Patents by Inventor Ching Chiun Wang

Ching Chiun Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20100038791
    Abstract: A resistive random access memory and a method for fabricating the same are provided. The method includes providing a bottom electrode formed on a substrate. A metal oxide layer is formed on the bottom electrode. An oxygen atom gettering layer is formed on the metal oxide layer. A top electrode is formed on the oxygen atom gettering layer. The previous mentioned structure is subjected to a thermal treatment, driving the oxygen atoms of the metal oxide layer to migrate into and react with the oxygen atom gettering layer, thus leaving a plurality of oxygen vacancies of the metal oxide layer.
    Type: Application
    Filed: December 12, 2008
    Publication date: February 18, 2010
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Hengyuan Lee, Pang-Hsu Chen, Tai-Yuan Wu, Ching-Chiun Wang
  • Publication number: 20090191685
    Abstract: A method for forming a capacitor in a dynamic random access memory, comprising steps of: providing a semiconductor substrate having at least a transistor, whereon an interlayer dielectric layer having at least a first plug is formed so that the first plug is connected to the drain of the transistor; depositing an etching stop layer on the first plug and the interlayer dielectric layer; depositing a first insulating layer on the etching stop layer; forming at least a second plug on the first insulating layer and the etching stop layer so that the second plug is connected to the first plug; depositing a second insulating layer on the first insulating layer and the second plug; forming at least a mold cavity in the second insulating layer so that the aperture of the mold cavity is larger than the diameter of the second plug and there is a deviation between the mold cavity and the second plug; removing the first insulating layer in the mold cavity until the etching stop layer; depositing a first electrode layer t
    Type: Application
    Filed: July 25, 2008
    Publication date: July 30, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Heng-Yuan LEE, Ching-Chiun WANG, Tai-Yuan WU
  • Publication number: 20090114899
    Abstract: A resistance memory is manufactured using semiconductor processing to comprise planar dual-tip electrodes so that the electric field in the resistance memory is concentrated to reduce the number of fuses in the dielectric material and improve the device characteristics. The resistance memory comprises: a first memory cell including a first bottom electrode and a common top electrode; and a second memory cell including a second bottom electrode and the common top electrode shared with the first memory cell; wherein the first bottom electrode, the second bottom electrode and the common top electrode are disposed on the same plane and are separated by a resistive conversion layer; wherein the common top electrode is connected to the ground through a via, while the first bottom electrode and the second bottom electrode are connected to the source of a transistor through a plug, respectively.
    Type: Application
    Filed: June 19, 2008
    Publication date: May 7, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: HENG-YUAN LEE, CHING-CHIUN WANG, PANG-HSU CHEN, TAI-YUAN WU
  • Publication number: 20080268593
    Abstract: A method for forming a capacitor comprises providing a substrate. A bottom electrode material layer is formed on the substrate. A first mask layer is formed on the bottom electrode material layer. A second mask layer is formed on the first mask layer. The second mask layer is patterned to form a patterned second mask layer in a predetermined region for formation of a capacitor. A plurality of hemispherical grain structures are formed on a sidewall of the patterned second mask layer. The first mask layer is etched by using the hemispherical grain structures and the patterned second mask layer as a mask, thereby forming a patterned first mask layer having a pattern. The pattern of the first mask layer is transferred to the bottom electrode material layer. And, a capacitor dielectric layer and a top electrode layer are formed on the bottom electrode material layer to form the capacitor.
    Type: Application
    Filed: July 3, 2008
    Publication date: October 30, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Hengyuan Lee, Lurng-Shehng Lee, Ching Chiun Wang, Pei-Jer Tzeng
  • Patent number: 7405122
    Abstract: A method for forming a capacitor comprises providing a substrate. A bottom electrode material layer is formed on the substrate. A first mask layer is formed on the bottom electrode material layer. A second mask layer is formed on the first mask layer. The second mask layer is patterned to form a patterned second mask layer in a predetermined region for formation of a capacitor. A plurality of hemispherical grain structures are formed on a sidewall of the patterned second mask layer. The first mask layer is etched by using the hemispherical grain structures and the patterned second mask layer as a mask, thereby forming a patterned first mask layer having a pattern. The pattern of the first mask layer is transferred to the bottom electrode material layer. And, a capacitor dielectric layer and a top electrode layer are formed on the bottom electrode material layer to form the capacitor.
    Type: Grant
    Filed: July 11, 2006
    Date of Patent: July 29, 2008
    Assignee: Industrial Technology Research Institute
    Inventors: Hengyuan Lee, Lurng-Shehng Lee, Ching Chiun Wang, Pei-Jer Tzeng
  • Publication number: 20080054394
    Abstract: A resistance type memory device disposed on a substrate including a first conductive layer, a second conductive layer and a variable resistance material layer is described. These conductive layers are composed of single or separate electrodes. The variable resistance material layer is disposed between the first conductive layer and the second conductive layer.
    Type: Application
    Filed: October 31, 2006
    Publication date: March 6, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Cha-Hsin Lin, Ching-Chiun Wang
  • Publication number: 20080023782
    Abstract: A photo sensor and a fabrication method thereof are provided. A fluorescent substance is utilized to absorb light in a specific wavelength range and re-emit light detectable by a photo transducer element. An anti-reflective layer is formed on the photo transducer element to reduce refractive scattering of the re-emitting light from the fluorescent substance and focus the re-emitting light on the photo transducer element capable of converting optical signals into electronic signals, thereby measuring the intensity of incident light from circumstances.
    Type: Application
    Filed: August 8, 2007
    Publication date: January 31, 2008
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Cha-Hsin LIN, Ching-Chiun WANG, Lurng-Shehng LEE
  • Publication number: 20080019168
    Abstract: A memory structure and data writing method thereof includes a power supply circuit and a bridge circuit. The bridge circuit is driven by the power supply circuit, and operate in a plurality of conduction modes. The memory structure only requires one set of power supply circuit and does not need to know the resistance of the bit line in advance, also the signal error is hardly occurred when the memory structure is switching between positive and negative.
    Type: Application
    Filed: July 24, 2006
    Publication date: January 24, 2008
    Inventors: Cha-Hsin Lin, Ching-Chiun Wang, Lurng-Shehng Lee
  • Publication number: 20070243690
    Abstract: A method for forming a capacitor comprises providing a substrate. A bottom electrode material layer is formed on the substrate. A first mask layer is formed on the bottom electrode material layer. A second mask layer is formed on the first mask layer. The second mask layer is patterned to form a patterned second mask layer in a predetermined region for formation of a capacitor. A plurality of hemispherical grain structures are formed on a sidewall of the patterned second mask layer. The first mask layer is etched by using the hemispherical grain structures and the patterned second mask layer as a mask, thereby forming a patterned first mask layer having a pattern. The pattern of the first mask layer is transferred to the bottom electrode material layer. And, a capacitor dielectric layer and a top electrode layer are formed on the bottom electrode material layer to form the capacitor.
    Type: Application
    Filed: July 11, 2006
    Publication date: October 18, 2007
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Hengyuan Lee, Lurng-Shehng Lee, Ching Chiun Wang, Pei-Jer Tzeng
  • Publication number: 20070166911
    Abstract: A structure and a method of fabricating a bottom electrode of a metal-insulator-metal (MIM) capacitor are provided. First, a transition metal layer is formed on a substrate. Thereafter, a self-assembling polymer film having a nano-pattern is formed on the transition metal layer to expose a portion of the transition metal layer. Using the self-assembling polymer film as a mask, the exposed portion of the transition metal layer is treated to undergo a phase change so that the bottom electrode can achieve a nano-level of phase separation. Thereafter, the self-assembling polymer film is removed.
    Type: Application
    Filed: May 15, 2006
    Publication date: July 19, 2007
    Inventors: Wen-Miao Lo, Lurng-Sheng Lee, Pei-Ren Jeng, Cha-Hsin Lin, Ching-Chiun Wang
  • Publication number: 20070145525
    Abstract: A metal-insulator-insulator (MIM) capacitor structure is provided. The MIM capacitor includes a top electrode, a bottom electrode and a dielectric layer. The dielectric layer is disposed between the top electrode and the bottom electrode. The main feature for this kind of MIM capacitor is that the bottom electrode includes a conductive layer and a metal nitride with multi-layered structure. The metal nitride with multi-layered structure is disposed between the conductive layer and the dielectric layer. The nitrogen content in the metal nitride with multi-layered structure gradually increases toward the dielectric layer and the metal nitride belongs to the amorphous type. Due to the presence of the metal nitride, the dielectric layer is prevented from crystallization, thereby reducing the current leakage of the MIM capacitor.
    Type: Application
    Filed: August 11, 2006
    Publication date: June 28, 2007
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Ching-Chiun Wang, Cha-Hsin Lin, Wen-Miao Lo, Lurng-Shehng Lee
  • Publication number: 20070141778
    Abstract: A metal-insulator-metal (MIM) capacitor having a top electrode, a bottom electrode and a capacitor dielectric layer is provided. The top electrode is located over the bottom electrode and the capacitor dielectric layer is disposed between the top and the bottom electrode. The capacitor dielectric layer comprises several titanium oxide (TiO2) layers and at least one tetragonal structure material layer. The tetragonal structure material layer is disposed between two titanium oxide layers and each tetragonal structure material layer has the same or a different thickness. Leakage path can be cut off through the tetragonal material layer between the titanium oxide layers. In the meantime, the tetragonal structure material layer can induce the titanium oxide layers to transform into a high k rutile phase.
    Type: Application
    Filed: March 21, 2006
    Publication date: June 21, 2007
    Inventors: Cha-Hsin Lin, Ching-Chiun Wang, Lurng-Shehng Lee
  • Publication number: 20070122934
    Abstract: A method of fabricating a photodetector device includes preparing a silicon substrate, forming a patterned mesa on the silicon substrate, and forming a patterned conductive layer over the patterned mesa.
    Type: Application
    Filed: November 29, 2005
    Publication date: May 31, 2007
    Inventors: Cha-Hsin Lin, Lurng-Shehng Lee, Ching-Chiun Wang