Patents by Inventor Chia-Wei Hsu

Chia-Wei Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210210490
    Abstract: Capacitor cells are provided. A first PMOS transistor is coupled between a power supply and a first node, and has a gate connected to a second node. A first NMOS transistor is coupled between a ground and the second node, and has a gate connected to the first node. A second PMOS transistor is coupled between the second node and the power supply, and has a gate connected to the second node. A second NMOS transistor is coupled between the first node and the ground, a gate connected to the first node, and has a gate connected to the first node. Sources of the first and second PMOS transistors share a P+ doped region in N-type well region, and the first PMOS transistor is disposed between the second PMOS transistor and the first and second NMOS transistors.
    Type: Application
    Filed: March 24, 2021
    Publication date: July 8, 2021
    Inventors: Chien-Yao Huang, Wun-Jie Lin, Chia-Wei Hsu, Yu-Ti Su
  • Patent number: 11037809
    Abstract: A transfer device for transferring a substrate is provided, including a base plate, at least one suction unit disposed on a side of the base plate to generate suction on the substrate, and a plurality of movement restriction units disposed on the side of the base plate to limit the movement of the substrate during transfer. Each of the movement restriction units includes a main body, an abutting member, and a pusher. The main body is attached to the base plate and has a chamber therein. The abutting member is movably received in the chamber and has an abutting portion that protrudes beyond the main body to abut the substrate. The pusher is received in the chamber and configured to push the abutting member to move toward the substrate.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Lun Hung, Chia-Wei Hsu, Chia-Hsiang Liao, Ming-Hung Chen
  • Publication number: 20210126105
    Abstract: Semiconductor devices and methods which utilize a passivation dopant to passivate a gate dielectric layer are provided. The passivation dopant is introduced to the gate dielectric layer through a work function layer using a process such as a soaking method. The passivation dopant is an atom which may help to passivate electrical trapping defects, such as fluorine.
    Type: Application
    Filed: June 12, 2020
    Publication date: April 29, 2021
    Inventors: Chia-Wei Hsu, Pei Ying Lai, Cheng-Hao Hou, Xiong-Fei Yu, Chi On Chui
  • Patent number: 10971495
    Abstract: A capacitor cell is provided. A first PMOS transistor is coupled between a power supply and a first node, and has a gate connected to a second node. A first NMOS transistor is coupled between a ground and the second node, and has a gate connected to the first node. A second PMOS transistor is coupled between the second node and the first node, and has a gate connected to the second node. A second NMOS transistor has a drain connected to the first node, a gate connected to the first node, and a source connected to the ground or the second node. The first and second PMOS transistors and the first and second NMOS transistors are arranged in the same row. The second PMOS transistor is disposed between the first PMOS transistor and the first and second NMOS transistors.
    Type: Grant
    Filed: October 2, 2019
    Date of Patent: April 6, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chien-Yao Huang, Wun-Jie Lin, Chia-Wei Hsu, Yu-Ti Su
  • Publication number: 20210098303
    Abstract: A method includes depositing a high-k gate dielectric layer over and along sidewalls of a semiconductor fin. The method further includes depositing an n-type work function metal layer over the high-k gate dielectric layer and performing a passivation treatment on the high-k gate dielectric layer through the n-type work function metal layer. The passivation treatment comprises a remote plasma process. The method further includes depositing a fill metal over the n-type work function metal layer to form a metal gate stack over the high-k gate dielectric layer. The metal gate stack comprising the n-type work function metal layer and the fill metal.
    Type: Application
    Filed: January 3, 2020
    Publication date: April 1, 2021
    Inventors: Pei Ying Lai, Chia-Wei Hsu, Cheng-Hao Hou, Xiong-Fei Yu, Chi On Chui
  • Publication number: 20210089111
    Abstract: A heat dissipation apparatus with energy-saving effect is coupled to an operation unit, and the heat dissipation apparatus includes a control unit and a drive circuit. The control unit determines whether the operation unit enters an energy-saving mode according to a first signal provided by the operation unit. The control unit shields a plurality of second signals provided to the drive circuit according to the energy-saving mode. The drive circuit does not drive the heat dissipation unit and the heat dissipation unit enters an inertia deceleration.
    Type: Application
    Filed: April 18, 2020
    Publication date: March 25, 2021
    Inventors: Chia-Feng WU, Po-Hui SHEN, Chien-Sheng LIN, Chun-Chieh TSAI, Chia-Wei HSU, Rou-Sheng WANG
  • Publication number: 20210082743
    Abstract: Methods and devices are provided herein for enhancing robustness of a bipolar electrostatic discharge (ESD) device. The robustness of a bipolar ESD device includes providing an emitter region and a collector region adjacent to the emitter region. An isolation structure is provided between the emitter region and the collector region. A ballasting characteristic at the isolation structure is modified by inserting at least one partition structure therein. Each partition structure extends substantially abreast at least one of the emitter and the collector regions.
    Type: Application
    Filed: November 30, 2020
    Publication date: March 18, 2021
    Inventors: Alexander Kalnitsky, Jen-Chou Tseng, Chia-Wei Hsu, Ming-Fu Tsai
  • Publication number: 20210020486
    Abstract: A transfer device for transferring a substrate is provided, including a base plate, at least one suction unit disposed on a side of the base plate to generate suction on the substrate, and a plurality of movement restriction units disposed on the side of the base plate to limit the movement of the substrate during transfer. Each of the movement restriction units includes a main body, an abutting member, and a pusher. The main body is attached to the base plate and has a chamber therein. The abutting member is movably received in the chamber and has an abutting portion that protrudes beyond the main body to abut the substrate. The pusher is received in the chamber and configured to push the abutting member to move toward the substrate.
    Type: Application
    Filed: July 17, 2019
    Publication date: January 21, 2021
    Inventors: Pei-Lun HUNG, Chia-Wei Hsu, Chia-Hsiang Liao, Ming-Hung Chen
  • Patent number: 10879061
    Abstract: Semiconductor devices and a method for forming the same are provided. In various embodiments, a method for forming a semiconductor device includes receiving a semiconductor substrate including a channel. An atmosphere-modulation layer is formed over the channel. An annealing process is performed to form an interfacial layer between the channel and the atmosphere-modulation layer.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: December 29, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Chun-Heng Chen, Hong-Fa Luan, Xiong-Fei Yu, Hui-Cheng Chang, Chia-Wei Hsu
  • Patent number: 10854501
    Abstract: Methods and devices are provided herein for enhancing robustness of a bipolar electrostatic discharge (ESD) device. The robustness of a bipolar ESD device includes providing an emitter region and a collector region adjacent to the emitter region. An isolation structure is provided between the emitter region and the collector region. A ballasting characteristic at the isolation structure is modified by inserting at least one partition structure therein. Each partition structure extends substantially abreast at least one of the emitter and the collector regions.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: December 1, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Alexander Kalnitsky, Jen-Chou Tseng, Chia-Wei Hsu, Ming-Fu Tsai
  • Patent number: 10838370
    Abstract: The present invention provides a laser projection clock, comprising a driving device, one or a plurality of pointer light source device, and one or a plurality of grating. The driving device comprises one or a plurality of rotating shafts and power elements for driving the one or plurality of the rotating shafts to rotate at different speeds respectively. The one or plurality of pointer light source devices is configured on one side of the driving device to each output a laser beam. The one or plurality of gratings is configured on the one or a plurality of rotating shafts in a one-on-one manner in order to be rotated by the one or plurality of rotating shafts respectively. The grating has an indication pattern, and the one or plurality of laser beams are projected to a projection plane through the one or a plurality of indication patterns of the one or plurality of gratings to form one or plurality of laser indications respectively.
    Type: Grant
    Filed: January 5, 2018
    Date of Patent: November 17, 2020
    Inventors: Chia Wei Hsu, Chia Chi Hsu
  • Patent number: 10622481
    Abstract: A method of rounding corners of a fin includes providing a substrate with a fin protruding from the substrate, wherein a pad oxide and a pad nitride entirely cover a top surface of the fin. Later, part of the pad oxide is removed laterally to expose part of the top surface of the fin. A silicon oxide layer is formed to contact two sidewalls of the fin and the exposed top surface, wherein two sidewalls and the top surface define two corners of the fin. After forming the silicon oxide layer, an annealing process is performed to round two corners of the fin. Finally, after the annealing process, an STI filling material is formed to cover the pad nitride, the pad oxide and the fin.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: April 14, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yi-Liang Ye, Chun-Wei Yu, Yu-Ren Wang, Hao-Hsuan Chang, Chia-Wei Hsu
  • Publication number: 20200052123
    Abstract: A method of rounding corners of a fin includes providing a substrate with a fin protruding from the substrate, wherein a pad oxide and a pad nitride entirely cover a top surface of the fin. Later, part of the pad oxide is removed laterally to expose part of the top surface of the fin. A silicon oxide layer is formed to contact two sidewalls of the fin and the exposed top surface, wherein two sidewalls and the top surface define two corners of the fin. After forming the silicon oxide layer, an annealing process is performed to round two corners of the fin. Finally, after the annealing process, an STI filling material is formed to cover the pad nitride, the pad oxide and the fin.
    Type: Application
    Filed: August 7, 2018
    Publication date: February 13, 2020
    Inventors: Yi-Liang Ye, Chun-Wei Yu, Yu-Ren Wang, Hao-Hsuan Chang, Chia-Wei Hsu
  • Publication number: 20200035681
    Abstract: A capacitor cell is provided. A first PMOS transistor is coupled between a power supply and a first node, and has a gate connected to a second node. A first NMOS transistor is coupled between a ground and the second node, and has a gate connected to the first node. A second PMOS transistor is coupled between the second node and the first node, and has a gate connected to the second node. A second NMOS transistor has a drain connected to the first node, a gate connected to the first node, and a source connected to the ground or the second node. The first and second PMOS transistors and the first and second NMOS transistors are arranged in the same row. The second PMOS transistor is disposed between the first PMOS transistor and the first and second NMOS transistors.
    Type: Application
    Filed: October 2, 2019
    Publication date: January 30, 2020
    Inventors: Chien-Yao HUANG, Wun-Jie LIN, Chia-Wei HSU, Yu-Ti SU
  • Patent number: 10475793
    Abstract: A capacitor cell is provided. A first PMOS transistor is coupled between a power supply and a first node, having a gate coupled to a second node. A first NMOS transistor coupled between a ground and the second node, having a gate coupled to the first node. A second PMOS transistor, having a drain coupled to the second node, a gate coupled to the second node, and a source coupled to the power supply or the first node. A second NMOS transistor, having a drain coupled to the first node, a gate coupled to the first node, and a source coupled to the ground or the second node.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: November 12, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chien-Yao Huang, Wun-Jie Lin, Chia-Wei Hsu, Yu-Ti Su
  • Publication number: 20190339522
    Abstract: Transparent displays enable many useful applications, including heads-up displays for cars and aircraft as well as displays on eyeglasses and glass windows. Unfortunately, transparent displays made of organic light-emitting diodes are typically expensive and opaque. Heads-up displays often require fixed light sources and have limited viewing angles. And transparent displays that use frequency conversion are typically energy inefficient. Conversely, the present transparent displays operate by scattering visible light from resonant nanoparticles with narrowband scattering cross sections and small absorption cross sections. More specifically, projecting an image onto a transparent screen doped with nanoparticles that selectively scatter light at the image wavelength(s) yields an image on the screen visible to an observer. Because the nanoparticles scatter light at only certain wavelengths, the screen is practically transparent under ambient light.
    Type: Application
    Filed: March 26, 2018
    Publication date: November 7, 2019
    Inventors: Chia Wei Hsu, Wenjun Qiu, Bo Zhen, Ofer Shapira, Marin Soljacic
  • Patent number: 10324237
    Abstract: A transparent display includes nanoparticles having wavelength-selective scattering (e.g., resonant scattering) to preferentially scatter light at one or more discrete wavelengths so as to create images. The nanoparticles transmit light at other wavelengths to maintain a high transparency of the display. The nanoparticles are disposed in proximity to a thin film, which can enhance the scattering the process by reflecting light back to the nanoparticles for re-scattering or increasing the quality factor of the resonant scattering.
    Type: Grant
    Filed: March 31, 2017
    Date of Patent: June 18, 2019
    Assignee: Massachusetts Institute of Technology
    Inventors: Marin Soljacic, Bo Zhen, Emma Anquillare, Yi Yang, Chia Wei Hsu, John D. Joannopoulos
  • Publication number: 20190148141
    Abstract: Semiconductor devices and a method for forming the same are provided. In various embodiments, a method for forming a semiconductor device includes receiving a semiconductor substrate including a channel. An atmosphere-modulation layer is formed over the channel. An annealing process is performed to form an interfacial layer between the channel and the atmosphere-modulation layer.
    Type: Application
    Filed: January 14, 2019
    Publication date: May 16, 2019
    Inventors: Chun-Heng CHEN, Hong-Fa Luan, Xiong-Fei Yu, Hui-Cheng Chang, Chia-Wei Hsu
  • Publication number: 20190137941
    Abstract: The present invention provides a laser projection clock, comprising a driving device, one or a plurality of pointer light source device, and one or a plurality of grating. The driving device comprises one or a plurality of rotating shafts and power elements for driving the one or plurality of the rotating shafts to rotate at different speeds respectively. The one or plurality of pointer light source devices is configured on one side of the driving device to each output a laser beam. The one or plurality of gratings is configured on the one or a plurality of rotating shafts in a one-on-one manner in order to be rotated by the one or plurality of rotating shafts respectively. The grating has an indication pattern, and the one or plurality of laser beams are projected to a projection plane through the one or a plurality of indication patterns of the one or plurality of gratings to form one or plurality of laser indications respectively.
    Type: Application
    Filed: January 5, 2018
    Publication date: May 9, 2019
    Inventors: Chia Wei HSU, Chia Chi HSU
  • Patent number: 10276399
    Abstract: A method and structure for providing conformal doping of FinFET fin structures, for example by way of a thermal treatment process, includes forming a gate stack at least partially over a fin extending from a substrate. In various embodiments, a barrier metal layer is deposited over the gate stack. By way of example, a thermal fluorine treatment is performed, where the thermal fluorine treatment forms a fluorinated layer within the barrier metal layer, and where the fluorinated layer includes a plurality of fluorine atoms. In some embodiments, after forming the fluorinated layer, an anneal is performed to drive at least some of the plurality of fluorine atoms into the gate stack (e.g., into the interfacial layer and the high-K dielectric layer), thereby conformally doping the gate stack with the at least some of the plurality of fluorine atoms.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: April 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Hao Hou, Xiong-Fei Yu, Chia-Wei Hsu