Patents by Inventor Chienliu Chang
Chienliu Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8596121Abstract: A structural member having a plurality of conductive regions electrically insulated from each other, in which the plurality of conductive regions are electrically insulated from each other by continuous oxidized regions, and the oxidized regions are each formed of an oxide made of a material having a plurality of through holes or trenches formed therein.Type: GrantFiled: January 10, 2008Date of Patent: December 3, 2013Assignee: Canon Kabushiki KaishaInventors: Atsushi Kandori, Chienliu Chang
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Publication number: 20130256817Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.Type: ApplicationFiled: May 31, 2013Publication date: October 3, 2013Inventors: Takahiro Ezaki, Chienliu Chang, Yasuhiro Soeda, Kenji Tamamori
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Patent number: 8531527Abstract: An acoustic-wave sensor (10) is constructed by a membrane (11) adapted to be displaced by an acoustic wave, a first waveguide (16a) for transmitting light therein, an optical coupling part (15) to which the light transmitted through the first waveguide (16a) is adapted to be optically coupled, and a second waveguide (16b) through which the light coupled from the optical coupling part (15) transmits. When the membrane (11) is displaced by its reception of the acoustic wave, at least one of an optical coupling coefficient between the first waveguide (16a) and the optical resonator (15) and an optical coupling coefficient between the second waveguide (16b) and the optical resonator (15) is changed to output a corresponding optical signal.Type: GrantFiled: August 25, 2008Date of Patent: September 10, 2013Assignee: Canon Kabushiki KaishaInventors: Chienliu Chang, Kenichi Nagae
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Patent number: 8466522Abstract: An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.Type: GrantFiled: June 29, 2009Date of Patent: June 18, 2013Assignee: Canon Kabushiki KaishaInventors: Takahiro Ezaki, Chienliu Chang, Yasuhiro Soeda, Kenji Tamamori
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Patent number: 8426235Abstract: A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.Type: GrantFiled: May 13, 2010Date of Patent: April 23, 2013Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Publication number: 20130081471Abstract: To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member.Type: ApplicationFiled: June 2, 2011Publication date: April 4, 2013Applicant: CANON KABUSHIKI KAISHAInventors: Takahiro Akiyama, Chienliu Chang
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Patent number: 8410659Abstract: An electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other, wherein a part of the vibration membrane and a part of the substrate are in contact with each other at a contact region, and another region of the vibration membrane other than the contact region is able to vibrate; an overlap region is provided between the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region, and a plurality of protrusions formed within the gap and on at least one of the vibration member and the support member, wherein the contact region is surrounded by the plurality of protrusions.Type: GrantFiled: September 19, 2008Date of Patent: April 2, 2013Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Patent number: 8371018Abstract: In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate.Type: GrantFiled: September 19, 2008Date of Patent: February 12, 2013Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Patent number: 8339014Abstract: An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.Type: GrantFiled: June 30, 2008Date of Patent: December 25, 2012Assignee: Canon Kabushiki KaishaInventors: Atsushi Kandori, Chienliu Chang, Makoto Takagi
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Patent number: 8288192Abstract: In a method of manufacturing a capacitive electromechanical transducer, a first electrode (8) is formed on a substrate (4), an insulating layer (9) which has an opening (6) leading to the first electrode is formed on the first electrode (8), and a sacrificial layer is formed on the insulating layer. A membrane (3) having a second electrode (1) is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (10), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode (8) and an externally placed counter electrode through the opening (6) and the aperture of the membrane.Type: GrantFiled: April 28, 2009Date of Patent: October 16, 2012Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Patent number: 8168544Abstract: There is provided an etching method of an amorphous oxide layer containing In and at least one of Ga and Zn, which includes etching the amorphous oxide layer using an etchant containing any one of acetic acid, citric acid, hydrochloric acid, and perchloric acid.Type: GrantFiled: July 18, 2007Date of Patent: May 1, 2012Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Patent number: 8136212Abstract: A structure fabricating method plastically deforms a target portion of a substrate, to thereby fabricate a structure having an inclined segment that is inclined relative to a principal surface of the substrate. The method includes forming a projection on the target portion to project from the principal surface of the substrate or from an opposing surface of the substrate on the side opposite to the principal surface, and applying a force to the projection to plastically deform the target portion such that the target portion is bent in a direction from one surface of the substrate on the side where the projection is formed, toward another surface on the side opposite to the one surface.Type: GrantFiled: April 2, 2008Date of Patent: March 20, 2012Assignee: Canon Kabushiki KaishaInventors: Yoshitaka Zaitsu, Chienliu Chang, Masao Majima
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Publication number: 20120058587Abstract: A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.Type: ApplicationFiled: May 13, 2010Publication date: March 8, 2012Applicant: CANON KABUSHIKI KAISHAInventor: Chienliu Chang
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Patent number: 8099854Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.Type: GrantFiled: June 22, 2009Date of Patent: January 24, 2012Assignee: Canon Kabushiki KaishaInventors: Ayako Kato, Chienliu Chang
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Patent number: 8087153Abstract: A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.Type: GrantFiled: June 22, 2009Date of Patent: January 3, 2012Assignee: Canon Kabushiki KaishaInventors: Ayako Kato, Chienliu Chang
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Patent number: 8087152Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.Type: GrantFiled: June 22, 2009Date of Patent: January 3, 2012Assignee: Canon Kabushiki KaishaInventors: Ayako Kato, Chienliu Chang
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Patent number: 8082651Abstract: A micro-structure fabrication method fabricates a micro-structure including an inclined part inclined to a principal plane of a substrate by plastically deforming a work piece having the substrate with the principal plane. The structure fabrication method includes the steps of providing in the work piece a projection configured to protrude from a first surface and away from the principal plane of the substrate, and bending the work piece toward a second surface opposite to the first surface. The bending is accomplished by applying a force on a block including an inclined pressure plane that is abutted on the projection for plastically deforming the work piece, in which in bending the work piece, the direction of a first force applied on the work piece intersects with the direction of a second force of the inclined pressure plane pushing the projection.Type: GrantFiled: July 15, 2008Date of Patent: December 27, 2011Assignee: Canon Kabushiki KaishaInventors: Yoshitaka Zaitsu, Chienliu Chang, Masao Majima
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Publication number: 20110305822Abstract: This invention includes energizing an electrode in which the surface facing a cavity is exposed as one electrode for electrolytic etching and the other electrode provided at the outside and contacting an electrolytic etching solution to perform electrolytic etching of a sacrificial layer to form a cavity. Thereafter, a removal agent is introduced from an etching hole to reduce residues of the sacrificial layer due to the electrolytic etching.Type: ApplicationFiled: May 24, 2011Publication date: December 15, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Yoshihiro Hasegawa, Chienliu Chang, Yuichi Masaki
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Patent number: 8039836Abstract: In the present invention, a thin film transistor is formed on a plastic film substrate (1) having anisotropy of thermal shrinkage rate or coefficient of thermal expansion in in-plane directions of the substrate. A channel is formed such that the direction (7) in which the thermal shrinkage rate or the coefficient of thermal expansion of the substrate is largest is nonparallel to the direction (8) of a current flowing through the channel of the thin film transistor. Then, a thin film transistor having stable and uniform electrical characteristics, which is formed on the plastic film substrate, is provided.Type: GrantFiled: November 17, 2010Date of Patent: October 18, 2011Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Patent number: 8034248Abstract: Provided is a dry etching method for an oxide semiconductor film made of In—Ga—Zn—O, in which an etching gas containing a hydrocarbon is used in a dry etching process for the oxide semiconductor film made of In—Ga—Zn—O formed on a substrate.Type: GrantFiled: May 22, 2007Date of Patent: October 11, 2011Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang