Patents by Inventor Chih-Hsun Lin
Chih-Hsun Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12009302Abstract: A method includes following steps. An image of a wafer is captured. A first contact region in the captured image at which the first conductive contact is rendered is identified. A second contact region in the captured image at which the second conductive contact is rendered is identified. The second conductive contact is determined as not shorted to the first conductive contact, in response to the identified second contact region in the captured image is darker than the identified first contact region in the captured image.Type: GrantFiled: July 26, 2022Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yen-Hsung Ho, Chia-Yi Tseng, Chih-Hsun Lin, Kun-Tsang Chuang, Yung-Lung Hsu
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Publication number: 20230018182Abstract: The present invention provides a simulated inflatable wheel including a rim, a filler tire mounted on the rim, and a tire casing covering the filler tire and having a rolling portion in rolling contact with the external environment and an abutting portion extending from two sides of the rolling portion. The abutting portion is located between the rim and the filler tire. The abutting portion abuts against the rim and the filler tire respectively. A recessed portion is formed on at least one position of an outer surface of the filler tire. The present invention utilizes the recessed portion of the filler tire to generate space between the filler tire and the rim (or the tire casing), for providing a buffer when the filler tire is deformed and improving elasticity of the filler tire. The present invention further provides a stroller including the simulated inflatable wheel.Type: ApplicationFiled: December 16, 2020Publication date: January 19, 2023Applicant: WONDERLAND SWITZERLAND AGInventors: Chih-Hsun LIN, Jian Yong TANG
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Publication number: 20220390628Abstract: The invention is related to particle induced radiography system, comprising a particle radiation source device, implant module, external detector device, central module and other controls, in which the implant module comprises active and/or passive components in tandem with the readout electronics and communication chosen to measure the beam properties and to generate and detect secondary gamma photons from the nuclear interactions, the external detector device provides a position sensitive gamma detector with a high detection efficiency, good spatial resolution and a relatively large field of view necessary for particle treatments useful in monitoring both the implanted device and the patient anatomical areas under treatment, and the external detector device can also be used to perform 3D spectral imaging on any material samples using proton beam as a probe.Type: ApplicationFiled: June 8, 2022Publication date: December 8, 2022Applicants: Academia Sinica, National Central UniversityInventors: Mythra Varun Nemallapudi, Chih-Hsun Lin, Shih-Chang Lee, Augustine Ei-fong Chen
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Publication number: 20220359395Abstract: A method includes following steps. An image of a wafer is captured. A first contact region in the captured image at which the first conductive contact is rendered is identified. A second contact region in the captured image at which the second conductive contact is rendered is identified. The second conductive contact is determined as not shorted to the first conductive contact, in response to the identified second contact region in the captured image is darker than the identified first contact region in the captured image.Type: ApplicationFiled: July 26, 2022Publication date: November 10, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yen-Hsung HO, Chia-Yi TSENG, Chih-Hsun LIN, Kun-Tsang CHUANG, Yung-Lung HSU
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Patent number: 11430733Abstract: A method includes capturing an image of a wafer, the wafer comprising a first conductive contact over an active region of the wafer and a second conductive contact over a shallow trench isolation (STI) region abutting the active region; identifying a brightness of a first contact region in the captured image at which the first conductive contact is rendered; identifying a brightness of a second contact region in the captured image at which the second conductive contact is rendered; and in response to the identified brightness of the first contact region in the captured image being substantially the same as the identified brightness of the second contact region in the captured image, determining that the second conductive contact is shorted to the first conductive contact.Type: GrantFiled: October 23, 2020Date of Patent: August 30, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yen-Hsung Ho, Chia-Yi Tseng, Chih-Hsun Lin, Kun-Tsang Chuang, Yung-Lung Hsu
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Patent number: 11257719Abstract: Integrated circuit devices having improved interlayer dielectric (ILD) layer topography and methods of fabrication thereof are disclosed herein. An exemplary integrated circuit device includes a first gate structure having a first height disposed over a substrate in a first region and a second gate structure having a second height disposed over the substrate in a second region. The second height is less than the first height. A first contact etch stop layer is disposed over the first gate structure. A second contact etch stop layer disposed over the second gate structure. The first contact etch stop layer has a first thickness, the second contact etch stop layer has a second thickness, and the second thickness is greater than the first thickness. An interlayer dielectric layer is disposed over the first contact etch stop layer and the second contact etch stop layer.Type: GrantFiled: June 1, 2020Date of Patent: February 22, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuan-Wei Su, Chun Yu Huang, Chih-Hsun Lin, Ping-Pang Hsieh
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Publication number: 20210043566Abstract: A method includes capturing an image of a wafer, the wafer comprising a first conductive contact over an active region of the wafer and a second conductive contact over a shallow trench isolation (STI) region abutting the active region; identifying a brightness of a first contact region in the captured image at which the first conductive contact is rendered; identifying a brightness of a second contact region in the captured image at which the second conductive contact is rendered; and in response to the identified brightness of the first contact region in the captured image being substantially the same as the identified brightness of the second contact region in the captured image, determining that the second conductive contact is shorted to the first conductive contact.Type: ApplicationFiled: October 23, 2020Publication date: February 11, 2021Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yen-Hsung HO, Chia-Yi TSENG, Chih-Hsun LIN, Kun-Tsang CHUANG, Yung-Lung HSU
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Patent number: 10818595Abstract: A method of fabricating a semiconductor structure includes forming first and second features in a scribe region of a semiconductor substrate in which the first feature has a first electrical resistance, the second feature has a second electrical resistance, and the first electrical resistance is different form the second electrical resistance; forming an interlayer dielectric layer over the first and second features; and forming a first contact in the interlayer dielectric layer and connected to the first feature and a second contact in the interlayer dielectric layer and connected to the second feature.Type: GrantFiled: April 13, 2017Date of Patent: October 27, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yen-Hsung Ho, Chia-Yi Tseng, Chih-Hsun Lin, Kun-Tsang Chuang, Yung-Lung Hsu
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Patent number: 10809469Abstract: A method and a system for active alignment of a light source assembly along three dimensions in an optical bench plane are provided. The light source assembly, preferably a laser diode on its sub-mount, is actively aligned in three dimensions, longitudinal, transection and vertical along the optical bench. The light source assembly is attached on edge of the optical bench, via adhesion processes, such as solder welding. Optical components such as collimator lens, isolator, etc are first passively aligned on the optical bench using alignment marks and epoxy slots provided on the surface of the optical bench. Then, laser diode, mounted on a laser diode sub-mount, is aligned in X and Z direction. Thereafter, the light source assembly is pushed towards the edge of the optical bench and attached with the edge via a solder joint. Also, a compensator can be actively aligned until the optimum light intensity achieved.Type: GrantFiled: April 2, 2019Date of Patent: October 20, 2020Assignee: Cloud Light Technology LimitedInventors: Vincent Wai Hung, Vivian Wei Ma, Wing Keung Mark Mak, Chih Hsun Lin
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Publication number: 20200319415Abstract: A method and a system for active alignment of a light source assembly along three dimensions in an optical bench plane are provided. The light source assembly, preferably a laser diode on its sub-mount, is actively aligned in three dimensions, longitudinal, transection and vertical along the optical bench. The light source assembly is attached on edge of the optical bench, via adhesion processes, such as solder welding. Optical components such as collimator lens, isolator, etc are first passively aligned on the optical bench using alignment marks and epoxy slots provided on the surface of the optical bench. Then, laser diode, mounted on a laser diode sub-mount, is aligned in X and Z direction. Thereafter, the light source assembly is pushed towards the edge of the optical bench and attached with the edge via a solder joint. Also, a compensator can be actively aligned until the optimum light intensity achieved.Type: ApplicationFiled: April 2, 2019Publication date: October 8, 2020Inventors: Vincent Wai Hung, Vivian Wei Ma, Wing Keung Mark Mak, Chih Hsun Lin
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Publication number: 20200294862Abstract: Integrated circuit devices having improved interlayer dielectric (ILD) layer topography and methods of fabrication thereof are disclosed herein. An exemplary integrated circuit device includes a first gate structure having a first height disposed over a substrate in a first region and a second gate structure having a second height disposed over the substrate in a second region. The second height is less than the first height. A first contact etch stop layer is disposed over the first gate structure. A second contact etch stop layer disposed over the second gate structure. The first contact etch stop layer has a first thickness, the second contact etch stop layer has a second thickness, and the second thickness is greater than the first thickness. An interlayer dielectric layer is disposed over the first contact etch stop layer and the second contact etch stop layer.Type: ApplicationFiled: June 1, 2020Publication date: September 17, 2020Inventors: Kuan-Wei Su, Chun Yu Huang, Chih-Hsun Lin, Ping-Pang Hsieh
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Publication number: 20200238645Abstract: A process for making a wheel assembly for a lightweight vehicle includes the steps of: (a) providing a wheel which includes a rim having a recessed outer surface, (b) disposing a foam tire core on the wheel such that an inner annular surface of the foam tire core is in abutment with the recessed outer surface of the rim, (c) applying an adhesive agent on at least one of an inner surface of a rubber casing and an outer annular surface of the foam tire core, and (d) wrapping the rubber casing on the foam tire core such that the inner surface of the rubber casing is brought into press engagement with the outer annular surface of the foam tire core.Type: ApplicationFiled: April 24, 2019Publication date: July 30, 2020Inventor: Chih-Hsun LIN
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Patent number: 10699960Abstract: Methods for improving interlayer dielectric (ILD) layer topography and resulting integrated circuit devices are disclosed herein. An exemplary method includes forming a first contact etch stop layer having a first thickness over a first region of a wafer, forming a second contact etch stop layer having a second thickness over a second region of the wafer, and forming an ILD layer over the first contact etch stop layer and the second contact etch stop layer. A first topography variation exists between the first region and the second region. The second thickness is different than the first thickness to achieve a second topography variation that is less than the first topography variation. The first topography variation can be caused by a height difference between a first gate structure disposed over the wafer in the first region and a second gate structure disposed over the wafer in the second region.Type: GrantFiled: August 30, 2018Date of Patent: June 30, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuan-Wei Su, Chun Yu Huang, Chih-Hsun Lin, Ping-Pang Hsieh
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Patent number: 10672777Abstract: A method for manufacturing a semiconductor device having a multi-height structure is provided. The semiconductor device having a multi-height structure includes a silicon substrate. A first structure and a second structure are respectively formed on the silicon substrate and connected to each other. A limiting block is formed on the second structure and near an edge of the second structure beside the first structure. A bottom anti-reflection coating (BARC) layer is formed to blanketly cover the first structure, the second structure and the limiting block, in which the BARC layer includes a low-viscosity material, and the BARC layer overlying the top surface of the second structure has an external surface substantially parallel to the top surface of the second structure. Control gates are formed on the external surface of the BARC layer.Type: GrantFiled: February 18, 2019Date of Patent: June 2, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuan-Wei Su, Yung-Lung Hsu, Chih-Hsun Lin, Kun-Tsang Chuang, Chiang-Ming Chuang, Chia-Yi Tseng
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Publication number: 20200006152Abstract: Methods for improving interlayer dielectric (ILD) layer topography and resulting integrated circuit devices are disclosed herein. An exemplary method includes forming a first contact etch stop layer having a first thickness over a first region of a wafer, forming a second contact etch stop layer having a second thickness over a second region of the wafer, and forming an ILD layer over the first contact etch stop layer and the second contact etch stop layer. A first topography variation exists between the first region and the second region. The second thickness is different than the first thickness to achieve a second topography variation that is less than the first topography variation. The first topography variation can be caused by a height difference between a first gate structure disposed over the wafer in the first region and a second gate structure disposed over the wafer in the second region.Type: ApplicationFiled: August 30, 2018Publication date: January 2, 2020Inventors: Kuan-Wei Su, Chun Yu Huang, Chih-Hsun Lin, Ping-Pang Hsieh
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Publication number: 20190181149Abstract: A method for manufacturing a semiconductor device having a multi-height structure is provided. The semiconductor device having a multi-height structure includes a silicon substrate. A first structure and a second structure are respectively formed on the silicon substrate and connected to each other. A limiting block is formed on the second structure and near an edge of the second structure beside the first structure. A bottom anti-reflection coating (BARC) layer is formed to blanketly cover the first structure, the second structure and the limiting block, in which the BARC layer includes a low-viscosity material, and the BARC layer overlying the top surface of the second structure has an external surface substantially parallel to the top surface of the second structure. Control gates are formed on the external surface of the BARC layer.Type: ApplicationFiled: February 18, 2019Publication date: June 13, 2019Inventors: Kuan-Wei SU, Yung-Lung HSU, Chih-Hsun LIN, Kun-Tsang CHUANG, Chiang-Ming CHUANG, Chia-Yi TSENG
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Patent number: 10211214Abstract: A semiconductor device having semiconductor device having a multi-height structure is provided. The semiconductor device having a multi-height structure includes a silicon substrate. A first structure and a second structure are respectively disposed on the silicon substrate and connected to each other. A limiting block is disposed on the second structure and near an edge of the second structure beside the first structure. A bottom anti-reflection coating (BARC) layer blanketly covering the first structure, the second structure and the limiting block, in which the BARC layer comprises a low-viscosity material, and the BARC layer overlying the top surface of the second structure has an external surface substantially parallel to the top surface of the second structure. Control gates are disposed on the external surface of the BARC layer.Type: GrantFiled: March 13, 2017Date of Patent: February 19, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuan-Wei Su, Yung-Lung Hsu, Chih-Hsun Lin, Kun-Tsang Chuang, Chiang-Ming Chuang, Chia-Yi Tseng
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Publication number: 20180261461Abstract: A semiconductor device includes a substrate having a source feature and a drain feature therein configured to enhance charge mobility, a gate stack directly over a portion of the source feature and a portion of the drain feature, a first salicide layer over substantially the entire source feature exposed by the gate stack, and a second salicide layer over substantially the entire drain feature exposed by the gate stack. The first salicide layer has a germanium concentration greater than about 0% by weight and less than about 3% by weight. The second salicide layer has a germanium concentration greater than about 0% by weight and less than about 3% by weight.Type: ApplicationFiled: May 16, 2018Publication date: September 13, 2018Inventors: Mei-Hsuan Lin, Chih-Hsun Lin, Ching-Hua Chu, Ling-Sung Wang
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Publication number: 20180261609Abstract: A semiconductor device having semiconductor device having a multi-height structure is provided. The semiconductor device having a multi-height structure includes a silicon substrate. A first structure and a second structure are respectively disposed on the silicon substrate and connected to each other. A limiting block is disposed on the second structure and near an edge of the second structure beside the first structure. A bottom anti-reflection coating (BARC) layer blanketly covering the first structure, the second structure and the limiting block, in which the BARC layer comprises a low-viscosity material, and the BARC layer overlying the top surface of the second structure has an external surface substantially parallel to the top surface of the second structure. Control gates are disposed on the external surface of the BARC layer.Type: ApplicationFiled: March 13, 2017Publication date: September 13, 2018Inventors: Kuan-Wei SU, Yung-Lung HSU, Chih-Hsun LIN, Kun-Tsang CHUANG, Chiang-Ming CHUANG, Chia-Yi TSENG
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Patent number: 10043653Abstract: A method of cleaning and drying a semiconductor wafer including inserting a semiconductor wafer into a chamber of a cleaning tool, spinning the semiconductor wafer in a range of about 300 revolutions per minute to about 1600 revolutions per minute, and simultaneously spraying the semiconductor wafer with de-ionized water and a mixture of isopropyl alcohol and nitrogen.Type: GrantFiled: August 27, 2012Date of Patent: August 7, 2018Assignee: Taiwan Semiconductor Manufacturing CompanyInventors: Wei-Cheng Chen, Ling-Sung Wang, Chih-Hsun Lin, Tzu kai Lin