Patents by Inventor Chien-Hao Huang
Chien-Hao Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12250834Abstract: A power device includes: a semiconductor layer, a well region, a body region, a gate, a source, a drain, a first salicide block (SAB) layer and a second SAB layer. The first SAB layer is formed on a top surface of the semiconductor layer, and is located between the gate and the drain, wherein a part of the well is located vertically below and in contact with the first SAB layer. The second SAB layer is formed vertically above and in contact with the first SAB layer.Type: GrantFiled: May 5, 2022Date of Patent: March 11, 2025Assignee: RICHTEK TECHNOLOGY CORPORATIONInventors: Kuo-Hsuan Lo, Chien-Hao Huang, Chu-Feng Chen, Wu-Te Weng
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Publication number: 20250070025Abstract: A manufacturing method of a semiconductor structure includes at least the following steps. A memory device is formed in an interconnect structure over a substrate. Forming the memory device includes forming an alternating stack of dielectric material layers and conductive material layers, wherein the alternating stack includes a memory array region and a staircase region adjacent to the memory array region; forming a trench on the memory array region of the alternating stack; forming a data storage layer, channel layers, bit line pillars, and source line pillars in the trench; and performing patterning processes to from a staircase structure on the staircase region. The staircase structure steps downward from a first direction and makes a 180-degree turn to step downward in a second direction opposite to the first direction.Type: ApplicationFiled: November 11, 2024Publication date: February 27, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Li-Shyue Lai, Chien-Hao Huang, Chia-Yu Ling, Katherine H CHIANG, Chung-Te Lin
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Publication number: 20250029918Abstract: A three-dimensional integrated structure and the manufacturing method(s) thereof are described. The three-dimensional integrated structure includes a substrate having conductive features therein, and a component array disposed over the substrate and on the conductive features. The component array includes a metallic material layer and capacitor structures separated by the metallic material layer. Each of the capacitor structures includes a first metallic pillar, a first dielectric sheath surrounding the first metallic pillar, a second metallic sheath surrounding the first dielectric sheath, and a second dielectric sleeve surrounding the second metallic sheath. The metallic material layer laterally encapsulates the capacitor structures.Type: ApplicationFiled: October 8, 2024Publication date: January 23, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG
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Publication number: 20250015191Abstract: A semiconductor device includes a FEOL structure and a BEOL structure. The BEOL structure is formed over the FEOL structure and includes a barrier dielectric layer, a transistor and a first barrier. The barrier dielectric layer has an upper surface and a lower surface. The transistor is partially formed in the barrier dielectric layer and includes an electrode element, and the electrode element has a first lateral surface, wherein the first lateral surface extends from the upper surface toward the lower surface. The first barrier covers the entirety of the first lateral surface of the electrode element.Type: ApplicationFiled: July 6, 2023Publication date: January 9, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao HUANG, Tzu-Hsiang HSU, Kuo-Chang CHIANG, Katherine H. CHIANG
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Patent number: 12176286Abstract: A memory device includes an alternating stack of dielectric layers and word line layers, pairs of bit lines and source lines spaced apart from one another, a data storage layer covering a sidewall of the alternating stack, and channel layers interposed between the data storage layer and the pairs of bit lines and source lines. The alternating stack includes a staircase structure in a staircase-shaped region, and the staircase structure steps downward from a first direction and includes at least one turn. The pairs of bit lines and source lines extend in a second direction that is substantially perpendicular to the first direction and are in lateral contact with the data storage layer through the channel layers. A semiconductor structure and a method are also provided.Type: GrantFiled: February 11, 2022Date of Patent: December 24, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Li-Shyue Lai, Chien-Hao Huang, Chia-Yu Ling, Katherine H Chiang, Chung-Te Lin
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Publication number: 20240383048Abstract: A two-dimensional array of discrete dielectric template structures is formed over a substrate. A first dielectric spacer matrix may be formed in lower portions of the trenches between the discrete dielectric template structures. A second dielectric spacer matrix layer may be formed in upper portions of the trenches. A pair of a source cavity and a drain cavity may be formed within a volume of each of the discrete dielectric template structures. A source electrode and a drain electrode may be formed in each source cavity and each drain cavity, respectively. The gate electrodes may be formed prior to, or after, formation of the two-dimensional array of discrete dielectric template structures to provide a two-dimensional array of field effect transistors that may be connected to, or may contain, memory elements.Type: ApplicationFiled: July 22, 2024Publication date: November 21, 2024Inventors: Gao-Ming WU, Katherine H. CHIANG, Chien-Hao HUANG, Chung-Te LIN
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Patent number: 12148691Abstract: A three-dimensional integrated structure and the manufacturing method(s) thereof are described. The three-dimensional integrated structure includes a substrate having conductive features therein, and a component array disposed over the substrate and on the conductive features. The component array includes a metallic material layer and capacitor structures separated by the metallic material layer. Each of the capacitor structures includes a first metallic pillar, a first dielectric sheath surrounding the first metallic pillar, a second metallic sheath surrounding the first dielectric sheath, and a second dielectric sleeve surrounding the second metallic sheath. The metallic material layer laterally encapsulates the capacitor structures.Type: GrantFiled: March 25, 2022Date of Patent: November 19, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Chien-Hao Huang, Gao-Ming Wu, Katherine H Chiang
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Publication number: 20240379735Abstract: A disclosed method of manufacturing a capacitor structure includes forming an alternating dielectric stack comprising first dielectric layers and second dielectric layers on a substrate and forming a trench through the alternating stack of first dielectric layers and second dielectric layers. The disclosed method includes etching the first dielectric layers from the trench to form notches between the second dielectric layers and forming a bottom electrode layer covering the first dielectric layers and the second dielectric layers. The disclosed method includes forming a third dielectric layer over the bottom electrode layer and forming a top electrode layer over the third dielectric layer.Type: ApplicationFiled: July 19, 2024Publication date: November 14, 2024Inventors: Yun-Feng KAO, Ming-Yen CHUANG, Katherine H. CHIANG, Chien-Hao HUANG
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Patent number: 12137573Abstract: A two-dimensional array of discrete dielectric template structures is formed over a substrate. A first dielectric spacer matrix may be formed in lower portions of the trenches between the discrete dielectric template structures. A second dielectric spacer matrix layer may be formed in upper portions of the trenches. A pair of a source cavity and a drain cavity may be formed within a volume of each of the discrete dielectric template structures. A source electrode and a drain electrode may be formed in each source cavity and each drain cavity, respectively. The gate electrodes may be formed prior to, or after, formation of the two-dimensional array of discrete dielectric template structures to provide a two-dimensional array of field effect transistors that may be connected to, or may contain, memory elements.Type: GrantFiled: March 17, 2022Date of Patent: November 5, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Gao-Ming Wu, Katherine H. Chiang, Chien-Hao Huang, Chung-Te Lin
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Publication number: 20240363706Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor structure includes gate electrodes and first insulation patterns laterally disposed and alternately arranged on a substrate, a gate dielectric layer disposed on the gate electrodes and the first insulation patterns, at least one channel pattern disposed on the gate dielectric layer, source electrodes and drain electrodes laterally disposed and alternately arranged on the channel pattern, and second insulation patterns disposed on the channel pattern between the source and drain electrodes. Besides, from a top view, each of the drain electrodes is overlapped with one of the first insulation patterns.Type: ApplicationFiled: July 11, 2024Publication date: October 31, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG, Chung-Te Lin
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Patent number: 12125548Abstract: A method of testing a non-volatile memory (NVM) array includes heating the NVM array to a target temperature, and while the NVM array is heated to the target temperature, programming a subset of the NVM cells to first resistance levels and obtaining a first current distribution, programming the subset of NVM cells to second resistance levels and obtaining a second current distribution, calculating a current threshold level from the first and second current distributions, and for each of the NVM cells, programing the NVM cell to one of the first or second resistance levels, and using the current threshold level to determine a first pass/fail (P/F) status and a second P/F status at the programmed resistance level. A bit error rate (BER) of the NVM array is calculated based on the first and second current distributions and the first and second P/F status of each of the NVM cells.Type: GrantFiled: July 25, 2023Date of Patent: October 22, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chien-Hao Huang, Katherine H. Chiang, Cheng-Yi Wu, Chung-Te Lin
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Publication number: 20240331795Abstract: It is checked, using machine learning, whether at least one fail bit in a memory block of a memory is unrepairable, according to a location of the at least one fail bit, and an available repair resource in the memory. When the checking indicates that the at least one fail bit is not unrepairable, it is determined whether a CSP containing constraints is solvable. The constraints correspond to the location of the at least one fail bit in the memory block, and the available repair resource. In response to determining that the CSP is not solvable, the memory block is marked as unrepairable or the memory is rejected. In response to the checking, using the machine learning, indicating that the at least one fail bit is unrepairable, the memory block is marked as unrepairable or the memory is rejected, without making further determinations as to repairability of the memory block.Type: ApplicationFiled: June 11, 2024Publication date: October 3, 2024Inventors: Katherine H. CHIANG, Chien-Hao HUANG, Cheng-Yi WU, Chung-Te LIN
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Patent number: 12107160Abstract: A power device includes: a semiconductor layer, a well region, a body region, a gate, a sub-gate, a source, a drain, and an electric field adjustment region. The sub-gate is formed above a top surface of the semiconductor layer, wherein a portion of the well region is located vertically beneath the sub-gate. The sub-gate is not directly connected to the gate. The electric field adjustment region has a conductivity type which is opposite to that of the well region. The electric field adjustment region is formed beneath and not in contact with the top surface of the semiconductor layer. The electric field adjustment region is located in the well region of the semiconductor layer, and at least a portion of the electric field adjustment region is located vertically beneath the sub-gate.Type: GrantFiled: April 21, 2022Date of Patent: October 1, 2024Assignee: RICHTEK TECHNOLOGY CORPORATIONInventors: Kuo-Hsuan Lo, Chien-Hao Huang, Chu-Feng Chen, Wu-Te Weng, Chien-Wei Chiu
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Patent number: 12068380Abstract: Semiconductor structures and methods of forming the same are provided. A semiconductor structure includes gate electrodes and first insulation patterns laterally disposed and alternately arranged on a substrate, a gate dielectric layer disposed on the gate electrodes and the first insulation patterns, at least one channel pattern disposed on the gate dielectric layer, source electrodes and drain electrodes laterally disposed and alternately arranged on the channel pattern, and second insulation patterns disposed on the channel pattern between the source and drain electrodes. Besides, from a top view, each of the drain electrodes is overlapped with one of the first insulation patterns.Type: GrantFiled: January 17, 2022Date of Patent: August 20, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Katherine H Chiang, Chung-Te Lin
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Patent number: 12014790Abstract: A location of at least one fail bit to be repaired in a memory block of a memory is extracted from at least one memory test on the memory block. An available repair resource in the memory for repairing the memory block is obtained. It is checked, using machine learning, whether the at least one fail bit is unrepairable, according to the location of the at least one fail bit, and the available repair resource. When the checking indicates that the at least one fail bit is not unrepairable, it is determined whether a Constraint Satisfaction Problem (CSP) containing a plurality of constraints is solvable. The constraints correspond to the location of the at least one fail bit in the memory block, and the available repair resource. In response to determining that the CSP is not solvable, the memory block is marked as unrepairable or the memory is rejected.Type: GrantFiled: July 26, 2022Date of Patent: June 18, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Katherine H. Chiang, Chien-Hao Huang, Cheng-Yi Wu, Chung-Te Lin
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Publication number: 20240079497Abstract: Provided are a transistor structure and a method of forming the same. The transistor structure includes a gate electrode; a gate dielectric layer, disposed on the gate electrode; an active layer, disposed on the gate dielectric layer; a pair of source/drain (S/D) features, disposed on the active layer; and an isolation structure, laterally surrounding the pair of S/D features, wherein the isolation structure at least comprises a blocking layer and an upper dielectric layer on the blocking layer.Type: ApplicationFiled: September 1, 2022Publication date: March 7, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG, Chung-Te Lin
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Patent number: 11848332Abstract: A semiconductor die includes a semiconductor substrate and a transistor array disposed over the semiconductor substrate. The transistor array includes unit cells and spacers. The unit cells are disposed along rows of the transistor array extending in a first direction and columns of the transistor array extending in a second direction perpendicular to the first direction. The spacers encircle the unit cells. The unit cells include source contacts and drain contacts separated by interlayer dielectric material portions. First sections of the spacers contacting the interlayer dielectric material portions are thicker than second sections of the spacers contacting the source contacts and the drain contacts.Type: GrantFiled: July 23, 2021Date of Patent: December 19, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Gao-Ming Wu, Katherine H. Chiang, Chien-Hao Huang, Chung-Te Lin
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Publication number: 20230377670Abstract: A method of testing a non-volatile memory (NVM) array includes heating the NVM array to a target temperature, and while the NVM array is heated to the target temperature, programming a subset of the NVM cells to first resistance levels and obtaining a first current distribution, programming the subset of NVM cells to second resistance levels and obtaining a second current distribution, calculating a current threshold level from the first and second current distributions, and for each of the NVM cells, programing the NVM cell to one of the first or second resistance levels, and using the current threshold level to determine a first pass/fail (P/F) status and a second P/F status at the programmed resistance level. A bit error rate (BER) of the NVM array is calculated based on the first and second current distributions and the first and second P/F status of each of the NVM cells.Type: ApplicationFiled: July 25, 2023Publication date: November 23, 2023Inventors: Chien-Hao HUANG, Katherine H. CHIANG, Cheng-Yi WU, Chung-Te LIN
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Patent number: 11776647Abstract: A semiconductor device is provided, which contains a memory bank including M primary word lines and R replacement word lines, a row/column decoder, and an array of redundancy fuse elements. A sorted primary failed bit count list is generated in a descending order for the bit fail counts per word line. A sorted replacement failed bit count list is generated in an ascending order of the M primary word lines in an ascending order. The primary word lines are replaced with the replacement word lines from top to bottom on the lists until a primary failed bit count equals a replacement failed bit count or until all of the replacement word lines are used up. Optionally, the sorted primary failed bit count list may be re-sorted in an ascending or descending order of the word line address prior to the replacement process.Type: GrantFiled: November 7, 2022Date of Patent: October 3, 2023Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Chien-Hao Huang, Cheng-Yi Wu, Katherine H. Chiang, Chung-Te Lin
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Publication number: 20230307351Abstract: A three-dimensional integrated structure and the manufacturing method(s) thereof are described. The three-dimensional integrated structure includes a substrate having conductive features therein, and a component array disposed over the substrate and on the conductive features. The component array includes a metallic material layer and capacitor structures separated by the metallic material layer. Each of the capacitor structures includes a first metallic pillar, a first dielectric sheath surrounding the first metallic pillar, a second metallic sheath surrounding the first dielectric sheath, and a second dielectric sleeve surrounding the second metallic sheath. The metallic material layer laterally encapsulates the capacitor structures.Type: ApplicationFiled: March 25, 2022Publication date: September 28, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG