Abstract: A method for preparing the low carbon number petrochemical products along with the high energy fuels from pyrolysis gasoline is provided. In this method, the pyrolysis gasoline is used as feedstock, and the reactive non-aromatic, unsaturated moieties, and the sulfur impurity contained in the pyrolysis gasoline are removed. Then the stabilized feedstock is used to produce C5 olefins, C6-C9 aromatic hydrocarbons as petrochemical products, and C10+ hydrocarbons as precursors of high energy fuels. Upon acid catalytic isomerization, or upon crystallization followed by acid catalytic isomerization, the C10+ hydrocarbons as precursors of high energy fuels are converted to exo-isomers as high energy fuels.

Abstract: An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.

Abstract: A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head.

Abstract: A wafer container includes a container body and a door joined with opening of the container body for protecting wafers therein. At least one latch component is disposed in the door, and each latch component includes an oval cam and a pair of moving bars, a first end of each moving bar connecting to one of the two opposite sides of the oval cam and a second end of each moving bar having a guiding structure, a pair of moving grooves being disposed between the first end and the second end of each moving bar, at least a pair of rollers being disposed on the door and each roller being embedded in each moving groove of moving bar, and a locating spring being formed as an integral part of the moving bars.

Abstract: A semiconductor substrate has a plurality of active device patterns. At least some of the active device patterns comprise doped regions. The substrate has a plurality of surface regions, including the active device patterns and un-patterned regions, with respectively different reflectances for light in a near infrared wavelength. A first difference is determined, between a largest reflectance at the near infrared wavelength and a smallest reflectance at the near infrared wavelength. A second infrared wavelength is determined, for which a second difference between a largest reflectances a smallest reflectance is substantially less than the first difference at the near infrared wavelength. A rapid thermal processing (RTP) spike annealing dopant activation step is performed on the substrate using a second light source providing light at the second wavelength.

Abstract: A method includes establishing an initial shot layout in which a number of shots are arranged in vertically aligned columns and horizontally aligned rows to cover a semiconductor wafer. At least one of a row of shots or a column of shots is shifted relative to an adjacent row or column of shots to establish at least one additional shot layout that differs from the initial shot layout in that shots in the at least one shifted row or column of shots are not aligned with the shots in the adjacent row or column of shots with which they were aligned in the initial shot layout. One of the initial shot layout and the at least one additional shot layout is selected as a final shot layout. The wafer is exposed to light using the final shot layout.

Abstract: An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

Abstract: An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.

Abstract: A wafer container includes a container body, in which a plurality of slots being disposed for supporting a plurality of wafers and an opening being formed on one sidewall of which for importing and exporting the plurality of wafers, and a door is joined with the opening of the container body for protecting the plurality of wafers therein, wherein the characteristic of the wafer container lies in that: at least one latch component is disposed in the door, the latch component including an oval cam with a pair of V-shape notches and on the surface of oval cam being a groove, a pair of moving bars including respectively an engaging portion, and a guiding element located on the moving bars, the engaging portion being engaged in the groove for the pair of moving bars to be respectively engaged with the oval cam.

Abstract: A reticle storing container is disclosed to include an outer container, an inner container, and a purging valve. The outer container comprises a container body and a container base on which at least a first through-hole is disposed, and a first inner space is formed between the container body and the container base for storing the inner container. The inner container comprises a top cover and a bottom base on which at least a second through-hole connected to the first through-hole is disposed, and a second inner space is formed between the top cover and the bottom base for storing a reticle. The purging valve is disposed in the first through-hole on the outer container base and connected to the second through-hole of said inner container, wherein the purging valve comprises a spring and a valve part. Thus, when the valve part is propped up by a purging head, the valve part compresses the spring for the purging valve to be connected to the purging head.

Abstract: An EUV pod with pressure sensors disposed between its inner container and outer container, wherein pressure sensors disposed on the inner side of the outer container are used to detect the pressure between the outer container and the inner container, and the pressure data are used to determine whether the inner container is firmly fastened by the outer container.

Abstract: A wafer container includes a container body, in which a plurality of slots being disposed for supporting a plurality of wafers and an opening being formed on one sidewall of which for importing and exporting the plurality of wafers, and a door is joined with the opening of the container body for protecting the plurality of wafers therein, wherein the characteristic of the wafer container lies in that: at least one latch component is disposed in the door, the latch component including an oval cam with a pair of V-shape notches and on the surface of oval cam being a groove, a pair of moving bars including respectively an engaging portion, and a guiding element located on the moving bars, the engaging portion being engaged in the groove for the pair of moving bars to be respectively engaged with the oval cam.

Abstract: A light source apparatus including a light source, an optical fiber, a light guide module, and a light shape adjustment element is provided. The light source emits a light beam. The optical fiber disposed in a transmission path of the light beam has a light incident end and a light emitting end. The light beam enters the optical fiber through the light incident end and leaves the optical fiber through the light emitting end. The light guide module has a first surface, a second surface opposite to the first surface, and a light incident surface connecting the first surface and the second surface. The light beam from the light emitting end enters the light guide module through the light incident surface. The light shape adjustment element is connected to the light guide module and capable of changing a light shape of an emitted light from the light guide module.

Abstract: A wafer container including a container body having an opening formed on one sidewall and a door joining with the opening, the characteristic of the wafer container in that: A latch component disposed in a platform of the door comprising an oval cam with an arrester disposed at its center, one surface of the oval cam being disposed with at least a groove, a pair of moving bars respectively having an engaging portion that is engaged in the groove for the pair of moving bars to be engaged with the oval cam, a guiding element disposed at the center of the oval cam, and a long narrow spring framingly disposed on the guiding element, wherein the arrester is used to control the rotation of the oval cam for the moving bars to go to and fro between the pair of socket holes and the pair of latch holes.

Abstract: A wafer container includes a container body that having a plurality of slots therein for placing a plurality of wafers; an opening is formed on a sidewall of the container body for importing or exporting the wafers; and a door having an inner surface and an outer surface, in which the inner surface of the door is joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: a recess is disposed in the central portion of the inner surface of the door to divide the inner surface into two platforms, and each restraint module is located on two platforms.

Abstract: A wafer container includes a container body, a door, and a purging valve, wherein the purging valve is disposed in the through hole of the container body. The purging valve includes a fixed sleeve body, a purging head, an elastic component, and a valve lid. The fixed sleeve body comprises a base, and a lower opening is formed at the center of the base for the purging head to be disposed therein. The purging head comprises a bottom portion and a hollow sleeve portion protruding upward from the bottom portion, wherein the hollow sleeve portion is surroundingly disposed with elastic component and with vent disposed on its circumference wall. The valve lid is disposed on top of the hollow sleeve portion so that the purging head can move from the first position to the second position inside the fixed sleeve body when being propped up by an upward force.

Abstract: A wafer container includes a container body and a door joined with opening of the container body for protecting wafers therein. At least one latch component is disposed in the door, and each latch component includes an oval cam and a pair of moving bars, a first end of each moving bar connecting to one of the two opposite sides of the oval cam and a second end of each moving bar having a guiding structure, a pair of moving grooves being disposed between the first end and the second end of each moving bar, at least a pair of rollers being disposed on the door and each roller being embedded in each moving groove of moving bar, and a locating spring being formed as an integral part of the moving bars.

Abstract: A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which, and a door, which is joined with opening of the container body for protecting the plurality of wafers in the container body, the characteristic in that: a magnetic member is formed at the inner edge of the opening of the container body and a magnet is disposed at the inner surface of the door corresponding to the magnetic member, the magnet being disposed in a magnetic yoke with recessed cross section, with the design of which the magnet on the door attracts the magnetic member at the opening of the container body for the door and the container body to be lock-fastened to each other.

Abstract: The wafer container includes a container body, which is disposed with a plurality of slots for receiving a plurality of wafers therein and an opening is formed by one sidewall of which for importing and exporting the plurality of wafers, and a door includes an outer surface and an inner surface, which is joined with the opening of the container body via the inner surface for protecting the plurality of wafers within the container body. A latch component is disposed in a platform of the inner surface of the door, which includes an oval cam, a pair of moving bars contacting two ends of the oval cam, at least a pair of roller disposed in the platform and each of roller fixed in a slide groove of each moving bar, and a locating spring being an integral part of each moving bar for controlling the turning of the oval cam to drive the each moving bar.

Abstract: A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which, and a door, which is joined with opening of the container body for protecting the plurality of wafers in the container body, the characteristic in that: a magnetic member is formed at the inner edge of the opening of the container body and a magnet is disposed at the inner surface of the door corresponding to the magnetic member, the magnet being disposed in a magnetic yoke with recessed cross section, with the design of which the magnet on the door attracts the magnetic member at the opening of the container body for the door and the container body to be lock-fastened to each other.