Patents by Inventor Chih-Yu Hsu

Chih-Yu Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10529581
    Abstract: Methods for isotropic etching at least a portion of a silicon-containing layer on a sidewall of high-aspect-ratio (HAR) apertures formed on a substrate in a reaction chamber are disclosed. The HAR aperture formed by plasma etching a stack of alternating layers of a first silicon-containing layer and a second silicon-containing layer, the second silicon-containing layer is different from the first silicon-containing layer. The method comprising the steps of: a) introducing a fluorine containing etching gas selected from the group consisting of nitrosyl fluoride (FNO), trifluoroamine oxide (F3NO), nitryl fluoride (FNO2) and combinations thereof into the reaction chamber; and b) removing at least a portion of the second silicon-containing layers by selectively etching the second silicon-containing layers versus the first silicon-containing layers with the fluorine containing etching gas to produce recesses between the first silicon-containing layers on the sidewall of the HAR aperture.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: January 7, 2020
    Assignees: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude, Air Liquide Electronics U.S. LP
    Inventors: Chih-Yu Hsu, Peng Shen, Takashi Teramoto, Nathan Stafford, Jiro Yokota
  • Publication number: 20190326126
    Abstract: Methods for minimizing sidewall damage during low k etch processes are disclosed. The methods etch the low k layers f using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N@C—)—(R)—(—C?N); Rx[-C?N(Rz)]y; and R(3-a)-N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.
    Type: Application
    Filed: December 29, 2017
    Publication date: October 24, 2019
    Inventors: Chih-Yu HSU, Peng SHEN, Nathan STAFFORD
  • Patent number: 10347498
    Abstract: Methods for minimizing plasma-induced sidewall damage during low k etch processes are disclosed. The methods etch the low k layers using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N?C—)—(R)—(—C?N); Rx[—C?N(Rz)]y; and R(3-a)—N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: July 9, 2019
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventors: Chih-yu Hsu, Peng Shen, Nathan Stafford
  • Publication number: 20190206696
    Abstract: Methods for isotropic etching at least a portion of a silicon-containing layer on a sidewall of high-aspect-ratio (HAR) apertures formed on a substrate in a reaction chamber are disclosed. The HAR aperture formed by plasma etching a stack of alternating layers of a first silicon-containing layer and a second silicon-containing layer, the second silicon-containing layer is different from the first silicon-containing layer. The method comprising the steps of: a) introducing a fluorine containing etching gas selected from the group consisting of nitrosyl fluoride (FNO), trifluoroamine oxide (F3NO), nitryl fluoride (FNO2) and combinations thereof into the reaction chamber; and b) removing at least a portion of the second silicon-containing layers by selectively etching the second silicon-containing layers versus the first silicon-containing layers with the fluorine containing etching gas to produce recesses between the first silicon-containing layers on the sidewall of the HAR aperture.
    Type: Application
    Filed: December 29, 2017
    Publication date: July 4, 2019
    Inventors: Chih-Yu Hsu, Peng Shen, Takashi Teramoto, Nathan Stafford, Jiro Yokota
  • Patent number: 10286252
    Abstract: A rhythm fitness step apparatus includes a body and two leg bases. The body has an upper surface and a lower surface, wherein the upper surface is installed with a platform thereon; both sides of the lower surface are formed with an installation space separately. The installation space has a plurality of slots and a plurality of dodge slots concavely and alternately installed therein, wherein the concave depth of the slot and the concave depth of the dodge slot are different so that the depth of the dodge slot is greater than the depth of the slot in design. The leg base has a plate body. The lower surface of the plate body is installed with a cushion pad; the upper surface of the plate body has a plurality of first supporting blocks and a plurality of second supporting blocks protruding therefrom alternately and corresponding to the configuration layout of the slots and the dodge slots of the body.
    Type: Grant
    Filed: May 29, 2017
    Date of Patent: May 14, 2019
    Assignee: CHIA LIN SPORT CO., LTD.
    Inventor: Chih-Yu Hsu
  • Publication number: 20180339191
    Abstract: A rhythm fitness step apparatus includes a body and two leg bases. The body has an upper surface and a lower surface, wherein the upper surface is installed with a platform thereon; both sides of the lower surface are formed with an installation space separately. The installation space has a plurality of slots and a plurality of dodge slots concavely and alternately installed therein, wherein the concave depth of the slot and the concave depth of the dodge slot are different so that the depth of the dodge slot is greater than the depth of the slot in design. The leg base has a plate body. The lower surface of the plate body is installed with a cushion pad; the upper surface of the plate body has a plurality of first supporting blocks and a plurality of second supporting blocks protruding therefrom alternately and corresponding to the configuration layout of the slots and the dodge slots of the body.
    Type: Application
    Filed: May 29, 2017
    Publication date: November 29, 2018
    Inventor: CHIH-YU HSU
  • Publication number: 20180247935
    Abstract: A first Fin Field-Effect Transistor (FinFET) and a second FinFET are adjacent to each other. Each of the first FinFET and the second FinFET includes a semiconductor fin, a gate dielectric on sidewalls and a top surface of the semiconductor fin, and a gate electrode over the gate dielectric. The semiconductor fin of the first FinFET and the semiconductor fin of the second FinFET are aligned to a straight line. An isolation region is aligned to the straight line, wherein the isolation region includes a portion at a same level as the semiconductor fins of the first FinFET and the second FinFET. A continuous straight semiconductor strip is overlapped by the semiconductor fins of the first FinFET and the second FinFET. A Shallow Trench Isolation (STI) region is on a side of, and contacts, the semiconductor strip. The isolation region and the first STI region form a distinguishable interface.
    Type: Application
    Filed: April 20, 2018
    Publication date: August 30, 2018
    Inventors: Chih-Yu Hsu, Yi-Tang Lin, Clement Hsingjen Wann, Chih-Sheng Chang, Wei-Chun Tsai, Jyh-Cherng Sheu, Chi-Yuan Shih
  • Publication number: 20180211845
    Abstract: Methods for minimizing plasma-induced sidewall damage during low k etch processes are disclosed. The methods etch the low k layers using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N?C—)—(R)—(—C?N); Rx[—C?N(Rz)]y; and R(3-a)—N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.
    Type: Application
    Filed: March 16, 2018
    Publication date: July 26, 2018
    Inventors: Chih-yu Hsu, Peng Shen, nathan Stafford
  • Publication number: 20180168787
    Abstract: In this invention, a high-accuracy jaw motion tracking system and method using the same are disclosed. The jaw motion tracking system of the invention mainly comprises an eyewear facebow static positioning device, a lower jaw dynamic tracking device and a stereo-vision charge-coupled device (CCD) and can provide information regarding the locations and relative movement of lower and upper jaws. The eyewear facebow static positioning device has several passive and active reflective markers. The lower jaw dynamic tracking device equips with a plural of lightweight light emitting devices. Using OpenCV-based self-developed algorithm and post-iterative compensator, the disclosed system can record the dynamical jaw movement with a high accuracy. The disclosed jaw motion tracking system and related method have minimal occlusal disturbance and provide smooth motion-tracking performance. The disclosed system can be used in clinical dentistry.
    Type: Application
    Filed: December 21, 2016
    Publication date: June 21, 2018
    Inventors: Liang-Yuan Cheng, Chih-Yu Hsu, Shyh-Yuan Lee, Yuan-Min Lin
  • Patent number: 9953975
    Abstract: A first Fin Field-Effect Transistor (FinFET) and a second FinFET are adjacent to each other. Each of the first FinFET and the second FinFET includes a semiconductor fin, a gate dielectric on sidewalls and a top surface of the semiconductor fin, and a gate electrode over the gate dielectric. The semiconductor fin of the first FinFET and the semiconductor fin of the second FinFET are aligned to a straight line. An isolation region is aligned to the straight line, wherein the isolation region includes a portion at a same level as the semiconductor fins of the first FinFET and the second FinFET. A continuous straight semiconductor strip is overlapped by the semiconductor fins of the first FinFET and the second FinFET. A Shallow Trench Isolation (STI) region is on a side of, and contacts, the semiconductor strip. The isolation region and the first STI region form a distinguishable interface.
    Type: Grant
    Filed: July 19, 2013
    Date of Patent: April 24, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yu Hsu, Yi-Tang Lin, Clement Hsinjen Wann, Chih-Sheng Chang, Wei-Chun Tsai, Jyh-Cherng Sheu, Chi-Yuan Shih
  • Patent number: 9779476
    Abstract: An image signal processing method includes: receiving an original color filter array (CFA) image and a pixel binned CFA image; computing a specific information of the pixel binned CFA image; and processing the original CFA image according to the specific information. The associated image signal processor includes an input terminal, an operating unit and a processing unit, wherein the input terminal is for receiving an original CFA image and a pixel binned CFA image, the operating unit is for computing a specific information of the pixel binned CFA image, and the processing unit is for processing the original CFA image according to the specific information and utilizing the pixel binned CFA image.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: October 3, 2017
    Assignee: Realtek Semiconductor Corp.
    Inventors: Chih-Yu Hsu, Wen-Tsung Huang, Shih-Tse Chen
  • Publication number: 20170110336
    Abstract: Methods for minimizing sidewall damage during low k etch processes are disclosed. The methods etch the low k layers using the plasma activated vapor of an organofluorine compound having a formula selected from the group consisting of N?C—R; (N?C—)—(R)—(—C?N); Rx[—C?N(Rz)]y; and R(3-a)—N—Ha, wherein a=1-2, x=1-2, y=1-2, z=0-1, x+z=1-3, and each R independently has the formula HaFbCc with a=0-11, b=0-11, and c=0-5.
    Type: Application
    Filed: December 31, 2016
    Publication date: April 20, 2017
    Inventors: Chih-yu HSU, Peng SHEN, Nathan STAFFORD
  • Patent number: 9472672
    Abstract: An embodiment fin field-effect transistor (FinFET) includes an inner fin, and outer fin spaced apart from the inner fin by a shallow trench isolation (STI) region, an isolation fin spaced apart from the outer fin by the STI region, the isolation fin including a body portion, an isolation oxide, and an etch stop layer, the etch stop layer interposed between the body portion and the isolation oxide and between the STI region and the isolation oxide, and a gate formed over the inner fin, the outer fin, and the isolation fin.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: October 18, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Tang Lin, Chih-Yu Hsu, Clement Hsingjen Wann, Chih-Sheng Chang
  • Publication number: 20160086309
    Abstract: An image signal processing method includes: receiving an original color filter array (CFA) image and a pixel binned CFA image; computing a specific information of the pixel binned CFA image; and processing the original CFA image according to the specific information. The associated image signal processor includes an input terminal, an operating unit and a processing unit, wherein the input terminal is for receiving an original CFA image and a pixel binned CFA image, the operating unit is for computing a specific information of the pixel binned CFA image, and the processing unit is for processing the original CFA image according to the specific information and utilizing the pixel binned CFA image.
    Type: Application
    Filed: September 21, 2015
    Publication date: March 24, 2016
    Inventors: Chih-Yu Hsu, Wen-Tsung Huang, Shih-Tse Chen
  • Publication number: 20150060959
    Abstract: An embodiment fin field-effect transistor (FinFET) includes an inner fin, and outer fin spaced apart from the inner fin by a shallow trench isolation (STI) region, an isolation fin spaced apart from the outer fin by the STI region, the isolation fin including a body portion, an isolation oxide, and an etch stop layer, the etch stop layer interposed between the body portion and the isolation oxide and between the STI region and the isolation oxide, and a gate formed over the inner fin, the outer fin, and the isolation fin.
    Type: Application
    Filed: September 4, 2013
    Publication date: March 5, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Tang Lin, Chih-Yu Hsu, Clement Hsingjen Wann, Chih-Sheng Chang
  • Publication number: 20150021710
    Abstract: A first Fin Field-Effect Transistor (FinFET) and a second FinFET are adjacent to each other. Each of the first FinFET and the second FinFET includes a semiconductor fin, a gate dielectric on sidewalls and a top surface of the semiconductor fin, and a gate electrode over the gate dielectric. The semiconductor fin of the first FinFET and the semiconductor fin of the second FinFET are aligned to a straight line. An isolation region is aligned to the straight line, wherein the isolation region includes a portion at a same level as the semiconductor fins of the first FinFET and the second FinFET. A continuous straight semiconductor strip is overlapped by the semiconductor fins of the first FinFET and the second FinFET. A Shallow Trench Isolation (STI) region is on a side of, and contacts, the semiconductor strip. The isolation region and the first STI region form a distinguishable interface.
    Type: Application
    Filed: July 19, 2013
    Publication date: January 22, 2015
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Yu Hsu, Yi-Tang Lin, Clement Hsinjen Wann, Chih-Sheng Chang, Wei-Chun Tsai, Jyh-Cherng Sheu, Chi-Yuan Shih
  • Patent number: 8865998
    Abstract: A photovoltaic electrochromic device and a method of manufacturing the same are provided. According to the method, at least one thin-film solar cell is formed on a transparent substrate, wherein the thin-film solar cell at least includes an anode, a photoelectric conversion layer, and a cathode, and a portion of a surface of the anode is exposed from the thin film solar cell. An electrochromic thin film is then deposited on at least one surface of the cathode and the exposed surface of the anode. Thereafter, an electrolyte layer is formed on a surface of the thin-film solar cell to cover the electrochromic thin film. The anode and the cathode of the thin-film solar cell also serve as the anode and the cathode of the photovoltaic electrochromic device.
    Type: Grant
    Filed: May 18, 2010
    Date of Patent: October 21, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Lee-May Huang, Fang-Yao Yeh, Kuo-Chuan Ho, Chih-Wei Hu, Chih-Yu Hsu, Chun-Ming Yeh
  • Publication number: 20130000703
    Abstract: An embodiment of the invention provides a complex dye-sensitized photovoltaic apparatus including a conductive substrate, a counter electrode, a partition member, a photoelectric conversion layer, a first electrolyte, and a charge storage device or an electrochromic solution. A space is provided between the counter electrode and the conductive substrate. The partition member is disposed in the space, dividing the space into a first chamber and a second chamber. The photoelectric conversion layer is disposed on the conductive substrate in the first chamber filled with the first electrolyte, wherein the photoelectric conversion layer includes a porous semiconductor film and a dye absorbed on the porous semiconductor film. The photoelectric conversion layer and the conductive substrate form a working electrode. The charge storage device or the electrochromic solution is disposed in the second chamber.
    Type: Application
    Filed: December 2, 2011
    Publication date: January 3, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Kun-Mu Lee, Hsin-Wei Chen, Chih-Yu Hsu, Kuo-Chuan Ho, Wen-Hsiang Yen
  • Publication number: 20120105776
    Abstract: A liquid crystal display panel includes a transistor array substrate, a color filter substrate, a liquid crystal layer, and a sealant material. The transistor array substrate includes a transparent substrate, a transistor array, and a plurality of peripheral wires. The transparent substrate has a display region and a non-display region, and the non-display region is located beside the display region. The transistor array is disposed in the display region. The peripheral wires are disposed in the non-display region and electrically connected with the transistor array. A transmittance of the non-display region is less than 30%. The liquid crystal layer is disposed between the color filter substrate and the transistor array substrate. The sealant material is disposed in the non-display region and connected between the color filter substrate and the transistor array substrate. The sealant material surrounds the liquid crystal layer.
    Type: Application
    Filed: March 28, 2011
    Publication date: May 3, 2012
    Applicant: CHUNGHWA PICTURE TUBES, LTD.
    Inventors: CHIH-WEI LIN, Min-Cheng Wang, Chih-Yu Hsu
  • Patent number: D855718
    Type: Grant
    Filed: May 20, 2017
    Date of Patent: August 6, 2019
    Inventor: Chih-Yu Hsu