Patents by Inventor Chih-Wen Yao
Chih-Wen Yao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10269954Abstract: A semiconductor device and the method of manufacturing the same are provided. The semiconductor device comprises a substrate, a source region, a drain region, a filed plate and a gate electrode. The source region is of a first conductivity type located at a first side within the substrate. The drain region is of the first conductive type located at a second side within the substrate opposite to the first side. The field plate is located over the substrate and between the source region and the drain region. A portion of the gate electrode is located over the field plate.Type: GrantFiled: January 5, 2018Date of Patent: April 23, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yogendra Yadav, Chi-Chih Chen, Ruey-Hsin Liu, Chih-Wen Yao
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Publication number: 20180130904Abstract: A semiconductor device and the method of manufacturing the same are provided. The semiconductor device comprises a substrate, a source region, a drain region, a filed plate and a gate electrode. The source region is of a first conductivity type located at a first side within the substrate. The drain region is of the first conductive type located at a second side within the substrate opposite to the first side. The field plate is located over the substrate and between the source region and the drain region. A portion of the gate electrode is located over the field plate.Type: ApplicationFiled: January 5, 2018Publication date: May 10, 2018Inventors: YOGENDRA YADAV, CHI-CHIH CHEN, RUEY-HSIN LIU, CHIH-WEN YAO
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Patent number: 9871134Abstract: A semiconductor device and the method of manufacturing the same are provided. The semiconductor device includes a substrate, a source region, a drain region, a filed plate and a gate electrode. The source region is of a first conductivity type located at a first side within the substrate. The drain region is of the first conductive type located at a second side within the substrate opposite to the first side. The field plate is located over the substrate and between the source region and the drain region. A portion of the gate electrode is located over the field plate.Type: GrantFiled: December 21, 2015Date of Patent: January 16, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Yogendra Yadav, Chi-Chih Chen, Ruey-Hsin Liu, Chih-Wen Yao
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Publication number: 20170271199Abstract: A method of fabricating a semiconductor structure includes forming an isolation feature in a substrate, removing a portion of the isolation feature and a portion of the substrate underneath the removed portion of the isolation feature to form a trench in the substrate, and forming a trapping feature around a bottom portion of the trench. A first sidewall and a second sidewall of the trench are in direct contact with the isolation feature, and a bottom surface of the trench is below a bottom surface of the isolation feature.Type: ApplicationFiled: June 5, 2017Publication date: September 21, 2017Inventors: Alex KALNITSKY, Chih-Wen YAO, Jun CAI, Ruey-Hsin LIU, Hsiao-Chin TUAN
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Patent number: 9698044Abstract: A semiconductor structure includes a substrate, a first power device and a second power device in the substrate, at least one isolation feature between the first and second power device, and a trapping feature adjoining the at least one isolation feature in the substrate.Type: GrantFiled: December 1, 2011Date of Patent: July 4, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Alex Kalnitsky, Chih-Wen Yao, Jun Cai, Ruey-Hsin Liu, Hsiao-Chin Tuan
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Publication number: 20170179280Abstract: A semiconductor device and the method of manufacturing the same are provided. The semiconductor device includes a substrate, a source region, a drain region, a filed plate and a gate electrode. The source region is of a first conductivity type located at a first side within the substrate. The drain region is of the first conductive type located at a second side within the substrate opposite to the first side. The field plate is located over the substrate and between the source region and the drain region. A portion of the gate electrode is located over the field plate.Type: ApplicationFiled: December 21, 2015Publication date: June 22, 2017Inventors: YOGENDRA YADAV, CHI-CHIH CHEN, RUEY-HSIN LIU, CHIH-WEN YAO
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Publication number: 20160043188Abstract: Some embodiments of the present disclosure relate to deceasing off-state leakage current within a metal-oxide-semiconductor field-effect transistor (MOSFET). The MOSFET includes source and drain regions. The source and drain regions are separated by a channel region. A gate is arranged over the channel region. The gate has a first gate region adjacent to the source region and a second gate region adjacent to the drain region. The first gate region is selectively doped adjacent the source region. The second gate region is undoped or lightly-doped. The undoped or lightly-doped second gate region reduces the electric field between the gate and the drain region, and hence reduces a gate induced drain leakage (GIDL) current between the gate and drain region. The undoped or lightly-doped region of the gate can reduce the GIDL current within the MOSFET by about three orders of magnitude. Other embodiments are also disclosed.Type: ApplicationFiled: August 6, 2014Publication date: February 11, 2016Inventors: Chen-Liang Chu, Chih-Wen Yao, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 9224827Abstract: Provided is a semiconductor device. The semiconductor device includes a resistor and a voltage protection device. The resistor has a spiral shape. The resistor has a first portion and a second portion. The voltage protection device includes a first doped region that is electrically coupled to the first portion of the resistor. The voltage protection device includes a second doped region that is electrically coupled to the second portion of the resistor. The first and second doped regions have opposite doping polarities.Type: GrantFiled: November 7, 2013Date of Patent: December 29, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai
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Patent number: 9224732Abstract: A method of forming a device includes forming a buried well region of a first dopant type in a substrate. A well region of the first dopant type is formed over the buried well region. A first well region of a second dopant type is formed between the well region of the first dopant type and the buried well region of the first dopant type. A second well region of the second dopant type is formed in the well region of the first dopant type. An isolation structure is formed at least partially in the well region of the first dopant type. A first gate electrode is formed over the isolation structure and the second well region of the second dopant type.Type: GrantFiled: March 14, 2014Date of Patent: December 29, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Chia-Chin Shen, Eric Huang, Fu Chin Yang, Chun Lin Tsai, Hsiao-Chin Tuan
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Publication number: 20150279951Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.Type: ApplicationFiled: June 12, 2015Publication date: October 1, 2015Inventors: Chen-Liang Chu, Fei-Yun Chen, Chih-Wen Yao
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Patent number: 9070663Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.Type: GrantFiled: August 16, 2013Date of Patent: June 30, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
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Publication number: 20140284706Abstract: A semiconductor device includes a buried layer having a first dopant type in a substrate. The semiconductor device includes a first layer having the first dopant type over the buried layer. The semiconductor device includes at least one first well of a second dopant type disposed in the first layer. The semiconductor device includes an implantation region of the second dopant type in a sidewall of the first layer, wherein the implantation region is below the at least one first well. The semiconductor device includes a first source region disposed in the at least one first well; and at least one gate disposed on top of the first well and the first layer. The semiconductor device includes a metal electrode extending from the buried layer to a drain contact, wherein the metal electrode is insulated from the first layer and the at least one first well by an insulation layer.Type: ApplicationFiled: June 11, 2014Publication date: September 25, 2014Inventors: Chih-Chang CHENG, Ruey-Hsin LIU, Chih-Wen YAO, Hsiao Chin TUAN
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Publication number: 20140197488Abstract: A method of forming a device includes forming a buried well region of a first dopant type in a substrate. A well region of the first dopant type is formed over the buried well region. A first well region of a second dopant type is formed between the well region of the first dopant type and the buried well region of the first dopant type. A second well region of the second dopant type is formed in the well region of the first dopant type. An isolation structure is formed at least partially in the well region of the first dopant type. A first gate electrode is formed over the isolation structure and the second well region of the second dopant type.Type: ApplicationFiled: March 14, 2014Publication date: July 17, 2014Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Chang CHENG, Ruey-Hsin LIU, Chih-Wen YAO, Chia-Chin SHEN, Eric HUANG, Fu Chin YANG, Chun Lin TSAI, Chin Tuan HSIAO
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Patent number: 8779505Abstract: A semiconductor device which includes a buried layer having a first dopant type disposed in a substrate. The semiconductor device further includes a second layer having the first dopant type over the buried layer, wherein a dopant concentration of the buried layer is higher than a dopant concentration of the second layer. The semiconductor device further includes a first well of a second dopant type disposed in the second layer and a first source region of the first dopant type disposed in the first well and connected to a source contact on one side. The semiconductor device further includes a gate disposed on top of the well and the second layer and a metal electrode extending from the buried layer to a drain contact, wherein the metal electrode is insulated from the second layer and the first well by an insulation layer.Type: GrantFiled: May 2, 2013Date of Patent: July 15, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Hsiao Chin Tuan
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Patent number: 8704312Abstract: A high voltage (HV) device includes a well region of a first dopant type disposed in a substrate. A first well region of a second dopant type is disposed in the well region of the first dopant type. An isolation structure is at least partially disposed in the well region of the first dopant type. A first gate electrode is disposed over the isolation structure and the first well region of the second dopant type. A second well region of the second dopant type is disposed in the well region of the first dopant type. The second well region of the second dopant type is spaced from the first well region of the second dopant type. A second gate electrode is disposed between and over the first well region of the second dopant type and the second well region of the second dopant type.Type: GrantFiled: January 5, 2010Date of Patent: April 22, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Chia-Chin Shen, Eric Huang, Fu Chin Yang, Chun Lin Tsai, Hsiao-Chin Tuan
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Publication number: 20140057407Abstract: Provided is a semiconductor device. The semiconductor device includes a resistor and a voltage protection device. The resistor has a spiral shape. The resistor has a first portion and a second portion. The voltage protection device includes a first doped region that is electrically coupled to the first portion of the resistor. The voltage protection device includes a second doped region that is electrically coupled to the second portion of the resistor. The first and second doped regions have opposite doping polarities.Type: ApplicationFiled: November 7, 2013Publication date: February 27, 2014Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Chang Cheng, Ruey-Hsin Liu, Chih-Wen Yao, Ru-Yi Su, Fu-Chih Yang, Chun Lin Tsai
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Publication number: 20130337644Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.Type: ApplicationFiled: August 16, 2013Publication date: December 19, 2013Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
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Patent number: 8513712Abstract: The present disclosure provides an apparatus and method for fabricating a semiconductor gate. The apparatus includes, a substrate having an active region and a dielectric region that forms an interface with the active region; a gate electrode located above a portion of the active region and a portion of the dielectric region; and a dielectric material disposed within the gate electrode, the dielectric material being disposed near the interface between the active region and the dielectric region. The method includes, providing a substrate having an active region and a dielectric region that forms an interface with the active region; forming a gate electrode over the substrate, the gate electrode having an opening near a region of the gate electrode that is above the interface; and filling the opening with a dielectric material.Type: GrantFiled: September 28, 2009Date of Patent: August 20, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Liang Chu, Fei-Yuh Chen, Chih-Wen Yao
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Patent number: 8507988Abstract: A high voltage (HV) device includes a gate dielectric structure over a substrate. The gate dielectric structure has a first portion and a second portion. The first portion has a first thickness and is over a first well region of a first dopant type in the substrate. The second portion has a second thickness and is over a second well region of a second dopant type. The first thickness is larger than the second thickness. A gate electrode is disposed over the gate dielectric structure. A metallic layer is over and coupled with the gate electrode. The metallic layer extends along a direction of a channel under the gate dielectric structure. At least one source/drain (S/D) region is disposed within the first well region of the first dopant type.Type: GrantFiled: June 2, 2010Date of Patent: August 13, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Wen Yao, Robert S. J. Pan, Ruey-Hsin Liu, Hsueh-Liang Chou, Puo-Yu Chiang, Chi-Chih Chen, Hsiao Chin Tuan
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Patent number: 8461647Abstract: A semiconductor device is provided that, in an embodiment, is in the form of a high voltage MOS (HVMOS) device. The device includes a semiconductor substrate and a gate structure formed on the semiconductor substrate. The gate structure includes a gate dielectric which has a first portion with a first thickness and a second portion with a second thickness. The second thickness is greater than the first thickness. A gate electrode is disposed on the first and second portion. In an embodiment, a drift region underlies the second portion of the gate dielectric. A method of fabricating the same is also provided.Type: GrantFiled: March 10, 2010Date of Patent: June 11, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsueh-Liang Chou, Ruey-Hsin Liu, Chih-Wen Yao, Hsiao-Chin Tuan