Abstract: A lithography mask and method for manufacturing such mask that includes optically isolated via features and proximity correction features. The via patterns that include via features that define vias are positioned on the mask in rows and columns with a row and a column pitch between each row and column on the mask. The via patterns are positioned such that via features that are in adjacent columns are separated by at least one intervening row between them. The via patterns can also be positioned such that the via patterns that are in adjacent rows are separated by at least one intervening column between them. As a result, the via feature of each via pattern and the associated optical proximity correction features that are positioned around each via feature do not overlap with the optical proximity correction features and the via features of the surrounding via patterns.

Abstract: A charge storage memory is configured in a NAND array, and includes NAND strings coupled to bit lines via string select switches and includes word lines. A controller is configured to produce a bias for performing an operation on a selected cell of the NAND array. The bias includes charging the bit line while the string select switches are closed, such as to not introduce noise into the strings caused by such bit line charging. The semiconductor body regions in memory cells that are on both sides of the memory cells in the NAND strings that are coupled to a selected word line are coupled to reference voltages such that they are pre-charged while the word lines of the strings in the array are transitioned to various voltages during the operation.

Abstract: A memory device includes an array of dielectric charge trapping structures memory cells including word lines and bit lines. Control circuitry is coupled to the array arranged to control read, program and erase operations. A controller is arranged with supporting circuitry thermally annealing charge trapping structures in the memory cells in the array. Word line drivers and word line termination circuits can be used to induce current flow on the word lines to induce heat for the annealing. The thermal annealing can be applied interleaved with normal operations for recover from cycling damage. Also, the thermally annealing can be applied during mission functions like erase, to improve performance of the function.

Abstract: A memory device includes an array of dielectric charge trapping structures memory cells including word lines and bit lines. Control circuitry is coupled to the array arranged to control read, program and erase operations. A controller is arranged with supporting circuitry thermally annealing charge trapping structures in the memory cells in the array. Word line drivers and word line termination circuits can be used to induce current flow on the word lines to induce heat for the annealing. The thermal annealing can be applied interleaved with normal operations for recover from cycling damage. Also, the thermally annealing can be applied during mission functions like erase, to improve performance of the function.