Patents by Inventor Chien-Hao Chen
Chien-Hao Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12255104Abstract: A dummy gate electrode and a dummy gate dielectric are removed to form a recess between adjacent gate spacers. A gate dielectric is deposited in the recess, and a barrier layer is deposited over the gate dielectric. A first work function layer is deposited over the barrier layer. A first anti-reaction layer is formed over the first work function layer, the first anti-reaction layer reducing oxidation of the first work function layer. A fill material is deposited over the first anti-reaction layer.Type: GrantFiled: August 2, 2023Date of Patent: March 18, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Ching Lee, Hsin-Han Tsai, Shih-Hang Chiu, Tsung-Ta Tang, Chung-Chiang Wu, Hung-Chin Chung, Hsien-Ming Lee, Da-Yuan Lee, Jian-Hao Chen, Chien-Hao Chen, Kuo-Feng Yu, Chia-Wei Chen, Chih-Yu Hsu
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Publication number: 20250071939Abstract: A liquid-cooling heat dissipation device which comprises a cooling plate, a heat dissipator having a working liquid therein, and at least two conduits connecting the cold plate to the heat dissipator is described. A surface of the cooling plate is configured to contact a heat-generating component, thereby transferring the heat generated by the heat-generating component to the cooling plate and conducting the heat away to the heat dissipator via a working liquid.Type: ApplicationFiled: December 1, 2023Publication date: February 27, 2025Inventor: Chien-Hao CHEN
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Patent number: 12237228Abstract: An improved work function layer and a method of forming the same are disclosed. In an embodiment, the method includes forming a semiconductor fin extending from a substrate; depositing a dielectric layer over the semiconductor fin; depositing a first work function layer over the dielectric layer; and exposing the first work function layer to a metastable plasma of a first reaction gas, a metastable plasma of a generation gas, and a metastable plasma of a second reaction gas, the first reaction gas being different from the second reaction gas.Type: GrantFiled: June 30, 2023Date of Patent: February 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shao-Jyun Wu, Hung-Chi Wu, Chia-Ching Lee, Pin-Hsuan Yeh, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Sheng-Liang Pan, Huan-Just Lin
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Publication number: 20250013157Abstract: Provided are a manufacturing method of an overlay mark and an overlay measurement method. The manufacturing method includes the following steps. A first stitching overlay mark structure having a plurality of first patterns is formed on a first layer. A second layer is formed on the first layer. A second stitching overlay mark structure having a plurality of second patterns is formed on the second layer. The second stitching overlay mark structure is located above the first stitching overlay mark structure, and from the top view on the second layer, the second patterns and the first patterns are alternately arranged.Type: ApplicationFiled: August 10, 2023Publication date: January 9, 2025Applicant: United Microelectronics Corp.Inventors: Chun-Yi Chang, Chien-Hao Chen
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Patent number: 12185490Abstract: Examples of a supporting assembly for supporting an installable component are described. The supporting assembly comprises a supporting member. The supporting assembly may further include a latch bar extending longitudinally to support the installable component. The supporting assembly may further include a coupling arm and a control knob. In an example, the control knob may be rotatable, and is to control rotation of the latch bar.Type: GrantFiled: July 31, 2020Date of Patent: December 31, 2024Assignee: Hewlett-Packard Development Company, L.P.Inventors: Chun-Wei Kuo, Chien-Hao Chen, Bang-Zhong Xu, Justin Tinhsi Lee
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Patent number: 12183590Abstract: A method includes depositing a silicon layer, which includes first portions over a plurality of strips, and second portions filled into trenches between the plurality of strips. The plurality of strips protrudes higher than a base structure. The method further includes performing an anneal to allow parts of the first portions of the silicon layer to migrate toward lower parts of the plurality of trenches, and performing an etching on the silicon layer to remove some portions of the silicon layer.Type: GrantFiled: March 13, 2023Date of Patent: December 31, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: De-Wei Yu, Chien-Hao Chen, Chia-Ao Chang, Pin-Ju Liang
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Patent number: 12183629Abstract: A method includes forming a gate electrode on a semiconductor region, recessing the gate electrode to generate a recess, performing a first deposition process to form a first metallic layer on the gate electrode and in the recess, wherein the first deposition process is performed using a first precursor, and performing a second deposition process to form a second metallic layer on the first metallic layer using a second precursor different from the first precursor. The first metallic layer and the second metallic layer comprise a same metal. The method further incudes forming a dielectric hard mask over the second metallic layer, and forming a gate contact plug penetrating through the dielectric hard mask. The gate contact plug contacts a top surface of the second metallic layer.Type: GrantFiled: July 20, 2022Date of Patent: December 31, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Chiang Wu, Po-Cheng Chen, Kuo-Chan Huang, Pin-Hsuan Yeh, Wei-Chin Lee, Hsien-Ming Lee, Chien-Hao Chen, Chi On Chui
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Patent number: 12174675Abstract: A holding device for retaining an installable component in a chassis of a computing device may includes a longitudinally extending first arm, and a movably coupled second arm. The holding device may further include a first engaging portion at first end of the holding device, and a second engaging portion at the second end of the holding device. The engaging portions may couple the holding device to the chassis of the computing device. Furthermore, the holding device may comprise a gripping member. The gripping member is to securely retain the installable component within the chassis of the computing device, and is movable across the length of the holding device.Type: GrantFiled: November 26, 2019Date of Patent: December 24, 2024Assignee: Hewlett-Packard Development Company, L.P.Inventors: Bangzhong Xu, Chun Wei Kuo, Cheng-Liang Gong, Chien Hao Chen
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Publication number: 20240411221Abstract: A photomask set including a first photomask and a second photomask is provided. The first photomask includes a first pattern. The first pattern includes a first main portion and a first stitching portion connected to each other. The first stitching portion includes a first matching portion and a first overlapping portion connected to each other. The second photomask includes a second pattern. The second pattern includes a second main portion and a second stitching portion connected to each other. The second stitching portion includes a second matching portion and a second overlapping portion connected to each other. After the first photomask is aligned with the second photomask, the first matching portion matches the second matching portion, the first overlapping portion overlaps the second pattern, and the second overlapping portion overlaps the first pattern.Type: ApplicationFiled: July 3, 2023Publication date: December 12, 2024Applicant: United Microelectronics Corp.Inventors: Chun-Yi Chang, Chien-Hao Chen
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Publication number: 20240401621Abstract: The present invention provides a magnetic computer case comprising a first plate body, a second plate body and a third plate body. The first plate body is provided with a first connection part, where the first connection part is provided at a corner of the first plate body. The second plate body is provided on one side of the first plate body and provided with a second connection part, where the second connection part is provided at a corner of the second plate body. The second plate body is provided with a third connection part and the third connection part is provided at a corner of the third plate body, such that the first plate body is movably and magnetically connected with the third plate body and the second plate body.Type: ApplicationFiled: September 1, 2023Publication date: December 5, 2024Inventor: Chien-Hao CHEN
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Publication number: 20240387679Abstract: A semiconductor device and method of manufacture are provided. In some embodiments a treatment process is utilized to treat a work function layer. The treatment prevents excessive oxidation of the work function layer during subsequent processing steps, such as application of a subsequent photoresist material, thereby allowing the work function layer to be thinner than otherwise.Type: ApplicationFiled: July 29, 2024Publication date: November 21, 2024Inventors: Chia-Ching Lee, Hung-Chin Chung, Chung-Chiang Wu, Hsuan-Yu Tung, Kuan-Chang Chiu, Chien-Hao Chen, Chi On Chui
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Publication number: 20240387276Abstract: Semiconductor devices and methods of manufacturing semiconductor devices with differing threshold voltages are provided. In embodiments the threshold voltages of individual semiconductor devices are tuned through the removal and placement of differing materials within each of the individual gate stacks within a replacement gate process, whereby the removal and placement helps keep the overall process window for a fill material large enough to allow for a complete fill.Type: ApplicationFiled: July 29, 2024Publication date: November 21, 2024Inventors: Chung-Chiang Wu, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Ching-Hwanq Su
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Publication number: 20240387257Abstract: A method includes forming a gate electrode on a semiconductor region, recessing the gate electrode to generate a recess, performing a first deposition process to form a first metallic layer on the gate electrode and in the recess, wherein the first deposition process is performed using a first precursor, and performing a second deposition process to form a second metallic layer on the first metallic layer using a second precursor different from the first precursor. The first metallic layer and the second metallic layer comprise a same metal. The method further incudes forming a dielectric hard mask over the second metallic layer, and forming a gate contact plug penetrating through the dielectric hard mask. The gate contact plug contacts a top surface of the second metallic layer.Type: ApplicationFiled: July 30, 2024Publication date: November 21, 2024Inventors: Chung-Chiang Wu, Po-Cheng Chen, Kuo-Chan Huang, Pin-Hsuan Yeh, Wei-Chin Lee, Hsien-Ming Lee, Chien-Hao Chen, Chi On Chui
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Patent number: 12147163Abstract: A method for correcting critical dimension (CD) measurements of a lithographic tool includes steps as follows. A correction pattern having a first sub-pattern parallel to a first direction and a second sub-pattern parallel to a second direction is provided on a lithographic mask; wherein the first sub-pattern and the second sub-pattern come cross with each other. A first After-Develop-Inspection critical dimension (ADI CD) of a developed pattern formed on a photo-sensitive layer and transferred from the correction pattern is measured using the lithographic tool along a first scanning direction. A second ADI CD of the developed pattern is measured using the lithographic tool along a second scanning direction. The first ADI CD is subtracted from the second ADI CD to obtain a measurement bias value. Exposure conditions and/or measuring parameters of the lithographic tool are adjusted according to the measurement bias value.Type: GrantFiled: November 17, 2021Date of Patent: November 19, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hsin-Yu Hsieh, Kuan-Ying LAi, Chang-Mao Wang, Chien-Hao Chen, Chun-Chi Yu
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Publication number: 20240379811Abstract: A semiconductor device includes a gate dielectric layer and a gate electrode formed on the gate dielectric layer. The gate electrode includes a first metal layer, a second metal layer, and a third metal layer. The second layer includes metal and oxygen. The first layer is first layer over the gate dielectric layer and may include one of titanium nitride (TiN), titanium silicon nitride (TiSiN), or tantalum carbide (TaC). Minimization of equivalent oxide thickness may result.Type: ApplicationFiled: July 22, 2024Publication date: November 14, 2024Inventors: Yong-Tian Hou, Yuan-Shun Chao, Chien-Hao Chen, Cheng-Lung Hung
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Patent number: 12142530Abstract: Semiconductor devices and methods of manufacturing semiconductor devices with differing threshold voltages are provided. In embodiments the threshold voltages of individual semiconductor devices are tuned through the removal and placement of differing materials within each of the individual gate stacks within a replacement gate process, whereby the removal and placement helps keep the overall process window for a fill material large enough to allow for a complete fill.Type: GrantFiled: July 1, 2021Date of Patent: November 12, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Chiang Wu, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Ching-Hwanq Su
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Publication number: 20240363627Abstract: A structure includes a semiconductor substrate including a first semiconductor region and a second semiconductor region, a first transistor in the first semiconductor region, and a second transistor in the second semiconductor region. The first transistor includes a first gate dielectric over the first semiconductor region, a first work function layer over and contacting the first gate dielectric, and a first conductive region over the first work function layer. The second transistor includes a second gate dielectric over the second semiconductor region, a second work function layer over and contacting the second gate dielectric, wherein the first work function layer and the second work function layer have different work functions, and a second conductive region over the second work function layer.Type: ApplicationFiled: July 9, 2024Publication date: October 31, 2024Inventors: Kuan-Chang Chiu, Chia-Ching Lee, Chien-Hao Chen, Hung-Chin Chung, Hsien-Ming Lee, Chi On Chui, Hsuan-Yu Tung, Chung-Chiang Wu
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Patent number: 12131488Abstract: A method used for object tracking includes: using a specific object model to generate a first vector of a first ratio object and a second vector of a second ratio object of an image in an object detection bounding box of a specific frame; generating an identity label of an object within the bounding box according to the first vector, the second vector, and M first ratio reference vectors and M second ratio reference vectors stored in an object vector database.Type: GrantFiled: March 3, 2022Date of Patent: October 29, 2024Assignee: Realtek Semiconductor Corp.Inventors: Chih-Wei Wu, Chien-Hao Chen, Chao-Hsun Yang, Shih-Tse Chen
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Patent number: 12125306Abstract: A method of performing person re-identification includes: obtaining a person feature vector according to an extracted image containing a person; obtaining state information of the person according to a state of the person in the extracted image; comparing the person feature vector with a plurality of registered person feature vectors in a database; when the person feature vector successfully matches a first registered person feature vector of the plurality of registered person feature vectors, identifying the person as a first identity corresponding to the first registered person feature vector; and selectively utilizing the person feature vector to update one of the first registered person feature vector and at least one second registered person feature vector that correspond to the first identity according to the state information.Type: GrantFiled: March 3, 2022Date of Patent: October 22, 2024Assignee: Realtek Semiconductor Corp.Inventors: Chien-Hao Chen, Chao-Hsun Yang, Chih-Wei Wu, Shih-Tse Chen
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Patent number: 12107086Abstract: The present disclosure provides a method that includes providing a semiconductor substrate having a first region and a second region; forming a first gate within the first region and a second gate within the second region on the semiconductor substrate; forming first source/drain features of a first semiconductor material with an n-type dopant in the semiconductor substrate within the first region; forming second source/drain features of a second semiconductor material with a p-type dopant in the semiconductor substrate within the second region. The second semiconductor material is different from the first semiconductor material in composition. The method further includes forming first silicide features to the first source/drain features and second silicide features to the second source/drain features; and performing an ion implantation process of a species to both the first and second regions, thereby introducing the species to first silicide features and the second source/drain features.Type: GrantFiled: March 28, 2022Date of Patent: October 1, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Su-Hao Liu, Yan-Ming Tsai, Chung-Ting Wei, Ziwei Fang, Chih-Wei Chang, Chien-Hao Chen, Huicheng Chang