Patents by Inventor Chia-Wei Hsu

Chia-Wei Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12170283
    Abstract: Capacitor cells are provided. A first PMOS transistor is coupled between a power supply and a first node, and has a gate directly connected to a second node. A first NMOS transistor is coupled between a ground and the second node, and has a gate directly connected to the first node. A second PMOS transistor is coupled between the second node and the power supply, and has a gate directly connected to the second node. A second NMOS transistor is coupled between the first node and the ground, and has a gate directly connected to the first node. Sources of the first and second NMOS transistors share an N+ doped region in the P-type well region. The first NMOS transistor is disposed between the second NMOS transistor and the first and second PMOS transistors. Source of the first PMOS transistor is directly connected to the power supply.
    Type: Grant
    Filed: April 14, 2023
    Date of Patent: December 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chien-Yao Huang, Wun-Jie Lin, Chia-Wei Hsu, Yu-Ti Su
  • Publication number: 20240387515
    Abstract: An integrated circuit (IC) device includes a substrate having a front side, a back side below the front side, and first functional circuitry and a first electrostatic discharge (ESD) clamp circuit on the front side of the substrate. The IC device further includes a first connection tower that extends below the back side of the substrate and is connected to an input/output pad below the back side of the substrate, and one or more first front side conductors and one or more first front side vias which connect the first buried connection tower to the first functional circuitry and to the first ESD clamp circuit.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 21, 2024
    Inventors: Chia-Wei HSU, Bo-Ting CHEN, Jam-Wem LEE
  • Patent number: 12147810
    Abstract: A processor, an operation method, and a load-store device are provided. The processor is adapted to access a memory. The processor includes a vector register file (VRF) and the load-store device. The load-store device is coupled to the VRF. The load-store device performs a strided operation on the memory. In a current iteration of the strided operation, the load-store device reads a plurality of first data elements at a plurality of discrete addresses in the memory and writes the first data elements into the VRF, or the load-store device reads a plurality of second data elements from the VRF and writes the second data elements into a plurality of discrete addresses in the memory during the current iteration of the strided operation.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: November 19, 2024
    Assignee: ANDES TECHNOLOGY CORPORATION
    Inventor: Chia-Wei Hsu
  • Patent number: 12148746
    Abstract: An integrated circuit (IC) device includes a semiconductor substrate, a first connection tower, and one or more first front side conductors and one or more first front side metal vias. The semiconductor substrate includes a first semiconductor substrate segment having first functional circuitry and a second semiconductor substrate segment having a first electrostatic discharge (ESD) clamp circuit. The first connection tower connects to an input/output pad. The one or more first front side conductors and one or more first front side metal vias connect the first buried connection tower to the first functional circuitry in the first semiconductor substrate segment and to the first ESD clamp circuit in the second semiconductor substrate segment.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: November 19, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Wei Hsu, Bo-Ting Chen, Jam-Wem Lee
  • Publication number: 20240379366
    Abstract: In an embodiment, a method includes: depositing a gate dielectric layer on a first fin and a second fin, the first fin and the second fin extending away from a substrate in a first direction, a distance between the first fin and the second fin decreasing along the first direction; depositing a sacrificial layer on the gate dielectric layer by exposing the gate dielectric layer to a self-limiting source precursor and a self-reacting source precursor, the self-limiting source precursor reacting to form an initial layer of a material of the sacrificial layer, the self-reacting source precursor reacting to form a main layer of the material of the sacrificial layer; annealing the gate dielectric layer while the sacrificial layer covers the gate dielectric layer; after annealing the gate dielectric layer, removing the sacrificial layer; and after removing the sacrificial layer, forming a gate electrode layer on the gate dielectric layer.
    Type: Application
    Filed: July 22, 2024
    Publication date: November 14, 2024
    Inventors: Kuei-Lun Lin, Chia-Wei Hsu, Xiong-Fei Yu, Chi On Chui, Chih-Yu Hsu, Jian-Hao Chen
  • Publication number: 20240379449
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first n-type transistor having a first threshold voltage and including a first gate dielectric layer, and a second n-type transistor having a second threshold voltage and including a second gate dielectric layer. The first threshold voltage is lower than the second threshold. Each of the first gate dielectric layer and the second gate dielectric layer contains fluorine and hafnium. The first gate dielectric layer has a first average fluorine concentration and a first average hafnium concentration. The second gate dielectric layer has a second average fluorine concentration and a second average hafnium concentration. A first ratio of the first average fluorine concentration to the first average hafnium concentration is greater than and a second ratio of the second average fluorine concentration to the second average hafnium concentration.
    Type: Application
    Filed: July 24, 2024
    Publication date: November 14, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Pei Ying LAI, Chia-Wei HSU, Tsung-Da LIN, Chi On CHUI
  • Publication number: 20240371925
    Abstract: A semiconductor device includes a semiconductor substrate having a first protected circuit; a first guard ring; and a second guard ring adjacent to the first guard ring and around the first protected circuit. The second guard ring includes a first via tower configured to provide a first reference voltage; a second via tower configured to provide a second reference voltage different than the first reference voltage; and at least a third via tower configured to provide the first reference voltage.
    Type: Application
    Filed: July 12, 2024
    Publication date: November 7, 2024
    Inventors: Chia-Wei HSU, Bo-Ting CHEN, Jam-Wem LEE
  • Patent number: 12100732
    Abstract: A method of fabricating a semiconductor device includes forming a semiconductor substrate having a first protected circuit, and forming a first guard ring around the first protected circuit including: forming a first wall configured to provide a first reference voltage; and forming a second wall configured to provide a second reference voltage different than the first reference voltage.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: September 24, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Chia-Wei Hsu, Bo-Ting Chen, Jam-Wem Lee
  • Publication number: 20240255977
    Abstract: A circuit includes a voltage divider circuit configured to generate a feedback voltage according to an output voltage, an operational amplifier configured to output a driving signal according to the feedback voltage and a reference voltage and a pass gate circuit including multiple current paths. The current paths are controlled by the driving signal and connected in parallel between the voltage divider circuit and a power reference node.
    Type: Application
    Filed: April 11, 2024
    Publication date: August 1, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huan-Neng CHEN, Yen-Lin LIU, Chia-Wei HSU, Jo-Yu WU, CHANG-FEN HU, Shao-Yu LI, Bo-Ting CHEN
  • Patent number: 12051896
    Abstract: A device is disclosed herein. The device includes a bias generator, an ESD driver, and a logic circuit. The bias generator includes a first transistor. The ESD driver includes a second transistor and a third transistor coupled to each other in series. The logic circuit is configured to generate a logic control signal. When the first transistor is turned on by a detection signal, the first transistor is turned off.
    Type: Grant
    Filed: May 24, 2023
    Date of Patent: July 30, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Po-Lin Peng, Yu-Ti Su, Chia-Wei Hsu, Ming-Fu Tsai, Shu-Yu Su, Li-Wei Chu, Jam-Wem Lee, Chia-Jung Chang, Hsiang-Hui Cheng
  • Publication number: 20240248713
    Abstract: A vector processor performing a vector reduction method and an element reduction method with the same circuit structure is provided. The vector processor includes a vector register file and a first lane. The first lane loads a first operand and a second operand based on a first state parameter and performs a first reduction operation on the first operand and the second operand to generate a first reduction result. The first lane performs a second reduction operation on the first and second parts of the first reduction result based on a second state parameter to generate a second reduction result.
    Type: Application
    Filed: February 20, 2024
    Publication date: July 25, 2024
    Applicant: ANDES TECHNOLOGY CORPORATION
    Inventor: Chia-Wei Hsu
  • Patent number: 12002706
    Abstract: Methods and devices are provided herein for enhancing robustness of a bipolar electrostatic discharge (ESD) device. The robustness of a bipolar ESD device includes providing an emitter region and a collector region adjacent to the emitter region. An isolation structure is provided between the emitter region and the collector region. A ballasting characteristic at the isolation structure is modified by inserting at least one partition structure therein. Each partition structure extends substantially abreast at least one of the emitter and the collector regions.
    Type: Grant
    Filed: July 3, 2023
    Date of Patent: June 4, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Alexander Kalnitsky, Jen-Chou Tseng, Chia-Wei Hsu, Ming-Fu Tsai
  • Publication number: 20240153823
    Abstract: A method includes depositing a high-k gate dielectric layer over and along sidewalls of a semiconductor fin. The method further includes depositing an n-type work function metal layer over the high-k gate dielectric layer and performing a passivation treatment on the high-k gate dielectric layer through the n-type work function metal layer. The passivation treatment comprises a remote plasma process. The method further includes depositing a fill metal over the n-type work function metal layer to form a metal gate stack over the high-k gate dielectric layer. The metal gate stack comprising the n-type work function metal layer and the fill metal.
    Type: Application
    Filed: January 18, 2024
    Publication date: May 9, 2024
    Inventors: Pei Ying Lai, Chia-Wei Hsu, Cheng-Hao Hou, Xiong-Fei Yu, Chi On Chui
  • Patent number: 11966241
    Abstract: A circuit includes a voltage divider circuit configured to generate a feedback voltage according to an output voltage, an operational amplifier configured to output a driving signal according to the feedback voltage and a reference voltage and a pass gate circuit including multiple current paths. The current paths are controlled by the driving signal and connected in parallel between the voltage divider circuit and a power reference node.
    Type: Grant
    Filed: February 11, 2022
    Date of Patent: April 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Huan-Neng Chen, Yen-Lin Liu, Chia-Wei Hsu, Jo-Yu Wu, Chang-Fen Hu, Shao-Yu Li, Bo-Ting Chen
  • Publication number: 20240071767
    Abstract: A method includes removing a dummy gate stack to form a trench between gate spacers, depositing a gate dielectric extending into the trench, and performing a first treatment process on the gate dielectric. The first treatment process is performed using a fluorine-containing gas. A first drive-in process is then performed to drive fluorine in the fluorine-containing gas into the gate dielectric. The method further includes performing a second treatment process on the gate dielectric, wherein the second treatment process is performed using the fluorine-containing gas, and performing a second drive-in process to drive fluorine in the fluorine-containing gas into the gate dielectric. After the second drive-in process, conductive layers are formed to fill the trench.
    Type: Application
    Filed: January 6, 2023
    Publication date: February 29, 2024
    Inventors: Hsueh-Ju Chen, Chi On Chui, Tsung-Da Lin, Pei Ying Lai, Chia-Wei Hsu
  • Patent number: 11915979
    Abstract: A method includes depositing a high-k gate dielectric layer over and along sidewalls of a semiconductor fin. The method further includes depositing an n-type work function metal layer over the high-k gate dielectric layer and performing a passivation treatment on the high-k gate dielectric layer through the n-type work function metal layer. The passivation treatment comprises a remote plasma process. The method further includes depositing a fill metal over the n-type work function metal layer to form a metal gate stack over the high-k gate dielectric layer. The metal gate stack comprising the n-type work function metal layer and the fill metal.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Pei Ying Lai, Chia-Wei Hsu, Cheng-Hao Hou, Xiong-Fei Yu, Chi On Chui
  • Patent number: 11881409
    Abstract: A method of cutting fins includes the following steps. A photomask including a snake-shape pattern is provided. A photoresist layer is formed over fins on a substrate. A photoresist pattern in the photoresist layer corresponding to the snake-shape pattern is formed by exposing and developing. The fins are cut by transferring the photoresist pattern and etching cut parts of the fins.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: January 23, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wei-Hao Huang, Chun-Lung Chen, Kun-Yuan Liao, Lung-En Kuo, Chia-Wei Hsu
  • Publication number: 20240004647
    Abstract: A vector processor with a vector reduction method and an element reduction method is provided. The vector processor includes a vector register file and first and second lanes. In the vector reduction method, the first lane loads a first operand and a first part of a second operand based on a first state parameter and performs a first reduction operation on the first operand and the first part of the second operand to generate a first part of a first reduction result. The second lane loads a second part of the second operand based on the first state parameter and uses the second part of the second operand as a second part of the first reduction result. One of the first lane or the second lane performs a second reduction operation on the first and second parts of the first reduction result to generate a second reduction result.
    Type: Application
    Filed: July 1, 2022
    Publication date: January 4, 2024
    Applicant: ANDES TECHNOLOGY CORPORATION
    Inventor: Chia-Wei Hsu
  • Patent number: 11862468
    Abstract: In an embodiment, a method includes: depositing a gate dielectric layer on a first fin and a second fin, the first fin and the second fin extending away from a substrate in a first direction, a distance between the first fin and the second fin decreasing along the first direction; depositing a sacrificial layer on the gate dielectric layer by exposing the gate dielectric layer to a self-limiting source precursor and a self-reacting source precursor, the self-limiting source precursor reacting to form an initial layer of a material of the sacrificial layer, the self-reacting source precursor reacting to form a main layer of the material of the sacrificial layer; annealing the gate dielectric layer while the sacrificial layer covers the gate dielectric layer; after annealing the gate dielectric layer, removing the sacrificial layer; and after removing the sacrificial layer, forming a gate electrode layer on the gate dielectric layer.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: January 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuei-Lun Lin, Chia-Wei Hsu, Xiong-Fei Yu, Chi On Chui, Chih-Yu Hsu, Jian-Hao Chen
  • Publication number: 20230418614
    Abstract: A processor, an operation method, and a load-store device are provided. The processor is adapted to access a memory. The processor includes a vector register file (VRF) and the load-store device. The load-store device is coupled to the VRF. The load-store device performs a strided operation on the memory. In a current iteration of the strided operation, the load-store device reads a plurality of first data elements at a plurality of discrete addresses in the memory and writes the first data elements into the VRF, or the load-store device reads a plurality of second data elements from the VRF and writes the second data elements into a plurality of discrete addresses in the memory during the current iteration of the strided operation.
    Type: Application
    Filed: June 22, 2022
    Publication date: December 28, 2023
    Applicant: ANDES TECHNOLOGY CORPORATION
    Inventor: Chia-Wei Hsu