Patents by Inventor Chieh-Wei Chen

Chieh-Wei Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240387341
    Abstract: A method forming a redistribution line, which includes a via and a metal trace over and joined to the via, over a carrier. The formation of the redistribution line includes depositing a first metal layer, depositing a barrier layer over the first metal layer, and depositing a second metal layer over the barrier layer. The method further includes de-bonding the redistribution line from the carrier, and bonding a package component to the redistribution line, wherein a metal bump bonds the package component to the via.
    Type: Application
    Filed: September 12, 2023
    Publication date: November 21, 2024
    Inventors: Shin-Puu Jeng, Meng-Liang Lin, Chieh-Lung Lai, Hsien-Wei Chen
  • Patent number: 12080556
    Abstract: A semiconductor device includes a semiconductor fin. The semiconductor device includes a metal gate disposed over the semiconductor fin. The semiconductor device includes a gate dielectric layer disposed between the semiconductor fin and the metal gate. The semiconductor device includes first spacers sandwiching the metal gate. The first spacers have a first top surface and the gate dielectric layer has a second top surface, and the first top surface and a first portion of the second top surface are coplanar with each other. The semiconductor device includes second spacers further sandwiching the first spacers. The second spacers have a third top surface above the first top surface and the second top surface. The semiconductor device includes a gate electrode disposed over the metal gate.
    Type: Grant
    Filed: June 29, 2023
    Date of Patent: September 3, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Jian-Jou Lian, Po-Yuan Wang, Chieh-Wei Chen
  • Publication number: 20240258428
    Abstract: A method of forming a semiconductor device includes surrounding a dummy gate disposed over a fin with a dielectric material; forming a gate trench in the dielectric material by removing the dummy gate and by removing upper portions of a first gate spacer disposed along sidewalls of the dummy gate, the gate trench comprising a lower trench between remaining lower portions of the first gate spacer and comprising an upper trench above the lower trench; forming a gate dielectric layer, a work function layer and a glue layer successively in the gate trench; removing the glue layer and the work function layer from the upper trench; filling the gate trench with a gate electrode material after the removing; and removing the gate electrode material from the upper trench, remaining portions of the gate electrode material forming a gate electrode.
    Type: Application
    Filed: April 9, 2024
    Publication date: August 1, 2024
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Chieh-Wei Chen, Tzu-Ang Chiang, Ming-Hsi Yeh
  • Patent number: 11996470
    Abstract: A semiconductor device includes a semiconductor fin. The semiconductor device includes first spacers over the semiconductor fin. The semiconductor device includes second spacers over the semiconductor fin. The second spacers vertically extend farther from the semiconductor fin than the first spacers. The semiconductor device includes a metal gate over the semiconductor fin, the metal gate is sandwiched by the first spacers. The metal gate includes a glue layer that contains tantalum nitride.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: May 28, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
  • Patent number: 11978801
    Abstract: A method of forming a semiconductor device includes surrounding a dummy gate disposed over a fin with a dielectric material; forming a gate trench in the dielectric material by removing the dummy gate and by removing upper portions of a first gate spacer disposed along sidewalls of the dummy gate, the gate trench comprising a lower trench between remaining lower portions of the first gate spacer and comprising an upper trench above the lower trench; forming a gate dielectric layer, a work function layer and a glue layer successively in the gate trench; removing the glue layer and the work function layer from the upper trench; filling the gate trench with a gate electrode material after the removing; and removing the gate electrode material from the upper trench, remaining portions of the gate electrode material forming a gate electrode.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: May 7, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Chieh-Wei Chen, Tzu-Ang Chiang, Ming-Hsi Yeh
  • Publication number: 20240105818
    Abstract: A semiconductor device includes a gate electrode over a channel region of a semiconductor fin, first spacers over the semiconductor fin, and second spacers over the semiconductor fin. A lower portion of the gate electrode is between the first spacers. An upper portion of the gate electrode is above the first spacers. The second spacers are adjacent the first spacers opposite the gate electrode. The upper portion of the gate electrode is between the second spacers.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 28, 2024
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Ming-Hsi Yeh, Chieh-Wei Chen, Tzu-Ang Chiang
  • Publication number: 20240063060
    Abstract: A method includes depositing a first work function layer over a gate dielectric layer, forming a first hard mask layer over the first work function layer, forming a photoresist mask over the first hard mask layer, where forming the photoresist mask includes depositing a bottom anti-reflective coating (BARC) layer over the first hard mask layer, etching a portion of the BARC layer, etching a portion of the first hard mask layer using the BARC layer as a mask, etching a portion of the first work function layer to expose a portion of the gate dielectric layer through the first hard mask layer and the first work function layer, removing the first hard mask layer, and depositing a second work function layer over the first work function layer and over the portion of the gate dielectric layer.
    Type: Application
    Filed: November 3, 2023
    Publication date: February 22, 2024
    Inventors: Chieh-Wei Chen, Jian-Jou Lian, Tzu-Ang Chiang, Chun-Neng Lin, Ming-Hsi Yeh
  • Patent number: 11901441
    Abstract: A method for manufacturing a semiconductor device includes forming a gate trench over a semiconductor fin, the gate trench including an upper portion and a lower portion. The method includes sequentially forming one or more work function layers, a capping layer, and a glue layer over the gate trench. The glue layer includes a first sub-layer and a second sub-layer that have respective different etching rates with respect to an etching solution. The method includes removing the second sub-layer while leaving a first portion of the first sub-layer filled in the lower portion of the gate trench.
    Type: Grant
    Filed: February 10, 2023
    Date of Patent: February 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
  • Publication number: 20240040909
    Abstract: An electronic device may have a display such as an organic light-emitting diode display. The organic light-emitting diode display may have an array of organic light-emitting diode pixels that each have organic light-emitting diode layers interposed between a cathode and an anode. To improve off-axis luminance and luminance uniformity, the display may include green pixels with emission spectra having a narrow full width at half maximum, the display may include a reflective layer that is formed separately from a transparent anode, and/or the display may include a diffusive layer. The diffusive layer may be embedded in one or more encapsulation layers for the display. The diffusive layer may be a diffusive color filter.
    Type: Application
    Filed: June 5, 2023
    Publication date: February 1, 2024
    Inventors: Yifan Zhang, Amin Salehi, Chieh-Wei Chen, Hoyeon Kim, Paul S. Drzaic, Yun Liu
  • Patent number: 11855193
    Abstract: A semiconductor device includes a gate electrode over a channel region of a semiconductor fin, first spacers over the semiconductor fin, and second spacers over the semiconductor fin. A lower portion of the gate electrode is between the first spacers. An upper portion of the gate electrode is above the first spacers. The second spacers are adjacent the first spacers opposite the gate electrode. The upper portion of the gate electrode is between the second spacers.
    Type: Grant
    Filed: January 17, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jian-Jou Lian, Chun-Neng Lin, Ming-Hsi Yeh, Chieh-Wei Chen, Tzu-Ang Chiang
  • Publication number: 20230411206
    Abstract: A method for manufacturing a semiconductor device includes: forming a patterned dielectric layer over a substrate, the patterned dielectric layer including an interconnect opening having a sidewall surface and a bottom surface; and forming a doped film by an opening-adjustment process, the doped film being disposed on the patterned dielectric layer and extending into the interconnect opening to cover an upper portion of the sidewall surface, so as to adjust a profile of the interconnect opening.
    Type: Application
    Filed: June 16, 2022
    Publication date: December 21, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Neng LIN, Jian-Jou LIAN, Chieh-Wei CHEN
  • Patent number: 11848239
    Abstract: A method includes depositing a first work function layer over a gate dielectric layer, forming a first hard mask layer over the first work function layer, forming a photoresist mask over the first hard mask layer, where forming the photoresist mask includes depositing a bottom anti-reflective coating (BARC) layer over the first hard mask layer, etching a portion of the BARC layer, etching a portion of the first hard mask layer using the BARC layer as a mask, etching a portion of the first work function layer to expose a portion of the gate dielectric layer through the first hard mask layer and the first work function layer, removing the first hard mask layer, and depositing a second work function layer over the first work function layer and over the portion of the gate dielectric layer.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chieh-Wei Chen, Jian-Jou Lian, Tzu-Ang Chiang, Chun-Neng Lin, Ming-Hsi Yeh
  • Publication number: 20230350105
    Abstract: A lenticular display may be formed with convex curvature. The lenticular display may have a lenticular lens film with lenticular lenses that extend across the length of the display. The lenticular lenses may be configured to enable stereoscopic viewing of the display. To enable more curvature in the display while ensuring satisfactory stereoscopic display performance, the display may have stereoscopic zones and non-stereoscopic zones. A central stereoscopic zone may be interposed between first and second non-stereoscopic zones. The non-stereoscopic zones may have more curvature than the stereoscopic zone. To prevent crosstalk within the lenticular display, a louver film may be incorporated into the display. The pixel array may have a diagonal layout and may be covered by vertically oriented lenticular lenses.
    Type: Application
    Filed: July 6, 2023
    Publication date: November 2, 2023
    Inventors: Yi-Pai Huang, Manjap Singh, Cheng-Ho Yu, ByoungSuk Kim, Yi Huang, Hitoshi Yamamoto, Mathew K. Mathai, Chieh-Wei Chen, Ping-Yen Chou, Donghee Nam, Chaohao Wang, Hao Chen
  • Publication number: 20230352306
    Abstract: A semiconductor device includes a semiconductor fin. The semiconductor device includes a metal gate disposed over the semiconductor fin. The semiconductor device includes a gate dielectric layer disposed between the semiconductor fin and the metal gate. The semiconductor device includes first spacers sandwiching the metal gate. The first spacers have a first top surface and the gate dielectric layer has a second top surface, and the first top surface and a first portion of the second top surface are coplanar with each other. The semiconductor device includes second spacers further sandwiching the first spacers. The second spacers have a third top surface above the first top surface and the second top surface. The semiconductor device includes a gate electrode disposed over the metal gate.
    Type: Application
    Filed: June 29, 2023
    Publication date: November 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Jian-Jou Lian, Po-Yuan Wang, Chieh-Wei Chen
  • Publication number: 20230327002
    Abstract: A method of forming a semiconductor device includes: forming a semiconductor structure having source/drain regions, a fin disposed between the source/drain regions, and a dummy gate disposed on the fin and surrounded by a spacer; removing the dummy gate to form a gate trench which is defined by a trench-defining wall; forming a gate dielectric layer on the trench-defining wall; forming a work function structure on the gate dielectric layer; forming a resist layer to fill the gate trench; removing a top portion of the resist layer; removing the work function structure exposed from the resist layer using a wet chemical etchant; removing the resist layer; and forming a conductive gate in the gate trench.
    Type: Application
    Filed: April 6, 2022
    Publication date: October 12, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chieh-Wei CHEN, Jian-Jou LIAN, Tzu-Ang CHIANG, Po-Yuan WANG, Yu-Shih WANG, Chun-Neng LIN, Ming-Hsi YEH
  • Patent number: 11774641
    Abstract: A lenticular display may be formed with convex curvature. The lenticular display may have a lenticular lens film with lenticular lenses that extend across the length of the display. The lenticular lenses may be configured to enable stereoscopic viewing of the display. To enable more curvature in the display while ensuring satisfactory stereoscopic display performance, the display may have stereoscopic zones and non-stereoscopic zones. A central stereoscopic zone may be interposed between first and second non-stereoscopic zones. The non-stereoscopic zones may have more curvature than the stereoscopic zone. To prevent crosstalk within the lenticular display, a louver film may be incorporated into the display. The pixel array may have a diagonal layout and may be covered by vertically oriented lenticular lenses.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: October 3, 2023
    Assignee: Apple Inc.
    Inventors: Yi-Pai Huang, Manjap Singh, Cheng-Ho Yu, ByoungSuk Kim, Yi Huang, Hitoshi Yamamoto, Mathew K. Mathai, Chieh-Wei Chen, Ping-Yen Chou, Donghee Nam, Chaohao Wang, Hao Chen
  • Patent number: 11735425
    Abstract: A semiconductor device includes a semiconductor fin. The semiconductor device includes a metal gate disposed over the semiconductor fin. The semiconductor device includes a gate dielectric layer disposed between the semiconductor fin and the metal gate. The semiconductor device includes first spacers sandwiching the metal gate. The first spacers have a first top surface and the gate dielectric layer has a second top surface, and the first top surface and a first portion of the second top surface are coplanar with each other. The semiconductor device includes second spacers further sandwiching the first spacers. The second spacers have a third top surface above the first top surface and the second top surface. The semiconductor device includes a gate electrode disposed over the metal gate.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Jian-Jou Lian, Po-Yuan Wang, Chieh-Wei Chen
  • Publication number: 20230187543
    Abstract: A method for manufacturing a semiconductor device includes forming a gate trench over a semiconductor fin, the gate trench including an upper portion and a lower portion. The method includes sequentially forming one or more work function layers, a capping layer, and a glue layer over the gate trench. The glue layer includes a first sub-layer and a second sub-layer that have respective different etching rates with respect to an etching solution. The method includes removing the second sub-layer while leaving a first portion of the first sub-layer filled in the lower portion of the gate trench.
    Type: Application
    Filed: February 10, 2023
    Publication date: June 15, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
  • Patent number: 11588041
    Abstract: A method for manufacturing a semiconductor device includes forming a gate trench over a semiconductor fin, the gate trench including an upper portion and a lower portion. The method includes sequentially forming one or more work function layers, a capping layer, and a glue layer over the gate trench. The glue layer includes a first sub-layer and a second sub-layer that have respective different etching rates with respect to an etching solution. The method includes removing the second sub-layer while leaving a first portion of the first sub-layer filled in the lower portion of the gate trench.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: February 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Jian-Jou Lian, Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Po-Yuan Wang, Chieh-Wei Chen
  • Publication number: 20230027261
    Abstract: A method of fabricating a semiconductor device includes forming at least one fin on a substrate, a plurality of dummy gates over the at least one fin, and a sidewall spacer on the dummy gates. Source and drain regions are epitaxially formed contacting the at least one fin and laterally adjacent the dummy gates, where forming the source and drain regions leaves a void below the source and drain regions and adjacent the dummy gates. The dummy gates are replaced with active gates, each having a gate dielectric on the sidewall spacer and a gate electrode on the gate dielectric. A patterned layer is formed exposing a selected active gate of the active gates. A first etch is performed to remove exposed portions of the gate electrode of the selected active gate. A second etch is performed, after the first etch, to remove exposed portions of a gate dielectric of the selected active gate.
    Type: Application
    Filed: July 22, 2021
    Publication date: January 26, 2023
    Applicant: Taiwan Semicondutor Manufacturing Company, Ltd.
    Inventors: Tzu Ang Chiang, Chun-Neng Lin, Jian-Jou Lian, Chieh-Wei Chen, Ming-Hsi Yeh, Po-Yuan Wang