Patents by Inventor Chih-Kai Hsu
Chih-Kai Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240128127Abstract: A semiconductor device includes a single diffusion break (SDB) structure dividing a fin-shaped structure into a first portion and a second portion, an isolation structure on the SDB structure, a first spacer adjacent to the isolation structure, a metal gate adjacent to the isolation structure, a shallow trench isolation (STI around the fin-shaped structure, and a second isolation structure on the STI. Preferably, a top surface of the first spacer is lower than a top surface of the isolation structure and a bottom surface of the first spacer is lower than a bottom surface of the metal gate.Type: ApplicationFiled: December 28, 2023Publication date: April 18, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-l Fu, Chun-ya Chiu, Chi-Ting Wu, Chin-HUNG Chen, Yu-Hsiang Lin
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Patent number: 11948975Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; and forming a buffer layer adjacent to the gate structure. Preferably, the buffer layer includes a crescent moon shape and the buffer layer includes an inner curve, an outer curve, and a planar surface connecting the inner curve and an outer curve along a top surface of the substrate, in which the planar surface directly contacts the outer curve on an outer sidewall of the spacer.Type: GrantFiled: October 24, 2021Date of Patent: April 2, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Publication number: 20240097569Abstract: An open-loop inductor current emulating circuit is provided. A current sensor circuit senses a current flowing through a first terminal of a low-side switch to output a current sensed signal. An emulation controller circuit outputs a plurality of charging current signals according to currents of a plurality of rising waveforms of the current sensed signal. The emulation controller circuit outputs a plurality of discharging current signals according to currents of a plurality of falling waveforms of the current sensed signal. A charging and discharging circuit generates a plurality of charging currents according to the charging current signals, and generates a plurality of discharging currents according to the discharging current signals. The charging and discharging circuit alternatively outputs the charging currents and the discharging currents to the capacitor to charge and discharge the capacitor multiple times, thereby achieving a purpose of emulating an inductor current.Type: ApplicationFiled: November 21, 2022Publication date: March 21, 2024Inventors: CHUN-KAI HSU, CHIH-HENG SU
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Publication number: 20240088187Abstract: Trenches in which to form a back side isolation structure for an array of CMOS image sensors are formed by a cyclic process that allows the trenches to be kept narrow. Each cycle of the process includes etching to add a depth segment to the trenches and coating the depth segment with an etch-resistant coating. The following etch step will break through the etch-resistant coating at the bottom of the trench but the etch-resistant coating will remain in the upper part of the trench to limit lateral etching and substrate damage. The resulting trenches have a series of vertically spaced nodes. The process may result in a 10% increase in photodiode area and a 30-40% increase in full well capacity.Type: ApplicationFiled: January 3, 2023Publication date: March 14, 2024Inventors: Chih Cheng Shih, Tsun-Kai Tsao, Jiech-Fun Lu, Hung-Wen Hsu, Bing Cheng You, Wen-Chang Kuo
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Patent number: 11901239Abstract: A semiconductor device includes a single diffusion break (SDB) structure dividing a fin-shaped structure into a first portion and a second portion, an isolation structure on the SDB structure, a first spacer adjacent to the isolation structure, a metal gate adjacent to the isolation structure, a shallow trench isolation (STI around the fin-shaped structure, and a second isolation structure on the STI. Preferably, a top surface of the first spacer is lower than a top surface of the isolation structure and a bottom surface of the first spacer is lower than a bottom surface of the metal gate.Type: GrantFiled: February 1, 2023Date of Patent: February 13, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Chun-Ya Chiu, Chi-Ting Wu, Chin-Hung Chen, Yu-Hsiang Lin
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Publication number: 20230326805Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a fin-shaped structure thereon; forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion; forming a first gate structure on the SDB structure; forming an interlayer dielectric (ILD) layer around the first gate structure; transforming the first gate structure into a first metal gate; removing the first metal gate to form a first recess; and forming a dielectric layer in the first recess.Type: ApplicationFiled: June 14, 2023Publication date: October 12, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Chun-Ya Chiu, Chi-Ting Wu, Chin-Hung Chen, Yu-Hsiang Lin
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Publication number: 20230326806Abstract: A semiconductor device includes a single diffusion break (SDB) structure dividing a fin-shaped structure into a first portion and a second portion, a first isolation structure on the SDB structure, a shallow trench isolation (STI) adjacent to the SDB structure, and a second isolation structure on the STI. Preferably, the first isolation structure further includes a cap layer on the SDB structure and a dielectric layer on the cap layer.Type: ApplicationFiled: June 14, 2023Publication date: October 12, 2023Inventors: Chih-Kai Hsu, Ssu-I Fu, Chun-Ya Chiu, Chi-Ting Wu, Chin-Hung Chen, Yu-Hsiang Lin
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Publication number: 20230327003Abstract: A method for fabricating semiconductor device includes: forming a first semiconductor layer and an insulating layer on a substrate; removing the insulating layer and the first semiconductor layer to form openings; forming a second semiconductor layer in the openings; and patterning the second semiconductor layer, the insulating layer, and the first semiconductor layer to form fin-shaped structures.Type: ApplicationFiled: June 6, 2023Publication date: October 12, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chin-Hung Chen, Ssu-I Fu, Chih-Kai Hsu, Chia-Jung Hsu, Yu-Hsiang Lin
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Publication number: 20230268424Abstract: A method for fabricating a semiconductor device includes the steps of providing a substrate having a high-voltage (HV) region and a low-voltage (LV) region, forming first fin-shaped structures on the HV region, and then performing an oxidation process to form a gate oxide layer on and directly connecting the first fin-shaped structures. Preferably, a bottom surface of the gate oxide layer includes first bumps on the first fin-shaped structures while a top surface of the gate oxide layer includes second bumps.Type: ApplicationFiled: March 28, 2022Publication date: August 24, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chia-Jung Hsu, Ssu-I Fu, Chih-Kai Hsu, Chun-Ya Chiu, Chin-Hung Chen, Yu-Hsiang Lin, Chien-Ting Lin
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Publication number: 20230268346Abstract: A method for fabricating a semiconductor device includes the steps of: providing a substrate having a high-voltage (HV) region and a low-voltage (LV) region; forming a base on the HV region and fin-shaped structures on the LV region; forming a first insulating around the fin-shaped structures; removing the base, the first insulating layer, and part of the fin-shaped structures to form a first trench in the HV region and a second trench in the LV region; forming a second insulating layer in the first trench and the second trench; and planarizing the second insulating layer to form a first shallow trench isolation (STI) on the HV region and a second STI on the LV region.Type: ApplicationFiled: March 21, 2022Publication date: August 24, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ya Chiu, Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin, Chien-Ting Lin, Chia-Jung Hsu, Chin-Hung Chen
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Publication number: 20230261108Abstract: The disclosure discloses a manufacturing method for high-voltage transistor. The manufacturing method comprises: providing a substrate; forming a recess in the substrate; forming an epitaxial doped structure with a first conductivity type in the recess of the substrate, wherein a top portion of the epitaxial doped structure comprises a top undoped epitaxial layer; forming a gate structure on the substrate and at least overlapping with the top undoped epitaxial layer; and forming a source/drain region with a second conductivity type in the epitaxial doped structure on a side of the gate structure. The first conductivity type is different from the second conductivity type.Type: ApplicationFiled: April 24, 2023Publication date: August 17, 2023Applicant: United Microelectronics Corp.Inventors: Chun-Ya Chiu, Chih-Kai Hsu, Chin-Hung Chen, Chia-Jung Hsu, Ssu-I Fu, Yu-Hsiang Lin
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Patent number: 11721591Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a fin-shaped structure thereon; forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion; forming a first gate structure on the SDB structure; forming an interlayer dielectric (ILD) layer around the first gate structure; transforming the first gate structure into a first metal gate; removing the first metal gate to form a first recess; and forming a dielectric layer in the first recess.Type: GrantFiled: June 4, 2021Date of Patent: August 8, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Chun-Ya Chiu, Chi-Ting Wu, Chin-Hung Chen, Yu-Hsiang Lin
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Patent number: 11721770Abstract: A manufacturing method of a semiconductor device includes the following steps. An opening is formed penetrating a dielectric layer on a semiconductor substrate. A stacked structure is formed on the dielectric layer. The stacked structure includes a first semiconductor layer partly formed in the opening and partly formed on the dielectric layer, a sacrificial layer formed on the first semiconductor layer, and a second semiconductor layer formed on the sacrificial layer. A patterning process is performed for forming a fin-shaped structure including the first semiconductor layer, the sacrificial layer, and the second semiconductor layer. An etching process is performed to remove the sacrificial layer in the fin-shaped structure. The first semiconductor layer in the fin-shaped structure is etched to become a first semiconductor wire by the etching process. The second semiconductor layer in the fin-shaped structure is etched to become a second semiconductor wire by the etching process.Type: GrantFiled: September 15, 2021Date of Patent: August 8, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Hung Chen, Ssu-I Fu, Chih-Kai Hsu, Chun-Ya Chiu, Chia-Jung Hsu, Yu-Hsiang Lin
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Patent number: 11710778Abstract: A method for fabricating semiconductor device includes: forming a first semiconductor layer and an insulating layer on a substrate; removing the insulating layer and the first semiconductor layer to form openings; forming a second semiconductor layer in the openings; and patterning the second semiconductor layer, the insulating layer, and the first semiconductor layer to form fin-shaped structures.Type: GrantFiled: March 10, 2021Date of Patent: July 25, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chin-Hung Chen, Ssu-I Fu, Chih-Kai Hsu, Chia-Jung Hsu, Yu-Hsiang Lin
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Publication number: 20230215855Abstract: A method for fabricating semiconductor device includes the steps of first providing a first substrate having a high-voltage (HV) region and a medium voltage (MV) region and a second substrate having a low-voltage (LV) region and a static random access memory (SRAM) region, in which the HV region includes a HV device, the MV region includes a MV device, the LV region includes a fin field-effect transistor (FinFET), and the SRAM region includes a SRAM device. Next, a bonding process is conducted by using hybrid bonding, through-silicon interposer (TSI) or redistribution layer (RDL) for bonding the first substrate and the second substrate.Type: ApplicationFiled: February 16, 2022Publication date: July 6, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Shih-Hung Tsai, Chien-Ting Lin, Yu-Hsiang Lin, Ssu-I Fu, Chih-Kai Hsu
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Publication number: 20230197523Abstract: A method for fabricating a semiconductor device includes first providing a substrate having a high-voltage (HV) region, a medium-voltage (MV) region, and a low-voltage (LV) region, forming a HV device on the HV region, and forming a LV device on the LV region. Preferably, the HV device includes a first base on the substrate, a first gate dielectric layer on the first base, and a first gate electrode on the first gate dielectric layer. The LV device includes a fin-shaped structure on the substrate, and a second gate electrode on the fin-shaped structure, in which a top surface of the first gate dielectric layer is even with a top surface of the fin-shaped structure.Type: ApplicationFiled: January 27, 2022Publication date: June 22, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin, Chien-Ting Lin, Chun-Ya Chiu, Chia-Jung Hsu, Chin-Hung Chen
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Publication number: 20230197710Abstract: A method for fabricating a semiconductor device includes first providing a substrate having a high-voltage (HV) region, a medium-voltage (MV) region, and a low-voltage (LV) region, forming a HV device on the HV region, and forming a LV device on the LV region. Preferably, the HV device includes a first base on the substrate, a first gate dielectric layer on the first base, and a first gate electrode on the first gate dielectric layer. The LV device includes a fin-shaped structure on the substrate, and a second gate electrode on the fin-shaped structure, in which a top surface of the first gate dielectric layer is lower than a top surface of the fin-shaped structure.Type: ApplicationFiled: January 27, 2022Publication date: June 22, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin, Chien-Ting Lin, Chia-Jung Hsu, Chun-Ya Chiu, Chin-Hung Chen
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Publication number: 20230197718Abstract: A semiconductor device includes a substrate, a first transistor, a second transistor and a third transistor. The substrate includes a high-voltage (HV) area, a medium-voltage (MV) area, and a low-voltage (LV) area. The first transistor is disposed in the HV area and includes a first gate dielectric layer and a first gate electrode. The second transistor is disposed in the LV area and includes a plurality of fin-shaped structures and a second gate electrode. The third transistor is disposed in the MV area and includes a third gate dielectric layer and a third gate electrode. The topmost surfaces of the first gate electrode, the second gate electrode and the third gate electrode are coplanar with each other.Type: ApplicationFiled: February 10, 2022Publication date: June 22, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Lin, Chien-Ting Lin
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Patent number: 11682728Abstract: The disclosure discloses a structure of high-voltage (HV) transistor which includes a substrate. An epitaxial doped structure with a first conductive type is formed in the substrate, wherein a top portion of the epitaxial doped structure includes a top undoped epitaxial layer. A gate structure is disposed on the substrate and at least overlapping with the top undoped epitaxial layer. A source/drain (S/D) region with a second conductive type is formed in the epitaxial doped structure at a side of the gate structure. The first conductive type is different from the second conductive type.Type: GrantFiled: October 16, 2020Date of Patent: June 20, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ya Chiu, Chih-Kai Hsu, Chin-Hung Chen, Chia-Jung Hsu, Ssu-I Fu, Yu-Hsiang Lin
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Patent number: 11682724Abstract: A high voltage transistor structure including a substrate, a first drift region, a second drift region, a first cap layer, a second cap layer, a gate structure, a first source and drain region, and a second source and drain region is provided. The first and second drift regions are disposed in the substrate. The first and second cap layers are respectively disposed on the first and second drift regions. The gate structure is disposed on the substrate and located over at least a portion of the first drift region and at least a portion of the second drift region. The first and second source and drain regions are respectively disposed in the first and second drift regions and located on two sides of the gate structure. The size of the first drift region and the size of the second drift region are asymmetric.Type: GrantFiled: August 18, 2021Date of Patent: June 20, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chun-Ya Chiu, Ssu-I Fu, Chih-Kai Hsu, Chin-Hung Chen, Chia-Jung Hsu, Yu-Hsiang Lin