Patents by Inventor Chih-Cheng Lu

Chih-Cheng Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050238073
    Abstract: Semiconductor substrate is disclosed having quantum wells having first bandgap, and quantum wells having second bandgap less than second bandgap. Semiconductor structure is disclosed comprising substrate having quantum wells having given bandgap, other quantum wells modified to bandgap greater than given bandgap. Semiconductor substrate is disclosed comprising wafer having quantum wells, section of first bandgap, and section of second bandgap greater than first bandgap. Method for forming semiconductor substrate is provided, comprising providing wafer having given bandgap, depositing dielectric cap on portion and rapid thermal annealing to tuned bandgap greater than given bandgap. Semiconductor structure is disclosed comprising substrate having quantum wells modified by depositing cap and rapid thermal annealing to tuned bandgap greater than given bandgap.
    Type: Application
    Filed: April 15, 2004
    Publication date: October 27, 2005
    Inventors: Peidong Wang, Chih-Cheng Lu, Daryoosh Vakhshoori
  • Publication number: 20050153519
    Abstract: A method of reducing oxide thickness variations in a STI pattern that includes both a dense trench array and a wide trench is described. A first HDP CVD step with a deposition/sputter (D/S) ratio of 9.5 is used to deposit a dielectric layer with a thickness that is 120 to 130% of the shallow trench depth. An etch back is performed in the same CVD chamber with NF3, SiF4 or NF3 and SiF4 to remove about 40 to 50% of the initial dielectric layer. A second HDP CVD step with a D/S ratio of 16 deposits an additional thickness of dielectric layer to a level that is slightly higher than after the first deposition. The etch back and second deposition form a smoother dielectric layer surface which enables a subsequent planarization step to provide filled STI features with a minimal amount of dishing in wide trenches.
    Type: Application
    Filed: January 8, 2004
    Publication date: July 14, 2005
    Inventors: Chih-Cheng Lu, Chuan-Ping Hou, Chu-Yun Fu, Chang Wen, Jang Ming
  • Publication number: 20050095727
    Abstract: A test region layout for testing shallow trench isolation gap fill characteristics is disclosed. Each test region further comprises at least one test pattern disposed in an interior portion of the test region. In a preferred embodiment, the test pattern is a square shape or, more preferably, two diametrically opposed ā€œLā€ shapes which are discontinuous with respect to each other. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    Type: Application
    Filed: November 5, 2003
    Publication date: May 5, 2005
    Inventors: Weng Chang, Chih-Cheng Lu, Chu-Yun Fu, Syun-Ming Jang
  • Publication number: 20040260196
    Abstract: A method and apparatus for measuring local body fat using the bioelectrical impedance analysis where a flat bottom plane of the impedance-measuring apparatus has four electrodes to connect to a pre-selected segment of the body to measure the body fat content, which allows all four electrodes on the bottom plane to be connected to the human body at the same time. When the impedance-measuring apparatus is connected to the person tested, a weak current is sent through the current electrodes and the body tissue. Since the resistance characteristics of body fat mass and fat free mass is quite different, the resistance values measured from segments of the body can provide useful information for computation of the proportion of fat free mass and body fat mass in the body.
    Type: Application
    Filed: June 18, 2003
    Publication date: December 23, 2004
    Inventor: Chih-Cheng Lu
  • Patent number: 6693047
    Abstract: A method for removing at least one carbon doped oxide layer over a surface to recycle the semiconductor process wafer including providing a semiconductor wafer including a process surface including at least one carbon doped silicon oxide layer; oxidizing the carbon doped oxide layer according to an oxidizing treatment to convert at oxidize at least a portion of the carbon doped oxide layer to produce silicon oxide; and, wet etching the silicon oxide to substantially remove the silicon oxide.
    Type: Grant
    Filed: December 19, 2002
    Date of Patent: February 17, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Chih-Cheng Lu, Wen Chang, Syun-Ming Jeng
  • Publication number: 20030236466
    Abstract: The method for collecting cardiac activity data non-invasively from the chest or thorax of a patient comprises the steps of:
    Type: Application
    Filed: June 21, 2002
    Publication date: December 25, 2003
    Inventors: Peter P. Tarjan, Chih-Cheng Lu, Walter G. Besio