tao CHU, Minwoo JANG, Yanbin LUO, Paul PACKAN, Guowei XU, Chiao-Ti HUANG, Robin CHAO, Feng ZHANG, Ting-Hsiang HUNG, Chia-Ching LIN, Yang ZHANG, Chung-Hsun LIN, Anand S. MURTHY
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Publication number: 20250107156Abstract: Techniques are provided herein to form an integrated circuit having dielectric material formed in cavities beneath source or drain regions. The cavities may be formed within subfin portions of semiconductor devices. In one such example, a FET (field effect transistor) includes a gate structure extending around a fin or any number of nanowires of semiconductor material. The semiconductor material may extend in a first direction between source and drain regions while the gate structure extends over the semiconductor material in a second direction substantially orthogonal to the first direction. A dielectric fill may be formed in a recess beneath the source or drain regions, or a dielectric liner may be formed on sidewalls of the recess, to prevent epitaxial growth of the source or drain regions from the subfins. Removal of the semiconductor subfin from the backside may then be performed without causing damage to the source or drain regions.Type: ApplicationFiled: September 21, 2023Publication date: March 27, 2025Applicant: Intel CorporationInventors: Chiao-Ti Huang, Robin Chao, Jaladhi Mehta, Tao Chu, Guowei Xu, Ting-Hsiang Hung, Feng Zhang, Yang Zhang, Chia-Ching Lin, Chung-Hsun Lin, Anand Murthy
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Publication number: 20250107212Abstract: Techniques are provided to form an integrated circuit having an airgap spacer between at least a transistor gate structure and an adjacent source or drain contact. In one such example, a FET (field effect transistor) includes a gate structure that extends around a fin or any number of nanowires (or nanoribbons or nanosheets, as the case may be) of semiconductor material. The semiconductor material may extend in a first direction between source and drain regions while the gate structure extends over the semiconductor material in a second direction. Airgaps are provided in the regions between the gate structures and the adjacent source/drain contacts. The airgaps have a low dielectric constant (e.g., around 1.0) to reduce the parasitic capacitance between the conductive structures.Type: ApplicationFiled: September 21, 2023Publication date: March 27, 2025Applicant: Intel CorporationInventors: Yang Zhang, Guowei Xu, Tao Chu, Robin Chao, Chiao-Ti Huang, Feng Zhang, Ting-Hsiang Hung, Chia-Ching Lin, Anand Murthy
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Patent number: 12261086Abstract: A method for fabricating a semiconductor device includes first providing a substrate having a high-voltage (HV) region, a medium-voltage (MV) region, and a low-voltage (LV) region, forming a HV device on the HV region, and forming a LV device on the LV region. Preferably, the HV device includes a first base on the substrate, a first gate dielectric layer on the first base, and a first gate electrode on the first gate dielectric layer. The LV device includes a fin-shaped structure on the substrate, and a second gate electrode on the fin-shaped structure, in which a top surface of the first gate dielectric layer is even with a top surface of the fin-shaped structure.Type: GrantFiled: January 27, 2022Date of Patent: March 25, 2025Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin, Chien-Ting Lin, Chun-Ya Chiu, Chia-Jung Hsu, Chin-Hung Chen
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Publication number: 20250096114Abstract: Techniques to form semiconductor devices can include one or more via structures having substrate taps. A semiconductor device includes a gate structure around or otherwise on a semiconductor region (or channel region). The gate structure may extend over the semiconductor regions of any number of devices along a given direction. The gate structure may be interrupted, for example, between two transistors with a via structure that extends through an entire thickness of the gate structure and includes a conductive core. The via structure has a conductive foot portion beneath the gate structure and a conductive arm portion extending from the conductive foot portion along a height of the gate structure. The conductive foot portion has a greater width along the given direction than any part of the conductive arm portion. The via structure may further include one or more dielectric layers between the conductive arm portion and the gate structure.Type: ApplicationFiled: September 19, 2023Publication date: March 20, 2025Applicant: Intel CorporationInventors: Robin Chao, Chiao-Ti Huang, Guowei Xu, Ting-Hsiang Hung, Tao Chu, Feng Zhang, Chia-Ching Lin, Yang Zhang, Anand Murthy, Conor P. Puls
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Publication number: 20250098260Abstract: Integrated circuit structures having patch spacers, and methods of fabricating integrated circuit structures having patch spacers, are described. For example, an integrated circuit structure includes a stack of horizontal nanowires. A gate structure is vertically around the stack of horizontal nanowires, the stack of horizontal nanowires extending laterally beyond the gate structure. An internal gate spacer is between vertically adjacent ones of the stack of horizontal nanowires and laterally adjacent to the gate structure. An external gate spacer is along sides of the gate structure and over the stack of horizontal nanowires, the external gate spacer having one or more patch spacers therein.Type: ApplicationFiled: September 19, 2023Publication date: March 20, 2025Inventors: Guowei XU, Feng ZHANG, Chiao-Ti HUANG, Robin CHAO, Tao CHU, Chung-Hsun LIN, Oleg GOLONZKA, Yang ZHANG, Ting-Hsiang HUNG, Chia-Ching LIN, Anand S. MURTHY
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Publication number: 20250085548Abstract: A light field display module including a light field display layer, an adjustment layer, and an image forming layer is provided. The light field display layer is configured to form a light field image beam. The adjustment layer is disposed on a path of the light field image beam, and configured to adjust the light field image beam. The image forming layer is disposed on the path of the light field image beam from the adjustment layer, and configured to change a position of a light field image by changing a direction of the light field image beam. The image forming layer has multiple optical micro-structures.Type: ApplicationFiled: August 1, 2024Publication date: March 13, 2025Applicant: Industrial Technology Research InstituteInventors: Szu-Wei Wu, Yi-Hsiang Huang, Chia-Ping Lin, Yu-Hsiang Liu, Hung Tsou
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Publication number: 20250089310Abstract: Techniques are provided to form semiconductor devices that include through-gate structures (e.g., gate cut structures or conductive via structures) that have an airgap spacer between the structure and the adjacent gate electrode. In an example, a semiconductor device includes a gate structure around or otherwise on a semiconductor region (or channel region) that extends from a first source or drain region to a second source or drain region. A through-gate structure may extend in a third direction through an entire thickness of the gate structure and adjacent to the semiconductor region along the second direction. The through-gate structure may be a dielectric structure (e.g., a gate cut) or a conductive structure (e.g., a via). In either case, an airgap spacer exists between the through-gate structure and the gate structure.Type: ApplicationFiled: September 13, 2023Publication date: March 13, 2025Applicant: Intel CorporationInventors: Ting-Hsiang Hung, Yang Zhang, Robin Chao, Guowei Xu, Tao Chu, Chiao-Ti Huang, Feng Zhang, Chia-Ching Lin, Anand Murthy
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Publication number: 20250079363Abstract: A bonded semiconductor structure includes a first device wafer and a second device wafer. The first device includes a first dielectric layer, a first bonding pad disposed in the first dielectric layer, and a first bonding layer on the first dielectric layer. The second device wafer includes a second dielectric layer, a second bonding layer on the second dielectric layer, and a second bonding pad disposed in the second dielectric layer and extending through the second bonding layer and at least a portion of the first bonding layer. A conductive bonding interface between the first bonding pad and the second bonding pad and a dielectric bonding interface between the first bonding layer and the second bonding layer include a step-height in a direction perpendicular to the dielectric bonding interface and the conductive bonding interface. A height of the step-height is smaller than a thickness of the first bonding layer.Type: ApplicationFiled: November 18, 2024Publication date: March 6, 2025Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chung-Sung Chiang, Chia-Wei Liu, Yu-Ruei Chen, Yu-Hsiang Lin
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Patent number: 12243839Abstract: A bonded semiconductor structure includes a first device wafer and a second device wafer. The first device includes a first dielectric layer, a first bonding pad disposed in the first dielectric layer, and a first bonding layer on the first dielectric layer. The second device wafer includes a second dielectric layer, a second bonding layer on the second dielectric layer, and a second bonding pad disposed in the second dielectric layer and extending through the second bonding layer and at least a portion of the first bonding layer. A conductive bonding interface between the first bonding pad and the second bonding pad and a dielectric bonding interface between the first bonding layer and the second bonding layer include a step-height in a direction perpendicular to the dielectric bonding interface and the conductive bonding interface.Type: GrantFiled: February 2, 2024Date of Patent: March 4, 2025Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chung-Sung Chiang, Chia-Wei Liu, Yu-Ruei Chen, Yu-Hsiang Lin
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Publication number: 20250067995Abstract: A floating image display device includes a light source module, a periodical optical structure and a blocking layer. The light source module generates light. The periodical optical structure includes lenses, and the light passes through the periodical optical structure and forms a floating image. The blocking layer is configured to block or absorb a part of the light, and the blocking layer is between any adjacent two lenses. A beam angle of another part of the light not blocked or absorbed by the blocking layer ranges between angles ? and ?, and the following conditions are satisfied: ?=tan?1 (d/h); and ?=2 tan?1 (d/2h), wherein ? is an off-axis viewing angle, ? is an on-axis viewing angle, d is a maximum width of an aperture corresponding to each lens, and h is a distance from the light source module to the aperture.Type: ApplicationFiled: October 20, 2023Publication date: February 27, 2025Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Hung TSOU, Chia-Ping LIN, Yi-Hsiang HUANG
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Patent number: 12230549Abstract: Three-dimensional integrated circuit (3DIC) structures and methods of forming the same are provided. A 3DIC structure includes a semiconductor package, a first package substrate, a molded underfill layer and a thermal interface material. The semiconductor package is disposed over and electrically connected to the first package substrate through a plurality of first bumps. The semiconductor package includes at least one semiconductor die and an encapsulation layer aside the semiconductor die. The molded underfill layer surrounds the plurality of first bumps and a sidewall of the semiconductor package, and has a substantially planar top surface. The CTE of the molded underfill layer is different from the CTE of the encapsulation layer of the semiconductor package. The thermal interface material is disposed over the semiconductor package.Type: GrantFiled: April 11, 2022Date of Patent: February 18, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Min Lin, Ching-Hua Hsieh, Chih-Wei Lin, Sheng-Hsiang Chiu, Sheng-Feng Weng, Yao-Tong Lai
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Patent number: 12224179Abstract: The current disclosure describes techniques of protecting a metal interconnect structure from being damaged by subsequent chemical mechanical polishing processes used for forming other metal structures over the metal interconnect structure. The metal interconnect structure is receded to form a recess between the metal interconnect structure and the surrounding dielectric layer. A metal cap structure is formed within the recess. An upper portion of the dielectric layer is strained to include a tensile stress which expands the dielectric layer against the metal cap structure to reduce or eliminate a gap in the interface between the metal cap structure and the dielectric layer.Type: GrantFiled: March 15, 2023Date of Patent: February 11, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yi-Sheng Lin, Chi-Jen Liu, Chi-Hsiang Shen, Te-Ming Kung, Chun-Wei Hsu, Chia-Wei Ho, Yang-Chun Cheng, William Weilun Hong, Liang-Guang Chen, Kei-Wei Chen
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Publication number: 20250047919Abstract: A method for facilitating streamer interaction with a viewer includes extracting a history topic based on an activity record of the viewer; calculating a score of each of the history topics based on at least one parameter; and generating a topic suggestion based on the history topic and the score which is corresponding to the history topic, and providing the topic suggestion to the streamer. The method is suitable for providing a topic suggestion (or interact topic suggestion) with respect to the viewer to the streamer via a live-streaming platform executed by a computing device. Thereby, the method can be used for facilitating streamer interaction with viewers and provides an appropriate topic suggestion. In addition, a computing device and a computer-readable storage medium which are capable of implementing the method are also provided.Type: ApplicationFiled: January 24, 2024Publication date: February 6, 2025Inventors: YUNG-CHI HSU, CHI-WEI LIN, SHAO-TANG CHIEN, WEI-HSIANG HUNG, WEI-KUN LU, YU-CHENG FAN, CHIA-HAN CHANG, HUNG-KUANG TAI