Patents by Inventor Chih-Ching Wang
Chih-Ching Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11282943Abstract: The present disclosure provides a method of manufacturing a semiconductor device. The method includes forming a fin structure having first semiconductor layers and second semiconductor layers alternately stacked, forming a sacrificial gate structure over the fin structure, and etching a source/drain (S/D) region thereby forming an opening exposing at least one second semiconductor layer. The method also includes implanting an etch rate modifying species into the at least one second semiconductor layer though the opening thereby forming an implanted portion of the at least one second semiconductor layer. The method further includes selectively etching the implanted portion of the at least one second semiconductor layer, recessing end portions of the first semiconductor layers exposed in the opening, and forming an S/D epitaxial layer in the opening.Type: GrantFiled: June 15, 2020Date of Patent: March 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Ching Wang, Chung-I Yang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
-
Publication number: 20210391443Abstract: The present disclosure provides a method of manufacturing a semiconductor device. The method includes forming a fin structure having first semiconductor layers and second semiconductor layers alternately stacked, forming a sacrificial gate structure over the fin structure, and etching a source/drain (S/D) region thereby forming an opening exposing at least one second semiconductor layer. The method also includes implanting an etch rate modifying species into the at least one second semiconductor layer though the opening thereby forming an implanted portion of the at least one second semiconductor layer. The method further includes selectively etching the implanted portion of the at least one second semiconductor layer, recessing end portions of the first semiconductor layers exposed in the opening, and forming an S/D epitaxial layer in the opening.Type: ApplicationFiled: June 15, 2020Publication date: December 16, 2021Inventors: Chih-Ching Wang, Chung-I Yang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
-
Patent number: 11201243Abstract: The current disclosure describes techniques for forming a gate-all-around device where semiconductor layers are released by etching out the buffer layers that are vertically stacked between semiconductor layers in an alternating manner. The buffer layers stacked at different vertical levels include different material compositions, which bring about different etch rates with respect to an etchant that is used to remove at least partially the buffer layers to release the semiconductor layers.Type: GrantFiled: September 3, 2019Date of Patent: December 14, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chansyun David Yang, Han-Yu Lin, Chun-Yu Chen, Chih-Ching Wang, Fang-Wei Lee, Tze-Chung Lin, Li-Te Lin, Gwan-Sin Chang, Pinyen Lin
-
Publication number: 20210376119Abstract: A method of manufacturing a semiconductor device includes forming a fin structure in which first semiconductor layers and second semiconductor layers are alternatively stacked; forming a sacrificial gate structure over the fin structure; etching a source/drain (S/D) region of the fin structure, which is not covered by the sacrificial gate structure, thereby forming an S/D space; laterally etching the first semiconductor layers through the S/D space, thereby forming recesses; forming a first insulating layer, in the recesses, on the etched first semiconductor layers; after the first insulating layer is formed, forming a second insulating layer, in the recesses, on the first insulating layer, wherein a dielectric constant of the second insulating layer is less than that of the first insulating layer; and forming an S/D epitaxial layer in the S/D space, wherein the second insulating layer is in contact with the S/D epitaxial layer.Type: ApplicationFiled: March 12, 2021Publication date: December 2, 2021Inventors: Chih-Ching Wang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
-
Publication number: 20210376163Abstract: Multi-gate devices and methods for fabricating such are disclosed herein. An exemplary device includes a channel layer, a first source/drain feature, a second source/drain feature, and a metal gate. The channel layer has a first horizontal segment, a second horizontal segment, and a vertical segment connects the first horizontal segment and the second horizontal segment. The first horizontal segment and the second horizontal segment extend along a first direction, and the vertical segment extends along a second direction. The vertical segment has a width along the first direction and a thickness along the second direction, and the thickness is greater than the width. The channel layer extends between the first source/drain feature and the second source/drain feature along a third direction. The metal gate wraps channel layer. In some embodiments, the first horizontal segment and the second horizontal segment are nanosheets.Type: ApplicationFiled: March 19, 2021Publication date: December 2, 2021Inventors: Chih-Ching Wang, Jon-Hsu Ho, Wen-Hsing Hsieh, Kuan-Lun Cheng, Zhiqiang Wu
-
Publication number: 20210343858Abstract: Embodiments of the present disclosure includes a method of forming a semiconductor device. The method includes providing a substrate having a plurality of first semiconductor layers and a plurality of second semiconductor layers disposed over the substrate. The method also includes patterning the first semiconductor layers and the second semiconductor layers to form a first fin and a second fin, removing the first semiconductor layers from the first and second fins such that a first portion of the patterned second semiconductor layers becomes first suspended nanostructures in the first fin and that a second portion of the patterned second semiconductor layers becomes second suspended nanostructures in the second fin, and doping a threshold modifying impurity into the first suspended nanostructures in the first fin. The impurity causes transistors formed with the first fin and second fin have different threshold voltages.Type: ApplicationFiled: February 8, 2021Publication date: November 4, 2021Inventors: Chih-Ching Wang, Chia-Ying Su, Wen-Hsing Hsieh, Kuan-Lun Cheng, Chung-Wei Wu, Zhiqiang Wu
-
Publication number: 20210066490Abstract: The current disclosure describes techniques for forming a gate-all-around device where semiconductor layers are released by etching out the buffer layers that are vertically stacked between semiconductor layers in an alternating manner. The buffer layers stacked at different vertical levels include different material compositions, which bring about different etch rates with respect to an etchant that is used to remove at least partially the buffer layers to release the semiconductor layers.Type: ApplicationFiled: September 3, 2019Publication date: March 4, 2021Inventors: Chansyun David Yang, Han-Yu Lin, Chun-Yu Chen, Chih-Ching Wang, Fang-Wei Lee, Tze-Chung LIN, Li-Te LIN, Gwan-Sin Chang, Pinyen LIN
-
Patent number: 10593246Abstract: A pixel array substrate includes a substrate, first and second scan lines, data lines, and pixel structures. The first and second scan lines are disposed alternately and are enabled for different time durations in the same frame time. The data lines intersect with the first and second scan lines. Each of the pixel structures includes first and second active devices, and a pixel electrode. The first and second active devices are turned on and off by the first and second scan lines, respectively. The pixel electrode is connected to the first active device which is connected to one of the data lines by being connected to the second active device. A distance between the first and second scan lines adjacent to each other is a third to a half of a pitch of the pixel structures.Type: GrantFiled: September 14, 2018Date of Patent: March 17, 2020Assignee: E Ink Holdings Inc.Inventors: Shu-Fen Tsai, Jia-Hung Chen, Kuang-Heng Liang, Chih-Ching Wang, Ian French
-
Publication number: 20190139476Abstract: A pixel array substrate includes a substrate, first and second scan lines, data lines, and pixel structures. The first and second scan lines are disposed alternately and are enabled for different time durations in the same frame time. The data lines intersect with the first and second scan lines. Each of the pixel structures includes first and second active devices, and a pixel electrode. The first and second active devices are turned on and off by the first and second scan lines, respectively. The pixel electrode is connected to the first active device which is connected to one of the data lines by being connected to the second active device. A distance between the first and second scan lines adjacent to each other is a third to a half of a pitch of the pixel structures.Type: ApplicationFiled: September 14, 2018Publication date: May 9, 2019Applicant: E Ink Holdings Inc.Inventors: Shu-Fen Tsai, Jia-Hung Chen, Kuang-Heng Liang, Chih-Ching Wang, Ian French
-
Publication number: 20170151085Abstract: An earhook anti-snoring device is disclosed. The earhook anti-snoring device includes a casing, a base plate, a control unit, a sound-receiving device, a sound-generating device and a vibrating device. The base plate is arranged in the casing, and the control unit and the sound-receiving device are positioned on a side of the base plate. The position of the sound-receiving device corresponds to a hollow pipe arranged on the casing. The sound-generating device and the vibrating device are positioned on another side of the base plate and the sound-generating device is opposite to the sound-receiving device. The position of the sound-generating device corresponds to another hollow pipe arranged on the casing, and the sound-generating device is directed to an ear canal of a user along the hollow pipe.Type: ApplicationFiled: April 7, 2016Publication date: June 1, 2017Inventors: Yung-Huang CHANG, Chih-Hao LU, An-Tai LEE, Chun-Chi LIN, Chih-Ching WANG
-
Patent number: 9620500Abstract: A series-connected transistor structure includes a first source, a first channel-drain structure, a second channel-drain structure, a gate dielectric layer, a gate, a first drain pad and a second drain pad. The first source is over a substrate. The first channel-drain structure is over the first source and includes a first channel and a first drain thereover. The second channel-drain structure is over the first source and substantially parallel to the first channel-drain structure and includes a second channel and a second drain thereover. The gate dielectric layer surrounds the first channel and the second channel. The gate surrounds the gate dielectric layer. The first drain pad is over and in contact with the first drain. The second drain pad is over and in contact with the second drain, in which the first drain pad and the second drain pad are separated from each other.Type: GrantFiled: May 18, 2016Date of Patent: April 11, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chin-Chi Wang, Chien-Chih Lee, Tien-Wei Chiang, Ching-Wei Tsai, Chih-Ching Wang, Jon-Hsu Ho, Wen-Hsing Hsieh
-
Publication number: 20160339358Abstract: A manufacturing and separating device and a method for oily radioactive substances provide an automatic synthesis box to minimize the man-made errors during the manufacturing, such that mass production for the oily radioactive substance can be possible, the radiation exposure time of the manufacturing staff can be reduced, and the radioactivity of the final products can be detected. The manufacturing and separating device includes a first reaction material bottle, a first heating device, a gas pump, a first flushing material bottle, a second flushing material bottle, a purifying device, a first transmission unit, a temperature-controlled temporary storage tank, a filter, a first collection bottle, a second collection bottle, a plurality of valves and a control unit.Type: ApplicationFiled: May 6, 2016Publication date: November 24, 2016Inventors: CHIH-CHING WANG, TSAI-YUEH LUO, I-CHUNG TANG
-
Patent number: 9502409Abstract: A multi-gate semiconductor device is formed including a semiconductor substrate. The multi-gate semiconductor device also includes a first transistor including a first fin portion extending above the semiconductor substrate. The first transistor has a first channel region formed therein. The first channel region includes a first channel region portion doped at a first concentration of a first dopant type and a second channel region portion doped at a second concentration of the first dopant type. The second concentration is higher than the first concentration. The first transistor further includes a first gate electrode layer formed over the first channel region. The first gate electrode layer may be of a second dopant type. The first dopant type may be N-type and the second dopant type may be P-type. The second channel region portion may be formed over the first channel region portion.Type: GrantFiled: February 18, 2015Date of Patent: November 22, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Jon-Hsu Ho, Chih-Ching Wang, Ching-Fang Huang, Wen-Hsing Hsieh, Tsung-Hsing Yu, Yi-Ming Sheu, Chih Chieh Yeh, Ken-Ichi Goto, Zhiqiang Wu
-
Patent number: 9502253Abstract: A method of forming an integrated circuit comprises forming a first doped region in a substrate using a first angle ion implantation performed on a first side of a gate structure. The gate structure has a length in a first direction and a width in a second direction. The method also comprises forming a second doped region in the substrate using a second angle ion implantation performed on a second side of the gate structure. The first angle ion implantation has a first implantation angle with respect to the second direction and the second angle ion implantation has a second implantation angle with respect to the second direction. Each of the first implantation angle and the second implantation angle is substantially larger than 0° and less than 90°.Type: GrantFiled: September 18, 2014Date of Patent: November 22, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Zhiqiang Wu, Yi-Ming Sheu, Tsung-Hsing Yu, Kuan-Lun Cheng, Chih-Pin Tsao, Wen-Yuan Chen, Chun-Fu Cheng, Chih-Ching Wang
-
Publication number: 20160260713Abstract: A series-connected transistor structure includes a first source, a first channel-drain structure, a second channel-drain structure, a gate dielectric layer, a gate, a first drain pad and a second drain pad. The first source is over a substrate. The first channel-drain structure is over the first source and includes a first channel and a first drain thereover. The second channel-drain structure is over the first source and substantially parallel to the first channel-drain structure and includes a second channel and a second drain thereover. The gate dielectric layer surrounds the first channel and the second channel. The gate surrounds the gate dielectric layer. The first drain pad is over and in contact with the first drain. The second drain pad is over and in contact with the second drain, in which the first drain pad and the second drain pad are separated from each other.Type: ApplicationFiled: May 18, 2016Publication date: September 8, 2016Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chin-Chi WANG, Chien-Chih LEE, Tien-Wei CHIANG, Ching-Wei TSAI, Chih-Ching WANG, Jon-Hsu HO, Wen-Hsing HSIEH
-
Patent number: 9373620Abstract: A series-connected transistor structure includes a first source, a first channel-drain structure, a second channel-drain structure, a gate dielectric layer, a gate, a first drain pad and a second drain pad. The first source is over a substrate. The first channel-drain structure is over the first source and includes a first channel and a first drain thereover. The second channel-drain structure is over the first source and substantially parallel to the first channel-drain structure and includes a second channel and a second drain thereover. The gate dielectric layer surrounds the first channel and the second channel. The gate surrounds the gate dielectric layer. The first drain pad is over and in contact with the first drain. The second drain pad is over and in contact with the second drain, in which the first drain pad and the second drain pad are separated from each other.Type: GrantFiled: September 12, 2014Date of Patent: June 21, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chin-Chi Wang, Chien-Chih Lee, Tien-Wei Chiang, Ching-Wei Tsai, Chih-Ching Wang, Jon-Hsu Ho, Wen-Hsing Hsieh
-
Patent number: 9318322Abstract: System and method for controlling the channel thickness and preventing variations due to formation of small features. An embodiment comprises a fin raised above the substrate and a capping layer is formed over the fin. The channel carriers are repelled from the heavily doped fin and confined within the capping layer. This forms a thin-channel that allows greater electrostatic control of the gate.Type: GrantFiled: November 13, 2014Date of Patent: April 19, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Zhiqiang Wu, Ken-Ichi Goto, Wen-Hsing Hsieh, Jon-Hsu Ho, Chih-Ching Wang, Ching-Fang Huang
-
Publication number: 20160079239Abstract: A series-connected transistor structure includes a first source, a first channel-drain structure, a second channel-drain structure, a gate dielectric layer, a gate, a first drain pad and a second drain pad. The first source is over a substrate. The first channel-drain structure is over the first source and includes a first channel and a first drain thereover. The second channel-drain structure is over the first source and substantially parallel to the first channel-drain structure and includes a second channel and a second drain thereover. The gate dielectric layer surrounds the first channel and the second channel. The gate surrounds the gate dielectric layer. The first drain pad is over and in contact with the first drain. The second drain pad is over and in contact with the second drain, in which the first drain pad and the second drain pad are separated from each other.Type: ApplicationFiled: September 12, 2014Publication date: March 17, 2016Inventors: Chin-Chi WANG, Chien-Chih LEE, Tien-Wei CHIANG, Ching-Wei TSAI, Chih-Ching WANG, Jon-Hsu HO, Wen-Hsing HSIEH
-
Patent number: 9263832Abstract: A male connector having an electrostatic discharge (ESD) function includes a metal portion, an insulating portion and a cable. The metal portion is inserted into a female connector. One end of the insulating portion is connected to the metal portion and another end of the insulating portion is connected to the cable. The cable includes a plurality of sub-cables and a grounded metal layer. The metal layer surrounds the sub-cables, and is in electrical contact with the metal portion. Static electricity on the metal portion is conducted to ground via the metal layer.Type: GrantFiled: August 13, 2013Date of Patent: February 16, 2016Assignee: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Chih-Ching Wang, Yu-Hua Ho
-
Publication number: 20150162334Abstract: A multi-gate semiconductor device is formed including a semiconductor substrate. The multi-gate semiconductor device also includes a first transistor including a first fin portion extending above the semiconductor substrate. The first transistor has a first channel region formed therein. The first channel region includes a first channel region portion doped at a first concentration of a first dopant type and a second channel region portion doped at a second concentration of the first dopant type. The second concentration is higher than the first concentration. The first transistor further includes a first gate electrode layer formed over the first channel region. The first gate electrode layer may be of a second dopant type. The first dopant type may be N-type and the second dopant type may be P-type. The second channel region portion may be formed over the first channel region portion.Type: ApplicationFiled: February 18, 2015Publication date: June 11, 2015Inventors: Jon-Hsu HO, Chih-Ching WANG, Ching-Fang HUANG, Wen-Hsing HSIEH, Tsung-Hsing YU, Yi-Ming SHEU, Chih-Chieh YEH, Ken-Ichi GOTO, Zhiqiang WU